CN103205810B - A kind of argon gas shielding system for the long brilliant stove of sapphire - Google Patents
A kind of argon gas shielding system for the long brilliant stove of sapphire Download PDFInfo
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- CN103205810B CN103205810B CN201210012874.XA CN201210012874A CN103205810B CN 103205810 B CN103205810 B CN 103205810B CN 201210012874 A CN201210012874 A CN 201210012874A CN 103205810 B CN103205810 B CN 103205810B
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Abstract
The invention discloses a kind of argon gas shielding system for the long brilliant stove of sapphire, comprising: air feed main line, two air feed branch roads, two argon bottles, bleed main line and air extractor. So arrange, the argon gas shielding system for the long brilliant stove of sapphire disclosed by the invention, it can effectively overcome argon gas shielding system in prior art can not continue air feed, and the problem that the long brilliant stove production efficiency of sapphire is impacted. In preferred version of the present invention, on the described air feed main line between the cavity of the long brilliant stove of described pressure-reducing valve and described sapphire, edge is provided with the first online filter and first flow monitor controller successively for airflow direction. So arrange, preferred version provided by the invention not only can be understood in time by first flow monitor controller the actual flow of argon gas, and regulates the precision of argon flow amount higher.
Description
Technical field
The present invention relates to the long brilliant apparatus field of sapphire, relate to more specifically a kind of for the long brilliant stove of sapphireArgon gas shielding system.
Background technology
Along with the develop rapidly of China's economy, continuous progress has been obtained in LED Display Technique field. For LEDThe material of substrate mainly comprises silicon, carborundum, sapphire etc. But, due to silicon single crystal Lattice MatchingPoor, it cannot commercial applications, and silicon nitride single crystal cost price is higher, and therefore, sapphire becomes LEDThe ideal chose of backing material.
At present, the long brilliant stove of sapphire in process of production, for prevent raw material at high temperature with air reaction,And then final products quality is impacted. Therefore, in the production process of the long brilliant stove of sapphire, need formerMaterial carries out the isolation of overall process inert gas.
In prior art, conventionally adopt argon gas to isolate raw material, its isolation processes is as described below. ArgonGas out passes through pressure-reducing valve from argon bottle, then by choke valve access arrangement, is full of the long brilliant stove of sapphireCavity, then taken away by vavuum pump, equipment cavity is in negative pressure state.
But argon gas shielding system of the prior art is single bottle of argon gas supply. When argon gas in bottle uses,More renew argon bottle time, due to argon gas also be simultaneously responsible for product is lowered the temperature. Therefore, when changing argonWhen gas cylinder, whole system work stops, and can not ensure continuous operation. And then life to the long brilliant stove of sapphireProduce efficiency and bring impact.
In addition, argon gas from argon bottle out only through decompression, then select throttle valve adjustment flow, streamAmount degree of regulation is very low, and the final products quality that the long brilliant stove of sapphire is produced impacts.
Therefore, how to solve argon gas shielding system in prior art and can not continue air feed, and long to sapphireThe problem that brilliant stove production efficiency impacts, becomes those skilled in the art's important technology to be solved and asksTopic.
Summary of the invention
The invention discloses a kind of argon gas shielding system for the long brilliant stove of sapphire, it can effectively overcomeIn prior art, argon gas shielding system can not continue air feed, and the long brilliant stove production efficiency of sapphire is caused to shadowThe problem of ringing.
A kind of argon gas shielding system for the long brilliant stove of sapphire provided by the invention, comprising:
Air feed main line, one end, described air feed main line is connected with the cavity of the long brilliant stove of sapphire, and described confessionGas main line is provided with pressure-reducing valve;
Two air feed branch roads, one end of two described air feed branch roads all with the other end phase on described air feed main lineConnect, and two described air feed branch roads are equipped with the first controlled valve and filter;
Two argon bottles, the other end corresponding company the one by one of two described argon bottles and two described air feed branch roadsConnect;
Bleed main line and air extractor, described in the bleed cavity phase of one end, main line and the long brilliant stove of described sapphireConnect, the other end is connected with described air extractor.
