CN103219633B - A kind of temperature control system of excimer laser - Google Patents
A kind of temperature control system of excimer laser Download PDFInfo
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- CN103219633B CN103219633B CN201310149256.4A CN201310149256A CN103219633B CN 103219633 B CN103219633 B CN 103219633B CN 201310149256 A CN201310149256 A CN 201310149256A CN 103219633 B CN103219633 B CN 103219633B
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Abstract
The invention discloses a kind of temperature control system for excimer laser, temperature control system comprises the cavity temperature control system of discharge cavity, the water cooling plant of magnetic compressors, the water cooling plant of solid switch, main pipeline and multiple branch pipe(tube), and described cavity temperature control system comprises the flow controller providing the pipeline of cooling water and be arranged on described pipeline of temperature sensor, controller and heat exchanger, heat exchanger; Gas temperature in discharge cavity described in temperature sensor Real-Time Monitoring, and temperature data is sent to described controller, controller produces control signal and control signal is sent to described flow controller, flow controller automatically adjusts to cooling water flow according to control signal, completes the control to gas temperature in described discharge cavity.The present invention can control the temperature of each parts of laser automatically, accurately, improves the energy conversion efficiency of laser, job stability and useful life.
Description
Technical field
The present invention relates to a kind of automatic temperature control system, be applicable to gas laser, be particularly useful for excimer laser and there is the excimer laser of double cavity structure.
Background technology
Excimer laser is a kind of conventional gas laser towards ultraviolet feature application, has that wavelength is short, a feature of Gao Zhongying and calibration amplification, is outstanding photoetching LASER Light Source.
Traditional discharge pumped excimer laser adopts single cavity structure design.Along with the development of photoetching technique, require that light source has narrower spectral width (live width), higher repetition rate and higher average power.
Narrow and laser power raising to effectively realize spectral width, double cavity structure is introduced in the design of laser.Its basic thought makes linewidth narrowing and improve laser output power to be achieved in different gas discharge modules (seeds chamber, enlarged cavity).Its course of work is as follows: seeds chamber produces the seed light with certain repetition rate, realizes the low power laser concussion radiation of very narrow bandwidth, high-quality; Enlarged cavity realizes the pulse energy after seed light incidence and amplifies.Laser based on double cavity structure design has possessed the output characteristic of photolithography light source necessary narrow spectrum control and higher single pulse energy.
The energy conversion efficiency of excimer laser is lower, and most of electric energy of input is all converted into heat.Meanwhile, the Rapid Circulation of working gas needs to be driven by running up of blower fan, thus produces more heat.If these heats can not shed in time, the temperature of working gas will be made to raise fast.And the temperature of working gas all has a significant impact energy of lasers conversion efficiency and energy stability, facts have proved, working gas has an optimum temperature (or optimum temperature range), and at such a temperature, laser has higher energy conversion efficiency and energy stability.
The traditional temperature control system for excimer laser adopts cooling water directly by the mode of heat exchanger, does not have temperature to control reponse system, therefore cannot accurate gas temperature in control chamber.And do not have chamber wall heating system, therefore laser needs longer warm-up times.
Summary of the invention
(1) technical problem that will solve
The object of the present invention is to provide a kind of temperature control system for excimer laser, with the working temperature of each parts to the excimer laser automatically, accurately controlled.
(2) technical scheme
(3) beneficial effect
Compared with prior art, the present invention controls the temperature of each parts such as laser discharge cavity, magnetic compressors and solid-state switch automatically, accurately, improves the energy conversion efficiency of laser, job stability and useful life.
Accompanying drawing explanation
Fig. 1 is the structural representation of the excimer laser MOPA system with main oscillations chamber and power amplification chamber;
Fig. 2 is the structural representation of the first embodiment of temperature control system of the present invention;
Fig. 3 is the schematic diagram of the cooling system of the magnetic compressors of the first embodiment of the present invention;
Fig. 4 is the basic structure schematic diagram of the discharge cavity of the first embodiment of the present invention;
Fig. 5 is the structural representation of another embodiment of temperature control system for excimer laser of the present invention;
Fig. 6 is the temperature control flow figure of another embodiment of temperature control system for excimer laser of the present invention;
Fig. 7 is the flow chart of the temperature compensation procedure of another embodiment of temperature control system for excimer laser of the present invention;
Fig. 8 is the temperature control curve figure of the actual measurement discharge cavity of temperature control system of the present invention.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
The excimer laser of typical single cavity structure is mainly made up of solid switch (SSS), magnetic compressors (MSG) and discharge cavity (DC).Wherein, solid switch is mainly used in electric pulse direct voltage being converted to high-frequency, narrow spaces, and electric pulse passes to the input of magnetic compressors.Magnetic compressors is used for the amplitude of potential pulse to improve, and is reduced by its width.The high-voltage pulse of magnetic compressors output enters the main electrodes of discharge cavity.Discharge cavity provides continual fresh working gas, and accepts high pressure pulse discharge generation laser.
