CN103205669B - A kind of supporting table for being suitable for different size object - Google Patents
A kind of supporting table for being suitable for different size object Download PDFInfo
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- CN103205669B CN103205669B CN201210006872.XA CN201210006872A CN103205669B CN 103205669 B CN103205669 B CN 103205669B CN 201210006872 A CN201210006872 A CN 201210006872A CN 103205669 B CN103205669 B CN 103205669B
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- Prior art keywords
- supporting table
- sub
- different size
- substrate
- fixed
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- Physical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention discloses a kind of supporting table for being suitable for different size object, and which includes that the substrate of plural sub- supporting table and stator supporting table, the sub- supporting table can be fixed on the diverse location on substrate, and the support so as to adapt to different size object is fixed;Wherein, the supporting surface of all sub- supporting tables is in the same plane.Retention mechanism is provided with per individual sub- supporting table, using cooperatively by retention mechanism can cause the object space for being supported to fix.The present invention is suitable for the supporting table of different size object, the fixation that diverse location on substrate can realize different size object is positioned at by sub- supporting table, fixed with adapting to the support of different size OLED evaporation mask plate housings, be well positioned to meet the assembling of different size OLED evaporation mask plates.
Description
Technical field
The invention belongs to the manufacture technology field of OLED evaporation mask plates, more particularly to one kind is suitable for different size pair
The supporting table of elephant.
Background technology
The characteristics such as the self-luminous of OLED, ultra-thin, fast response time, wide viewing angle, low-power consumption make the mobile phone of carrying OLED screen
Make us pursuing.At present, OLED has tentatively established the status as third generation display leading nucleus, with the maturation of technology
With the breakthrough of large scale batch production technique, OLED products will extend to more large scale, therefore, each point of industry in OLED industrial chains
Prop up and require that there is preferably compatibility.
Each layer of generally OLED realizes that by evaporation process various sizes of OLED products are required in manufacturing process
There is various sizes of Vapor deposition mask plate supporting with which, this is accomplished by having in the manufacturing process of OLED evaporation mask plates can
Meet the assembled machine table of different size OLED evaporation mask plates, existing assembled machine table is " one-to-one " type, i.e., a kind of group
Installation platform can only adapt to a kind of assembling of OLED evaporation mask plates.This kind of mode is not suitable for pursuing efficient commercial production.
Therefore, industry is badly in need of exploring a kind of supporting table for being suitable for different size object, to adapt to different size
The support of OLED evaporation mask plate housings is fixed, so as to be well positioned to meet the group of different size OLED evaporation mask plates
Dress, improve production efficiency.
Content of the invention
For solving the above problems, it is an object of the invention to provide a kind of supporting table for being suitable for different size object, its
The support for being suitable for different size OLED evaporation mask plate housings is fixed, and is well positioned to meet different size OLED evaporations with covering
The assembling of template.
For achieving the above object, the technical scheme is that:
A kind of supporting table for being suitable for different size object, it include the base of plural sub- supporting table and stator supporting table
Plate, the sub- supporting table can be fixed on the diverse location on substrate, and the support so as to adapt to different size object is fixed;Its
In, the supporting surface of all sub- supporting tables is in the same plane.Retention mechanism is provided with per individual sub- supporting table, by fastening machine
Using cooperatively for structure, can cause the object space for being supported to fix.
Further, the retention mechanism is a screw rod, is provided with clamp nut.
Further, the mechanism coordinated with substrate para-position is provided with the sub- supporting table, can be with by the matching mechanism
So that no longer there is position skew after being fixed on substrate surface in sub- supporting table.
Further, the matching mechanism is pin, is provided with multigroup mechanism coordinated with sub- supporting table para-position on substrate,
Pin with correspondingly sub- supporting table.
Further, the fixing hole of the sub- supporting table of plural groups is provided with the substrate and supporting table is fixed on other machines
Link mechanism on structure.
Further, the fastening screw top is spherical structure, can fix screw rod by screwing for clamp nut.
The present invention is suitable for the supporting table of different size object, and being positioned on substrate diverse location by sub- supporting table can be with
The fixation of different size object is realized, is fixed with adapting to the support of different size OLED evaporation mask plate housings, can be well
Meet the assembling of different size OLED evaporation mask plates.