Preferably, on the described air feed main line between the cavity of the long brilliant stove of described pressure-reducing valve and described sapphireAlong being provided with successively the first online filter and first flow monitor controller for airflow direction.
Preferably, described in, bleed on main line and to be provided with successively the second online filter and the along the flow path direction of bleedingTwo flow monitor controllers.
Preferably, described air feed main line is provided with bypass supply air line, and described bypass supply air line one end connectsBe connected between described the first online filter and described first flow monitor controller, the other end is connected inBetween the cavity of the long brilliant stove of described first flow monitor controller and described sapphire; Described bypass air supply pipeRoad is provided with choke valve and second switch valve, the described air feed main line between described bypass supply air lineBe provided with the 3rd controlled valve and the 4th controlled valve, and described first flow monitor controller is positioned at describedBetween three controlled valves and described the 4th controlled valve.
Preferably, described in the main line of bleeding be provided with bypass exhaust pipe, described bypass exhaust pipe one end connectsBe connected between described the second flow monitor controller and described the second online filter, the other end is connected inBetween described the second flow monitor controller and described air extractor; Described bypass exhaust pipe is provided with the 5thControlled valve, is provided with the 6th controlled valve on the main line of bleeding described between described bypass exhaust pipeWith minion closing valve, described the second online filter bits is in described the 6th controlled valve and the described the 7thBetween controlled valve.
Preferably, also comprise and being connected between the cavity of the long brilliant stove of described sapphire and described air extractorExhaust pipeline, and described exhaust pipeline is provided with octavo closing valve.
Preferably, described air feed main line and described in the main line of bleeding be provided with pressure sensor.
Preferably, described second switch valve, described the 4th controlled valve, described the 5th controlled valve,Described minion closing valve and described octavo closing valve are operated pneumatic valve.
Preferably, described air extractor is vavuum pump.
A kind of argon gas shielding system for the long brilliant stove of sapphire provided by the invention, comprising: air feed main line,One end, described air feed main line is connected with the cavity of the long brilliant stove of sapphire, and described air feed main line is provided with decompressionValve; Two air feed branch roads, one end of two described air feed branch roads all with the other end phase on described air feed main lineConnect, and two described air feed branch roads are equipped with the first controlled valve and filter; Two argon bottles, twoThe other end of individual described argon bottle and two described air feed branch roads connects one to one; Bleed main line and bleedingDevice, described in the one end, main line of bleeding be connected with the cavity of the long brilliant stove of described sapphire, the other end and described inAir extractor is connected.
So arrange, argon gas shielding system provided by the invention comprises two air feed branch roads, when sapphire longWhen brilliant stove is produced, only need open the first controlled valve on one of them air feed branch road, argon gasFlowed out by argon bottle, and filter on this air feed branch road enters air feed main line, the decompression on air feed main lineValve carries out entering in the cavity of the long brilliant stove of sapphire after pressure adjusting to argon gas, to completely cut off air, ensures to produceProduct quality. Meanwhile, air extractor is taken out argon gas to the cavity of the long brilliant stove of sapphire, ensures the stream of argon gasLogical, to ensure the lasting cooling to production environment. Obviously, provided by the invention for the long brilliant stove of sapphireArgon gas shielding system, it can effectively overcome argon gas shielding system in prior art can not continue air feed,And the problem that the long brilliant stove production efficiency of sapphire is impacted.