The double cavity structure design of excimer laser is mainly divided three classes: main oscillations chamber-power amplification cavity configuration (MOPA), main oscillations chamber-power oscillation cavity configuration (MOPO) and the ring cavity structure (MOPRA) developing out on main oscillations chamber-power amplification cavity configuration basis.
Fig. 1 is the structural representation of the excimer laser MOPA system with main oscillations chamber and power amplification chamber.As shown in Figure 1, it has double cavity structure, this double cavity structure comprises MO module (main oscillations chamber module) and PA module (power amplification chamber module), MO module and PA module all have discharge cavity, magnetic compressors and solid switch, mark the discharge cavity that 17 are MO module in figure, mark 18 is discharge cavities of PA module; Mark 19 is magnetic compressors of MO module, and mark 20 is magnetic compressors of PA module; Mark 21 is solid switches of MO module, and mark 23 is solid switches of PA module.
Fig. 2 is the structural representation of an embodiment of the temperature control system for MOPA excimer laser of the present invention shown in Fig. 1.In this embodiment, the temperature control system of laser comprises the water cooling plant of described magnetic compressors 19,20, and magnetic compressors 19,20 inside of excimer laser has high voltage device, produces high pressure and a large amount of heats during work.For high pressure height thermal element, wind-cooling heat dissipating mode ability is inadequate, and water-cooling has again very large potential risk, therefore selects iknsulating liquid to carry out submergence cooling.As shown in Figure 3, the water cooling plant of magnetic compressors mainly comprises transformer oil 106, oil pump 107, oil water heat exchange device 108 and for providing the pipeline etc. of the cooling water of transformer oil and oil water heat exchange device.The high pressure height thermal element of transformer oil 106 pairs of magnetic compressors inside carries out submergence cooling, transformer oil 106 after heat absorption is pumped into oil water heat exchange device 108 by oil pipe by oil pump 107, and carry out heat exchange with the cooling water in oil water heat exchange device 108, re-inject into magnetic compressors through cooled transformer oil 106.In fig. 2, described label 108a, 108b are oil water heat exchange devices.
Because the cooling capacity of submergence free convection is limited, be strengthening cooling capacity, the import and export of oil pipe can be arranged near high pressure height thermal element, utilize the power of oil pump to form submergence forced convection.
In this embodiment, temperature control system also comprises the cavity temperature control system of the discharge cavity 17,18 of MO module and PA module, cavity temperature control system comprises temperature sensor 29,30, controller 15,16, the pipeline of cooling water being provided and being arranged at the motor valve door 11,13 (flow controller) on described pipeline of heat exchanger 34, heat exchanger 34.Gas temperature in temperature sensor 29,30 Real-Time Monitoring cavity, and temperature data is sent to controller 15,16, controller 15,16 carries out logical operation according to described temperature data and in conjunction with the target temperature value of its storage inside, produce control signal and control signal sent to motor valve door 11,13, this automatic regulating valve door 11,13 automatically adjusts to cooling water flow according to the control signal received, thus completes the control to gas temperature in cavity.
Described main oscillations chamber or power amplification chamber are discharge cavity, and Fig. 4 is the basic structure schematic diagram of the discharge cavity of this embodiment, and as shown in Figure 4, discharge cavity is made up of the cavity 31 sealed, sparking electrode 32, blower fan 33, heat exchanger 34 and electric heater 35.Cavity 31 forms by having the wall encirclement of certain thickness chamber, supports and form the runner of gas circulation for providing machinery.Electric heater 35 is arranged in the inside of chamber wall, for heating chamber wall, thus indirect working gas.The Surface coating heat-conducting insulation material of electric heater 35, to avoid being short-circuited with chamber wall, and can heat conduction preferably.Heat exchanger 34 and blower fan 33 are arranged in the inside of cavity 31, are respectively used to cool cycles gas and the power providing gas circulation.
For the laser with above-mentioned discharge cavity, before laser starts, start electric heater 35 in advance, to heat the chamber wall of cavity 31, to make the temperature of the discharge gas in cavity 31 reach optimum temperature as early as possible, thus reduce start-up time, and reduce electrode damage.
