CN103199034A - 真空处理系统 - Google Patents
真空处理系统 Download PDFInfo
- Publication number
- CN103199034A CN103199034A CN2012100022552A CN201210002255A CN103199034A CN 103199034 A CN103199034 A CN 103199034A CN 2012100022552 A CN2012100022552 A CN 2012100022552A CN 201210002255 A CN201210002255 A CN 201210002255A CN 103199034 A CN103199034 A CN 103199034A
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- sealing
- drive rod
- backboard
- chamber
- moving part
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
Description
Claims (23)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210002255.2A CN103199034B (zh) | 2012-01-05 | 2012-01-05 | 真空处理系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210002255.2A CN103199034B (zh) | 2012-01-05 | 2012-01-05 | 真空处理系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103199034A true CN103199034A (zh) | 2013-07-10 |
CN103199034B CN103199034B (zh) | 2015-12-02 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201210002255.2A Active CN103199034B (zh) | 2012-01-05 | 2012-01-05 | 真空处理系统 |
Country Status (1)
Country | Link |
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CN (1) | CN103199034B (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009063009A (ja) * | 2007-09-04 | 2009-03-26 | Nippon Valqua Ind Ltd | ゲート弁 |
CN101539221A (zh) * | 2008-03-21 | 2009-09-23 | 东捷科技股份有限公司 | 阀门组 |
CN101627244A (zh) * | 2007-03-01 | 2010-01-13 | 应用材料股份有限公司 | 控制狭缝门密封压力的方法和设备 |
TW201104113A (en) * | 2009-07-24 | 2011-02-01 | Bay Zu Prec Co Ltd | Gate valve driving device of vacuum equipment |
-
2012
- 2012-01-05 CN CN201210002255.2A patent/CN103199034B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101627244A (zh) * | 2007-03-01 | 2010-01-13 | 应用材料股份有限公司 | 控制狭缝门密封压力的方法和设备 |
JP2009063009A (ja) * | 2007-09-04 | 2009-03-26 | Nippon Valqua Ind Ltd | ゲート弁 |
CN101539221A (zh) * | 2008-03-21 | 2009-09-23 | 东捷科技股份有限公司 | 阀门组 |
TW201104113A (en) * | 2009-07-24 | 2011-02-01 | Bay Zu Prec Co Ltd | Gate valve driving device of vacuum equipment |
Also Published As
Publication number | Publication date |
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CN103199034B (zh) | 2015-12-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170327 Address after: 201620 Shanghai city Songjiang District Sixian Road No. 3255, building 3, Room 403 Patentee after: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT CO., LTD. Address before: 201203 Pudong New Area Zhangjiang Road, Shanghai, No. 1 Curie Patentee before: Ideal Energy Equipment (Shanghai) Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180412 Address after: 225400, 9 / F, building 16, Zhi Guang science and Technology Plaza, north of Huan Xi Road, Taixing high tech Industrial Development Zone, Jiangsu. Patentee after: Ideal Wan Li Hui vacuum equipment (Taixing) Co., Ltd. Address before: 201620 Shanghai city Songjiang District Sixian Road No. 3255, building 3, Room 403 Patentee before: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT CO., LTD. |
|
TR01 | Transfer of patent right |