CN104881968A - Machining form liquid leakage alarm device applied to semiconductor device - Google Patents
Machining form liquid leakage alarm device applied to semiconductor device Download PDFInfo
- Publication number
- CN104881968A CN104881968A CN201510185026.2A CN201510185026A CN104881968A CN 104881968 A CN104881968 A CN 104881968A CN 201510185026 A CN201510185026 A CN 201510185026A CN 104881968 A CN104881968 A CN 104881968A
- Authority
- CN
- China
- Prior art keywords
- leakage
- detecting sensor
- leakage detecting
- housing
- liquid leakage
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
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- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/18—Status alarms
- G08B21/187—Machine fault alarms
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
Abstract
A machining form liquid leakage alarm device applied to a semiconductor device mainly solves the problem in the prior art that a leakage source can not be found rapidly and accurately. The machining form liquid leakage alarm device applied to the semiconductor device is characterized in that a split type liquid leakage alarm structural element is arranged along a joint of a liquid conveying pipeline, and a liquid leakage perception sensor is arranged in the element. The machining form liquid leakage alarm device applied to the semiconductor device comprises an installing shell, a pipeline joint, a pipeline, the liquid leakage perception sensor and the like, the liquid leakage perception sensor is fixed in the installing shell via a liquid leakage perception sensor briquetting, the liquid leakage perception sensor briquetting is fixed on the installing shell via a liquid leakage perception sensor briquetting screw, and the liquid leakage perception sensor is used to detect the leakage of the pipeline joint in the installing shell and provide the alarm information. The machining form liquid leakage alarm device applied to the semiconductor device of the present invention can support the use of the joints of various and different forms, enables the leakage point finding needed time to be shortened and the device to be recovered more rapidly, thereby reducing the economic losses brought by the shutdown of the device and the personnel hazard brought by leakage.
Description
Technical field
The present invention relates to a kind of leakage warning device being applied to semiconductor equipment, be exactly a kind of machined form leakage warning device being applied to semiconductor equipment, belong to semiconductive thin film deposition applications and manufacturing technology field.
Background technology
Semiconductor equipment often needs the serviceability temperature making reaction cavity or related elements reach certain when deposition reaction, to maintain the normal operation of whole semiconductor equipment.The chilled water that serviceability temperature is lower sometimes carries out the cooling of related device, or uses the liquid with uniform temperature to realize maintaining the intensification of related device or temperature.Its product produced of semiconductor equipment and equipment itself all comprise many electron devices, liquid transmission pipeline is once leakage will pollute clean room environment, as there is the abnormal phenomenon because leakage causes, grievous injury semiconductor equipment and product, the more serious safety by endangering staff.Although the leakage of liquid is difficult to avoid sometimes, should taper to minimum by the harm of leakage as much as possible, be the problem that people pay close attention to.
Existing semiconductor equipment is often just from the withstand voltage and intensity aspect improving pipeline, or the classification of waterproof aspect of key components is as improving Whole Equipment to the resistivity of leakage.But only rely on these safeguard procedures to be inadequate, also need to carry out in source detecting and protecting, to process leakage event timely, to reduce the infringement to equipment and personnel.
Summary of the invention
The present invention is for the purpose of solving the problem, source is revealed in can not quick and precisely searching that the passive liquid-leakage preventing mode mainly solving ubiquitous only dependence reinforcement pipeline intensity or components and parts classification of waterproof in existing semiconductor equipment exists, so that the very first time solves the phenomenon of leakage.In fact the intensity of pipeline is only relied on to be insecure, even if the intensity of pipeline can ensure, but the weakest link of the joint of pipeline whole liquid conveying system often, because joint often needs the operations such as dismounting, installation, or the reason such as the sealing original paper inefficacy caused after using for a long time, most equipment leak of liquid phenomenon is all the shank appearing at pipeline.The invention provides one more direct leakage detection alarm device, use the split type sensor installation module that the leakage of arranging along liquid transmission pipeline detects tactility apparatus and matches with corresponding pipe joint, can when there being small leakage situation to occur the very first time detect the phenomenon of leakage, and provide feedback signal to cut off in time Liquid transfer and process leakage fault to system.
