CN103235337A - Electrochemical seismic detector based on mechanical seal and packaging method thereof - Google Patents
Electrochemical seismic detector based on mechanical seal and packaging method thereof Download PDFInfo
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- CN103235337A CN103235337A CN2013101886481A CN201310188648A CN103235337A CN 103235337 A CN103235337 A CN 103235337A CN 2013101886481 A CN2013101886481 A CN 2013101886481A CN 201310188648 A CN201310188648 A CN 201310188648A CN 103235337 A CN103235337 A CN 103235337A
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- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000004806 packaging method and process Methods 0.000 title abstract 2
- 238000007789 sealing Methods 0.000 claims abstract description 19
- 238000012856 packing Methods 0.000 claims description 34
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Abstract
本发明公开了一种基于机械密封的电化学地震检波器及其封装方法，所述电化学地震检波器包括：固定圈、外壳、弹性膜和电极敏感核心；所述电极敏感核心置于两个所述外壳之间，且所述电极敏感核心与外壳之间通过柔性密封垫圈密封；所述弹性膜置于每个所述外壳与固定圈之间，以实现固定圈与外壳之间的密封，所述外壳与所述固定圈之间通过机械方式固定。电极敏感核心采用MEMS加工技术制造出来后，将其密封在小的密封件中，再将小的密封件密封在大的外壳中，最后用螺丝加固完成整个检波器的封装。所有的硬接触面之间均放置一层软垫，螺丝加固时，软垫发生形变，实现机械密封。
The invention discloses an electrochemical geophone based on mechanical sealing and a packaging method thereof. The electrochemical geophone includes: a fixed ring, a casing, an elastic film and an electrode sensitive core; the electrode sensitive core is placed in two between the shells, and between the electrode sensitive core and the shell is sealed by a flexible sealing gasket; the elastic film is placed between each of the shells and the fixing ring, so as to realize the sealing between the fixing ring and the shell, The housing and the fixing ring are fixed mechanically. After the electrode sensitive core is manufactured by MEMS processing technology, it is sealed in a small seal, and then the small seal is sealed in a large shell, and finally the package of the entire detector is completed with screws. A soft pad is placed between all hard contact surfaces. When the screws are reinforced, the soft pad is deformed to achieve a mechanical seal.
Description
Technical field
The present invention relates to earthquake detection technical field and sensor package technical field, relate in particular to a kind of galvanochemistry earthquake wave detector and method for packing thereof based on mechanical seal.
Background technology
Seismoreceiver is belong to vibration transducer a kind of, in the measuring process tested Vibration Parameter (as displacement, speed, acceleration etc.) is changed into different signal form (as machinery, electricity, light signal etc.).
Galvanochemistry earthquake wave detector is coasting body with the electrolytic solution that contains iodine and potassium iodide, and its sensitive element is an electrode sensitive core that comprises two pairs of electrodes.Every pair of electrode in this sensitive core constitutes by anode and negative electrode, and two pairs of electrodes are anode-cathode-K-A and distribute, and sensitive core and electrolytic solution are encapsulated in the shell of organic glass and rubber film formation.Under the effect of earthquake signal, electrolytic solution and electrode sensitive core produce relative motion, thereby changed near the CONCENTRATION DISTRIBUTION of two pairs of reactive ions of electrode, causing wherein, the electrochemical reaction speed of pair of electrodes accelerates, and another electrochemical reaction speed to electrode is slack-off or almost constant, and then the output current that makes pair of electrodes wherein becomes big, and another output current to electrode diminishes or be almost constant, detects seismic event by the variation of measuring the difference of output current between two pairs of electrodes.Therefore, the galvanochemistry wave detector has noise low, is difficult for the stress influence that is heated, and anti-electromagnetic interference (EMI) is strong, and is highly sensitive, installs and uses advantages such as simple.
The electrode sensitive core sintering of traditional electrical chemistry wave detector is in a ceramic disks, ceramic disks uses liquid silicone rubber seal in the organic glass shell, because liquid glue has flowability, in encapsulation process, may block the runner of electrode sensitive core, influence the consistance between device performance and device; In addition, the iodine in can a large amount of absorption reaction solution after fluid silicone rubber solidifies, thus cause device sensitivity to reduce gradually even lost efficacy.