In preferred version of the present invention, the institute between the cavity of the long brilliant stove of described pressure-reducing valve and described sapphireState on air feed main line along being provided with successively the first online filter and first flow Monitoring and Controlling for airflow directionDevice. It should be noted that, the argon gas passing in the long brilliant stove of sapphire need have higher purity, if argon gasStream is being mingled with impurity the product quality to final formation is being impacted, meanwhile, if be mingled with in argon gas streamImpurity, impurity is attached on first flow monitor controller, by the control to first flow monitor controllerPrecision causes harmful effect. Therefore, air feed provided in the present embodiment main line be provided with firstLine formula filter, it can filter in time to argon gas stream, to filter out impurities. In addition need to illustrate,Be, in process of production, the argon flow amount passing in its cavity needs strict control to the long brilliant stove of sapphire, withObtain the product of better quality. Should be appreciated that first flow monitor controller can be to the flow of supply air lineMonitor, in the time that its flow value monitoring is greater than or less than normal value, it can regulate argon gas stream automaticallyFlow. Therefore,, in preferred version provided by the invention, not only can pass through first flow Monitoring and ControllingDevice is understood the actual flow of argon gas in time, and regulates the precision of argon flow amount higher.
Brief description of the drawings
Fig. 1 is the argon gas shielding system schematic diagram for the long brilliant stove of sapphire in the specific embodiment of the invention.
Detailed description of the invention
The invention discloses a kind of argon gas shielding system for the long brilliant stove of sapphire, it can effectively overcomeIn prior art, argon gas shielding system can not continue air feed, and the long brilliant stove production efficiency of sapphire is caused to shadowThe problem of ringing.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried outDescribe clearly and completely, obviously, described embodiment is only the present invention's part embodiment, andNot whole embodiment. Based on the embodiment in the present invention, those of ordinary skill in the art are not doingGo out the every other embodiment obtaining under creative work prerequisite, all belong to the scope of protection of the invention.
Please refer to Fig. 1, Fig. 1 is the argon gas isolation for the long brilliant stove of sapphire in the specific embodiment of the inventionSystem schematic.
Argon gas shielding system for the long brilliant stove of sapphire provided in the present embodiment, comprises air feedMain line 11, two air feed branch roads 12, two argon bottles 13, bleed main line 14 and air extractor 15.
Wherein, 11 one end, air feed main line are connected with the cavity 16 of the long brilliant stove of sapphire, and air feed main line11 are provided with pressure-reducing valve 111.
One end of two air feed branch roads 12 is all connected with the other end on air feed main line 11, and two air feedBranch road 12 is equipped with the first switch valve 121 and filter 122.
The other end of two argon bottles 13 and two air feed branch roads 12 connects one to one.
The cavity 16 of the long brilliant stove of 14 one end, main line and sapphire of bleeding is connected, the other end and air extractor15 are connected.
So arrange, argon gas shielding system provided in the present embodiment comprises two air feed branch roads 12,In the time that the long brilliant stove of sapphire is produced, only need open the first switch valve on one of them air feed branch road 12121, argon gas can be by the argon bottle 13 being connected with this air feed branch road 12 out, and through air feed branch roadFilter 122 on 12 enters air feed main line 11.
Pressure-reducing valve 111 on air feed main line 12 carries out entering after pressure adjusting the long brilliant stove of sapphire to argon gasIn cavity 16, to completely cut off air, ensure product quality. Meanwhile, air extractor 15 is long brilliant to sapphireThe cavity 16 of stove is taken out argon gas, ensures the circulation of argon gas, and then ensures the lasting cooling to production environment.
Obviously, the argon gas shielding system for the long brilliant stove of sapphire that this detailed description of the invention provides, its energyEnough effectively overcoming argon gas shielding system in prior art can not continue air feed, and the long brilliant stove of sapphire is producedThe problem that efficiency impacts.
In the preferred version of this detailed description of the invention, the cavity of pressure-reducing valve 111 and the long brilliant stove of sapphire 16 itBetween air feed main line on along be provided with successively the first online filter 117 and first flow prison for airflow directionSurvey controller 112.
It should be noted that, the argon gas stream passing in the long brilliant stove of sapphire need have higher purity, if argonAir-flow is being mingled with impurity the product quality to final formation is being impacted, meanwhile, if be mingled with in argon gas streamImpurity, impurity is attached on first flow monitor controller, by the control to first flow monitor controllerPrecision processed causes harmful effect.
Therefore, in preferred version provided in the present embodiment, air feed main line 11 be provided with firstLine formula filter 117, it can filter in time to argon gas stream, to filter out impurities.
