CN103198922B - A kind of comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism - Google Patents
A kind of comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism Download PDFInfo
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- CN103198922B CN103198922B CN201310128735.8A CN201310128735A CN103198922B CN 103198922 B CN103198922 B CN 103198922B CN 201310128735 A CN201310128735 A CN 201310128735A CN 103198922 B CN103198922 B CN 103198922B
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- compliant mechanism
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Abstract
Comb teeth-shaped capacitor is micro-actuator conventional in MEMS and the version of microsensor.Generally only several microns of comb teeth-shaped capacitor gear shaping gap, the gap between its positive/negative plate needs precision to control.The design proposes a kind of comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism, the accurate control in gap between comb teeth-shaped capacitor positive/negative plate can be improved, so that batch has mutually isostructural MEMS and has consistent, estimable capacitance, improve the concordance of performance when electrostatic MEMS devices in batches manufactures.
Description
Technical field
The present invention relates to a kind of comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism, belong in MEMS
Micro-actuator and micro-sensor technologies field.
Background technology
Comb teeth-shaped capacitor is micro-actuator conventional in MEMS and the version of microsensor.Comb teeth-shaped electric capacity
Gap between device positive/negative plate needs precision to control, just can make batch have mutually isostructural MEMS have consistent,
Estimable capacitance, thus improve the concordance of performance when electrostatic MEMS devices in batches manufactures.But comb teeth-shaped capacitor is inserted
Generally only several microns, backlash, gives and uses Deep Reaction ion etching manufacturing process to cause the biggest difficulty.
Summary of the invention
The problem needing precision control for the gap between comb teeth-shaped capacitor positive/negative plate, the present invention proposes a kind of base
Comb electric capacity Precise Assembling Method in bi-stable state compliant mechanism, it is possible to increase gap between comb teeth-shaped capacitor positive/negative plate
Accurate control.
To achieve these goals, the present invention adopts the following technical scheme that.
The fixed fingers of described comb teeth-shaped capacitor and movable comb use plane fanning manufacture, after having manufactured, fixing
There is between pole plate and movable polar plate certain horizontal cross distance.
For realizing fixed fingers and cross assembly and the precision positioning determining comb of living, on rear side of movable polar plate, design phase therewith
Bi-stable state compliant mechanism even.Bi-stable state compliant mechanism is a kind of compliant parallel mechanism with two statics balance position shapes.
Utilize two shape balance characteristics and the compliant movement ability of bi-stable state compliant mechanism, devise one and carry out MEMS
(MEMS) assembly method on the sheet of device.Can be used for multiple needs to be accurately positioned in the MEMS controlled with structure interval.This
Kind of structure have manufacture and design simple, the rigidity of structure and the convenient advantage of power-deformation analysis, be suitable for the batch of MEMS
Manufacture.
Rear side in bi-stable state compliant mechanism designs the submissive actuator of electric heating simultaneously.The submissive braking of electric heating is that one can export
The micro mechanical actuators of relatively large power output.Due to the uncertainty of thermal losses, the precise motion control of electrothermal micro actuator
Make the most difficult.In the design, what the equilibrium configuration only utilizing electrothermal micro actuator to carry out bi-stable state compliant mechanism converted drives
Dynamic control, the Fine Boring location of movable polar plate controls to be realized by clamping block.
Accompanying drawing explanation
Fig. 1 is schematic diagram before comb assembling.
Label declaration in described Fig. 1: 1 fixed fingers, 2 movable comb, 3 clamping blocks, 4 spring beams, 5 bistable states are submissive
Mechanism, 6 bracers, 7 electrothermal drive electrodes, 8 electric heating compliant mechanism micro-actuators.
Fig. 2 is schematic diagram after comb assembling.
Fig. 3 is locked out the fundamental diagram of block.
Fig. 4 is that both-end support flexible bistable bends beam schematic diagram.
Fig. 5 is the fundamental diagram of electric heating compliant mechanism micro-actuator.
Detailed description of the invention
As shown in Figure 1, a kind of comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism, it is characterised in that
Described device includes: fixed fingers 1, movable comb 2, clamping block 3, spring beam 4, bi-stable state compliant mechanism 5, a bracer 6, electricity
Thermal drivers electrode 7, electric heating compliant mechanism micro-actuator 8.
As shown in Figures 1 and 2, two before respectively bi-stable state compliant mechanism 5 has been assembled and after having assembled
Orthostasis shape.Owing to bi-stable state compliant mechanism 5 has certain stability in two orthostasis shape, when device work
When making in vibration environment, the position of movable polar plate also will not change, and can realize steady lock.
As shown in Figure 3, it is V-arrangement retraction slot structure that the structure of movable polar plate position clamping block 3 uses at end A, at B is
Thin-walled cantilever beam structure.When movable polar plate support applies directed force F to the A end inclined-plane of clamping block 3, the thin walled beam B of clamping block 3
Flexural deformation will be produced.After movable polar plate support is by V-shaped groove, clamping block 3 thin walled beam B deformation-recovery original position, clamping block
A end face withstand on the rear end face of movable polar plate support, make movable polar plate can not be returned in situ, it is achieved electrostatic comb gear shaping electrode
Cross assembly.The inclination angle on clamping block 3 A end V-shaped groove inclined-plane needs to carry out matched design according to the bending stiffness of flexible beam B.When
When the bending stiffness of flexible beam B is bigger, design A end inclination angle of inclined plane is smaller value；When the bending stiffness of flexible beam B is less, if
Meter A end inclination angle of inclined plane is higher value, thus the locking for movable polar plate position provides more reliable support.
