CN103217395A - System for online control of concentration of chemical solution, and method thereof - Google Patents

System for online control of concentration of chemical solution, and method thereof Download PDF

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Publication number
CN103217395A
CN103217395A CN2012100167481A CN201210016748A CN103217395A CN 103217395 A CN103217395 A CN 103217395A CN 2012100167481 A CN2012100167481 A CN 2012100167481A CN 201210016748 A CN201210016748 A CN 201210016748A CN 103217395 A CN103217395 A CN 103217395A
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China
Prior art keywords
chemical solution
concentration
instrument
soup
data
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Pending
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CN2012100167481A
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Chinese (zh)
Inventor
梁建
范琼
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KUTTLER AUTOMATION SYSTEMS (SUZHOU) CO Ltd
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KUTTLER AUTOMATION SYSTEMS (SUZHOU) CO Ltd
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Priority to CN2012100167481A priority Critical patent/CN103217395A/en
Publication of CN103217395A publication Critical patent/CN103217395A/en
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Abstract

The invention provides a system for the online control of the concentration of a chemical solution, and a method thereof, and belongs to the technical field of chemical solution monitoring analysis. The system comprises a near infrared grating spectrograph used for the online acquisition of the spectral data of the chemical solution, a concentration test device used for analyzing the spectral data to obtain the concentration data of the chemical solution, an analysis device used for the calibration and calculation of the concentration data to output a control signal of the quantitative addition of a soup, and a soup adding device. The chemical solution concentration online control precision of the system is high, and products prepared through a wet technology adopting the system and the method have a high quality and a low rework rate.

