CN103196474A - Manufacturing method of optical fiber Fabry-Perot sensor and detector composed of optical fiber Fabry-Perot sensor - Google Patents

Manufacturing method of optical fiber Fabry-Perot sensor and detector composed of optical fiber Fabry-Perot sensor Download PDF

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CN103196474A
CN103196474A CN2013101335493A CN201310133549A CN103196474A CN 103196474 A CN103196474 A CN 103196474A CN 2013101335493 A CN2013101335493 A CN 2013101335493A CN 201310133549 A CN201310133549 A CN 201310133549A CN 103196474 A CN103196474 A CN 103196474A
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optical fiber
fiber
sensor
film
coupling mechanism
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CN103196474B (en
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吴迪
傅剑宇
王国胤
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Chongqing Institute of Green and Intelligent Technology of CAS
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Chongqing Institute of Green and Intelligent Technology of CAS
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Abstract

The invention discloses a manufacturing method of a miniature optical fiber Fabry-Perot sensor based on a single mode fiber and electric arc discharge and a detector composed of the miniature optical fiber Fabry-Perot sensor. The manufacturing method of the optical fiber Fabry-Perot sensor comprises the following steps: firstly, a layer of film is formed by conducting repeated electro discharge treatment on the end face of a section of a single mode fiber; then one end of the film is connected with the other section of the single mode fiber in a fusion mode; and finally, a non-film end of the signal mode fiber after the electro discharge treatment is cut according to a designed length, and two reflecting surfaces used for Fabry-Perot interference are formed respectively. The two reflecting surfaces are formed by the film in a fusion position of the two sections of the single mode fiber and an air-optical fiber interface at the tail end of the sensor. The sensor is all-fiber, simple to manufacture, high in reliability, small in size, low in cost, capable of resisting electromagnetic interference, and achieving simultaneous measurement of temperature and refraction index. The maximum temperature of the sensor can reach 1000 DEG C.