As shown in Figure 4, the both-end that is designed with of bi-stable state compliant mechanism 5 supports flexibility girder construction in the wrong.Institute in external force F
Position shown in Fig. 4 (b) can be become from position shown in Fig. 4 (a) by the stable state position shape of lower compliant mechanism.The change of this stable state position shape
Can be used for adjustment and the assembling of movable part position in MEMS.
As shown in Figure 5, electric heating compliant mechanism micro-actuator 8 is used to realize driving of bi-stable state compliant mechanism 5 stable state position shape
Dynamic conversion.When the electrode two ends of electric heating compliant mechanism micro-actuator 8 apply voltage, compliant beams produces electric current, due to compliant beams
There is certain resistance, heat can be produced after by electric current.Resistance heating will cause compliant beams length to increase.Owing to electric heating is soft
V-beam symmetrical structure is used along mechanism, when the length of compliant beams increases, under lateral symmetry power effect, the centre of flexible beam
Support will only produce horizontal cross displacement.Electrothermal micro actuator can produce relatively large power output, promotes bistable state submissive
Mechanism 5 produces the conversion of position shape, thus realizes the control of electrostatic gear shaping float electrode position.When float electrode support is by such as figure
After V-shaped groove shown in 3, clamping block 3 position is replied, it is achieved the locking of movable polar plate position.
Make assemble mechanism on this sheet normally work, need by the horizontal direction structural Rigidity Design of electric heating compliant mechanism be, by the flexural deformation rigidity Design of bi-stable state compliant mechanism 5 it is, by the structural Rigidity Design of clamping block flexible beam it is
, and three rigidities of structure meet relation。
Claims (4)
1. a comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism, this assembly method is to fixed fingers and activity
Comb plane fanning assembles, and after having assembled, has certain horizontal cross distance between fixed polar plate and movable polar plate, and it is special
Levy and be that the employing of this assembly method includes clamping block, spring beam, bi-stable state compliant mechanism, bracer, electrothermal drive electrode, electric heating
Fixed fingers, movable comb are assembled by the assembling device of compliant mechanism micro-actuator；Electric heating compliant mechanism micro-cause during assembling
Dynamic device promotes bi-stable state compliant mechanism to move, and bi-stable state compliant mechanism drives movable polar plate and the work being fixed on movable polar plate
Dynamic comb moves to fixed fingers, and movable comb tooth pushes fixed fingers teeth groove, clamping block locking movable polar plate the most at last, it is achieved Gu
Determine comb and the cross assembly of movable comb and precision positioning.
Comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism the most according to claim 1, it is characterised in that
Bi-stable state compliant mechanism is that both-end supports flexibility girder construction in the wrong, is positioned on rear side of movable polar plate and is connected with movable polar plate；Electric heating
Compliant mechanism micro-actuator is positioned on rear side of bi-stable state compliant mechanism, drives and controls the conversion of bi-stable state compliant mechanism equilibrium configuration.
Comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism the most according to claim 1, it is characterised in that
Clamping block is made up of with flexible beam V-arrangement retraction slot structure end, and flexible beam is thin-walled cantilever beam structure, V-arrangement retraction slot inclined-plane
Inclination angle matches with the bending stiffness of flexible beam.
Comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism the most according to claim 1, it is characterised in that
The horizontal direction rigidity of structure of electric heating compliant mechanism is K1, the flexural deformation rigidity of bi-stable state compliant mechanism 5 is K2, clamping block is soft
The rigidity of structure of property beam is K3, then K is met1>K2>2K3。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310128735.8A CN103198922B (en) | 2013-04-15 | 2013-04-15 | A kind of comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310128735.8A CN103198922B (en) | 2013-04-15 | 2013-04-15 | A kind of comb electric capacity Precise Assembling Method based on bi-stable state compliant mechanism |
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| CN103198922A CN103198922A (en) | 2013-07-10 |
| CN103198922B true CN103198922B (en) | 2016-11-23 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103552066B (en) * | 2013-11-18 | 2015-07-01 | 山东理工大学 | Deviation prevention type elastic moving pair |
| CN105174199B (en) * | 2015-08-05 | 2018-03-09 | 南京衡平电子科技有限公司 | A kind of micro- anchor drive of low energy consumption |
| CN108226235B (en) * | 2016-12-21 | 2020-12-15 | 中国矿业大学 | Capacitive MEMS gas sensor |
| CN107907045B (en) * | 2017-09-28 | 2019-09-13 | 东南大学 | A kind of curvature sensor of interdigital capacitor structure |
| CN109990028B (en) * | 2019-03-21 | 2020-08-18 | 西安交通大学 | Constant force compliant mechanism |
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|---|---|---|---|---|
| CN101286714A (en) * | 2008-05-22 | 2008-10-15 | 上海交通大学 | Electrothermal micro-driver of composite material with V-type beam |
| CN101482441A (en) * | 2008-12-11 | 2009-07-15 | 南京理工大学 | Dual-spindle surface shearing stress sensor |
| CN101834097A (en) * | 2010-05-15 | 2010-09-15 | 大连理工大学 | Static microrelay based on bistable compliant mechanism |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4540443B2 (en) * | 2004-10-21 | 2010-09-08 | 富士通コンポーネント株式会社 | Electrostatic relay |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101286714A (en) * | 2008-05-22 | 2008-10-15 | 上海交通大学 | Electrothermal micro-driver of composite material with V-type beam |
| CN101482441A (en) * | 2008-12-11 | 2009-07-15 | 南京理工大学 | Dual-spindle surface shearing stress sensor |
| CN101834097A (en) * | 2010-05-15 | 2010-09-15 | 大连理工大学 | Static microrelay based on bistable compliant mechanism |
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Granted publication date: 20161123 Termination date: 20170415 |