CN103198997B

CN103198997B - Sample support with angle adjustment function

Info

Publication number: CN103198997B
Application number: CN201310093590.2A
Authority: CN
Inventors: 刘媛媛; 杨富华
Original assignee: Institute of Semiconductors of CAS
Current assignee: Institute of Semiconductors of CAS
Priority date: 2013-03-22
Filing date: 2013-03-22
Publication date: 2015-05-13
Anticipated expiration: 2033-03-22
Also published as: CN103198997A

Abstract

The invention provides a sample support with an angle adjustment function. The sample support with the angle adjustment function comprises a base table, an angle adjustment rod, a spiral extension spring and a threaded rod, wherein a V-shaped fixing groove is formed along the direction of the diameter of the circle center of the base table, the angle adjustment rod is of a rectangular structure, a triangle protrusion which is vertically perpendicular to the angle adjustment rod is arranged below the angle adjustment rod, the triangle protrusion is matched with the V-shaped fixing groove in the base table, one end of the spring is located inside a through hole in the base table, the other end of the spring is located inside a first through hole in the angle adjustment rod, two ends of the extension spring are respectively fixed with a center in a first small hole and a center in a second small hole, and the threaded rod penetrates through a second through hole in the angle adjustment rod and is connected with a threaded through hole in the base table in a threaded mode. The sample support with the angle adjustment function is matched with a standard configuration sample table of a manufacturer, and a six-dimensional adjustment function of a sample is achieved.

Description

There is the sample carrier of angle regulating function

Technical field

The present invention relates to the sample carrier that a kind of scanning electron microscopy field uses, especially there is the sample carrier of angle regulating function, the sample carrier used when it is and observes cross section.

Background technology

Scanning electron microscopy is that secondary electron, backscattered electron or other signals by producing the interphase interaction of electron beam and sample detects, analyzes, thus the science of the information such as response sample surface topography, sample composition.Scanning electron microscopy, with its ultrahigh resolution, high reliability, advantage simple to operation etc., widely uses in every subjects fields such as biology, semiconductor science, material analysiss, and it has become a kind of requisite scientific and technical means.

First sample generally all sticks on sample carrier when observing sample by scanning electron microscopy, then sample carrier is fixed on the sample stage that can carry out translational motion and rotation adjustment in the chamber, there is the sample stage of oneself standard configuration in scanning electron microscopy producer, but due to the restriction in sample chamber space, the sample stage of usual producer standard configuration has 5 dimension regulatory functions, comprises 3 dimension translations, is X-axis, Y-axis, Z axis respectively, rotate with 2 dimensions, the rotation around Z axis and the rotation around X-axis.Owing to lacking one-dimensional rotation function, when carrying out cross-section to sample, if need opposing connection X-axis and when Y-axis is rotated respectively, cannot realize, sample is needed to take off from sample carrier, re-start stickup, add unnecessary workload in this process, add the probability to sample damage.

Summary of the invention

For these reasons, the object of the invention is to, propose a kind of sample carrier with angle regulating function, this sample carrier has the sample carrier of one dimension adjusting angle function, thus coordinates with the sample stage of producer standard configuration, realizes 6 dimension regulatory functions of sample.

The invention provides a kind of sample carrier with angle regulating function, comprising:

One base station, it is a cylinder, a cylindrical plane there is a V-arrangement holddown groove along the diametric(al) by the center of circle, become 90 degree of directions with V-arrangement holddown groove and have a tapped through hole near the side of base station edge, opposite side has a through hole, the sidewall of this base station has one first aperture, is inserted with a thimble in this first aperture, this first aperture is communicated with through hole; There is a blind hole below of the V-arrangement opening of the V-arrangement holddown groove on this base station;

One angular adjustment bar, for rectangular configuration, one end margin place has one first through hole, the other end has one second through hole, the sidewall of angular adjustment boom end has a second orifice, this second orifice is communicated with the first through hole, this second orifice is inserted with a thimble, a triangle projection is had with below this angular adjustment bar that angular adjustment bar is longitudinally vertical, this triangle projection coordinates with the V-arrangement holddown groove on base station, the angle of the V-arrangement holddown groove on described base station is greater than the angle of the triangular hill on angular adjustment bar, triangular hill can be freely in V-type groove, rotate glossily, rotational angle depends on the difference of the angle of V-type groove and triangular hill, angle of regulation range between this base station and this angular adjustment bar is between ± 5 degree,

The extension spring of one spiral, its one end is positioned at the through hole on base station, the other end is positioned at the first through hole on angular adjustment bar, the two ends of this extension spring are fixed with the thimble in the first aperture and second orifice respectively, the drift of this extension spring should be less than the height of angular adjustment bar, in whole adjustment process, be all in tension;

One screw rod, is spirally connected through the second through hole on angular adjustment bar and the tapped through hole on base station.