For achieving the above object, the present invention adopts following technical proposals: a kind of machined form leakage warning device being applied to semiconductor equipment, this device installs a kind of split type leakage alarm structure element along the joint of liquid transmission pipeline, element internal installs leakage detecting sensor, even if when only having the small leakage phenomenon not easily discovered to occur, drop can be on a sensor low at first, make leakage signal be converted to electric signal and feed back to device Host, so that the very first time provides warning message, and perform cut-out liquid transmission pipeline simultaneously, the predefined operations such as device powers down, more serious consequence is produced to avoid imminent leakage.Different signal locations is defined according to the joint of diverse location on pipeline; the position that maintainer's leakage exists can be fed back to faster; shorten and search leak source required time; carry out the recovery of equipment faster, to strive for the economic loss that reduces to bring because of equipment downtime and because revealing the personnel's harm brought.
This device mainly comprises: holder housing, pipe joint, leakage detecting sensor briquetting, pipeline, leakage detecting sensor briquetting screw, leakage detecting sensor and jiont treatment case top lid.Leakage detecting sensor is fixed by leakage detecting sensor briquetting in described holder housing; Above-mentioned leakage detecting sensor briquetting is fixed on holder housing by leakage detecting sensor briquetting screw.Described leakage detecting sensor is for detecting the leakage of pipe joint in holder housing and providing warning message.Holder housing upper cover and holder housing pass through holder housing screw fastening on pipeline, and are undertaken fastening by screw.
Beneficial effect of the present invention and feature: structure is simple, applicability good; shorten and search leak source required time; quick and precisely can search and reveal source to carry out equipment recovery fast, reduce the economic loss because equipment downtime brings to greatest extent and endanger because revealing the personnel brought.Holder housing and holder housing upper cover adopt machined structure, and volume is little, lightweight, and appearance integral is attractive in appearance, can not bring damage to pipeline.And processing many general type joint housing structure can be coordinated according to different types of connection form, the pipe joint of applicable threeway, straight-through or elbow form and the different connection form such as cutting ferrule connects, pagoda connects, be threaded.Semiconductive thin film deposition applications and manufacturing technology field can be widely used in.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 be Fig. 1 overlook longitudinal sectional drawing.
Fig. 3 is using state schematic diagram of the present invention.
In figure, piece mark represents respectively:
1, pagoda jiont treatment housing; 2, pagoda joint; 3, leakage detecting sensor briquetting; 4, hose line; 5, leakage detecting sensor briquetting screw; 6, leakage detecting sensor; 7, pagoda jiont treatment case top lid; 8, jiont treatment housing screw; 9, cutting ferrule straight coupling; 10, cutting ferrule straight coupling holder housing; 11, sleeve three-way connector; 12, sleeve three-way connector holder housing; 13, cutting ferrule elbow connection; 14, cutting ferrule elbow holder housing; 15, cutting ferrule/NPT changes elbow; 16, cutting ferrule/NPT changes elbow holder housing; 17, cutting ferrule/NPT changes straight coupling; 18, cutting ferrule/NPT changes straight coupling holder housing; 19, hard tube pipeline.
Below in conjunction with drawings and Examples, the present invention is further illustrated.
Embodiment
Embodiment
As depicted in figs. 1 and 2, be applied to a machined form leakage warning device for semiconductor equipment, this device mainly comprises: pagoda jiont treatment housing 1, pagoda joint 2, leakage detecting sensor briquetting 3, hose line 4, leakage detecting sensor briquetting screw 5, leakage detecting sensor 6 and pagoda jiont treatment case top lid 7.Leakage detecting sensor 6 is fixed by leakage detecting sensor briquetting 3 in described pagoda jiont treatment housing 1; Above-mentioned leakage detecting sensor briquetting 3 is fixed on pagoda jiont treatment housing 1 by leakage detecting sensor briquetting screw 5.Described leakage detecting sensor 6 is for detecting the leakage of pagoda joint 2 in pagoda jiont treatment housing 1 and providing warning message.Pagoda jiont treatment case top lid 7 and pagoda jiont treatment housing 1 are fastened on hose line 4 by jiont treatment housing screw 8.