In addition, when laser minibreak, the chamber wall also starting electric heater 35 pairs of cavitys 31 heats, to make the gas in cavity maintain optimum temperature, for the startup again of laser is ready.
When laser normally runs, the heat that electric discharge produces produce by blower fan 33 high velocity air and take away, and carry out heat exchange with the cooling water in heat exchanger 34, thus heat is shed.By the flow of controlled cooling model water, the temperature of the gas in cavity 31 accurately can be controlled.
In this embodiment, laser also comprises solid switch 21 and 23, and laser temperature control system also comprises the water cooling plant of solid switch 21,23, and water cooling plant comprises the pipeline providing cooling water, and it adopts serial or parallel connection mode to connect.
In this embodiment, the temperature control system of laser also comprises main pipeline, and main pipeline is connected with water cooling unit, provides the cooling water needed for whole temperature control system, and it can be equipped with filter 1, filters cooling water, in order to avoid blocking pipe after long-play.Also there is an electromagnetic valve 2 after filter 1, for controlling the break-make of main water inlet tube.And main pipeline also can be provided with flowmeter, monitoring cooling water actual flow.
In this embodiment, described main pipeline is connected to each branch pipe(tube), branch pipe(tube) comprises the water cooled pipeline of the water cooled pipeline of cavity temperature control system, the water cooling plant of magnetic compressors, and the water cooled pipeline of solid switch, the front end of each branch pipe(tube) all has a water outlet valve 5 ~ 9, and its break-make is controlled by water outlet valve 5 ~ 9.
In this embodiment, the temperature control system of laser also comprises check-valves, lays respectively at the end of each branch pipe(tube), and its effect is the backflow preventing each branch road current.
For the excimer laser with double cavity structure, the layout of double cavity structure mainly point horizontal arrangement (parallel or series connection) and be arranged vertically two kinds.Horizontal arrangement scenario-frame is loose, floor space is very large, installs, uses all inconveniences; Be arranged vertically that scenario-frame is compact, floor space is little, be convenient to install and use.General employing is arranged vertically, and complete machine outside is designed with semiclosed casing.Therefore fan can also be set at casing internal, adopt air cooling way to carry out auxiliary heat dissipation to double cavity structure.
Fig. 5 is the structural representation of another embodiment of temperature control system for excimer laser of the present invention.As shown in Figure 5, this this embodiment excimer laser also comprises two discharge cavities 17,18, each discharge cavity corresponding a magnetic compressors, i.e. magnetic compressors 19,20, two solid-state switches 21,23.
In addition, the excimer laser of this embodiment also comprises a power-supply controller of electric 22.Power-supply controller of electric 22 is for controlling discharge voltage and the discharge frequency of solid-state switch 21,23.Equally, include water cooling plant (not shown in Fig. 5) as shown in figs. 2 to 4 in each discharge cavity, magnetic compressors, solid-state switch, do not repeat them here.And the water cooling plant of described each parts can be connected with the water pipe of outside, thus the cooling water utilizing water pipe to provide goes the parts at place to cool.
The temperature control system of this embodiment comprises delivery port P1, water return outlet P2, filter 1, shunt 3,4, electromagnetically operated valve 2, ball valve 5 ~ 9, flow controller 10 ~ 14, programmable device 15,16, momentum switch 24 ~ 28 and thermometer 29,30.All parts is interconnected by pipeline, and wherein P1, P2 are connected with water cooling unit.
The delivery port P1 of temperature control system is used for providing cooling water to whole system, this delivery port is connected to shunt 3 through filter 1, electromagnetically operated valve 2 successively by main pipeline, current are separated five tunnels in parallel by shunt 3, make it the water cooling plant respectively by the water cooling plant of the cavity temperature control system of the cavity temperature control system of discharge cavity 17, discharge cavity 18, magnetic compressors 19, magnetic compressors 20 and the solid-state switch 21 of connecting successively, solid-state switch 23.Filter 1 is identical with the first embodiment with the effect of electromagnetically operated valve 2.Shunt 3,4 is by main pipeline water stream, polymerization.The effect of ball valve 5 ~ 9 is equivalent to the water outlet valve in the first embodiment, for Non-follow control each water route switch, can turn off branch road and supply water, also can regulate initial flow by switch size in installation and repairing process.