In addition, it should be noted that, sapphire is grown brilliant stove in process of production, the argon passing in its cavityThroughput needs strict control, to obtain the product of better quality. Should be appreciated that first flow Monitoring and ControllingDevice 112 can be monitored the flow of supply air line, when its flow value monitoring is greater than or less than normallyWhen value, it can regulate the flow of argon gas stream automatically.
Therefore,, in preferred version provided by the invention, not only can pass through first flow monitor controller 112Understand in time the actual flow of argon gas, and regulate the precision of argon flow amount higher.
Equally, when the long brilliant stove of sapphire is bled, the control of extraction flow also needs to have higher precision,Can ensure the quality of product. Given this, the argon gas shielding system that this detailed description of the invention provides, it is taken outOn gas main line 14, be provided with successively the second online filter 142 and the second flow monitoring control along the flow path direction of bleedingDevice 141 processed.
So arrange, the second flow monitor controller 141 can be monitored the flow on the main line 14 of bleeding,In the time that its flow value monitoring is greater than or less than normal value, it can regulate the flow of argon gas stream automatically. ThisOutward, the second online filter 142 can effectively ensure to enter the argon gas of the second flow monitor controller 141Stream purity, is not subject to impurity effect with the control accuracy that ensures the second flow monitor controller 141.
Therefore, argon gas shielding system provided by the invention, not only can pass through the second flow monitor controller141 understand actual extraction flow in time, and the precision of bleeding regulating flow is higher.
In another preferred version of this detailed description of the invention, air feed main line 11 is provided with bypass supply air line113, bypass supply air line 113 one end are connected in the first online filter 117 and first flow monitoring controlBetween device 112 processed, the other end is connected in the chamber of first flow monitor controller 112 and the long brilliant stove of sapphireBetween body 16.
In addition, in this detailed description of the invention, bypass supply air line 113 is provided with choke valve 114 and second and opensClosing valve 115, the air feed main line between bypass supply air line 113 is provided with the 3rd controlled valve 116 HesThe 4th controlled valve 118, and first flow monitor controller 112 is positioned at the 3rd controlled valve 116 and the 4thBetween controlled valve 118.
So arrange, in the time that first flow monitor controller 112 needs dismounting and change, only need open the 3rdClosing valve 116 and the 4th controlled valve 118 are closed, and meanwhile, open second switch valve 115. Air feed gasStream can be entered in the cavity 16 of the long brilliant stove of sapphire by bypass supply air line 113, and due to the 3rd switchValve 116 and the 4th controlled valve 118 are closed condition, can not flow to first flow monitoring for entraining air streamController 112 positions, thereby, in the time of dismounting first flow monitor controller 112, there will not be gas leakage to askTopic.
In addition, can be by regulating the choke valve 114 arranging on bypass supply air line 113, adjusting enters blue preciousFlow in the cavity 16 of the long brilliant stove of stone.
Therefore, this detailed description of the invention can not stop under the condition of producing, to first flow Monitoring and ControllingDevice 112 is dismantled, and has effectively improved production efficiency.
Certainly, argon gas shielding system provided in the present embodiment, also can comprise bypass exhaust pipe143, and to be connected in the second flow monitor controller 141 and second online in bypass exhaust pipe 143 one endBetween filter 142, the other end is connected between the second flow monitor controller 141 and air extractor 15;Bypass exhaust pipe 143 is provided with the 5th controlled valve 144, bleeding between bypass exhaust pipe 143Main line is provided with the 6th controlled valve 145 and minion closing valve 146, and the second online filter 141Between the 6th controlled valve 145 and minion closing valve 146.
Equally, in the time that the second flow monitor controller 141 needs dismounting and change, only need be by the 6th switch valveDoor 145 and minion closing valve 146 are closed, and meanwhile, open the 5th controlled valve 144. For entraining air stream beCan be extracted out by bypass exhaust pipe 143, and due to the 6th controlled valve 145 and minion closing valve 146For closed condition, pumping airflow can not flow to the second flow monitor controller 141 positions, thereby, when tearing openWhile unloading the second flow monitor controller 141, there will not be gas leakage problem.