Description

Chemical solution concentration on-line control system and method
Technical field
The invention belongs to chemical solution monitoring analysis technical field, relate to chemical solution concentration on-line control system and chemical solution concentration On-Line Control Method.
Background technology
In photovoltaic (PV) technical field, need carry out various wet processings to the solar cell substrate usually, for example, wet etching trimming or the like.Equally, in printed circuit board (PCB) (PCB) technical field, also there is the multistep wet processing.In the wet processing process, must need to use the chemical solution of various corresponding compositions, concentration value.And therefore the whether accurate quality and the rework rate that directly can influence product of the concentration of chemical solution, must control the concentration of chemical solution well to improve the quality of product.
Normally, in the wet processing process, along with chemical reaction takes place in chemical solution tank product, the solution concentration in the chemical solution tank also can change thereupon, for guaranteeing the stable of solution concentration, needs the corresponding soup of online interpolation usually.In the prior art, the interpolation soup mode of employing is that the meter chip adds and flow-stopping sheet adds.
But, along with the raising that product quality is required, the also corresponding raising of precision to chemical solution concentration, thereby also require accurately to add chemical solution concentration, the precision that interpolation soup mode of the prior art can not guarantee to add soup, the concentration that is difficult to online accurate control chemical solution influences product quality, has increased the rework rate of product.
In view of this, be necessary to propose a kind of novel chemical solution concentration on-line control system.
Summary of the invention
The objective of the invention is to, improve the On-line Control precision of chemical solution concentration.
For realizing above purpose or other purposes, the invention provides following technical scheme.
According to an aspect of of the present present invention, a kind of chemical solution concentration on-line control system is provided, it comprises:
Near infrared grating instrument is used for the spectroscopic data of the described chemical solution of online acquisition;
The concentration determination device is used for described spectroscopic data analysis is drawn the concentration data of described chemical solution;
Analytical equipment is used for described concentration data is carried out the control signal that calibration calculations is quantitatively added with the output soup; And
The soup adding set.
According to the chemical solution concentration on-line control system of one embodiment of the invention, wherein, described system applies is in solar cell wet processing or printed circuit board (PCB) wet processing.
In the system of described embodiment before, preferably, the spectrophotometer with automatic internal calibration function is set in the described echelette instrument.
In the system of described embodiment before, preferably, described echelette instrument is arranged near the outlet of circulation pumping of corresponding chemical solution tank.
In the system of described embodiment before, preferably, described concentration determination device connects described echelette instrument and is arranged near the described chemical solution tank, and the relative described analytical equipment with the echelette instrument of a plurality of described concentration determination devices is dispersed placement independently.
In the system of described embodiment before, preferably, described analytical equipment comprises:
Programmable logic controller, and
Computer installation.
In the system of described embodiment before, preferably, be provided with membrane pump or fixed displacement pump in the described soup adding set.
According to another aspect of the present invention, a kind of chemical solution concentration On-Line Control Method is provided, it may further comprise the steps:
Spectroscopic data by the described chemical solution of near infrared grating instrument online acquisition;
Described spectroscopic data analysis is drawn the concentration data of described chemical solution;
Normal concentration data based on described concentration data and described chemical solution are carried out calibration calculations; And
Quantitatively add corresponding soup to chemical solution tank.
According to the chemical solution concentration On-Line Control Method of one embodiment of the invention, wherein, described method is applied in solar cell wet processing or the printed circuit board (PCB) wet processing.
In the method for described embodiment before, preferably, the frequency range of described collection is 1 time/5 minutes to 1 time/minute.
Technique effect of the present invention is, finishes online concentration monitor function by adopting echelette instrument and corresponding concentration determination device, therefore, measures concentration precision height; Further by the addition of the automatic calibration calculations of analytical equipment with the accurately controlling medicinal liquid adding set; Thereby the online fluctuation of concentration that can realize the chemical solution in the chemical solution tank is little, and the concentration precision can be guaranteed, and the product quality of wet processing preparation reduces the product rework rate greatly and reduces the preparation of product cost.
Description of drawings
From following detailed description in conjunction with the accompanying drawings, will make above-mentioned and other purposes of the present invention and advantage clear more fully, wherein, same or analogous key element adopts identical label to represent.
Fig. 1 is the chemical solution concentration on-line control system according to one embodiment of the invention.
Fig. 2 be in embodiment illustrated in fig. 1 near infrared grating instrument synoptic diagram is set.
Embodiment
What introduce below is a plurality of some in may embodiment of the present invention, aims to provide basic understanding of the present invention, is not intended to confirm key of the present invention or conclusive key element or limits claimed scope.Understand easily, according to technical scheme of the present invention, do not changing under the connotation of the present invention, but one of ordinary skill in the art can propose other implementations of mutual alternative.Therefore, following embodiment and accompanying drawing only are the exemplary illustrations to technical scheme of the present invention, and should not be considered as of the present invention all or be considered as qualification or restriction to technical solution of the present invention.
Figure 1 shows that chemical solution concentration on-line control system according to one embodiment of the invention.In this embodiment, chemical solution concentration on-line control system 10 is applied in the wet processing process of solar cell preparation.For reducing the rework rate of solar cell, need the concentration of accurate online in real time regulation and control inhibition and generation solution to maintain a certain predetermined value or predetermined range.