Description of the drawings
Fig. 1 is the three-dimensional diagram of the supporting table that the present invention is suitable for different size object.
Fig. 2 is the structural representation after the sub- supporting table position adjustment of the present invention.
Fig. 3 is the structural representation of a seed supporting table of the present invention.
Fig. 4 is the structural representation of another seed supporting table of the present invention.
Fig. 5 is a kind of schematic diagram of fixing hole on substrate in the present invention.
Fig. 6 show the schematic diagram that supporting table and a mesh stretching body are coordinated assembling.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with drawings and Examples, right
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only in order to explain the present invention, and
It is not used in the restriction present invention.
The present invention is suitable for various sizes of supporting table includes the substrate of some sub- supporting tables and stator supporting table, described
Sub- supporting table can be fixed on the diverse location on substrate, and the support so as to adapt to different size object is fixed.Wherein, Suo Youzi
The supporting surface of supporting table is in the same plane.Retention mechanism is provided with per individual sub- supporting table, by the cooperation of retention mechanism
Use, the object space for being supported can be caused to fix, the retention mechanism described in the embodiment of the present invention is a screw rod, thereon
It is provided with clamp nut.The mechanism coordinated with substrate para-position is provided with sub- supporting table.Son can be caused by the matching mechanism
No longer there is position skew after being fixed on substrate surface in supporting table;Meanwhile, by the matching mechanism so that the repeatability of supporting table
More preferably.In the present invention is that the matching mechanism is pin in example.It is provided with substrate and multigroup coordinates with sub- supporting table para-position
Mechanism, the pin of corresponding sub- supporting table is positioned at diverse location on substrate by sub- supporting table and can realize different size pair
The fixation of elephant.
Refer to shown in Fig. 1-Fig. 4, the present invention be suitable for the supporting table of different size object include plural sub- supporting table,
And the substrate 12 of stator supporting table 11;It is five in the embodiment of the present invention, respectively first, second, third, fourth supporting table
11a、11b、11c、11d、11e.The fixing hole 120 of the sub- supporting table 11 of plural groups is provided with substrate 12 and supporting table is fixed on
Link mechanism 13 in other mechanisms.
Sub- supporting table can be fixed by being coordinated from different fixing holes 120, such that it is able to realize different size object
Fixed.Fig. 2 show the schematic diagram of the zone line that sub- supporting table 11 is fixed on substrate 12, and which disclosure satisfy that size relatively
The fixation of little object.
Refer to shown in Fig. 3, Fig. 3 is a kind of structural representation of sub- supporting table 11, for supporting table entirety, its all son
The supporting surface 310 of supporting table 11 is on same plane.Fastening screw 32, the fastening spiral shell is provided with sub- supporting table 11
32 top 320 of bar is spherical structure, is so designed that and can ensure that screw rod 32 is contacted for point with supported objects contacts side surfaces;Screw rod
A clamp nut 321 is provided with 32, screw rod 32 can be fixed by screwing for clamp nut 321.
Refer to shown in Fig. 4, Fig. 4 show and for sub- supporting table 11 to coordinate fixed schematic diagram on the substrate 12, Fig. 4 A institutes
The sub- supporting table lower end for showing be provided with fixing hole 311 and shown in alignment pin 41,42, Fig. 4 B be substrate partial schematic diagram, its
On be provided with and fixing hole 311 and 41, the 42 corresponding fixing hole 311 ' of difference of alignment pin and location hole 41 ', 42 '.Alignment pin 41,
Fixed being fixed on same position with the last time is had the 42 sub- supporting tables that can be caused with the cooperation of location hole 41 ', 42 ' every time
Good repeatability, meanwhile, which can prevent from sub- supporting table standing back from putting shifting.