Summary of the invention
For addressing the above problem, the present invention proposes a kind of galvanochemistry earthquake wave detector and method for packing thereof based on mechanical seal, its ultimate principle is, between all building blocks of wave detector, all place one deck silicon rubber cushion, thereby mechanical pressure compresses the silicon rubber cushion and realizes sealing between each building block of wave detector during assembling.
The invention discloses a kind of galvanochemistry earthquake wave detector based on mechanical seal, it comprises: retainer plate, shell, elastic membrane and electrode sensitive core; Described electrode sensitive core places between two described shells, and seals by the flexible sealing packing ring between described electrode sensitive core and the shell; Described elastic membrane places between each described shell and the retainer plate, and is to realize the sealing between retainer plate and the shell, fixing mechanically between described shell and the described retainer plate.
According to a further aspect in the invention, the invention also discloses a kind of method for packing of the galvanochemistry earthquake wave detector based on mechanical seal, it comprises:
Step 1, two packing washers are placed on two shells the RC groove of inside surface in, obtain the shell of two identical band packing washers;
Step 2, the electrode sensitive core after will encapsulating are placed in the RC groove of inside surface of described two shells;
Step 4, two shells and two retainer plates are tightened together, finish the encapsulation of galvanochemistry earthquake wave detector.
The invention has the beneficial effects as follows: (i) all parts of wave detector all are to assemble by the mode of mechanical seal, so assembling process is simple, efficient, and the good sealing effect of device; (ii) compare with traditional packaged type, machinery seal method does not use liquid glue in all assembling links, avoided on the one hand in the encapsulation process liquid glue to the influence of electrode sensitive core, thereby improved the consistance of wave detector, avoid the iodine in the reaction solution to be absorbed by liquid glue on the other hand, thereby guaranteed the permanently effective of wave detector.
Description of drawings
Fig. 1 is the structural representation of galvanochemistry earthquake wave detector among the present invention;
Fig. 2 is the fixed ring synoptic diagram of galvanochemistry earthquake wave detector among the present invention;
Fig. 3 is the shell mechanism synoptic diagram of galvanochemistry earthquake wave detector among the present invention;
Fig. 4 is the gasket structure synoptic diagram that is used among the present invention between encapsulation rear electrode sensitive core and the shell;
Fig. 5 is the elastic membrane structural representation of galvanochemistry earthquake wave detector among the present invention;
Fig. 6 is the encapsulation rear electrode sensitive core structural representation of galvanochemistry earthquake wave detector among the present invention;
Fig. 7 is the gasket structure synoptic diagram that is used among the present invention between electrode sensitive core and the seal;
Fig. 8 is the seal configuration synoptic diagram of galvanochemistry earthquake wave detector among the present invention;
Fig. 9 is the electrode sensitive core texture synoptic diagram of galvanochemistry earthquake wave detector among the present invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
The present invention proposes a kind of galvanochemistry earthquake wave detector and method for packing thereof based on mechanical seal.
Fig. 1 shows described in the present invention the structural representation based on the galvanochemistry earthquake wave detector of mechanical seal.As shown in Figure 1, this galvanochemistry earthquake wave detector is laterally zygomorphic, comprising: the electrode sensitive core 4 after retainer plate 1, shell 2, elastic membrane 3 and the encapsulation, wherein retainer plate 1, shell 2 are divided into identical in structure two parts up and down with elastic membrane 3.
Fig. 2 shows the structural representation of said fixing circle among the present invention.The hollow circular ring shape structure of described retainer plate 1 for being made by materials such as stainless steel and other metal materials or quartz or potteries has the depressed area on its two symmetrical sidewall, for increasing external mass piece headspace later on; Its upper surface (Fig. 2 right side) is a circular planes, and lower surface (Fig. 2 left side) is made up of annulus 5 and annulus 6, and annulus 5 is the outer ring, is distributed with threaded hole 7, and annulus 6 is inner ring, and its plane is lower than the plane of annulus 5, places elastic membrane 3 headspaces during for assembling.