Described thermometer 29,30 is a kind of embodiments of described temperature sensor, for detecting the temperature in discharge cavity 17,18.Controller in programmable device 15 and 16 i.e. the first embodiment, the temperature of its discharge cavity that can obtain according to thermometer, close and always sent control information to flow controller 11,13 by the pre-set programs wherein stored, automatically to control the flow controller 11,13 of the cooling flow not for controlling the water cooling plant entering discharge cavity 17,18.Flow controller 11,13 can accept the control signal of programmable device 15 and 16, and according to Signal Regulation discharge cavity water cooled pipeline flow.
Momentum switch 24 ~ 28 can send warning when pressure exceedes set point, for detecting the value whether ducted flow in place can reach.
Fig. 6 is the temperature control flow figure of two discharge cavity lasers of this embodiment.When laser is started working, water cooling unit and ball valve 5 ~ 8 are all opened.Laser discharge makes temperature in discharge cavity 17,18 rise gradually, discharge cavity temperature measured by thermometer 29,30, programmable device 15,16 collecting temperature signal, when temperature information temperature is greater than a design temperature (as 40 DEG C), programmable device 15,16 is respectively with certain proportion adjust flux automatic regulating valve door 11,13.
For making temperature stabilization, in this embodiment, be greater than design temperature when recording temperature, and when difference is greater than a threshold value (such as 1 DEG C), programmable device control flow check amount controller standard-sized sheet, declines rapidly to make temperature; Be greater than design temperature when recording temperature, but when its difference does not exceed this threshold value (when such as exceeding within design temperature 1 DEG C), the flow of programmable device control flow check amount controller is according to the linear change of the difference of this temperature.As shown in Figure 6, when initialization, the initial flow of flow controller is P
0, the real time temperature that thermometer gathers discharge cavity is at set intervals T, and temperature is sent to programmable device, and when programmable device judges that T is greater than 40 DEG C, it sends control signal makes motor valve door 11,13 adjust flux be linear regulation amount P
1, wherein: P
1=P
0+ K Δ T, Δ T=T-40 DEG C, K=P
s-P
0.Wherein P
sbeing the maximum stream flow of flow controller, such as, is 10L/min.
Because temperature is a progressive formation, heat exchanger effectiveness can vary with temperature and change simultaneously, control algolithm shown in independent employing Fig. 6, the control result obtained has residual error or overshoot, and therefore temperature control system of the present invention have also been devised the auxiliary control of temperature-compensating mechanism as temperature control system.
Fig. 7 shows the flow chart of the temperature compensation procedure in this embodiment.As shown in Figure 7.Programmable device can calculate the difference DELTA T of the temperature overshoot (or residual error) that the overshoot (or residual error) of the temperature now collected and a upper moment collect in (as 2 seconds) every a setting-up time
2-Δ T
1, before this difference, be multiplied by an empirical coefficient u, so just obtain compensating flowrate regulated value Δ P=u (the Δ T that programmable device will control
2-Δ T
1).The P that compensated regulation value and Fig. 6 draw
1and P=P
1+ Δ P be flow control its control the actual flow of this system.Then the Δ T will obtained now
2value pays Δ T
1, then programmable device waited for for 2 seconds again, used the same method and calculated new Δ T
2value, still calculate flow compensated value according to method above, so repeatedly, make the temperature of laser cavity finally be stabilized in 40 DEG C.Wherein coefficient u and second stand-by period 2 are all empirical values, can be adjusted to different values for different systems, as long as these two value adjustments is relatively good, controlled system just can reach very high precision.
The caloric value of power-supply controller of electric is relatively very little, does not need water quench.The caloric value of magnetic compressors and solid-state switch is almost constant, so by Flow-rate adjustment to a certain size lasting water flowing, can not repeat them here.
Fig. 8 is the temperature control curve figure of the actual measurement discharge cavity of temperature control system of the present invention.The situation that curve is above design temperature when being 42 DEG C, to be design temperature the be situation of 40 DEG C of curve below.As seen from Figure 8, temperature control system of the present invention can to realize discharge cavity automatically, accurately temperature regulate.
