CN103208405B - Repair technology for cathode liner in P5000 etching machine - Google Patents
Repair technology for cathode liner in P5000 etching machine Download PDFInfo
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- CN103208405B CN103208405B CN201210012960.0A CN201210012960A CN103208405B CN 103208405 B CN103208405 B CN 103208405B CN 201210012960 A CN201210012960 A CN 201210012960A CN 103208405 B CN103208405 B CN 103208405B
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- inner lining
- cathode inner
- connector
- etching machine
- cathode
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W30/00—Technologies for solid waste management
- Y02W30/50—Reuse, recycling or recovery technologies
- Y02W30/82—Recycling of waste of electrical or electronic equipment [WEEE]
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- Electron Sources, Ion Sources (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
A repair technology for a cathode liner in a P5000 etching machine comprises the steps of protecting surfaces of parts which are not required to be machined, packaging the cathode liner (1) through an adhesive tap and a protective material, and only exposing a first edge interface (1-1), a second edge interface (1-2) and a third edge interface (1-3) which are to be machined and a trench (2) for positioning during machining on the liner. According to the repair technology, only three leaked protruding interfaces are processed, other unrelated characteristics and dimensions on the cathode liner are not affected, through addition of a seal ring on the end face and adoption of threaded connection, sealing performances of components are more reliable than those of the original welding structures, a repeated repair characteristic is provided, and production costs are saved for P5000 etching machine users.
Description
Technical field
The present invention utilizes precise machine machining and in conjunction with specific processing arrangement to some key components and parts method of renovating, reprocessing in the semiconductor equipment damaged, particularly the renovation technique of cathode inner lining in a kind of P5000 etching machine.
Background technology
As parts crucial in semiconductor equipment, protrude interface with three snap joints connect with 3 that are positioned at liner end face in the direct-cooling type cathode inner lining course of work, and utilize 3 of interface root plane contact that facet is corresponding with in snap joint to position, to ensure accurate and Fast Installation when assembling.Because of little with the contact area of snap joint, direct-cooling type cathode inner lining volume, weight are large, make direct-cooling type cathode inner lining occur that imbalance just easily causes sealing property to damage in vain once there be wherein 1 contact platform.The characteristic of operational environment, has strict requirement to the sealing property of direct-cooling type cathode inner lining and decay resistance.The high cost of new product is changed after the manufacture craft highly difficult because of it and the production standard of high request must cause damage of internal lining.
Summary of the invention
The object of the invention is renovation technique the problems referred to above being provided to cathode inner lining in a kind of P5000 etching machine.
The object of the invention is to realize as follows: the renovation technique of cathode inner lining in a kind of P5000 etching machine, comprises the following steps:
A, protection do not need the component surface processed, and wrap up with adhesive tape and protection material target liner, only expose 3 limit interfaces that needs carry out processing and are interiorly lining with for adding the ditch of locating man-hour;
B, machining, centered by delivery port, the end face of cathode inner lining is benchmark, processes the countersunk head of the dark 2.5mm of the φ 43 concentric with delivery port, with the countersunk head bottom surface of φ 43 for benchmark, attack the screw thread of M33 × 1.5 downwards, depth of thread 9mm, with counterbore bottom surface for benchmark, the seal groove that on counterbore bottom surface, processing is concentric with screwed hole, seal groove center size φ 36mm, wide 2mm, dark 1.3mm;
C, installing replacement connector is: the seal groove that polishing step b processes, require that soffit plane degree reaches 0.02, surface roughness reaches 0.8, sealing ring is installed, sealing ring is placed in the seal groove handled well, determine to replace connector bottom slot position, replacement connector is arranged on cathode inner lining by M33 × 1.5 stud, and indicate on replacement connector according to the position of the fluid passage of cathode inner lining, on replacement connector, the groove that the degree of depth is 10mm is outputed with 8mm flat-bottom milling cutter, uniform application AB glue on the internal thread and round platform upper end of cathode inner lining, the replacement connector of having slotted is installed, mounted cathode inner lining is put into baking box,
D, machining are: the location identical with step b and fixing means, and Precision Machining replaces connector;
E, detect sealing property and be: with 2 in standard plug airtight 3 limit interfaces, the 3rd connects and is connected with fluid pressure leak detector, applies 1MPa pressure to this pressure system, if system can keep pressure 1 hour constant, then represents that cathode inner lining does not leak;
F, surface treatment are: want standard to carry out surface anodization process to part according to the technical requirement of former part, to improve insulation property and the decay resistance of cathode inner lining.