Fig. 3 shows the structural representation of shell described in the present invention.Described shell 2 is the disk 8 that there is projection at an edge for to be made by chemical inert materials such as organic glass or polytetrafluoros in the middle of its upper surface (Fig. 3 left side), is used for holding electrolytic solution; Outside the disk 8 annulus 9 is arranged, be used for placing elastic membrane 3; Annulus 9 is outer a set collar 10, is distributed with threaded hole 13, and screw runs through the threaded hole 7 of two retainer plates 1 up and down, behind the threaded hole 13 of two shells 2 retainer plate and shell is fixed together up and down.Projection between projection between disk 8 and the annulus 9, annulus 9 and the annulus 10 has limited the scope of activities of the annulus 16 of elastic membrane 3, provides the location for placing elastic membrane 3.The lower surface of described shell 2 (Fig. 3 right side) is disc-shape, and has depressed area, many places 14 on its sidewall, a through hole is arranged in the middle of it, and screw is fixed on wave detector on the outside pedestal with the through hole of described depressed area 14 and the threaded hole of outside pedestal by the threaded hole 7 of retainer plate 1; The lower surface center position has groove 11, and described groove is square, and its center has a toroidal cavity to be used for placing packing washer 15, the electrode sensitive core 4 after described packing washer 15 is used for guaranteeing to encapsulate and the sealing between the described shell 2.The groove 11 of lower surface has one to extend to outside groove 12, is used for the extraction electrode lead-in wire.
Fig. 4 shows the electrode sensitive core that is used among the present invention after the encapsulation and the structural representation of the packing washer between the shell.Described packing washer 15 is for to be made by materials such as silicon rubber or nitrile rubbers, and it is shaped as annular, and the degree of depth, the interior external diameter size of the toroidal cavity (Fig. 3 right side) of groove 11 centers of the size of its thickness, interior external diameter and shell 2 are complementary.
Fig. 5 shows the structural representation of elastic membrane described in the present invention.Described elastic membrane 3 is for being made by chemical inertness such as silicon rubber or nitrile rubber and material with favorable elasticity, its upper surface (Fig. 5 left side) outermost has an annulus 16, it contacts with the annulus 9 of shell 2, the annulus 6 of retainer plate 1, annulus 16 is subjected to mechanical pressure generation deformation during assembling, realizes the sealing between retainer plate 1 and the shell 2.Annulus 16 inboards have one to the curved surface annulus 17 of outer lug, are used for holding electrolytic solution; There is a disk 18 at the center, is for increasing the design that the external mass piece is reserved later on.The thickness of elastic membrane 3 is about 2mm, and its lower surface (Fig. 5 right side) caves inward, and is used for holding electrolytic solution, and the function of the various piece that the function of its various piece and upper surface are corresponding is identical.
Fig. 6 shows the structural representation of the electrode sensitive core after the encapsulation among the present invention.Electrode sensitive core 4 after the described encapsulation is made up of two packing washers 19, two seals 20 and an electrode sensitive core 21.During assembling, described electrode sensitive core 21 (Fig. 9) is placed between two packing washers 19 (Fig. 7), distinguish two seals 20 of socket (Fig. 8) in the periphery of described two packing washers 19 again, tighten the screw in upper and lower two seals, the 20 both sides threaded holes, just can obtain the electrode sensitive core 4 after the described encapsulation.From assembling process as can be seen, can guarantee sealing between electrode sensitive core 21 and upper and lower two seals 20 by compression seal packing ring 19.
Fig. 7 shows the structural representation that is used in the packing washer between electrode sensitive core and the seal among the present invention.Described packing washer 19 is for to be made by materials such as silicon rubber or nitrile rubbers, and it is shaped as annular, and size of external diameter, thickness are complementary with annulus 24, the annulus 25 (Fig. 8 right side) of seal 20 lower surface centers respectively in it.
