CN103207539A - Non-contact conveying device - Google Patents
Non-contact conveying device Download PDFInfo
- Publication number
- CN103207539A CN103207539A CN2012100649395A CN201210064939A CN103207539A CN 103207539 A CN103207539 A CN 103207539A CN 2012100649395 A CN2012100649395 A CN 2012100649395A CN 201210064939 A CN201210064939 A CN 201210064939A CN 103207539 A CN103207539 A CN 103207539A
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- roller
- roller bearing
- contact type
- type conveyer
- substrate
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Abstract
The invention discloses a non-contact conveying device used in a developing machine. The device comprises a plurality of component units including: rolling shafts, a plurality of rollers sleeved on the rolling shafts, and gears fixed on the ends of the rolling shafts. The rollers are divided into two groups, and are respectively fixed near the two ends of each rolling shaft. With the non-contact conveying device provided by the invention, the possibility of dry film falling caused by the contact between the dry film and the rollers during conveying is avoided. Also, with the non-contact design, sprayed developing liquid is prevented from phenomena such as non-uniform spraying and inconstant pressure caused by the blockage of the rollers.
Description
Technical field
The present invention relates to a kind of developing machine assembly, relate in particular to a kind of non-contact type conveyer for developing machine.
Background technology
In pcb board or PCB mask plate process, need use developing machine, the main effect of developing machine is that the graphics field after the exposure is revealed, thereby carries out next step operation.As an important link, the quality of development quality has very big influence to the quality of final products.The problem that the tradition development occurs easily mainly is underdevelop or overdevelop, and people wish by controlling the generation that some parameters reduce these problems always.But in reality was produced, this problem not can solve, and its main cause is in developing process, even same substrate, the degree that different piece is developed is because various inside and outsides factor affecting is difficult to reach consistent.
Summary of the invention
Because traditional developing machine conveyer is the roller load mode, the barrier effect of the pair of rollers developer solution spray of traditional load mode easily causes the local inequality of developing, and influences development effect, thereby can influence the quality of final products.In addition, in developing process, roller directly contacts with the development substrate, and the graphics field that obtains of developing on the substrate may be rubbed by roller.At above-mentioned technical matters, the present invention improves the transmitting device of the horizontal developing machine of tradition.
The invention provides a kind of non-contact type conveyer, this device contains the same or analogous component units of some structures; Described component units is made of roller bearing, roller and gear; The material of described roller bearing, roller and gear is metal material or macromolecular material; Near the blank parts that the placement effect has been arranged the described roller bearing two ends; Described roller housing and is positioned near the two ends of roller bearing on roller bearing, does not contact with the graphics field of base plate exposure at roller described in the transport process, has guaranteed that figure is not rubbed in transport process; The number of described roller is more than two and two; Described gear is fixed on the roller bearing, and is positioned near the of a side wheel or is positioned near the terminal of roller bearing.In transport process, rotated by the gear driven roller, substrate places on the roller, and the substrate both sides contact with roller, and zone line roller bearing and substrate isolates come.
Non-contact type conveyer provided by the present invention has been inherited the velocity-stabilization that substrate transmits in the developing process that traditional mask makes, non-slip characteristic.The more important thing is that dry film contacted the possibility that causes dry film to come off when non-contact type conveyer provided by the present invention had been avoided transmitting with roller; Owing to touchless design, the inconsistent phenomenon of hydrojet inequality, pressure that causes that stops owing to roller can not appear in the developer solution of ejection simultaneously.In addition, non-contact type conveyer provided by the present invention can not scratch substrate, can scratch not arranged to the figure dry film of exposure.
Description of drawings
Fig. 1 is that conveyer transmits the synoptic diagram of substrate according to an embodiment of the invention;
Fig. 2 is the component units of conveyer according to an embodiment of the invention and an end enlarged diagram of component units;
Fig. 3 is the synoptic diagram of gear end according to an embodiment of the invention; And
Fig. 4 is that conveyer transmits the synoptic diagram of substrate according to an embodiment of the invention.
Embodiment
Following examples will be discussed to a kind of horizontal surface development machine structure that goes up the jet mould formula of the present invention.Certainly, the present invention also can be used in the two-sided developing machine.Should be understood that following examples only are for purpose of explanation, but not protection domain of the present invention is limited, so all can all fall into protection scope of the present invention by the application that simple transformation obtains.