Therefore, this detailed description of the invention also can not stop under the condition of producing, to the second flow monitoring controlDevice 141 processed is dismantled, and has effectively improved production efficiency.
In addition, it should be noted that, the long brilliant stove of sapphire, need be first by the gas in its cavity before productionBody and dust are extracted out, then, then provide argon gas. During for fear of the front exhaust of production, in air, be mingled withDust be attached to and bleed on main line or valve, and the normal use of bleed main line or valve is impacted.This detailed description of the invention also can comprise between the cavity 16 and air extractor 15 that is connected in the long brilliant stove of sapphireExhaust pipeline 17, and exhaust pipeline 17 is provided with octavo closing valve 18.
So arrange, before the long brilliant stove of sapphire is produced, can first close the 6th controlled valve 145 and theFive controlled valves 144 are opened octavo closing valve simultaneously. Air extractor 15 can pass through exhaust pipeline 17Directly cavity 16 is bled. Obviously, do not flow through bleed main line 14 and bypass of air taken out when exhaustAir pipe 143, and then effectively avoided the dust in air to be attached to the main line 14 of bleeding, bypass exhaust tubeThe problem of the parts such as road 143 and valve thereof.
In addition, the argon gas shielding system of the long brilliant stove of sapphire provided in the present embodiment, air feed is dryRoad 11 and the main line 14 of bleeding are provided with pressure sensor 19.
So arrange, staff can learn bleeding of the main line 1 of bleeding easily by pressure sensor 19The air feed air pressure on air pressure 4 and air feed main line 11.
In addition, it should be noted that second switch valve provided in the present embodiment 115, the 4thControlled valve 118, the 5th controlled valve 144, minion closing valve 146 and octavo closing valve 18 canBe operated pneumatic valve, certainly, also can be the valve of other type, such as, magnetic valve, hand-operated valve etc.The first controlled valve 121, the 3rd controlled valve 116 and the 6th controlled valve can be specially hand-operated valve, same,Also can be the valve of other type, such as, pneumatic operated valve, magnetic valve etc. This detailed description of the invention providesAir extractor 15 can be specially vavuum pump, so can realize the operation of bleeding.
Above a kind of argon gas shielding system for the long brilliant stove of sapphire provided by the present invention is carried out in detailThin introduction, has applied specific case herein principle of the present invention and embodiment has been set forth, withThe explanation of upper embodiment is just for helping to understand method of the present invention and core concept thereof. It should be pointed out thatFor those skilled in the art, under the premise without departing from the principles of the invention, also canSo that the present invention is carried out to some improvement and modification, these improvement and modify and also fall into the claims in the present inventionIn protection domain.
Claims (4)
1. for an argon gas shielding system for the long brilliant stove of sapphire, it is characterized in that, comprising:
Air feed main line, one end, described air feed main line is connected with the cavity of the long brilliant stove of sapphire, and described confessionGas main line is provided with pressure-reducing valve;
Two air feed branch roads, one end of two described air feed branch roads all with the other end phase on described air feed main lineConnect, and two described air feed branch roads are equipped with the first controlled valve and filter;
Two argon bottles, the other end corresponding company the one by one of two described argon bottles and two described air feed branch roadsConnect;
Bleed main line and air extractor, described in the bleed cavity phase of one end, main line and the long brilliant stove of described sapphireConnect, the other end is connected with described air extractor;
On described air feed main line between the cavity of the long brilliant stove of described pressure-reducing valve and described sapphire, edge is for air-flowDirection is provided with the first online filter and first flow monitor controller successively;
On the described main line of bleeding, be provided with successively the second online filter and the second flow prison along the flow path direction of bleedingSurvey controller;
Described air feed main line is provided with bypass supply air line, described in described bypass supply air line one end is connected inBetween the first online filter and described first flow monitor controller, the other end is connected in described firstBetween the cavity of the long brilliant stove of flow monitoring controller and described sapphire; Described bypass supply air line is provided with jointStream valve and second switch valve, the described air feed main line between described bypass supply air line is provided with the 3rdControlled valve and the 4th controlled valve, and described first flow monitor controller is positioned at described the 3rd switch valveBetween door and described the 4th controlled valve;
The described main line of bleeding is provided with bypass exhaust pipe, described in described bypass exhaust pipe one end is connected inBetween the second flow monitor controller and described the second online filter, the other end is connected in described secondBetween flow monitoring controller and described air extractor; Described bypass exhaust pipe is provided with the 5th controlled valve,Bleed described between described bypass exhaust pipe and be provided with the 6th controlled valve on main line and minion is closedValve, described the second flow monitor controller is positioned at described the 6th controlled valve and described minion closing valveBetween;
Also comprise the tracheae of finding time between cavity and the described air extractor that is connected in the long brilliant stove of described sapphireRoad, and described exhaust pipeline is provided with octavo closing valve.