Fig. 8 shows the structural representation of seal of the present invention.Described seal 20 is made by chemical inertnesses such as organic glass or polytetrafluoro and material with favorable elasticity, there is threaded hole 23 both sides of its upper surface (Fig. 8 left side), there is the annulus 22 of a projection at the center of described upper surface, be used for being complementary with the toroidal cavity (Fig. 3 right side) at the lower surface center of shell 2, the hole at described annulus 22 centers is runners of electrolytic solution.There is threaded hole 23 both sides of the lower surface of described seal 20 (Fig. 8 right side), and there is an annulus 24 at the center, and external diameter size is complementary with packing washer 19 in it, and the hole at its center is the runner of electrolytic solution.There is the annulus 25 of a projection in the outside of annulus 24, is used for fixing seal packing ring 19.
Fig. 9 shows the structural representation of the core of electrode sensitive described in the present invention.Described electrode sensitive core 21 is made by microelectron-mechanical technology (MEMS) by silicon materials.Described electrode sensitive core 21 is rhythmo structure, is made up of 5 layer insulatings and 4 layers of alternate stack of electrode layer.Described insulation course and electrode layer surface are covered with circular or square through hole, and described through hole is the runner of electrolyte flow.Described electrode layer is the core component of wave detector work, and when wave detector detected seismic signal, electrode layer can output current signal.
When assembling, at first two packing washers 15 (Fig. 4) are placed on 11 li of the RC grooves of lower surface (Fig. 3 right side) of two shells 2 respectively, obtain the shell 2 of two identical band packing washers.Electrode sensitive core 4 (Fig. 6) after will encapsulating then is placed on 11 li of the RC grooves of lower surface of two shells 2, and the electrode sensitive core 4 after the encapsulation just is stuck between two shells 2.On the upper surface of two shells 2, place an elastic membrane 3 (Fig. 5) and a retainer plate 1 (Fig. 2) more respectively successively, form symmetrical structure as shown in Figure 1.At last long screw is applied in the threaded hole 7 of two retainer plates 1 up and down, up and down in the threaded hole 13 of two shells 2, holding screw is finished the encapsulation of whole galvanochemistry earthquake wave detector.Realize sealing by elasticity of compression film 3 between described retainer plate 1 and the shell 2, one deck packing washer 15 is also arranged to guarantee its sealing between the electrode sensitive core 4 after described shell 2 and the described encapsulation.
Described galvanochemistry earthquake wave detector, its described retainer plate 1 can be made by materials such as stainless steel and other metal materials or quartz or potteries.
Described galvanochemistry earthquake wave detector, its described shell 2 and seal 20 can be made by chemical inert materials such as organic glass or polytetrafluoros.
Described galvanochemistry earthquake wave detector, its described elastic membrane 3, packing washer 15 and packing washer 19 can be made by chemical inertnesses such as silicon rubber or nitrile rubber and the material with favorable elasticity.
Electrode sensitive core 21 also can be finished sealing by low-temp ceramics sintering technology sintering in pottery.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; be understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. galvanochemistry earthquake wave detector based on mechanical seal, it comprises: retainer plate, shell, elastic membrane and electrode sensitive core; Described electrode sensitive core places between two described shells, and seals by the flexible sealing packing ring between described electrode sensitive core and the shell; Described elastic membrane places between each described shell and the retainer plate, and is to realize the sealing between retainer plate and the shell, fixing mechanically between described shell and the described retainer plate.
2. galvanochemistry earthquake wave detector as claimed in claim 1 is characterized in that, described electrode sensitive core is the electrode sensitive core after encapsulating, and it comprises: electrode sensitive core and seal; Described electrode sensitive core places between two described seals, and realizes sealing by described flexible sealing packing ring between electrode sensitive core and described seal.
3. galvanochemistry earthquake wave detector as claimed in claim 1 is characterized in that having the threaded hole of mutual correspondence between described retainer plate and the shell, and it is used for described retainer plate, shell are interfixed.