As shown in Figure 1, chemical solution concentration on-line control system 10 is to carry out online adjusting control at the chemical solution concentration in the chemical solution tank 90.The chemical solution of chemical solution tank 90 is used for solar cell or solar cell substrate are handled, and its concrete solution compolision is not restrictive, and the specific constructive form of chemical solution tank 90 neither be restrictive.Part solution 901 in the chemical solution tank 90 flow to or near infrared (NIR) the grating instrument 110 of the system 10 that flows through, and near infrared grating instrument 110 detects spectroscopic data in the solution 901 and the feedback light spectrum information 111 concentration determination device 120 to system 10.
Near infrared grating instrument 110 can be provided with concentration determination device 120 particularly integratedly; Be tester in the concentration determination device 120(present embodiment) spectral information 111 is analyzed to draw the concentration data about solution 901, wherein, the concrete grammar principle that the spectral information of solution 901 is calculated its concentration is conventionally known to one of skill in the art.Analytical equipment 120 is specifically as follows the system of self-contained control function, and it does not need extra computing machine to wait to realize control.
Be provided with spectrophotometer in the near infrared grating instrument 110, this spectrophotometer has automatic internal calibration function, thereby can guarantee near infrared grating instrument 110 and good measurement stability and the repeatability of concentration determination device 120 realizations.For guaranteeing that soup can obtain in time replenishing, the frequency range that near infrared grating instrument 110 is gathered spectroscopic data can be 1 time/1 minute to 1 time/5 minutes, for example, 1 time/1.5 minutes, those skilled in the art can select concrete frequency values according to the quantity of the solar cell of the accuracy requirement of chemical solution, the capacity of chemical solution tank 90, online preparation or the like factor.
Near infrared grating instrument 110 and the concentration determination device 120 common concentration monitor functions that realize, it not only can realize the concentration of on-line monitoring solution, and the measuring accuracy height of concentration, for example, its precision can reach the 0.3%-0.5%(mass percent concentration) more than.By near infrared grating instrument 110 and concentration determination device 120, not only can on-line analysis go out the concentration of various soup compositions in the chemical solution, can also analyze the concentration that draws chemical reaction product.
Continue as shown in Figure 1, chemical solution concentration on-line control system 10 comprises analytical equipment 130, and the concentration data 121 that concentration determination device 120 is drawn is input to analytical equipment 130.PLC(Programmable Logic Controller can be set in the analytical equipment 130, programmable logic controller) (not shown), by PLC concentration data 121 is sent to PC, and with PC in the preset concentration data of storing carry out calibration calculations, promptly can draw in the chemical solution every kind of soup in requisition for the amount of adding.Further, analytical equipment 130 output soups quantitatively add control signal 131 to soup adding set 140.
Above calibration calculations process can realize by preassembled software in the PC, software is stored the normal concentration data or is remembered normal online concentration data, carry out calibration calculations by " calibrating patterns " set up in advance between this concentration data and the concentration data 121, with the amount of the required interpolation of soup that calculates each composition correspondence in the chemical solution.
Therefore, analytical equipment 130 can be finished the concentration data calibration calculations and export the quantitatively function of the control signal of interpolation of soup; It will be appreciated that the specific implementation form of analytical equipment 130 is not limited by above embodiment.
Further, chemical solution concentration on-line control system 10 herb liquid add-on systems 140 can add soup by annexes such as pipelines to chemical solution tank 90 quantitatively, with the concentration of each composition in the accurate On-line Control chemical solution tank 90.Particularly, in the soup add-on system 140 (not shown)s such as membrane pump or fixed displacement pump can be set, to realize the accurate interpolation of soup.
Figure 2 shows that the synoptic diagram that is provided with of near infrared grating instrument in embodiment illustrated in fig. 1.In conjunction with illustrated in figures 1 and 2, preferably, near infrared grating instrument 110 is installed near the outlet of circulation pumping 91 of chemical solution tank 90, and wherein, the soup in the circulation pumping 91 place circulation lines 82 can be by gathering the pipeline 81 near infrared grating instrument 110 that flow to or flow through.Valve 92 is installed in conducting and the disconnection that is used for the Control Circulation pipeline in the circulation line 82, and valve 93 and valve 94 are installed in to gather to be used for controlling whether gather spectroscopic data in the pipeline 81.The concentration determination device 120 that is connected with near infrared grating instrument 110 also is arranged near the near infrared grating instrument 110, therefore, near infrared grating instrument 110 and concentration determination device 120 can 90 of chemical solution tanks nearby the position be provided with and with respect to analytical equipment 130 as a separate sub setting, therefore, near infrared grating instrument 110 is provided with flexibly with concentration determination device 120 positions, make things convenient for and be distributed in solar cell and prepare in each flow process of wet processing in the factory, is very suitable for the formation of the online acquisition network of data.
It will be appreciated that, correspond respectively to a plurality of chemical solution tanks and disperse a plurality of near infrared grating instrument 110 of setting can export an analytical equipment simultaneously to, therefore can realize concentrating calibration calculations to handle with concentration determination device 120 concentration data that collects.
To sum up, by using above chemical solution concentration on-line control system 10, can realize that the online fluctuation of concentration of the chemical solution in the chemical solution tank 90 is little, the concentration precision can be guaranteed, thereby can improve the quality of products, reduce the product rework rate greatly and then reduce cost.
It will be appreciated that, more than chemical solution concentration on-line control system 10 embodiment illustrated in fig. 1 can be applied to equally in the printed circuit board (PCB) plate wet processing, in this no longer concrete example explanation.
Above example has mainly illustrated chemical solution concentration on-line control system of the present invention, and chemical solution concentration On-Line Control Method of the present invention has been described simultaneously.Although only the some of them embodiments of the present invention are described, those of ordinary skills should understand, and the present invention can be in not departing from its purport and scope implements with many other forms.Therefore, example of being showed and embodiment are regarded as illustrative and not restrictive, and under situation about not breaking away from as defined spirit of the present invention of appended each claim and scope, the present invention may be contained various modifications and replacement.