Description

A kind of optical fiber F-P sensor method for making reaches by its pick-up unit that constitutes
Technical field
The present invention relates to a kind of optical fiber sensing technology, relate in particular to a kind of mini optical fibre F-P sensor and method for making based on single-mode fiber and arc discharge.
Background technology
Fibre Optical Sensor with little, the anti-electromagnetic interference (EMI) of its volume, can be used for outstanding advantages such as rugged surroundings and be widely used in fields such as space flight, boats and ships, dam, environmental monitoring, chemical industry biologies.The optical fiber interference type sensor has adopted interference of light technology, its precision and remolding sensitivity ordinary optic fibre sensor height.
The optical fiber interference type sensor mainly contains perot interferometer type in grating type optical fiber, Michelson interferometer type, Mach-Zehnder interferometer, Sagnac interferometer type and the enamel cloth.Wherein, in the enamel cloth perot interferometer type have that volume is little, good stability, counter-bending and strong adaptability, the high outstanding advantage of integrated level.But shortcoming such as Perot interference type sensor still exists complex structure, cost of manufacture height in the present existing optical fiber enamel cloth, measurement parameter is limited, heat-resisting ability is not strong is unfavorable for practical application in industry.
The Chinese invention patent of number of patent application CN200910190826.8 publication number CN101650235 " interior integrated optical fiber interference type temperature sensor of mini optical fibre and preparation method thereof " provides by forming High-termperature Optical Fiber Sensor at the terminal biasing of incident single-mode fiber welding one end shaddock type optical fiber.This structure makes its cost of manufacture height, process complexity owing to need special shaddock type optical fiber and require relatively harsher biasing welding distance.In addition, the Chinese invention patent of number of patent application CN200710088067.5 publication number CN101034007 " optical fiber Fabry-Perot sensor and manufacture method thereof " provides by laser single-mode fiber has been processed to form microflute type method Fabry-Parot interferent instrument.Need femto-second laser but this F-P sensor is made, and the multi-cavity body structure makes signal handle trouble.The Chinese invention patent " based on the preparation method for fabry-perot sensor of corroded high doping optical fiber " of number of patent application CN200910059204.1 publication number CN101561295 provides by the strong acid corroded high doping optical fiber and has formed micropore, and then forms the method for making of pore type enamel Fabry-Parot interferent instrument by welding.People such as Wei and also by utilize laser to beat to lack at single-mode fiber form the optical fiber F-P interferometer (see Opt.Express. vol.16 for details, no.8, pp:5764-5769, Jan.2008.).
But without exception, the making of the optical fiber F-P sensor of these structures need be used special and expensive optical fiber or instrument, make its making complicated, with high costs, be unfavorable for industrial widespread use.
Therefore be badly in need of a kind of make simple, reliability is high, volume is little, anti-electromagnetic interference (EMI), cheap mini optical fibre F-P sensor and preparation method thereof.
Summary of the invention
In view of this, technical matters to be solved by this invention provide a kind of make simple, reliability is high, volume is little, anti-electromagnetic interference (EMI), cheap mini optical fibre F-P sensor and preparation method thereof.This sensor is formed by one section single-mode fiber and one section general single mode fiber welding of handling through arc discharge, makes the full optical fiber of sensor, realization temperature and refractive index is measured simultaneously, the highest thermometric reaches 1000 ℃ of mini optical fibre F-P sensors.
One of purpose of the present invention is to propose a kind of mini optical fibre preparation method for fabry-perot sensor based on single-mode fiber and arc discharge; Two of purpose of the present invention is to propose a kind of pick-up unit of making based on the mini optical fibre F-P sensor of single-mode fiber and arc discharge.
One of purpose of the present invention is achieved through the following technical solutions:
A kind of optical fiber F-P sensor method for making provided by the invention may further comprise the steps:
S1: a section single-mould fiber end face is carried out multiple discharge handle the formation thin film;
S2: with film one end and another section single-mould fiber welding;
S3: according to the non-film end of design length cutting through the discharge process single-mode fiber, be formed for two reflectings surface of enamel Fabry-Parot interferent respectively, described reflecting surface is formed by the film of two section single-mould fiber welds and the air of transducer tip-optical fiber interface respectively.
Further, described film forms in the following manner: at first a section single-mould fiber tail end is cut flatly, utilized optical fiber splicer that one section single-mould fiber end face is carried out multiple discharge then and handle, thereby form thin film.
Further, described single-mode fiber external diameter 125 ± 1 μ m, fibre core 8.2 ± 0.1 μ m.
Further, described film is handled by optical fiber splicer arc discharge or carbon dioxide laser arc discharge.
Further, described welding is carried out welding by arc welding or carbon dioxide laser heat welded.
Further, the length of described film is 20-60 μ m.
Further, the physical length of the described single-mode fiber after discharge process is cut according to designing requirement, and length is 10-1000 μ m.
Two of purpose of the present invention is achieved through the following technical solutions:
The pick-up unit of making based on the mini optical fibre F-P sensor of single-mode fiber and arc discharge provided by the invention comprises mini optical fibre F-P sensor, wideband light source, coupling mechanism, spectrometer and computing machine based on single-mode fiber and arc discharge;
Described wideband light source is connected to coupling mechanism one end, the other end of described coupling mechanism is connected to the mini optical fibre F-P sensor based on single-mode fiber and arc discharge, form the reflection interference spectral line, be connected to spectrometer via the other end of coupling mechanism, computing machine and spectrometer communicate to connect.
Further, described coupling mechanism is 1 * 2 coupling mechanism, described wideband light source is connected to a wherein end of 1 * 2 coupling mechanism " 2 ", " 1 " end of described 1 * 2 coupling mechanism is connected to the mini optical fibre F-P sensor based on single-mode fiber and arc discharge, form the reflection interference spectral line, be connected to spectrometer via the other end of 1 * 2 coupling mechanism " 2 ".
The invention has the advantages that: the present invention adopts based on mini optical fibre F-P sensor of single-mode fiber and arc discharge and preparation method thereof, it is formed by one section single-mode fiber and one section general single mode fiber welding of handling through arc discharge, may further comprise the steps: utilize optical fiber splicer that one section single-mould fiber end face is carried out multiple discharge and handle the formation thin film; With film end and the welding of another section general single mode fiber; According to the non-film end of design length cutting through the discharge process single-mode fiber; Two reflectings surface of its enamel Fabry-Parot interferent are formed by the film of two section single-mould fiber welds and the air of transducer tip-optical fiber interface respectively; Useful technique effect of the present invention is: make the full optical fiber of sensor, realize temperature and refractive index is measured simultaneously, the highest thermometric reaches 1000 ℃, it is simple to make, reliability is high, volume is little, anti-electromagnetic interference (EMI), cheap.Sensor provided by the invention can make the full optical fiber of sensor, realize temperature and refractive index measure simultaneously, high temperature resistant, make simple, reliability is high, volume is little, anti-electromagnetic interference (EMI), cheap.
