CN103245634B - 单片集成式微型红外气体传感器 - Google Patents
单片集成式微型红外气体传感器 Download PDFInfo
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DE102014208498B4 (de) * | 2014-05-07 | 2024-05-29 | Robert Bosch Gmbh | Montagekörper für Mikrospiegelchips, Spiegelvorrichtung und Herstellungsverfahren für eine Spiegelvorrichtung |
CN104677851B (zh) * | 2015-02-17 | 2018-02-13 | 苏州诺联芯电子科技有限公司 | 气体传感器及其制备方法 |
CN107389190A (zh) * | 2017-07-28 | 2017-11-24 | 华东师范大学 | 一种在硅圆片上单片集成的微型光谱仪及其制作方法 |
CN109596560B (zh) * | 2018-12-19 | 2021-09-24 | 电子科技大学 | 一种多通道集成红外气体传感器 |
CN109781649A (zh) * | 2018-12-29 | 2019-05-21 | 哈尔滨理工大学 | 一种适用于多种气体检测的非分光型红外气体传感器 |
CN110132877B (zh) * | 2019-06-17 | 2021-03-23 | 山东大学 | 一种基于mems的集成式红外气体传感器 |
CN113008823B (zh) * | 2019-12-20 | 2023-02-21 | 有研工程技术研究院有限公司 | 一种全集成式红外气体传感器 |
CN111693480A (zh) * | 2020-05-26 | 2020-09-22 | 中国科学院上海微系统与信息技术研究所 | 一种竖式微型红外气体传感器 |
CN111947791B (zh) * | 2020-08-17 | 2021-09-17 | 湖北星奔光电科技有限公司 | 一种红外辐射探测装置及暗场背散射光学读出方法 |
CN113375857A (zh) * | 2021-06-09 | 2021-09-10 | 江苏创芯海微科技有限公司 | 自验证真空度传感器 |
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DE4112678C2 (de) * | 1991-04-18 | 1995-06-14 | Schoeller Felix Jun Papier | Vorrichtung zur Erfassung von Erhöhungen auf sich bewegenden Materialbahnen |
US5327225A (en) * | 1993-01-28 | 1994-07-05 | The Center For Innovative Technology | Surface plasmon resonance sensor |
WO2009004558A2 (en) * | 2007-07-03 | 2009-01-08 | Koninklijke Philips Electronics N. V. | Thin film detector for presence detection |
CN102890067A (zh) * | 2012-09-17 | 2013-01-23 | 江苏惠通集团有限责任公司 | 基于近红外的甲醇汽油快速检测仪 |
CN203259470U (zh) * | 2013-05-16 | 2013-10-30 | 江苏物联网研究发展中心 | 单片集成式微型红外气体传感器 |
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Effective date of registration: 20190726 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3, building 15, room 328 Patentee after: Beijing Zhongke micro Investment Management Co., Ltd. Address before: 214135 Jiangsu New District of Wuxi City Linghu Road No. 200 China Sensor Network International Innovation Park C building 4 floor Patentee before: Jiangsu Internet of Things Research & Develoment Co., Ltd. |
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Effective date of registration: 20210107 Address after: 610200 in the concentration area of Chengdu Xingu Industrial Park, Dongsheng Street, Shuangliu District, Chengdu City, Sichuan Province Patentee after: China core Microelectronics Technology Chengdu Co.,Ltd. Address before: 100029 room 328, building 15, 3 Beitucheng West Road, Chaoyang District, Beijing Patentee before: Beijing Zhongke micro Investment Management Co.,Ltd. |