Claims (10)

1. a chemical solution concentration on-line control system is characterized in that, comprising:
Near infrared grating instrument is used for the spectroscopic data of the described chemical solution of online acquisition;
The concentration determination device is used for described spectroscopic data analysis is drawn the concentration data of described chemical solution;
Analytical equipment is used for described concentration data is carried out the control signal that calibration calculations is quantitatively added with the output soup; And
The soup adding set.
2. the system as claimed in claim 1 is characterized in that, described system applies is in solar cell wet processing or printed circuit board (PCB) wet processing.
3. system as claimed in claim 1 or 2 is characterized in that, the spectrophotometer with automatic internal calibration function is set in the described echelette instrument.
4. system as claimed in claim 3 is characterized in that, described echelette instrument is arranged near the outlet of circulation pumping of corresponding chemical solution tank.
5. system as claimed in claim 4, it is characterized in that, described concentration determination device connects described echelette instrument and is arranged near the described chemical solution tank, and the relative described analytical equipment with the echelette instrument of a plurality of described concentration determination devices is dispersed placement independently.
6. system as claimed in claim 1 or 2 is characterized in that, described analytical equipment comprises:
Programmable logic controller, and
Computer installation.
7. system as claimed in claim 1 or 2 is characterized in that, is provided with membrane pump or fixed displacement pump in the described soup adding set.
8. a chemical solution concentration On-Line Control Method is characterized in that, may further comprise the steps:
Spectroscopic data by the described chemical solution of near infrared grating instrument online acquisition;
Described spectroscopic data analysis is drawn the concentration data of described chemical solution;
Normal concentration data based on described concentration data and described chemical solution are carried out calibration calculations; And
Quantitatively add corresponding soup to chemical solution tank.
9. method as claimed in claim 8 is characterized in that, described method is applied in solar cell wet processing or the printed circuit board (PCB) wet processing.
10. method as claimed in claim 8 or 9 is characterized in that the frequency range of described collection is 1 time/5 minutes to 1 time/minute.
CN2012100167481A 2012-01-19 2012-01-19 System for online control of concentration of chemical solution, and method thereof Pending CN103217395A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105645438A (en) * 2016-04-07 2016-06-08 芜湖英帕特工程技术有限公司 Na<+> and Cl<-> ion purification system
CN106855433A (en) * 2016-12-26 2017-06-16 中国科学院长春光学精密机械与物理研究所 A kind of method and device of imaging spectrometer auto-scaling
CN107970860A (en) * 2017-12-05 2018-05-01 宜宾海丰和锐有限公司 A kind of system of continuous automatic dilution hydrazine hydrate
CN108137340A (en) * 2015-10-07 2018-06-08 Sms集团有限公司 Particularly it is used to prepare the on-line analysis by means of near-infrared spectrum analysis NIR of polyaluminium chloride hydroxide

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1449369A (en) * 2000-07-06 2003-10-15 米兰纽姆石化公司 Process control for acetic acid manufacture
JP2005187844A (en) * 2003-12-24 2005-07-14 Kurabo Ind Ltd Device and method for regenerating acid solution and measuring concentration
CN101256141A (en) * 2008-03-21 2008-09-03 天地(常州)自动化股份有限公司 Method for on-line regulating-correcting firedamp sensor for mining safety monitoring system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1449369A (en) * 2000-07-06 2003-10-15 米兰纽姆石化公司 Process control for acetic acid manufacture
JP2005187844A (en) * 2003-12-24 2005-07-14 Kurabo Ind Ltd Device and method for regenerating acid solution and measuring concentration
CN101256141A (en) * 2008-03-21 2008-09-03 天地(常州)自动化股份有限公司 Method for on-line regulating-correcting firedamp sensor for mining safety monitoring system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108137340A (en) * 2015-10-07 2018-06-08 Sms集团有限公司 Particularly it is used to prepare the on-line analysis by means of near-infrared spectrum analysis NIR of polyaluminium chloride hydroxide
CN105645438A (en) * 2016-04-07 2016-06-08 芜湖英帕特工程技术有限公司 Na<+> and Cl<-> ion purification system
CN105645438B (en) * 2016-04-07 2018-10-09 芜湖英帕特工程技术有限公司 A kind of Na+, Cl- ion purification system
CN106855433A (en) * 2016-12-26 2017-06-16 中国科学院长春光学精密机械与物理研究所 A kind of method and device of imaging spectrometer auto-scaling
CN107970860A (en) * 2017-12-05 2018-05-01 宜宾海丰和锐有限公司 A kind of system of continuous automatic dilution hydrazine hydrate

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Application publication date: 20130724