CN103258766B - Rack for cleaning - Google Patents
Rack for cleaning Download PDFInfo
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- CN103258766B CN103258766B CN201310167831.3A CN201310167831A CN103258766B CN 103258766 B CN103258766 B CN 103258766B CN 201310167831 A CN201310167831 A CN 201310167831A CN 103258766 B CN103258766 B CN 103258766B
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- carrying handle
- cleaning
- cubic container
- container
- pair
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Abstract
A kind of semi-conductor silicon chip carrier rack for cleaning, it has a structure that an open top and a bottom opening；Superposed a pair carrying handle, described each carrying handle is the set of multiple frameworks of multiple horizontal stripe and vertical bar composition, and the top of each carrying handle is a crossbeam, and the both sides of each carrying handle are that cant beam supports；It is positioned at the cubic container of bottom, the pair of carrying handle is connected to the top of described two relative edges of cubic container, said two relative edge extends tiles push rod to both sides, it is vertically arranged at least two stiffener on the opposite face at said two relative edge place, the complete hollow of two other opposite face of described cubic container, bottom described cubic container, side center and corner have multiple locating piece, and described bottom also has fixing device.
Description
Technical field
The present invention relates to a kind of in semi-conductor silicon chip processing, the device of silicon wafer carrier used by one or more Wafer Cleaning operation can be loaded simultaneously.
Background technology
The manufacture of integrated circuit relates to the multiple operation on the silicon chip of semiconductor substrate.Some of which operation potentially includes such as photoetching, etches, exposes, wherein involved environment typically broadly falls into the severe corrosive environment such as strong acid and/or highly basic, thus carry out the device such as the carrier of corresponding operating and the rack for cleaning of carrier load be required for being capable of withstanding strong acid and alkali corrosion for carrying silicon chip, even strong acid and the corrosion of highly basic under hot conditions, such material is generally selected fluoroplastics, such as polytetrafluoroethylene (PTFE), perfluoroalkyl vinyl ether copolymer (PFA), Kynoar (PVDF) etc..
Along with developing rapidly of semiconductor science and technology, the extensively application of silicon chip relates to all trades and professions of modern society.Therefore, the production and processing amount of silicon chip constantly rises, and is subsequently formed extensive streamlined operation.In order to improve the utilization ratio of equipment in large-scale production; usually need a production line can clean the silicon chip of different size specification; for example with a cleaning product line; both the silicon chip of 2 inches can have been cleaned; the silicon chip of 4 inches can also be cleaned; thus improve the utilization rate of production line, reduce production cost, improve production efficiency.Such application proposes corresponding requirement for the rack for cleaning loading silicon wafer carrier.
Summary of the invention
The present invention is in order to adapt to above application request, devise a kind of semi-conductor silicon chip carrier rack for cleaning, the most both a large-scale silicon wafer carrier for Wafer Cleaning can have been loaded, can also load multiple small-sized silicon wafer carrier for Wafer Cleaning, this goal of the invention is achieved in that
A kind of semi-conductor silicon chip carrier rack for cleaning, it has a structure that
One open top and a bottom opening；
Superposed a pair carrying handle, described each carrying handle is the set of multiple frameworks of multiple horizontal stripe and vertical bar composition, and the top of each carrying handle is a crossbeam, and the both sides of each carrying handle are that cant beam supports；
It is positioned at the cubic container of bottom, the pair of carrying handle is connected to the top of two relative edges of container, said two relative edge extends tiles push rod to both sides, it is vertically arranged at least two stiffener on the opposite face at said two relative edge place, the complete hollow of two other opposite face of described cubic container, bottom described cubic container, side center and corner have multiple locating piece, and described bottom also has fixing device.
In one preferred embodiment of the present invention, the stiffener of described container part can be four.
Accompanying drawing explanation
Fig. 1 is that silicon wafer carrier rack for cleaning of the present invention loads 4 inches of carriers and the axonometric chart of two 2 inches of carriers.
Fig. 2 is that silicon wafer carrier rack for cleaning of the present invention loads 4 inches of carriers and the sectional view of two 2 inches of carriers.
Detailed description of the invention
With reference to Fig. 1,2, the silicon wafer carrier rack for cleaning of the present invention is represented with labelling 100, it includes an open top 3 and a bottom opening 4, and superposed a pair carrying handle 1 and be positioned at the cubic container 2 of bottom, can be used for loading 200 or 14 inches of carrier 300 of 22 inches of carriers.