Description of drawings
In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention is described in further detail below in conjunction with accompanying drawing, wherein:
Fig. 1 is the general single mode fiber structural representation of handling without arc discharge;
Fig. 2 is the single-mode fiber structural representation after handling through the heat sealing machine arc discharge;
Fig. 3 is the mini optical fibre F-P sensor structural representation based on single-mode fiber and arc discharge;
Fig. 4 is for adopting the measurement mechanism structural representation of mini optical fibre F-P sensor of the present invention.
Among the figure, 1, single-mode fiber, 2, film, 3, optical fiber F-P sensor, 4,1 * 2 coupling mechanism, 5, wideband light source, 6, spectrometer, 7, computing machine.
Embodiment
Below with reference to accompanying drawing, the preferred embodiments of the present invention are described in detail; Should be appreciated that preferred embodiment only for the present invention is described, rather than in order to limit protection scope of the present invention.
Fig. 1 is the general single mode fiber structural representation of handling without arc discharge, Fig. 2 is the single-mode fiber structural representation after handling through the heat sealing machine arc discharge, Fig. 3 is the mini optical fibre F-P sensor structural representation based on single-mode fiber and arc discharge, Fig. 4 is for adopting the measurement mechanism structural representation of mini optical fibre F-P sensor of the present invention, as shown in the figure: the mini optical fibre preparation method for fabry-perot sensor based on single-mode fiber and arc discharge provided by the invention may further comprise the steps:
S1: a section single-mould fiber end face is carried out multiple discharge handle the formation thin film;
The concrete parameter of described arc discharge is: the heat sealing machine model: Furukawa S176; Fiber end face and electrode axis are to offset or dish: 120 μ m; Discharge energy: 70; The pre-arcing time: 150ms; Discharge period: 1000ms; Discharge time: 8 times;
S2: with film one end and another section single-mould fiber welding;
The concrete parameter of described heat sealing machine setting is: discharge energy: 100; The pre-arcing time: 150ms; Discharge period: 1200ms.
S3: according to the non-film end of design length cutting through the discharge process single-mode fiber, be formed for two reflectings surface of enamel Fabry-Parot interferent respectively, described reflecting surface is formed by the film of two section single-mould fiber welds and the air of transducer tip-optical fiber interface respectively.
Described film forms in the following manner: at first a section single-mould fiber tail end is cut flatly, utilized optical fiber splicer that one section single-mould fiber end face is carried out multiple discharge then and handle, thereby form thin film.
Described single-mode fiber external diameter 125 ± 1 μ m, fibre core 8.2 ± 0.1 μ m.
Described film is handled by optical fiber splicer arc discharge or carbon dioxide laser arc discharge.
Described welding is carried out welding by arc welding or carbon dioxide laser heat welded.
The film length of described film is 20-60 μ m, and film 2 length that the specific embodiment of the invention provides are about 30 μ m, and concrete length is 33 μ m.
Described single mode after discharge process can be according to actual needs, utilize the fiber cut cutter according to the tail end of design length cutting through discharge process single-mode fiber 1, two reflectings surface of its enamel Fabry-Parot interferent are formed by the film 2 of two section single-mould fibers, 1 weld and the air-optical fiber interface of transducer tip respectively, thereby generation interference signal, interference cavity length is 413 μ m in this example, and the interference signal contrast reaches 10dB.
The concrete parameter of the arc discharge in the present embodiment is: the heat sealing machine model: Furukawa S176; Fiber end face and electrode axis are to offset or dish: 120 μ m; Discharge energy: 70; The pre-arcing time: 150ms; Discharge period: 1000ms; Discharge time: 8 times; The concrete parameter of described heat sealing machine setting is: discharge energy: 100; The pre-arcing time: 150ms; Discharge period: 1200ms.
Interference cavity length in the present embodiment is 413 μ m, and the interference signal contrast reaches 10dB.
The pick-up unit that the embodiment of the invention also provides a kind of basis to make based on the mini optical fibre F-P sensor of single-mode fiber and arc discharge comprises mini optical fibre F-P sensor, wideband light source, coupling mechanism, spectrometer and computing machine based on single-mode fiber and arc discharge;
Described wideband light source is connected to coupling mechanism one end, the other end of described coupling mechanism is connected to the mini optical fibre F-P sensor based on single-mode fiber and arc discharge, form the reflection interference spectral line, be connected to spectrometer via the other end of coupling mechanism, computing machine and spectrometer communicate to connect.
Described coupling mechanism is 1 * 2 coupling mechanism, described wideband light source is connected to a wherein end of 1 * 2 coupling mechanism " 2 ", " 1 " end of described 1 * 2 coupling mechanism is connected to the mini optical fibre F-P sensor based on single-mode fiber and arc discharge, form the reflection interference spectral line, be connected to spectrometer via the other end of 1 * 2 coupling mechanism " 2 ".
Referring to Fig. 4, by the pick-up unit structure of forming based on the mini optical fibre F-P sensor 3 of single-mode fiber and arc discharge of the present invention be: the laser of the wideband light source 5 certain bandwidth of output and wavelength coverage, connect and enter into a wherein end of " 2 " termination of 1 * 2 coupling mechanism 4,1 * 2 coupling mechanism 4 " 1 " end wherein is connected to the mini optical fibre F-P sensor 3 based on single-mode fiber and arc discharge, when the Laser Transmission formation interference spectrum that is reflected to based on two reflectings surface of the mini optical fibre F-P sensor 3 of single-mode fiber and arc discharge the time, via 1 * 2 coupling mechanism 4 wherein the other end of " 2 " termination be connected to spectrometer 6, the computing machine 7 that is attached thereto is gathered the reflection interference spectrum signal line data of going forward side by side by data communication and is handled.Change based on the mini optical fibre F-P sensor 3 of single-mode fiber and the arc discharge catoptrical optical path difference of two reflectings surface or light intensity under the effect under the environmental physics quantitative changeization and (to depend on physical quantity, cause that as temperature optical path difference change, refraction index changing cause that then reflective light intensity changes), survey these changes by spectrometer 6, machine 7 data are handled and can be learnt the change value as calculated.
Measure when this sensor and sensing device can be used for temperature and refractive index, be particularly useful for high temperature measurement, the highest measurement temperature reaches 1000 ℃.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and obviously, those skilled in the art can carry out various changes and modification and not break away from the spirit and scope of the present invention the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.