Further, in described step C, the temperature in baking box remains on 80 degrees Celsius, and is incubated 1 hour.Advantage of the present invention: this renovation technique only processes for protruding interface with raw 3 of leaking, and does not affect other extraneous features on cathode inner lining and size.Be threaded by adding sealing ring at end face and using instead, the sealing property of parts is more more reliable than Welding Structure originally, and has the advantages that to repeat to repair.For P5000 etching machine user has saved production cost.
Accompanying drawing explanation
In order to make content of the present invention more easily be clearly understood, below according to specific embodiment also by reference to the accompanying drawings, the present invention is further detailed explanation, and wherein Fig. 1 is structural representation of the present invention, and Fig. 2 is rigging position schematic diagram in repair process.
Embodiment
See Fig. 1 and Fig. 2, the renovation technique of cathode inner lining in a kind of P5000 etching machine, comprises the following steps:
A, protection do not need process component surface, wrap up with adhesive tape and protection material target liner 1, only expose 3 limit interfaces that needs carry out processing and interior being lining with is respectively the first limit interface 1-1, Second Edge interface 1-2, the 3rd limit interface 1-3 for adding ditch 2,3 limit interfaces of locating man-hour;
B, machining, centered by delivery port, the end face of cathode inner lining 1 is benchmark, processes the countersunk head of the dark 2.5mm of the φ 43 concentric with delivery port, with the countersunk head bottom surface of φ 43 for benchmark, attack the screw thread of M33 × 1.5 downwards, depth of thread 9mm, with counterbore bottom surface for benchmark, the seal groove that on counterbore bottom surface, processing is concentric with screwed hole, seal groove center size φ 36mm, wide 2mm, dark 1.3mm;
C, installing replacement connector is: the seal groove that polishing step b processes, require that soffit plane degree reaches 0.02, surface roughness reaches 0.8, sealing ring 3 is installed, sealing ring 3 is placed in the seal groove handled well, determine to replace connector bottom slot position, replacement connector is arranged on cathode inner lining 1 by M33 × 1.5 stud 4, and indicate on replacement connector according to the position of the fluid passage of cathode inner lining 1, on replacement connector, the groove that the degree of depth is 10mm is outputed with 8mm flat-bottom milling cutter, uniform application AB glue on the internal thread and round platform upper end of cathode inner lining, the replacement connector 5 of having slotted is installed, mounted cathode inner lining 1 is put into baking box, temperature in baking box remains on 80 degrees Celsius, and is incubated 1 hour,
D, machining are: the location identical with step b and fixing means, and Precision Machining replaces connector;
E, detect sealing property and be: with 2 in standard plug airtight 3 limit interfaces, the 3rd connects and is connected with fluid pressure leak detector, applies 1MPa pressure to this pressure system, if system can keep pressure 1 hour constant, then represents that cathode inner lining does not leak;
F, surface treatment are: want standard to carry out surface anodization process to part according to the technical requirement of former part, to improve insulation property and the decay resistance of cathode inner lining.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (2)
1. the renovation technique of cathode inner lining in P5000 etching machine, comprises the following steps:
A, protection do not need process component surface, wrap up with adhesive tape and protection material target liner (1), only expose 3 limit interfaces that needs carry out processing and be interiorly lining with for adding the ditch (2) of locating man-hour, 3 limit interfaces are respectively the first limit interface (1-1), Second Edge interface (1-2), the 3rd limit interface (1-3);
B, machining, centered by delivery port, the end face of cathode inner lining (1) is benchmark, processes the countersunk head of the dark 2.5mm of the φ 43 concentric with delivery port, with the countersunk head bottom surface of φ 43 for benchmark, attack the screw thread of M33 × 1.5 downwards, depth of thread 9mm, with counterbore bottom surface for benchmark, the seal groove that on counterbore bottom surface, processing is concentric with screwed hole, seal groove center size φ 36mm, wide 2mm, dark 1.3mm;
C, installing replacement connector is: the seal groove that polishing step b processes, require that soffit plane degree reaches 0.02, surface roughness reaches 0.8, sealing ring (3) is installed, sealing ring (3) is placed in the seal groove handled well, determine to replace connector bottom slot position, replacement connector is arranged on cathode inner lining (1) by M33 × 1.5 stud (4), and indicate on replacement connector according to the position of the fluid passage of cathode inner lining (1), on replacement connector, the groove that the degree of depth is 10mm is outputed with 8mm flat-bottom milling cutter, uniform application AB glue on the internal thread and round platform upper end of cathode inner lining, the replacement connector (5) of having slotted is installed, mounted cathode inner lining (1) is put into baking box,
D, machining are: the location identical with step b and fixing means, and Precision Machining replaces connector;
E, detect sealing property and be: with 2 in standard plug airtight 3 limit interfaces, the 3rd connects and is connected with fluid pressure leak detector, applies 1MPa pressure to this pressure system, if system can keep pressure 1 hour constant, then represents that cathode inner lining does not leak;
F, surface treatment are: want standard to carry out surface anodization process to part according to the technical requirement of former part, to improve insulation property and the decay resistance of cathode inner lining.