2. the argon gas shielding system for the long brilliant stove of sapphire as claimed in claim 1, is characterized in that,Described air feed main line and described in the main line of bleeding be provided with pressure sensor.
3. the argon gas shielding system for the long brilliant stove of sapphire as claimed in claim 1, is characterized in that,Described second switch valve, described the 4th controlled valve, described the 5th controlled valve, described minion are closedValve and described octavo closing valve are operated pneumatic valve.
4. the argon gas shielding system for the long brilliant stove of sapphire as claimed in claim 3, is characterized in that,Described air extractor is vavuum pump.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210012874.XA CN103205810B (en) | 2012-01-16 | 2012-01-16 | A kind of argon gas shielding system for the long brilliant stove of sapphire |
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| CN201210012874.XA CN103205810B (en) | 2012-01-16 | 2012-01-16 | A kind of argon gas shielding system for the long brilliant stove of sapphire |
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| CN103205810B true CN103205810B (en) | 2016-05-11 |
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| CN108213750A (en) * | 2018-03-12 | 2018-06-29 | 济南森峰科技有限公司 | Laser cutting machine quick-replaceable compressed air source unit of the same race |
| CN113174637B (en) * | 2021-04-26 | 2023-06-27 | 山东天岳先进科技股份有限公司 | Gas supply device of crystal growth furnace |
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| CN101311341A (en) * | 2008-03-17 | 2008-11-26 | 中国电子科技集团公司第四十八研究所 | Vacuum pressure continuous control process for polysilicon ingot casting process and control system thereof |
| CN201805137U (en) * | 2010-08-10 | 2011-04-20 | 武汉钢铁(集团)公司 | High power fast-flow axis CO2 laser continuous gas supply device |
| CN201889590U (en) * | 2010-12-03 | 2011-07-06 | 天水锻压机床有限公司 | Continuous air feeding device |
| CN102268741A (en) * | 2011-07-13 | 2011-12-07 | 协鑫光电科技（张家港）有限公司 | Heat exchange system for crystal growth |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN202465956U (en) * | 2012-01-16 | 2012-10-03 | 至砾机电设备（上海）有限公司 | Argon isolation system for sapphire crystal growth furnace |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101311341A (en) * | 2008-03-17 | 2008-11-26 | 中国电子科技集团公司第四十八研究所 | Vacuum pressure continuous control process for polysilicon ingot casting process and control system thereof |
| CN201805137U (en) * | 2010-08-10 | 2011-04-20 | 武汉钢铁(集团)公司 | High power fast-flow axis CO2 laser continuous gas supply device |
| CN201889590U (en) * | 2010-12-03 | 2011-07-06 | 天水锻压机床有限公司 | Continuous air feeding device |
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Address after: 200000 floors 3 and 4, building 2, No. 170, Zihai Road, Minhang District, Shanghai Patentee after: Shanghai Zhichun system integration Co., Ltd Address before: 200241, room 103, first floor, first floor, No. 4481, Wu Long Road, Shanghai, Minhang District Patentee before: Zhigu Mechanical and Electrical Equipment (Shanghai) Co., Ltd. |