Above-mentioned leakage detecting sensor 6 adopts Omron brand, and model is the product of F03-16PE.
As shown in Figure 3, during work, along whole liquid transmission pipeline, according to different joint forms, different holder housings is installed, as: cutting ferrule straight coupling 9 is installed cutting ferrule straight coupling holder housing 10; Sleeve three-way connector 11 is installed sleeve three-way connector holder housing 12; Cutting ferrule elbow 13 is installed cutting ferrule elbow holder housing 14; Cutting ferrule/NPT changes on elbow 15 and installs cutting ferrule/NPT conversion elbow holder housing 16; Cutting ferrule/NPT changes on straight coupling 17 and installs cutting ferrule/NPT conversion straight coupling holder housing 18, to be applicable to different pipeline in whole liquid transmission pipeline, hose line 4 or hard tube pipeline 19 and different connector forms (NPT is threaded, cutting ferrule connects, the connection of pagoda joint etc.).And fix leakage detecting sensor 6 by leakage detecting sensor briquetting 3 therein, when whole pipeline there is leak of liquid phenomenon, the leakage detecting sensor 6 meeting very first time and leakage liquid joint, even if when only having the small leakage phenomenon not easily discovered to occur, drop can be on a sensor low at first, make leakage signal be converted to electric signal and feed back to device Host, so that the very first time provides warning message, and perform cut-out liquid transmission pipeline simultaneously, the predefined operations such as device powers down, produce more serious consequence to avoid imminent leakage.Different signal locations is defined according to the joint of diverse location on pipeline; the position that maintainer's leakage exists can be fed back to faster; shorten and search leak source required time; carry out the recovery of equipment faster, to strive for the economic loss that reduces to bring because of equipment downtime and because revealing the personnel's harm brought.
Above-mentioned cutting ferrule/NPT conversion, refer to that one end of joint is cutting ferrule connected mode, the other end is NPT thread connecting mode, is because the joint form that different components and parts manufacturers manufactures may be different, needs to convert unified standard in a fluid delivery system.
The present invention can be multi-form with multiple types joint support the use.
Claims (5)
1. one kind is applied to the machined form leakage warning device of semiconductor equipment, it is characterized in that: this device installs a kind of split type leakage alarm structure element along the joint of liquid transmission pipeline, element internal installs leakage detecting sensor, it mainly comprises: holder housing, pipe joint, leakage detecting sensor briquetting, pipeline, leakage detecting sensor briquetting screw, leakage detecting sensor and jiont treatment case top lid, fixes leakage detecting sensor in described jiont treatment housing by leakage detecting sensor briquetting; Above-mentioned leakage detecting sensor briquetting is fixed on jiont treatment housing by leakage detecting sensor briquetting screw; Described leakage detecting sensor is used for the leakage of pipe joint in detection tabs holder housing and provides warning message, and jiont treatment case top lid and jiont treatment housing pass through jiont treatment housing screw fastening on pipeline, and are undertaken fastening by screw.
2. be applied to the machined form leakage warning device of semiconductor equipment as claimed in claim 1, it is characterized in that: along whole liquid transmission pipeline, according to different joint forms, different holder housings is installed.
3. be applied to the machined form leakage warning device of semiconductor equipment as claimed in claim 2, it is characterized in that: described different joint form installs different holder housings, adopt pagoda jiont treatment housing, pagoda joint, in described pagoda jiont treatment housing, fix leakage detecting sensor by leakage detecting sensor briquetting; Above-mentioned leakage detecting sensor briquetting 3 is fixed on pagoda jiont treatment housing by leakage detecting sensor briquetting screw, and pagoda jiont treatment case top lid and pagoda jiont treatment housing pass through jiont treatment housing screw fastening on hose line.