In sum, discharge cavity tool of the present invention has the following advantages: compared with prior art, the present invention adopts easy method to achieve automatic to each parts such as laser discharge cavity, magnetic compressors and solid-state switches, accurate temperature and controls, particularly temperature conditions is required that the harsher and heat production high accuracy that laser cavity does not quietly realize error range ± 0.5 DEG C controls, thus improve the energy conversion efficiency of laser, job stability and useful life.The temperature stabilization that simultaneously the present invention can also be used for the similar device of other and Optical Maser System controls.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. the temperature control system for excimer laser, described excimer laser comprises discharge cavity, magnetic compressors and solid-state switch, described temperature control system comprises the cavity temperature control system of described discharge cavity, the water cooling plant of described magnetic compressors, the water cooling plant of described solid-state switch, main pipeline and multiple branch pipe(tube), wherein
Described main pipeline is connected to each branch pipe(tube), and each branch pipe(tube) comprises the water cooled pipeline of the described water cooled pipeline of cavity temperature control system, the water cooling plant of magnetic compressors, and the water cooled pipeline of solid-state switch; Described main pipeline is connected with a water cooling unit, for providing cooling water for whole temperature control system; It is characterized in that:
Described cavity temperature control system comprises the flow controller providing the pipeline of cooling water and be arranged on described pipeline of temperature sensor, programmable device and heat exchanger, described heat exchanger;
Gas temperature in discharge cavity described in described temperature sensor Real-Time Monitoring, and temperature data is sent to described programmable device, described programmable device is according to described temperature data, and carry out logical operation in conjunction with the target temperature value of its storage inside, produce control signal and control signal is sent to described flow controller, described flow controller automatically adjusts to cooling water flow according to the control signal received, thus completes the control to gas temperature in described discharge cavity, wherein
When the temperature of the discharge cavity of described temperature sensor measurement is greater than a design temperature, described programmable device regulates described flow controller with certain proportion; Be greater than described design temperature when described temperature sensor records temperature, and when its difference is greater than a threshold value, described programmable device controls described flow controller standard-sized sheet; Be greater than design temperature when described temperature sensor records temperature, but when its difference does not exceed described threshold value, described programmable device control flow check amount controller is according to the linear regulated quantity P of this difference
1control flow; The difference of the temperature overshoot in a moment in described programmable device also calculates the temperature now collected hyperharmonic every a setting-up time, obtain a compensating flowrate regulated value Δ P according to this temperature overshoot mathematic interpolation, described flow controller is according to P
1+ Δ P adjust flux, described compensating flowrate regulated value Δ P equals this temperature overshoot difference described and is multiplied by an empirical coefficient u.
2. as claimed in claim 1 for the temperature control system of excimer laser, it is characterized in that: described temperature control system comprises delivery port, water return outlet, filter, shunt, electromagnetically operated valve, ball valve and momentum switch, all parts is interconnected by pipeline, and wherein delivery port is connected with water cooling unit.
3. as claimed in claim 2 for the temperature control system of excimer laser, it is characterized in that: described delivery port is used for providing cooling water to whole system, this delivery port is connected to shunt through described filter, electromagnetically operated valve successively by described main pipeline, by described shunt, current are separated multichannel in parallel, make it the water cooling plant respectively by the described water cooling plant of cavity temperature control system, the water cooling plant of magnetic compressors and solid-state switch.
4. as claimed in claim 2 for the temperature control system of excimer laser, it is characterized in that: described discharge cavity has multiple, the corresponding magnetic compressors of each discharge cavity and a solid-state switch.
5. as claimed in claim 2 for the temperature control system of excimer laser, it is characterized in that: the branch pipe(tube) of the water cooling plant of the cavity temperature control system of described each discharge cavity is in parallel; The pipeline of the water cooling plant of described each magnetic compressors is in parallel, the placed in series of the water cooling plant of described solid-state switch.
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Families Citing this family (4)
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| CN108427449A (en) * | 2018-02-09 | 2018-08-21 | 北京科益虹源光电技术有限公司 | Excimer laser temprature control method and system based on Smith predictive compensations |
| CN109663214A (en) * | 2018-12-19 | 2019-04-23 | 武汉奇致激光技术股份有限公司 | A kind of excimer treatment instrument cooling system structure and its control method |
| CN111864518A (en) * | 2020-06-04 | 2020-10-30 | 东风汽车集团有限公司 | Low-cost laser instrument cooling system |
| CN113783097A (en) * | 2021-04-15 | 2021-12-10 | 北京科益虹源光电技术有限公司 | Method and system for controlling energy of double-cavity laser |
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| US6034978A (en) * | 1999-05-12 | 2000-03-07 | Cymer, Inc. | Gas discharge laser with gas temperature control |
| EP1582828A1 (en) * | 2004-03-30 | 2005-10-05 | KRESS, Ekkehard | Apparatus and method for cooling one or more semiconductor elements and/or laser materials |
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Effective date of registration: 20160907 Address after: 100176, Beijing, Daxing District Beijing economic and Technological Development Zone, Yizhuang Industrial Park, No. 10, building Patentee after: Beijing science and Technology Co., Ltd. Address before: 100094 Haidian District, Deng Zhuang Road, No. 9, Beijing Patentee before: Inst of Photoelectrics, C.A.S |