The present invention has the following advantages, and has simplicity of design, easy to use, the angle of angular adjustment bar can be made to change by adjusting screw(rod), makes sample produce one dimension angular turn.

Accompanying drawing explanation

For further illustrating concrete technology contents of the present invention, to further illustrate as rear below in conjunction with the accompanying drawings and embodiments, wherein:

Fig. 1 is structural representation of the present invention.

Embodiment

Refer to shown in Fig. 1, the invention provides a kind of sample carrier with angle regulating function, comprising:

One base station 10, it is a cylinder, a cylindrical plane there is a V-arrangement holddown groove 11 along the diametric(al) by the center of circle, a tapped through hole 12 is had with V-arrangement holddown groove 11 one-tenth 90 degree of directions and near the side of base station 10 edge, opposite side has a through hole 13, the sidewall of this base station 10 has one first aperture 14, is inserted with a thimble in this first aperture 14, this first aperture 14 is communicated with through hole 13; There is a blind hole 15 below of the V-arrangement opening of the V-arrangement holddown groove 11 on this base station 10, and the angle of the V-arrangement holddown groove 11 on described base station is greater than the angle of the triangular hill 24 on angular adjustment bar 20;

One angular adjustment bar 20, for rectangular configuration, one end margin place has one first through hole 21, the other end has one second through hole 22, the sidewall of angular adjustment bar 20 end has a second orifice 23, and this second orifice 23 is communicated with the first through hole 21, and this second orifice 23 is inserted with a thimble, this angular adjustment bar 20 longitudinally vertical with angular adjustment bar 20 has a triangle projection 24 below, and this triangle protruding 24 coordinates with the V-arrangement holddown groove 11 on base station 10;

Angle of regulation range between this base station 10 described and this angular adjustment bar 20 is between ± 5 degree.

The extension spring 30 of one spiral, its one end is positioned at the through hole 13 on base station 10, and the other end is positioned at the first through hole 21 on angular adjustment bar 20, and the two ends of this extension spring 30 are fixed with the thimble in the first aperture 14 and second orifice 23 respectively;

One screw rod 40, is spirally connected with the tapped through hole 12 on base station 10 through the second through hole 22 on angular adjustment bar 20.

As shown in Figure 1, put in the V-arrangement holddown groove 11 of base station 10 by the triangular hill 24 of angular adjustment bar 20, the top margin of triangular hill 24 and the base of V-type groove 11 should have high fineness and steepness, and fillet controls at R < 0.05mm;

Triangular hill 24 can freely, glossily rotate in V-type groove 11, and rotational angle depends on the difference of the angle of V-type groove 11 and triangular hill 24;

The drift of extension spring 30 should be less than the height of angular adjustment bar, in whole adjustment process, be all in tension;

On the screw thread of screw rod 40 and base station 10, the screw thread of tapped through hole 12 is fine thread, ensures the precision of angular adjustment;

Base station 10, angular adjustment bar 20, screw rod 40 and thimble should adopt light metal material to make, such as duralumin;

The external diameter of extension spring 30 is slightly less than the internal diameter of the first through hole 21 on angular adjustment bar 20, and in the process of angular adjustment, extension spring 30 keeps vertical, can not touch mutually with the inwall of the first through hole 21;

Thimble is fixed in the first aperture 14 of base station 10 and the second orifice 23 of angular adjustment bar 20, can not rotate, can not relative movement;

The shape of base station 10 can be cylindrical, also can be square column type.The shape of angular adjustment bar 20 can be other shapes;

When carrying out scanning electron microscopic observation to sample 60, first conductive tape 50 special for ESEM being pasted onto the side of angle conditions bar 20, then sample 60 being pasted onto on conductive tape 50.Adjusting screw(rod) 40, due to the tension regulating action of extension spring 30, makes sample carrier turn to required angle around the top margin of triangular hill 24, then sample carrier is put into scanning electron microscope example room and observe.

The sample carrier with angle regulating function of the present invention, one dimension angular adjustment can be realized, adjustable range is between ± 5 degree, the translation had with ESEM itself and be rotatably assorted and can realize the angular turn in D translation and three directions, avoid sample and repeatedly paste generation breakage, sample carrier simplicity of design, easy to use.

It should be noted last that, above embodiment is only in order to illustrate technical scheme of the present invention and unrestricted.Although be described in detail the utility model with reference to embodiment, those of ordinary skill in the art is to be understood that, the technical solution of the utility model is modified or is equal to reference, do not depart from the spirit and scope of technical solutions of the utility model, it all should be encompassed in the middle of right of the present invention.

Claims

1. there is a sample carrier for angle regulating function, comprising: