CN103246195A - 3D laser printing method and system - Google Patents

3D laser printing method and system Download PDF

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CN103246195A
CN103246195A CN2013101663411A CN201310166341A CN103246195A CN 103246195 A CN103246195 A CN 103246195A CN 2013101663411 A CN2013101663411 A CN 2013101663411A CN 201310166341 A CN201310166341 A CN 201310166341A CN 103246195 A CN103246195 A CN 103246195A
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grating
diffraction
lens
fourier transform
empty
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CN103246195B (en
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陈林森
楼益民
浦东林
袁晓峰
朱鹏飞
魏国军
张瑾
朱鸣
李恒
胡进
申溯
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Suzhou Sudavig Science and Technology Group Co Ltd
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SVG Optronics Co Ltd
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Abstract

The invention discloses a 3D laser printing method and system. A four-parameter continuous modulation laser printout method is adopted to prepare a 3D image consisting of diffraction pixels arranged according to the position coordinates and provided with both a specific grating space frequency and an angle of orientation; the modulation method of parameters of grating stripes in the diffraction pixels is realized on the basis of a 4F imaging system and a diffraction grating; the 4F imaging system comprises a first Fourier transformation lens or lens group and a second Fourier transformation lens or lens group; the diffraction grating is placed between the first Fourier transformation lens or lens group and the second Fourier transformation lens or lens group; the distance between the diffraction grating and the first Fourier transformation lens or lens group is changed to realize continuous modulation of the space frequency of the grating stripes; and the diffraction grating is rotated to realize continuous modulation of the grating orientation angle of the grating stripes. The 3D laser printing method and system realize continuous adjustment of the space frequency and the orientation of the grating, and encodes on the basis of the four-parameter micro-nano structure with continuously changeable space frequency and orientation of the grating to form a 3D color image.

Description

Three-dimensional laser Method of printing and system
Technical field
The present invention relates to a kind of Method of printing and system of 3-D view, be specifically related to a kind of laser printing method and system that adopts micro-nano structure to express 3-D view.
Background technology
On physical meaning, expressing width of cloth two dimension (2D) image needs 3 parameters at least: two planimetric position coordinate variables and a gray scale variable.Accordingly, if export different gray-scale values with device at different coordinates by certain method, can realize the printout of plane picture.Method and systems such as the laser printing that produces according to this principle, inkjet printing have become the requisite apparatus of routine office work.
Express a three-dimensional (3D) object, need four independent variables at least: three-dimensional coordinate variable (x-y-z) and color (gray scale).If wish to express the coloured image that a width of cloth can show three-dimensional information in the plane, so, also to follow this physical principles, export 4 independent variables (parameter) in the plane at least.Common Method of printing can only be realized the modulation of 3 parameters in the plane, therefore, can only export two dimensional image, and perhaps by the forming materials mode, output does not have the stereoscopic model of color.Realize 3-D view, must adopt reasonable method and system space variable and color variance are encoded and to export.According to the difference of implementation method, mainly can be divided into two classes: a class is laser holography; Another kind of is the dot matrix holographic technique.
Laser holography is to utilize laser coherence to interfere to record amplitude and the phase information of object reflection light field, amplitude corresponding grey scale information wherein, and phase place corresponding three-dimensional coordinate information has been realized record and the reproduction of 3-D view in the plane by photosensitive material.But the record environment of laser holographic recording process need coherent source and strict and steady needs mock-up simultaneously, and range of application is restricted.For overcoming the limitation of laser holography, American Luo Man has invented the computing mechanism holographic technique, utilizes numerical evaluation to replace the optical interference process, thereby has expanded the hologram three-dimensional display technique.But, in order to realize the printout of computing mechanism hologram, need be by the support of large-scale semiconductor processing equipments such as laser direct-writing, electron-beam direct writing, this kind equipment is mainly used in integrated circuit fields, and is expensive.
Chinese patent CN101051097A discloses a kind of calculation holographic production and output system of special use, has designed a kind of subregion micro device hologram is printed output.The hologram resolution of this type systematic output is subjected to the restriction of the imaging resolution of miniature system, and simultaneously, optical diffraction efficient is low, and breadth is subjected to the serious restriction that hologram magnanimity is calculated.For overcoming this restriction, US Patent No. 6330088, US7262891 have proposed a kind of digital synthetic hologram printing technique, utilize stereoscopic technology and subregion to interfere exposure technique to realize that the reflection holography of 3-D view shows.Sony (sony) company, Tokyo Institute of Technology, Toppan Printing printing firm have developed corresponding synthetic hologram dimension display technologies according to similar principles.The limitation of this class holography is that resolution and diffraction efficiency that the reflective holographic of its production shows that the display effect of image is subjected to recording materials seriously restrict, and only be suitable for the single width manufacturing, can not carry out large-scale industrialization with printing technology the samely and copy.
Dot matrix hologram (Dot-Matrix Hologram) is the hologram that is made of the small grating pixel of arranging by the certain position coordinate.The grating fringe that comprises one group of micro-nano-scale in each grating pixel, the frequently empty and orientation of grating fringe will determine the direction of propagation and the color of this diffracted ray.Therefore, adopt the one-dimensional grating pixel, in theory, can obtain two independent variables (the empty Λ frequently of grating, grating orientation θ) at least, (x y), just has four variablees to add the locations of pixels coordinate.By the modulation to four independent variables, dot matrix hologram can be realized visual effects such as iridescence change, 3 D stereo in the plane.Coding according to four independent variables is different with the way of output, and people have designed different some array holographic output systems.But, at present and fail to solve well the empty Λ frequently of grating and modulate this difficult problem in the industry, cause the three-dimensional stereo effect of image strong, observe field of view angle and be restricted.
US Patent No. 5,132,812 disclose a kind of method for making of color 2 D dot matrix hologram, interfere by thing light and the reference light of three beams different incidence angles to have formed three kinds of different empty grating pixels frequently, have realized the empty discrete modulation frequently of grating.But this system can't modulate grating is empty frequently continuously, and the efficiency of light energy utilization is low.US Patent No. 5,262,879, US5,822, the 092 pairs of light paths and physical construction are improved.Owing to utilize the beam interference principle of three groups of different angles equally, it is frequently empty still can only to form three kinds of discrete gratings.
For realizing the empty conversion frequently of continuous but not discrete grating, a kind of consideration is, variable prism splitter system and the lens light gathering system of many group relative positions is set, by the prism group is being moved up and down along optical axis when optical axis direction rotates, realize continuous frequency conversion dot matrix hologram type output, but this set mechanical motion mechanism complexity is unfavorable for that light path is stable.
Summary of the invention
Goal of the invention of the present invention provides a kind of three-dimensional laser Method of printing and system, with simple structure and method, realizes that the three-dimensional laser of and angle continuous modulation frequently empty based on grating is printed.
To achieve the above object of the invention, the technical solution used in the present invention is: a kind of three-dimensional laser Method of printing, the 3-D view that the diffraction pixel that adopts the continuous modulated laser print-out method preparation of four parameters to be arranged by the opsition dependent coordinate constitutes, be filled with the random grating of specific empty frequency and the angle of orientation in the described diffraction pixel, described four parameters comprise the position coordinates (x of random grating, y), empty Λ and the angle of orientation θ frequently of random grating, described four parameters are realized the laser printing output of 3-D view by the continuous modulation to three-dimensional information, it is characterized in that: the modulator approach of described random grating realizes based on 4F imaging system and diffraction grating, described 4F imaging system comprises first fourier transform lens or lens combination and second fourier transform lens or lens combination, described diffraction grating places between first fourier transform lens or lens combination and second fourier transform lens or the lens combination, by changing the distance between described diffraction grating and first fourier transform lens or the lens combination, realize the empty continuous modulation frequently of grating, by rotating described diffraction grating, realize the continuous modulation of the grating angle of orientation, optical axis by the 4F system is realized the continuous modulation of described position coordinates with recording relatively moving of plane, and described Method of printing is printed by realize three-dimensional laser at the grating pixel-matrix of diverse location coordinate place printout through modulating continuously.
In the technique scheme, the frequently empty and orientation of random grating jointly determines according to the diffraction grating equation that by the planimetric coordinates at diffraction pixel place and definite diffracted ray direction, the incident direction of illuminating ray and the wavelength of diffracted ray of position coordinates of watch window the wavelength of described diffracted ray is determined by the color of the image information of described diffraction pixel corresponding point in the 3-D view of exporting.
Adopt technique scheme, can obtain four parameters (x, y, Λ, θ) three-dimensional color image of the empty frequency of a kind of grating and orientation continuous variable.Described three-dimensional color image information is recorded in that (x y) in the plane, is made of the serial diffraction pixel corresponding with coordinate position, and described diffraction pixel is filled by one group of random grating with specific empty Λ frequently and orientation θ and formed.The diffracted ray that diffraction pixel is sent enters apart from plane (x, y) the assigned address coordinate place of the watch window that sets in the plane of a distance (x ', y ').The frequently empty and orientation of described random grating is by the planimetric coordinates (x at grating pixel place, y) with watch window in light incoming position coordinate (x ', y ') wavelength of the incident direction of the diffracted ray direction of Que Dinging, illuminating ray and diffracted ray is determined jointly according to grating equation, described illuminating ray direction is set according to service condition, and the wavelength of described diffracted ray is determined by the color of described diffraction image vegetarian refreshments corresponding image information.
In the such scheme, described watch window is preferably the slit-type window that is parallel to observer's eyes line direction, described slit-type window comprises some viewing areas, an observation visual angle of described each viewing area corresponding three-dimensional image, the different viewing area of diffracted ray difference incident of the diffraction pixel of different observation visual angles on the three-dimensional color image information record plane.
A kind of three-dimensional laser print system, comprise light source, imaging optical subsystem, the electromechanical structure subsystem, motion control subsystem, recording medium, the light beam incident optical imaging subsystems that light source sends forms the grating fringe information of specific empty frequency and orientation, be recorded on the recording medium, described imaging optical subsystem comprises one group of frequently empty and angle that is made of 4F imaging len and diffraction grating at least and modulates light path continuously, described 4F imaging system comprises first fourier transform lens or lens combination and second fourier transform lens or lens combination, described diffraction grating places between first fourier transform lens or lens combination and second fourier transform lens or the lens combination, described electromechanical structure subsystem comprises the diffraction grating parallel moving mechanism, the diffraction grating rotating mechanism, the accurate translation mechanism of two dimension, described motion control subsystem is coordinated translation and the rotation of control diffraction grating, translation and the light source shutter of two dimension precision surface plate, at the diffraction pixel dot matrix of relevant position coordinate place printout through modulating continuously, realize the printout of 3-D view.
In the technique scheme, described light source is coherent source, is selected from continuous laser source or pulsed laser light source.Described light-pulse generator comprises and is not limited to ps pulsed laser and ns pulsed laser light source, picosecond pulse laser light source, femtosecond pulse light source etc.
In the such scheme, the light beam of described light source output can be to photochromics exposure formation grating fringe after by imaging optical subsystem, also can be directly at the base material grating fringe of ablating out, can also directly cause photochromic or the phase structure variation at base material, form corresponding grating fringe.
Described imaging optical subsystem also comprises field stop, iris, micro object lens, automatic focus light path, real-time monitored light path.
Described field stop, iris can be spatial light modulators, also can be mechanical iriss, and the shape of diaphragm and big I are regulated in real time by kinetic control system, are used for the beam diameter that control enters system.Described field stop is preferably placed on the optical axis behind second fourier transform lens.
Described micro object lens can carry out the micro imaging to the information on the field stop face after the 4F imaging system, improve the frequently empty of random grating.
Described automatic focus light path guarantees that the imaging surface of imaging optical subsystem focuses near the base material.
Described real-time detection light path is carried out imaging to substrate material surface and is detected.
Described electromechanical structure also comprises auto focus control mechanism, light source shutter control mechanism.
Described motion control subsystem is preferably coordinated control by computing machine and control program.
Because technique scheme is used, the present invention compared with prior art has following advantage:
1. the present invention is by arranging the 4F imaging system, diffraction grating is placed between first fourier transform lens or lens combination and second fourier transform lens or the lens combination, realized the adjustable continuously of the empty frequency of grating, empty frequently and the micro-nano structure of four parameters of the orientation continuous variable formation three-dimensional color image of encoding based on grating, its 3-D view stereoscopic sensation and the sense of reality is stronger, the color performance is more accurate abundant.
2. (Λ, micro-nano structure θ) realize that the method for three-dimensional color image is more effective to four parameters of and the orientation continuous variable frequently empty based on grating that propose of the present invention for x, y.
The three-dimensional laser print system of proposition of the present invention can really realize four parameters (x, y, Λ, the output of θ) three-dimensional color image, the printing modulation accuracy height of system, system architecture is simple, it is effective to be printed as picture.
Description of drawings
Fig. 1 is 3 d image data and the display structure synoptic diagram among the embodiment 1.
Fig. 2 is three-dimensional color image data and the display structure synoptic diagram among the embodiment 2.
Four parameters (x, y, Λ, θ) the optical modulation method synoptic diagram of the empty frequency of a kind of grating among Fig. 3 embodiment 3 and orientation continuous variable.
Four parameters (x, y, Λ, θ) the optical modulation method synoptic diagram of the empty frequency of a kind of grating among Fig. 4 embodiment 4 and orientation continuous variable.
Fig. 5 is a kind of four parameters (x, y, Λ, θ) the laser printing system synoptic diagram of 3-D view output of realizing the empty frequency of grating and orientation continuous variable among the embodiment 5.
Fig. 6 is a kind of four parameters (x, y, Λ, θ) the laser printing system synoptic diagram of 3-D view output of realizing the empty frequency of grating and orientation continuous variable among the embodiment 6.
Fig. 7 is a kind of four parameters (x, y, Λ, θ) the laser printing system synoptic diagram of 3-D view output of realizing the empty frequency of grating and orientation continuous variable among the embodiment 7.
Fig. 8 is the structural representation of the diffraction grating among the embodiment 8.
Fig. 9 is a kind of three-dimensional laser Method of printing and the system flowchart among the embodiment 9.
Wherein: 1,3-D display image; 2, diffraction pixel; 3, random grating; 4, diffracted ray; 5, viewing area; 6, watch window; 7, illumination light; 8, first fourier transform lens; 9, diffraction grating; 10, second fourier transform lens; 11, optical axis; 12, ps pulsed laser and ns pulsed laser; 13, spatial filter; 14, catoptron; 15, DMD spatial light modulator; 16 field stops; 17, detect light path in real time; 18, semi-transparent semi-reflecting lens; 19, tubelens; 20, red sub-pixel; 21, green sub-pixels; 22, blue subpixels; 23, white space; 30, micro object lens; 31, automatic focus light path; 32, two-dimentional accurate translation stage; 33, motion controller; 34, control computing machine; 35, photosensitive material; 40, red diffracted ray; 41, green diffracted ray; 42, blue diffracted ray.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described:
Embodiment 1:
Referring to accompanying drawing 1, be the empty frequency of a kind of grating and four parameters (x, y, Λ, θ) 3-D view and the display effect synoptic diagram thereof that are orientated continuous variable in the present embodiment.
The 3-D view 1 of present embodiment is positioned at coordinate plane, and (x y) locates, and is made of a series of diffraction pixel 2, and described diffraction pixel 2 has specific random grating 3 fillings frequently empty and orientation by one group and forms.The empty of random grating in the described image 1 gradually changes frequently from top to bottom, depends on the position of illumination direction of light and watch window, usually, to the bottom, empty becomes big frequently gradually from the top of image.Described 3-D view issues to gain interest in the illumination of illumination light 7 and penetrates, Z place, range image plane (x ', y ') form slit-type watch window 6 on the plane, described watch window 6 is made of a plurality of viewing areas 5, the picture of different viewing area corresponding three-dimensional figure different visual angles.The diffracted ray 4 of the diffraction pixel of the same visual angle of expression image information enters described same viewing area in the 3-D view.The frequently empty and orientation of grating in the described diffraction pixel is determined jointly by the incident angle of illumination light 7, emergence angle and the diffraction wavelength of diffracted ray 4, satisfies following condition according to its relation of grating equation:
Figure 967886DEST_PATH_IMAGE001
α wherein 7, β 7Be respectively the direction cosine angle of illuminating ray 7, α 4, β 4Be respectively the direction cosine angle of diffracted ray 4, λ is diffraction wavelength.The direction cosine of illuminating ray 7 are condition enactment according to the observation.The direction cosine of diffracted ray can calculate according to the relative position of diffraction pixel and viewing area:
The size of the x ' direction of slit-type watch window is greater than the distance between the human eye binocular among the embodiment, and value is greater than 60mm usually, the size value 3mm-10mm of watch window y ' direction.Be to realize the described slit-type watch window of present embodiment, 3-D view 1 will form as a series of curved unit that are hyperbolic type shown in Fig. 1 frame of broken lines, and the frequently empty and orientation of the random grating in the curved unit changes continuously, and is satisfied:
Figure 477813DEST_PATH_IMAGE003
Λ wherein 0For constant is low-limit frequency in the curved unit.The 3-D view that satisfies above-mentioned condition will be seen the coloured image of view picture solid colour in viewing area.
Embodiment 2:
Referring to accompanying drawing 2, be the empty frequency of a kind of grating and four parameters (x, y, Λ, θ) synoptic diagram of three-dimensional color image that are orientated continuous variable in the present embodiment.
The three-dimensional color image 1 of present embodiment is positioned at coordinate plane (x, y) locate, constituted by a series of diffraction pixel 2, described diffraction pixel 2 is made up of red sub-pixel 20, green sub-pixels 21, blue subpixels 22, and the sub-pixel of described three kinds of colors has specific grating 3 and white space 23 fillings frequently empty and orientation by one group and forms.State the empty of random grating in the image 1 and frequently gradually change from top to bottom, depend on the position of illumination direction of light and watch window, usually, to the bottom, empty become big frequently gradually from the top of image.Described three-dimensional color image issues to gain interest in the illumination of illumination light 7 and penetrates, Z place, range image plane (x ', y ') form slit-type watch window 6 on the plane, described watch window 6 is made of a plurality of viewing areas 5, the picture of different viewing area corresponding three-dimensional figure different visual angles.Red diffracted ray 40, green diffracted ray 41, the blue diffracted ray 42 of the grating pixel of the same visual angle of expression image information enter described same viewing area in the 3-D view, form coloured image.The frequently empty and orientation of the grating of described grating pixel is determined jointly by the incident angle of illumination light, emergence angle and the diffraction wavelength of diffracted ray.
Described diffraction wavelength can be red, green, blue three primary colours wavelength, also is any three wavelength in the true color interval in CIE 1931 chromaticity coordinates.The gray shade scale of described red, green, blue three coloured light is regulated and control by the area that diffraction pixel empty zone 23 occupies whole pixel, and the big brightness of white space footprint area is low, the little brightness height of footprint area.
The color of illustrating in the present embodiment forms the color that is not limited in the red, green, blue three primary colours system, also can be the color of primary colours allotment formation, corresponding four looks, six look wavelength respectively arbitrarily such as four looks, six looks.Same object point different colours (λ 1, λ 2) the empty Changing Pattern frequently of corresponding random grating satisfies following relation:
Figure 942030DEST_PATH_IMAGE004
Embodiment 3
Referring to shown in Figure 3, be four parameters (x, y, Λ, θ) the optical modulation method synoptic diagram of the empty frequency of a kind of grating and orientation continuous variable.
In the present embodiment, four parameters (x, y, Λ, θ) optical modulation method of the empty frequency of a kind of grating and orientation continuous variable.Comprise that focal length is f 1First fourier transform lens 8 be f with focal length 2Second fourier transform lens, 10 lens the 4F optical system and the diffraction grating 9 that constitute.Described diffraction grating 9 is between the focal length of first fourier transform lens and first fourier transform lens.Diffraction grating can move along optical axis 11, also can rotate around optical axis 11.
Described method by mobile diffraction grating 9 change between diffraction grating and first fourier transform lens apart from d 0, realize the empty continuous modulation of Λ parameter frequently of described grating.By rotation diffraction grating 9, realize the continuous modulation of described grating angle of orientation θ parameter.Optical axis 11 and (x, y) the relatively move described parameter of realization (x, continuous modulation y) on plane by the 4F system.
Diffraction grating described in the present embodiment 9 is one dimension phase-type grating, and its phase distribution function is the empty cosine function T (x of Λ that frequently is 0, y 0)=cos (2
Figure 998979DEST_PATH_IMAGE005
Λ x 0), the output plane of 4F system (x, y) optical field distribution on is:
Figure 126335DEST_PATH_IMAGE006
Described optical field distribution still is the cosine function grating, and wherein A is amplitude, the empty frequency of grating
Figure 462376DEST_PATH_IMAGE007
Be apart from d 0Linear function, can change parameter d by mobile diffraction grating 9 0Realize empty continuous modulation frequently, modulation range is (0~Λ f 1/ f 2).
The distribution function of the diffraction grating described in the present invention includes but are not limited to: the one dimension cosine function described in the present embodiment and distributes, can be any period functions such as two-dimentional cosine function, square wave function, two-dimentional square wave function, can also be to have any binary optical elements that specific frequency spectrum distributes, the binary optical elements structure can be according to concrete spectrum distribution in conjunction with binary optical principle specific design.
On the frequency plane of 4F of the present invention system, can carry out necessary filtering operation to the frequency spectrum of diffraction grating, including, but not limited to eliminating zero order light, blocking senior diffraction etc.
Empty frequently continuous modulation range described in the present invention is including, but not limited to (0~Λ f 1/ f 2), can to output plane (x, y) optical field distribution on is carried out further micro, setting the micro multiplying power is M, the diffraction limit frequency of micro object lens is Λ Limit, then the maximal value of system of space frequency modulation is Λ Max=min[Λ Limit, Λ Mf 1/ f 2], corresponding empty modulation range frequently is (0~Λ Max).
Embodiment 4
Referring to shown in Figure 4, be four parameters (x, y, Λ, θ) the optical modulation method synoptic diagram of the empty frequency of a kind of grating and orientation continuous variable.
In the present embodiment, four parameters (x, y, Λ, θ) optical modulation method of the empty frequency of a kind of grating and orientation continuous variable.Comprise that focal length is first fourier transform lens 8 of f1 and 4F optical system and the diffraction grating 9 of second fourier transform lens, the 10 lens formation that focal length is f2.Described diffraction grating 9 is between the second fourier transform lens front focal length and second fourier transform lens.Diffraction grating can move along optical axis 11, also can rotate around optical axis 11.
Described method by mobile diffraction grating 9 change between diffraction grating and second fourier transform lens apart from d 0, realize the empty continuous modulation of Λ parameter frequently of described grating.By rotation diffraction grating 9, realize the continuous modulation of described grating angle of orientation θ parameter.Optical axis 11 and (x, y) the relatively move described parameter of realization (x, continuous modulation y) on plane by the 4F system.
The distribution function of the diffraction grating described in the present invention includes but are not limited to: the one dimension cosine function described in the present embodiment and distributes, can be any period functions such as two-dimentional cosine function, square wave function, two-dimentional square wave function, can also be to have any binary optical elements that specific frequency spectrum distributes, the binary optical elements structure can be according to concrete spectrum distribution in conjunction with binary optical principle specific design.