Claims (9)

1. optical fiber F-P sensor method for making is characterized in that: may further comprise the steps:
S1: a section single-mould fiber end face is carried out multiple discharge handle the formation thin film;
S2: with film one end and another section single-mould fiber welding;
S3: according to the non-film end of design length cutting through the discharge process single-mode fiber, be formed for two reflectings surface of enamel Fabry-Parot interferent respectively, described reflecting surface is formed by the film of two section single-mould fiber welds and the air of transducer tip-optical fiber interface respectively.
2. optical fiber F-P sensor method for making according to claim 1, it is characterized in that: described film forms in the following manner: at first cut a section single-mould fiber tail end flat, utilize optical fiber splicer that one section single-mould fiber end face is carried out multiple discharge then and handle, thereby form thin film.
3. optical fiber F-P sensor method for making according to claim 1 is characterized in that: described single-mode fiber external diameter 125 ± 1 μ m, fibre core 8.2 ± 0.1 μ m.
4. optical fiber F-P sensor method for making according to claim 1 is characterized in that: described film is handled by optical fiber splicer arc discharge or carbon dioxide laser arc discharge.
5. optical fiber F-P sensor method for making according to claim 1, it is characterized in that: described welding is carried out welding by arc welding or carbon dioxide laser heat welded.
6. optical fiber F-P sensor method for making according to claim 1, it is characterized in that: the length of described film is 20-60 μ m.
7. optical fiber F-P sensor method for making according to claim 1, it is characterized in that: the physical length of the described single-mode fiber after discharge process is 10-1000 μ m.
8. the pick-up unit that adopts the sensor that formed by the described optical fiber F-P sensor method for making of claim 1 to make is characterized in that: comprise mini optical fibre F-P sensor, wideband light source, coupling mechanism, spectrometer and computing machine based on single-mode fiber and arc discharge;
Described wideband light source is connected to coupling mechanism one end, the other end of described coupling mechanism is connected to the mini optical fibre F-P sensor based on single-mode fiber and arc discharge, form the reflection interference spectral line, be connected to spectrometer via the other end of coupling mechanism, described computing machine and spectrometer communicate to connect.
9. pick-up unit according to claim 8, it is characterized in that: described coupling mechanism is 1 * 2 coupling mechanism, described wideband light source is connected to a wherein end of 1 * 2 coupling mechanism " 2 ", " 1 " end of described 1 * 2 coupling mechanism is connected to the mini optical fibre F-P sensor based on single-mode fiber and arc discharge, form the reflection interference spectral line, be connected to spectrometer via the other end of 1 * 2 coupling mechanism " 2 ".
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CN103900621A (en) * 2014-03-31 2014-07-02 深圳大学 Manufacturing method and device of FP interferometer with adjustable FP cavity
CN106289407A (en) * 2016-08-29 2017-01-04 北京信息科技大学 A kind of method utilizing fibre core bubble optical fiber simultaneously to measure temperature and magnetic field
CN106404054A (en) * 2016-08-29 2017-02-15 北京信息科技大学 Method utilizing core bubble fibers to simultaneously measuring temperature and material strain
CN106404053A (en) * 2016-08-29 2017-02-15 北京信息科技大学 Method utilizing core bubble fibers to simultaneously measuring temperature and solution refractive index
CN107132201A (en) * 2017-07-12 2017-09-05 广西师范大学 The long-range pH value monitoring device of laser type
CN107478354A (en) * 2017-10-09 2017-12-15 中国计量大学 A kind of pyrostat based on the miniature temperature probe of high germnium doped fiber
CN108020248A (en) * 2017-11-28 2018-05-11 北京信息科技大学 The method that large mode field fibre-optical F-P sensor is prepared based on chemical corrosion method
CN108120489A (en) * 2017-11-24 2018-06-05 辽宁世达通用航空股份有限公司 A kind of agricultural sprinkling liquid capacity sensor based on fiber F-P
CN108168631A (en) * 2017-11-24 2018-06-15 辽宁世达通用航空股份有限公司 A kind of agricultural sprinkling medicinal liquid flow sensor based on fiber F-P
CN108195411A (en) * 2017-12-29 2018-06-22 北京信息科技大学 The Microstructure Sensor of fiber F-P cavity cascade FBG is inscribed based on femtosecond
CN110487454A (en) * 2019-09-18 2019-11-22 大连理工大学 A kind of miniature film chip optical fiber end FP pressure sensor, production method and application
CN110689838A (en) * 2019-10-31 2020-01-14 京东方科技集团股份有限公司 Display panel and display device