2. the renovation technique of cathode inner lining in a kind of P5000 etching machine according to claim 1, it is characterized in that: in described step C, the temperature in baking box remains on 80 degrees Celsius, and is incubated 1 hour.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210012960.0A CN103208405B (en) | 2012-01-17 | 2012-01-17 | Repair technology for cathode liner in P5000 etching machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210012960.0A CN103208405B (en) | 2012-01-17 | 2012-01-17 | Repair technology for cathode liner in P5000 etching machine |
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| CN103208405A CN103208405A (en) | 2013-07-17 |
| CN103208405B true CN103208405B (en) | 2015-06-10 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104972268B (en) * | 2015-05-18 | 2017-08-01 | 潘洁萍 | A kind of restorative procedure of butterfly valve seepage |
| CN105097409B (en) * | 2015-09-06 | 2017-03-22 | 靖江先锋半导体科技有限公司 | Straight cold cathode bush with magnet ring for plasma reaction chamber |
| CN110280968B (en) * | 2019-05-23 | 2021-09-07 | 中国人民解放军第五七一九工厂 | Repairing and assembling method for composite material bushing of engine lubricating oil pump set |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851860A (en) * | 2005-12-08 | 2006-10-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Bottom electrode assembly for semiconductor device |
| CN101206999A (en) * | 2006-12-18 | 2008-06-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Inner lining and reaction chamber containing the same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040017165A (en) * | 2002-08-20 | 2004-02-26 | 삼성전자주식회사 | Plasma etching apparatus having cathode liner |
| KR101091309B1 (en) * | 2009-08-18 | 2011-12-07 | 주식회사 디엠에스 | Plasma etching device |
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- 2012-01-17 CN CN201210012960.0A patent/CN103208405B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851860A (en) * | 2005-12-08 | 2006-10-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Bottom electrode assembly for semiconductor device |
| CN101206999A (en) * | 2006-12-18 | 2008-06-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Inner lining and reaction chamber containing the same |
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Application publication date: 20130717 Assignee: JINGJIANG XIANFENG SEMICONDUCTOR TECHNOLOGY CO.,LTD. Assignor: You Li Contract record no.: 2013320000055 Denomination of invention: Repair technology for cathode liner in P5000 etching machine License type: Exclusive License Record date: 20130304 |
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Effective date of registration: 20201202 Address after: 214500, No. 8, Tak Yu Road, Chengnan South Park, Taizhou, Jiangsu, Jingjiang Patentee after: JINGJIANG XIANFENG SEMICONDUCTOR TECHNOLOGY Co.,Ltd. Address before: 214500, six North, South Industrial Zone, Jingjiang Economic Development Zone, Taizhou, Jiangsu Patentee before: You Li |
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Address after: 214500 No. 195, Xingang Avenue, Jingjiang Economic Development Zone, Taizhou City, Jiangsu Province Patentee after: Jiangsu Xianfeng Precision Technology Co.,Ltd. Address before: 214500 No.8 Deyu Road, Chengnan Park, Jingjiang City, Taizhou City, Jiangsu Province Patentee before: JINGJIANG XIANFENG SEMICONDUCTOR TECHNOLOGY CO.,LTD. |
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