Embodiment 5
Referring to accompanying drawing 5, be a kind of four parameters (x, y, Λ, θ) laser printing system synoptic diagram of three-dimensional color image output of realizing the empty frequency of grating and orientation continuous variable in the present embodiment.
Three-dimensional color image laser printing system in the present embodiment comprises ps pulsed laser and ns pulsed laser 12, spatial filter 13, the first fourier transform lenses 8, diffraction grating 9, the second fourier transform lenses 10, field stop 16, detect light path 17, semi-transparent semi-reflecting lens 18, tubelens19 in real time, micro object lens 30, automatic focus light path 31, two-dimentional accurate translation stage 32, motion controller 33, control computing machine 34, photosensitive material 35.
The laser that ps pulsed laser and ns pulsed laser 12 sends among the embodiment forms directional light and enters by first fourier transform lens 8 behind spatial filter 13 beam-expanding collimations, diffraction grating 9, the empty frequency of grating and angle that second fourier transform lens 10 constitutes are modulated light path continuously, zone behind second fourier transform lens 10 forms the grating fringe information frequently empty and orientation of specifying, the second fourier transform lens back focal plane is provided with the imaging region that field stop 16 is used for the restriction interference fringe, see through the grating fringe of field stop through semi-transparent semi-reflecting lens 18, tubelens19 and micro object lens 30 form the high-frequency grating striped at photosensitive material 35.Motion controller 33 is coordinated ps pulsed laser and ns pulsed laser 12 under the programmed control that control computing machine 34 is set pulse sequence, the movement of diffraction grating 9 and the two dimension of rotation and two-dimentional accurate translation stage 32 move, at photosensitive material record four parameter (x, y, Λ, θ) Tiao Zhi three-dimensional color image information.Detect 17 pairs of photosensitive material surface imagings of light path in real time and be used for the real-time monitored recording process.Automatic focus light path 31 monitoring and the real-time distance of adjusting focusing objective len and photosensitive material surface guarantee that the high-frequency grating striped is at photosensitive material surface accurately image.
Adopt semiconductor pumped solid-state laser light source in the present embodiment, comprise as the ps pulsed laser and ns pulsed laser light source etc., its output frequency can reach more than the 1000Hz, and the pulse energy height, can be to materials such as the photoresist etching of exposing; Also directly the characteristic of transient state place to go or change base material forms the relief grating structure, realizes the printout of micro-nano structure image.
For example, diffraction grating described in the present embodiment 9 is empty frequently be the cosine grating of Λ=75line/mm, the focal distance f 1=10cm of first fourier transform lens, focal distance f of second fourier transform lens 1=5cm, the multiplying power M=20 of micro object lens, the empty variation range (0 ~ 3000line/mm) frequently of system.This sky frequency scope can be implemented in the accurate expression of the true color 3-D view of visible region.
The empty maximal value that changes frequently is Λ described in the present embodiment Max=min[Λ Limit, Λ Mf 1/ f 2], Λ LimitBe the diffraction limit frequency of system, corresponding empty modulation range frequently is (0~Λ Max).For example, be the deep ultraviolet system of 266nm for wavelength, its limit is empty to be 7519line/mm frequently, the empty variation range frequently of system is (0 ~ 7519line/mm) in theory.To be bigger for the empty variation range frequently described in system's present embodiments such as extreme ultraviolet system, X ray.
Embodiment 6
Referring to accompanying drawing 6, be a kind of four parameters (x, y, Λ, θ) laser printing system synoptic diagram of 3-D view output of realizing the empty frequency of grating and orientation continuous variable in the present embodiment.
Three-dimensional laser print system in the present embodiment comprises ps pulsed laser and ns pulsed laser 12, spatial filter 13, the first fourier transform lenses 8, diffraction grating 9, the second fourier transform lenses 10, field stop 16, detect light path 17, semi-transparent semi-reflecting lens 18, tubelens19 in real time, micro object lens 30, automatic focus light path 31, two-dimentional accurate translation stage 32, motion controller 33, control computing machine 34, photosensitive material 35.
The laser that ps pulsed laser and ns pulsed laser 12 sends among the embodiment forms directional light and enters by first fourier transform lens 8 behind spatial filter 13 beam-expanding collimations, diffraction grating 9, the empty frequency of grating and angle that second fourier transform lens 10 constitutes are modulated light path continuously, diffraction grating 9 is between the second fourier transform lens front focal length and second fourier transform lens, zone behind second fourier transform lens 10 forms specifies grating fringe frequently empty and orientation, after near second fourier transform lens, be provided with the imaging region that field stop 16 is used for the restriction interference fringe, see through the grating fringe of field stop through semi-transparent semi-reflecting lens 18, tubelens19 and micro object lens 30 form the high-frequency grating striped at photosensitive material 35.Motion controller 33 is coordinated ps pulsed laser and ns pulsed laser 12 under the programmed control that control computing machine 34 is set pulse sequence, the movement of diffraction grating 9 and the two dimension of rotation and two-dimentional accurate translation stage 32 move, at photosensitive material record four parameter (x, y, Λ, θ) Tiao Zhi three-dimensional image information.Detect 17 pairs of photosensitive material surfaces of light path in real time and carry out imaging for the real-time monitored recording process.Automatic focus light path 31 monitoring and the real-time distance of adjusting focusing objective len and photosensitive material surface guarantee that the high-frequency grating striped is at photosensitive material surface accurately image.