Described superposed a pair carrying handle 1 is two opposed frameworks on cubic container 2 relative edge top, described each carrying handle 1 is the set of multiple frameworks of multiple horizontal stripe 11 and vertical bar 12 composition, the top of each carrying handle is a crossbeam 13, and the both sides of each carrying handle are that cant beam supports 14.When described rack for cleaning 100 is put in cleaning equipment (not shown), described carrying handle 1 is exposed at the top of cleanout fluid horizontal plane in cleaning equipment, described cubic container 2 is submerged in inside cleanout fluid, mechanical hand in cleaning equipment can stretch in the framework space of described carrying handle 1, and described rack for cleaning 100 is mentioned (or putting into).
It is positioned at the cubic container 2 of bottom, have and be connected to two relative edges 21 of container part with the pair of carrying handle, said two relative edge 21 extends tiles push rod 22 to both sides, this push rod 22 is for contacting with the corresponding braking equipment of cleaning equipment, thus keep rack for cleaning constantly to vibrate when cleaning, to discharge the bubble being gathered in rack for cleaning internal (inside such as silicon wafer carrier, even on silicon chip).It is vertically arranged at least two stiffener 23(on the opposite face at said two relative edge 21 place and can also is that three, four etc.), two other complete hollow of opposite face 24 of described cubic container 2.Bottom described cubic container 2, side center and corner have multiple locating piece 25, are respectively used to position 2 inch silicon wafer carriers and 4 inch silicon wafer carriers position in rack for cleaning.Described bottom also has fixing device 26, for being fixed on inside cleaning equipment by rack for cleaning 100.
The present invention can be implemented by other form, therefore in the case of without departing from its purport, it is illustrated that embodiment is illustrating and noting limit of the present invention, and relate to showing the scope of the invention is appending claims rather than above-mentioned explanation.
Claims (2)
1. a semi-conductor silicon chip carrier rack for cleaning, it has a structure that
One open top and a bottom opening；
Superposed a pair carrying handle, each described carrying handle is the set of multiple frameworks of multiple horizontal stripe and vertical bar composition, and the top of each carrying handle is a crossbeam, and the both sides of each carrying handle are that cant beam supports；
It is positioned at the cubic container of bottom, the pair of carrying handle is connected to the top of described two relative edges of cubic container, said two relative edge extends tiles push rod to both sides, it is vertically arranged at least two stiffener on the opposite face at said two relative edge place, the complete hollow of two other opposite face of described cubic container, bottom described cubic container, side center and corner have multiple locating piece, and described bottom also has fixing device.
2. silicon wafer carrier rack for cleaning as claimed in claim 1, the stiffener of described container part is four.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310167831.3A CN103258766B (en) | 2013-05-09 | 2013-05-09 | Rack for cleaning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310167831.3A CN103258766B (en) | 2013-05-09 | 2013-05-09 | Rack for cleaning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103258766A CN103258766A (en) | 2013-08-21 |
| CN103258766B true CN103258766B (en) | 2016-08-24 |
Family
ID=48962598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310167831.3A Active CN103258766B (en) | 2013-05-09 | 2013-05-09 | Rack for cleaning |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103258766B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108655844A (en) * | 2017-03-30 | 2018-10-16 | 江苏大亚铝业有限公司 | Grinding wheel roll climb-cut grinding device and application method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040226506A1 (en) * | 2003-05-14 | 2004-11-18 | Lynn David Mark | Coated wafer processing equipment |
| CN1303664C (en) * | 2004-12-17 | 2007-03-07 | 北京市塑料研究所 | Silicon wafer carrier |
| CN202238829U (en) * | 2011-09-05 | 2012-05-30 | 浙江昱辉阳光能源有限公司 | Cleaning basket |
| CN202268336U (en) * | 2011-10-11 | 2012-06-06 | 天津市环欧半导体材料技术有限公司 | Cleaning basket for cleaning silicon wafers |
-
2013
- 2013-05-09 CN CN201310167831.3A patent/CN103258766B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103258766A (en) | 2013-08-21 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100009, 47 Gulou Street, Beijing, Xicheng District Patentee after: Beijing Plastics Research Institute Co.,Ltd. Address before: 100009, 47 Gulou Street, Beijing, Xicheng District Patentee before: BEIJING PLASTICS Research Institute |