4. be applied to the machined form leakage warning device of semiconductor equipment as claimed in claim 2, it is characterized in that: described different joint form is installed different holder housings and referred to: cutting ferrule straight coupling is installed cutting ferrule straight coupling holder housing; Sleeve three-way connector is installed sleeve three-way connector holder housing; Cutting ferrule elbow is installed cutting ferrule elbow holder housing; Cutting ferrule/NPT changes on elbow and installs cutting ferrule/NPT conversion elbow holder housing; Cutting ferrule/NPT changes on straight coupling and installs cutting ferrule/NPT conversion straight coupling holder housing, one or more in above-mentioned, to be applicable to different pipeline in whole liquid transmission pipeline, hose line or hard tube pipeline, and fix leakage detecting sensor by leakage detecting sensor briquetting therein.
5. be applied to the machined form leakage warning device of semiconductor equipment as claimed in claim 4, it is characterized in that: in described device, select one or more in different holder housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510185026.2A CN104881968A (en) | 2015-04-20 | 2015-04-20 | Machining form liquid leakage alarm device applied to semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510185026.2A CN104881968A (en) | 2015-04-20 | 2015-04-20 | Machining form liquid leakage alarm device applied to semiconductor device |
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| Publication Number | Publication Date |
|---|---|
| CN104881968A true CN104881968A (en) | 2015-09-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510185026.2A Pending CN104881968A (en) | 2015-04-20 | 2015-04-20 | Machining form liquid leakage alarm device applied to semiconductor device |
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| CN (1) | CN104881968A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107367422A (en) * | 2017-08-07 | 2017-11-21 | 胡国良 | Extract leakage detection method and abstraction instrument |
| CN109185568A (en) * | 2018-10-25 | 2019-01-11 | 浙江久运车辆部件有限公司 | A kind of nitrile rubber and polyethylene blend braided construction hose |
| WO2019148701A1 (en) * | 2018-02-05 | 2019-08-08 | 深圳光峰科技股份有限公司 | Liquid leakage prevention device, and heat dissipation system |
| CN111799196A (en) * | 2020-07-17 | 2020-10-20 | 中国科学院微电子研究所 | Semiconductor cleaning equipment and emergency drainage method thereof |
| CN115031901A (en) * | 2022-08-11 | 2022-09-09 | 拓荆科技(北京)有限公司 | Liquid leakage detection system and semiconductor process equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1103948A (en) * | 1994-06-22 | 1995-06-21 | 唐新环 | Method for detecting the leakage in liquid conveying pipe or storage tank |
-
2015
- 2015-04-20 CN CN201510185026.2A patent/CN104881968A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1103948A (en) * | 1994-06-22 | 1995-06-21 | 唐新环 | Method for detecting the leakage in liquid conveying pipe or storage tank |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107367422A (en) * | 2017-08-07 | 2017-11-21 | 胡国良 | Extract leakage detection method and abstraction instrument |
| WO2019148701A1 (en) * | 2018-02-05 | 2019-08-08 | 深圳光峰科技股份有限公司 | Liquid leakage prevention device, and heat dissipation system |
| CN110121249A (en) * | 2018-02-05 | 2019-08-13 | 深圳光峰科技股份有限公司 | Leakage-proof liquid device and cooling system |
| CN109185568A (en) * | 2018-10-25 | 2019-01-11 | 浙江久运车辆部件有限公司 | A kind of nitrile rubber and polyethylene blend braided construction hose |
| CN111799196A (en) * | 2020-07-17 | 2020-10-20 | 中国科学院微电子研究所 | Semiconductor cleaning equipment and emergency drainage method thereof |
| CN111799196B (en) * | 2020-07-17 | 2022-09-20 | 中国科学院微电子研究所 | Semiconductor cleaning equipment and emergency drainage method thereof |
| CN115031901A (en) * | 2022-08-11 | 2022-09-09 | 拓荆科技(北京)有限公司 | Liquid leakage detection system and semiconductor process equipment |
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Application publication date: 20150902 |
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| RJ01 | Rejection of invention patent application after publication |