Embodiment 7
Referring to accompanying drawing 7, be a kind of four parameters (x, y, Λ, θ) laser printing system synoptic diagram of 3-D view output of realizing the empty frequency of grating and orientation continuous variable in the present embodiment.
3-D view laser printing system in the present embodiment comprises ps pulsed laser and ns pulsed laser 12, spatial filter 13, catoptron 14, DMD spatial light modulator 15, the first fourier transform lenses 8, diffraction grating 9, second fourier transform lens 10, field stop 16 detects light path 17 in real time, semi-transparent semi-reflecting lens 18, tubelens19, micro object lens 30, automatic focus light path 31, two-dimentional accurate translation stage 32, motion controller 33, control computing machine 34, photosensitive material 35.
The laser that ps pulsed laser and ns pulsed laser 12 sends among the embodiment forms directional light and incides on the DMD spatial light modulator 15 behind spatial filter 13 beam-expanding collimations, the DMD spatial light modulator is used for the diameter of control parallel beam as iris shutter, light through the reflection of DMD spatial light modulator enters by first fourier transform lens 8, diffraction grating 9, the empty frequency of grating and angle that second fourier transform lens 10 constitutes are modulated light path continuously, back focal plane at second fourier transform lens 10 forms the grating fringe of specifying empty frequency and orientation, back focal plane is provided with field stop 16, see through the grating fringe of field stop through semi-transparent semi-reflecting lens 18, tubelens19 and micro object lens 30 form the high-frequency grating striped at photosensitive material 35.Motion controller 33 is coordinated ps pulsed laser and ns pulsed laser 12 under the programmed control that control computing machine 34 is set pulse sequence, the movement of diffraction grating 9 and the two dimension of rotation and two-dimentional accurate translation stage 32 move, form four parameter (x at the photosensitive material record, y, Λ, θ) Tiao Zhi three-dimensional image information.Detect 17 pairs of photosensitive material surface imagings of light path in real time and be used for the real-time monitored recording process.Automatic focus light path 31 monitoring and the real-time distance of adjusting focusing objective len and photosensitive material surface guarantee that high-frequency grating striped imaging surface is at photosensitive material surface accurately image.
Embodiment 8
Referring to accompanying drawing 8, demonstration be three kinds of surperficial surface structures and function or the spectrum distribution of diffraction grating 9 in the present embodiment.What Fig. 8 (a) showed is the diffraction grating that the one dimension cosine phase distributes, and it is the cosine phase function curve that Fig. 8 (a) surveys on a left side, and the right side is the surperficial face type of diffraction grating.What Fig. 8 (b) showed is the diffraction grating that one dimension square wave phase function distributes, and it is the square wave phase function curve that Fig. 8 (b) surveys on a left side, and the right side is the surperficial face type of diffraction grating.What Fig. 8 (c) showed is the diffraction grating of two-dimensional phase distribution function, and what Fig. 8 (c) right side showed is its frequency spectrum function, shown in frequency spectrum function be three δ functions, namely on its frequency spectrum plane, will obtain three pointolites.Two dimension position phase distribution function shown in Fig. 8 (c) can calculate according to the binary optical elements method for designing.
The diffraction grating that different functions in the present embodiment distribute will obtain four different parameter modulation effects.
Embodiment 9
Referring to accompanying drawing 1,2,5,9, Fig. 9 is a kind of three-dimensional laser Method of printing and system flowchart in the present embodiment.
In the present embodiment at first with three-dimensional body information (x, y, z, I) carry out code conversion form a kind of as Fig. 1 or four parameter 3 d image datas shown in Figure 2 (x, y, Λ, θ), described four parameter three-dimensional datas change continuously.Then with as shown in Figure 5 stop position of view data input, frequently empty and be orientated continuously adjustable four parameters (x, y, Λ, θ) three-dimensional laser print system is by printing the physics output that realizes three-dimensional color image.
Three-dimensional color image described in the present embodiment is made of different diffraction pixel frequently empty and orientation, will form the slit-type watch window at the viewing plane at Z place, range image plane.The frequently empty and orientation of the random grating that described diffraction pixel is filled changes continuously.Empty frequently with orientation will be according to the kind of image different the variation.Usually, coloured image is empty frequently from increasing gradually down and down.