Refer to shown in Fig. 5, Fig. 5 show the mask that supporting table of the present invention supports a kind of OLED evaporations of size
The schematic diagram of plate housing 50, when fixed, first adjust sub- supporting table and causes the fastening screw 32 on sub- supporting table 11a, 11b, 11c true
It is scheduled on a position, 320 3, the top summit of the fastening screw 32 of sub- supporting table 11a, 11b, 11c after adjustment can be by
The OLED evaporation mask plates housing 50 for being supported is determined on a fixed position, further in adjustment supporting table 11d, 11e
Fastening screw 32 so as to other the several sides for the OLED evaporation mask plates housing 50 for being supported are close on summit 320, so as to
The OLED evaporation mask plates housing 50 for being supported is fixed at the determination position in supporting table.
Refer to shown in Fig. 6, Fig. 6 show the schematic diagram that supporting table and a mesh stretching body are coordinated assembling, by the machine
Structure can complete OLED evaporation mask plates taut net will its be weldingly fixed on housing 50 and work.
Presently preferred embodiments of the present invention is the foregoing is only, not in order to limit the present invention, all in essence of the invention
Any modification, equivalent and improvement that is made within god and principle etc., should be included within the scope of the present invention.
Claims (3)
1. a kind of supporting table for being suitable for different size object, it is characterised in that:Including plural sub- supporting table and stator
The substrate of support platform, the sub- supporting table can be fixed on the diverse location on substrate, so as to adapt to the support of different size object
Fixed;Wherein, the supporting surface of all sub- supporting tables is in the same plane;Retention mechanism is provided with per individual sub- supporting table, is led to
Using cooperatively for retention mechanism is crossed, the object space for being supported can be caused to fix;It is provided with and substrate in the sub- supporting table
The mechanism that para-position coordinates, can cause sub- supporting table, after being fixed on substrate surface, position no longer occurs by the matching mechanism inclined
Move;The matching mechanism is pin, is provided with multigroup mechanism coordinated with sub- supporting table para-position, with correspondingly sub- supporting table on substrate
Pin;The fixing hole of the sub- supporting table of plural groups is provided with the substrate and supporting table is fixed on the link in other mechanisms
Mechanism.
2. the supporting table of different size object is suitable for as claimed in claim 1, it is characterised in that:The retention mechanism is one
Screw rod, is provided with clamp nut.
3. the supporting table of different size object is suitable for as claimed in claim 1, it is characterised in that:The fastening screw top
For spherical structure, screw rod can be fixed by screwing for clamp nut.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210006872.XA CN103205669B (en) | 2012-01-11 | 2012-01-11 | A kind of supporting table for being suitable for different size object |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210006872.XA CN103205669B (en) | 2012-01-11 | 2012-01-11 | A kind of supporting table for being suitable for different size object |
Publications (2)
Publication Number | Publication Date |
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CN103205669A CN103205669A (en) | 2013-07-17 |
CN103205669B true CN103205669B (en) | 2017-03-15 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210006872.XA Expired - Fee Related CN103205669B (en) | 2012-01-11 | 2012-01-11 | A kind of supporting table for being suitable for different size object |
Country Status (1)
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CN (1) | CN103205669B (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000296599A (en) * | 1999-04-14 | 2000-10-24 | Murakami:Kk | Screen mesh tensioning apparatus |
CN201766049U (en) * | 2010-08-05 | 2011-03-16 | 安徽鑫昊等离子显示器件有限公司 | Mask device of plasma display |
CN102449553A (en) * | 2010-06-17 | 2012-05-09 | 恩斯克科技有限公司 | Exposure apparatus |
CN202530146U (en) * | 2012-01-11 | 2012-11-14 | 昆山允升吉光电科技有限公司 | Support table adaptable to objects with different sizes |
-
2012
- 2012-01-11 CN CN201210006872.XA patent/CN103205669B/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000296599A (en) * | 1999-04-14 | 2000-10-24 | Murakami:Kk | Screen mesh tensioning apparatus |
CN102449553A (en) * | 2010-06-17 | 2012-05-09 | 恩斯克科技有限公司 | Exposure apparatus |
CN201766049U (en) * | 2010-08-05 | 2011-03-16 | 安徽鑫昊等离子显示器件有限公司 | Mask device of plasma display |
CN202530146U (en) * | 2012-01-11 | 2012-11-14 | 昆山允升吉光电科技有限公司 | Support table adaptable to objects with different sizes |
Also Published As
Publication number | Publication date |
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CN103205669A (en) | 2013-07-17 |
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