4. galvanochemistry earthquake wave detector as claimed in claim 3 is characterized in that,
Described retainer plate is a circular ring, and its lower surface is made of two annulus, and the plane of its inboard annulus is lower than outside annulus;
Described shell is disc-shaped structure, the disk that has edge protuberance in the middle of its upper surface, and described disk has an annulus outward, and described annulus has a set collar outward, has projection between described annulus and the set collar; Its lower surface center position has groove, is used for placing the electrode sensitive core after encapsulating;
Described elastic membrane outermost is an annulus, and its inboard is the curved surface annulus to outer lug, is a disk in the middle of this curved surface annulus;
Wherein, described electrode sensitive core is placed on interior the fixing of groove at the lower surface center of two described shells, and two described upper surface of outer cover are placed with described elastic membrane respectively, and the outermost annulus of described elastic membrane places on the annulus of described upper surface of outer cover; Two described retainer plates are individually fixed in the described upper surface of outer cover of having placed described elastic membrane, and the outermost annulus of described elastic membrane places on the inboard annulus of described retainer plate, and its curved surface annulus is from the hollow space projection of described retainer plate; The common formation of disk on curved surface annulus on the described elastic membrane, disk and the described shell is held the container of electrolytic solution.
5. galvanochemistry earthquake wave detector as claimed in claim 4, it is characterized in that, have a circle shape groove in the central recess of described shell lower surface, this circle shape groove is used for placing described flexible sealing packing ring, with the sensitive electrode core after the realization encapsulation and the sealing between the shell.
6. galvanochemistry earthquake wave detector as claimed in claim 4 is characterized in that the central recess of described shell lower surface has outward extending groove, is used for the extraction electrode lead-in wire.
7. galvanochemistry earthquake wave detector as claimed in claim 2 is characterized in that, there is the annulus of projection at described seal upper surface center, and the groove of itself and described shell lower surface corresponding position is complementary; The lower surface corresponding positions of described seal is equipped with toroidal cavity, is used for placing packing washer; Described electrode sensitive core is encapsulated between two seals that packing washer arranged.
8. galvanochemistry earthquake wave detector as claimed in claim 1 is characterized in that described retainer plate is made by metal, quartz or pottery; Shell is made by inert material; Elastic membrane and packing washer are made by inert elastomeric materials.
9. galvanochemistry earthquake wave detector as claimed in claim 2 is characterized in that, described seal center has through hole; Described electrode sensitive core is by multilayer dielectric layer alternate stacked composition with electrode layer, and its surface has a plurality of through holes; Wherein, the through hole at described seal center and the through hole of described electrode sensitive core surfaces are electrolyte flow channel.
10. method for packing based on the galvanochemistry earthquake wave detector of mechanical seal, it comprises:
Step 1, two packing washers are placed on two shells the RC groove of inside surface in, obtain the shell of two identical band packing washers;
Step 2, the electrode sensitive core after will encapsulating are placed in the RC groove of inside surface of described two shells;
Step 3, on the outside surface of two shells, place elastic membrane and retainer plate successively respectively;
Step 4, two shells and two retainer plates are tightened together, finish the encapsulation of galvanochemistry earthquake wave detector.
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| CN201310188648.1A CN103235337B (en) | 2013-05-21 | 2013-05-21 | Electrochemical seismic detector based on mechanical seal and packaging method thereof |
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| CN201310188648.1A CN103235337B (en) | 2013-05-21 | 2013-05-21 | Electrochemical seismic detector based on mechanical seal and packaging method thereof |
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| CN105425282A (en) * | 2015-11-10 | 2016-03-23 | 中国科学院电子学研究所 | An Electrochemical Geophone Based on Force Balance Feedback |
| CN106597527A (en) * | 2017-03-03 | 2017-04-26 | 中国科学院电子学研究所 | Integrated triaxial electrochemical geophone and detection method thereof |
| CN111474575A (en) * | 2020-04-23 | 2020-07-31 | 中国科学院空天信息创新研究院 | MEMS integrated planar electrode and electrochemical angular acceleration sensor comprising same |
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| CN112986619B (en) * | 2021-02-08 | 2023-03-14 | 中国科学院空天信息创新研究院 | Electrochemical angular acceleration sensor based on miniaturized planar electrode |
| CN113687102A (en) * | 2021-09-10 | 2021-11-23 | 中国科学院空天信息创新研究院 | Packaging method of electrochemical angular acceleration sensor |
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