Watch window described in the present embodiment comprises some viewing areas, the different different visual angles of viewing area corresponding three-dimensional image.The diffracted ray of the diffraction pixel of the same visual angle of expression image information enters described same viewing area in the 3-D view.Can see the true color 3-D view by described watch window.

Claims (10)

1. three-dimensional laser Method of printing, the 3-D view that the diffraction pixel that adopts the continuous modulated laser print-out method preparation of four parameters to be arranged by the opsition dependent coordinate constitutes, be filled with the random grating of specific empty frequency and the angle of orientation in the described diffraction pixel, described four parameters comprise the position coordinates (x of random grating, y), empty Λ and the angle of orientation θ frequently of random grating, described four parameters are realized the laser printing output of 3-D view by the continuous modulation to three-dimensional information, it is characterized in that: the modulator approach of described random grating realizes based on 4F imaging system and diffraction grating, described 4F imaging system comprises first fourier transform lens or lens combination and second fourier transform lens or lens combination, described diffraction grating places between first fourier transform lens or lens combination and second fourier transform lens or the lens combination, by changing the distance between described diffraction grating and first fourier transform lens or the lens combination, realize the empty continuous modulation frequently of grating, by rotating described diffraction grating, realize the continuous modulation of the grating angle of orientation, optical axis by the 4F system is realized the continuous modulation of described position coordinates with recording relatively moving of plane, and described Method of printing is printed by realize three-dimensional laser at the diffraction pixel dot matrix of diverse location coordinate place printout through modulating continuously.
2. three-dimensional laser Method of printing according to claim 1, it is characterized in that: the frequently empty and orientation of random grating jointly determines according to the diffraction grating equation that by the planimetric coordinates at random grating place and definite diffracted ray direction, the incident direction of illuminating ray and the wavelength of diffracted ray of position coordinates of watch window the wavelength of described diffracted ray is determined by the color of the image information of described diffraction pixel corresponding point in the 3-D view of exporting.
3. three-dimensional laser Method of printing according to claim 2, it is characterized in that: the watch window that the 3-D view of exporting forms is the slit-type window that is parallel to observer's eyes line direction, described slit-type window comprises some viewing areas, an observation visual angle of each viewing area corresponding three-dimensional image, the different viewing area of the diffracted ray of the diffraction pixel of different observation visual angles difference incident on the 3-D view plane, the observer sees 3-D view in described watch window.
4. three-dimensional laser print system, comprise light source, imaging optical subsystem, the electromechanical structure subsystem, motion control subsystem, recording medium, the light beam incident optical imaging subsystems that light source sends forms the grating fringe information of specific empty frequency and orientation, be recorded on the recording medium, it is characterized in that: described imaging optical subsystem comprises one group of frequently empty and angle of orientation that is made of 4F imaging len and diffraction grating at least and modulates light path continuously, described 4F imaging system comprises first fourier transform lens or lens combination and second fourier transform lens or lens combination, described diffraction grating places between first fourier transform lens or lens combination and second fourier transform lens or the lens combination, described electromechanical structure subsystem comprises the diffraction grating parallel moving mechanism at least, the diffraction grating rotating mechanism, the accurate translation mechanism of two dimension, described motion control subsystem is coordinated the translation of control diffraction grating, rotate, translation and the light source shutter of two dimension precision surface plate, at the diffraction pixel dot matrix of relevant position coordinate place printout through modulating continuously, realize the printout of 3-D view.
5. three-dimensional laser print system according to claim 4, it is characterized in that: the light of light source output is by exposure forms grating fringe to photochromics behind the imaging optical subsystem, perhaps directly at the base material grating fringe of ablating out, perhaps directly cause photochromic or phase structure variation formation grating fringe at base material, realize the printout of 3-D view.
6. three-dimensional laser print system according to claim 4, it is characterized in that: described light source has the coherence, is selected from continuous laser source or pulsed laser light source.
7. three-dimensional laser print system according to claim 4, it is characterized in that: described imaging optical subsystem also comprises field stop, iris, micro object lens, automatic focus light path, real-time monitored light path.
8. three-dimensional laser print system according to claim 7, it is characterized in that: described field stop and iris are spatial light modulator or mechanical iris, the shape of diaphragm and size are regulated in real time by kinetic control system, be used for the beam diameter that control enters system, described field stop is positioned on the optical axis behind second fourier transform lens.
9. three-dimensional laser print system according to claim 7 is characterized in that: the information of described micro object lens after to the 4F imaging system is carried out the micro imaging, improves the spatial frequency of the random grating in the diffraction pixel.
10. according to claim 4 or 7 described three-dimensional laser print systems, it is characterized in that: described electromechanical structure also comprises auto focus control mechanism, light source shutter control mechanism, and described electromechanical structure is coordinated control by described motion control subsystem by computing machine and control program.
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