The invention provides a kind of non-contact type conveyer.As shown in Figure 1, it shows the synoptic diagram of conveyer transmission substrate according to an embodiment of the invention, and this device contains the identical component units of some structures 11.Figure 2 shows that the component units 11 of conveyer and an end enlarged diagram of component units 11 according to an embodiment of the invention, described component units 11 is made of roller bearing a, roller b and gear c.Described roller bearing a material can be stainless steel, and there has been the blank parts d of placement effect the position near the roller bearing two ends.Described roller b and gear c material can be polypropylene.The number of described roller b is 4, is divided near two groups of two ends of being fixed in roller bearing a.Described gear is fixed in the terminal of roller bearing a.Figure 3 shows that the synoptic diagram of gear end according to an embodiment of the invention.
Figure 4 shows that from another angle and observe the synoptic diagram (namely corresponding with Fig. 1, the viewing angle difference) of conveyer transmission substrate e according to an embodiment of the invention.As shown in the figure, in transport process, driving roller b by gear c rotates, substrate e places on the roller b, substrate e both sides contact with roller b, and the roller bearing in centre position and substrate e isolate a segment distance, and roller b does not contact with the graphics field (substrate zone line) of substrate e exposure when transmitting, and has guaranteed that figure is not rubbed in transport process; In addition, the center section of roller bearing to the impact effect unanimity of developer solution spray, has guaranteed the quality of developing on diverse location.
Claims (6)
1. non-contact type conveyer that is used for developing machine, this device comprises a plurality of component units, described component units comprises:
Roller bearing;
A plurality of rollers, described a plurality of roller housings are on roller bearing, and described a plurality of roller is divided near two groups of two ends that are individually fixed in roller bearing; And
Gear, described gear is fixed in the terminal of roller bearing.
2. non-contact type conveyer as claimed in claim 1, it is characterized in that described non-contact type conveyer is configured to be rotated by the gear driven roller when transmitting substrate, substrate places on the described roller, and the roller bearing in centre position and substrate isolates one segment distance.
3. non-contact type conveyer as claimed in claim 2 is characterized in that, described non-contact type conveyer is further configured into when transmitting substrate, and described roller only contacts with the both sides of substrate and do not contact with the image-region of base plate exposure.
4. non-contact type conveyer as claimed in claim 1 is characterized in that, described roller bearing, roller and gear are made by metal material or macromolecular material.
5. non-contact type conveyer as claimed in claim 4 is characterized in that, the material of described roller bearing is stainless steel, and the material of described roller and gear is polypropylene.
6. non-contact type conveyer as claimed in claim 1 is characterized in that, the number of described roller is 4, and two rollers are respectively arranged near the two ends of described roller bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100649395A CN103207539A (en) | 2012-01-13 | 2012-01-13 | Non-contact conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100649395A CN103207539A (en) | 2012-01-13 | 2012-01-13 | Non-contact conveying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103207539A true CN103207539A (en) | 2013-07-17 |
Family
ID=48754806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100649395A Pending CN103207539A (en) | 2012-01-13 | 2012-01-13 | Non-contact conveying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103207539A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1567095A (en) * | 2003-06-19 | 2005-01-19 | 铼宝科技股份有限公司 | Photoresistive striping process |
| CN2680627Y (en) * | 2003-02-10 | 2005-02-23 | 扬博科技股份有限公司 | Hard circuit board transfer arrangement |
| JP2007005695A (en) * | 2005-06-27 | 2007-01-11 | Tokyo Electron Ltd | Substrate processing apparatus |
| CN101320158A (en) * | 2008-06-26 | 2008-12-10 | 友达光电股份有限公司 | Transmission module |
| CN202433671U (en) * | 2012-01-13 | 2012-09-12 | 昆山允升吉光电科技有限公司 | Non-contact conveying device |
-
2012
- 2012-01-13 CN CN2012100649395A patent/CN103207539A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2680627Y (en) * | 2003-02-10 | 2005-02-23 | 扬博科技股份有限公司 | Hard circuit board transfer arrangement |
| CN1567095A (en) * | 2003-06-19 | 2005-01-19 | 铼宝科技股份有限公司 | Photoresistive striping process |
| JP2007005695A (en) * | 2005-06-27 | 2007-01-11 | Tokyo Electron Ltd | Substrate processing apparatus |
| CN101320158A (en) * | 2008-06-26 | 2008-12-10 | 友达光电股份有限公司 | Transmission module |
| CN202433671U (en) * | 2012-01-13 | 2012-09-12 | 昆山允升吉光电科技有限公司 | Non-contact conveying device |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20130717 |