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CN101561295A (en) * 2009-05-07 2009-10-21 电子科技大学 Preparation method for fabry-perot sensor based on corroded high doping optical fiber
CN102519380A (en) * 2011-12-19 2012-06-27 无锡成电光纤传感科技有限公司 Micro-cavity Fabry-Perot sensor based on fibers, manufacturing method thereof, and detection apparatus

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CN102519380A (en) * 2011-12-19 2012-06-27 无锡成电光纤传感科技有限公司 Micro-cavity Fabry-Perot sensor based on fibers, manufacturing method thereof, and detection apparatus

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CN103900621B (en) * 2014-03-31 2016-10-05 深圳大学 The manufacture method of the FP interferometer in adjustable FP chamber and producing device
CN103900621A (en) * 2014-03-31 2014-07-02 深圳大学 Manufacturing method and device of FP interferometer with adjustable FP cavity
CN106404054B (en) * 2016-08-29 2018-09-21 北京信息科技大学 A method of utilizing fibre core bubble optical fiber while measuring temperature and material strain
CN106289407A (en) * 2016-08-29 2017-01-04 北京信息科技大学 A kind of method utilizing fibre core bubble optical fiber simultaneously to measure temperature and magnetic field
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CN106404053A (en) * 2016-08-29 2017-02-15 北京信息科技大学 Method utilizing core bubble fibers to simultaneously measuring temperature and solution refractive index
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CN107478354A (en) * 2017-10-09 2017-12-15 中国计量大学 A kind of pyrostat based on the miniature temperature probe of high germnium doped fiber
CN108120489A (en) * 2017-11-24 2018-06-05 辽宁世达通用航空股份有限公司 A kind of agricultural sprinkling liquid capacity sensor based on fiber F-P
CN108168631A (en) * 2017-11-24 2018-06-15 辽宁世达通用航空股份有限公司 A kind of agricultural sprinkling medicinal liquid flow sensor based on fiber F-P
CN108020248A (en) * 2017-11-28 2018-05-11 北京信息科技大学 The method that large mode field fibre-optical F-P sensor is prepared based on chemical corrosion method
CN108195411A (en) * 2017-12-29 2018-06-22 北京信息科技大学 The Microstructure Sensor of fiber F-P cavity cascade FBG is inscribed based on femtosecond
CN110487454A (en) * 2019-09-18 2019-11-22 大连理工大学 A kind of miniature film chip optical fiber end FP pressure sensor, production method and application
CN110689838A (en) * 2019-10-31 2020-01-14 京东方科技集团股份有限公司 Display panel and display device

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