CN103185743A - Tubular sputtering coating target material detection mechanism - Google Patents
Tubular sputtering coating target material detection mechanism Download PDFInfo
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- CN103185743A CN103185743A CN2011104465019A CN201110446501A CN103185743A CN 103185743 A CN103185743 A CN 103185743A CN 2011104465019 A CN2011104465019 A CN 2011104465019A CN 201110446501 A CN201110446501 A CN 201110446501A CN 103185743 A CN103185743 A CN 103185743A
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Abstract
The present invention relates to a tubular sputtering coating target material detection mechanism. A tubular sputtering coating target material is oppositely clamped by two waterproof sleeving pipes which are arranged on a seat of a carrier. A coupling liquid can be injected into a lining pipe of the tubular sputtering coating target material from a liquid injection port of the waterproof sleeving pipe, so that the coupling liquid can reach a predetermined liquid level at the lower section of the lining pipe. The seat is provided with a target material rotational driving device for driving tubular sputtering coating target material to rotate, and is provided with a detection car driven by a detection car driving device and moving between the inside of the waterproof sleeving pipe and the inside of the lining pipe of the tubular sputtering coating target material. An ultrasonic inspection detector at the bottom of the detection car can dip into the coupling liquid at the lower section of the lining pipe for ultrasonic detection of the tubular sputtering coating target material, thereby preventing the oxidation problem caused by contacting the target material arranged at the outer peripheral of the lining pipe with water in the process of detection. The tubular sputtering coating target material detection mechanism can be applied to the target material which cannot be soaked in water.
Description
Technical field
The invention relates to a sputtered target material testing agency, refer to a kind of testing agency that is exclusively used in rotary tubular sputtered target material especially.
Background technology
In the processing procedure of products such as semiconductor element, for making substrate surface form the rete of a certain material, often produce Ionized gas (electricity slurry) by sputtering unit and impact sputtered target material, make sputtered target material discharge specific particle and be attached on the substrate surface and form desired rete.
For avoiding the quality of the defective effect sputter process in the sputtered target material, described sputtered target material must utilize sputtered target material testing agency to carry out detections such as sputtered target material Inner Defect Testing, seam defects detection usually in advance, therefrom filters out bad sputtered target material.Because sputtered target material includes various ways such as planar shaped target, tubular target or special-shaped target, based on the shape difference of each form target, the purposes that each design of sputtered target material testing agency has special-purpose mechanism to detect.
In the sputtered target material non-destructive detection technique, ultrasound examination mechanism is be widely used at present a kind of at present.Because ultrasound examination mechanism must make water etc. make hyperacoustic coupling liquid, when tubular sputtered target material carries out ultrasound examination, all be tubular sputtered target material to be put into the tank immersion carry out ultrasound examination again.
But the tubular sputtered target material is through after this soaking type ultrasound examination, and this tubular sputtered target material is because of the step through drying again of immersion fully, so because fabrication steps is many, and take a lot of work when causing the detection operation cost of tubular sputtered target material.And the ultrasound examination mechanism of this soaking type is because directly immersing sputtered target material in the water, the problem that namely can't be suitable for for the sputtered target material that can not soak.
In addition, in the existing ultrasound examination mechanism design, the known interior ultrasonic flaw detecting device of tubule that has the clear 62-198755 of day disclosure number, ultrasonic flaw detecting device is applied to the non-destructive detection applications of the steam generator heat transfer tubule of pressure (hydraulic) water type atomic pile in this tubule, ultrasonic flaw detecting device is to move and rotation in tubules such as steam generator heat transfer tubule are inner with a ultrasonic detector that is driven by driving mechanism in this tubule, and pour into water fully as coupling liquid in tubule inside, make ultrasonic detector whether have slight crack to detect with the ultrasound examination means to the tubule tube wall.
Ultrasonic flaw detecting device is that non-destructive for the steam generator heat transfer tubule of pressure (hydraulic) water type atomic pile detects and designs in the aforementioned tubule, and the ultrasonic detector that ultrasonic flaw detecting device is to use driving mechanism to drive in this tubule moves and rotation in tubule is inner, this device construction complexity, and must pour into water fully as the coupling liquid of ultrasound examination in tubule inside, be not suitable for the detection operation of tubular sputtered target material.
Summary of the invention
The technical matters that the present invention solves provides a kind of, and solving existing soaking type ultrasound examination mechanism must detect tubular sputtered target material immersion, after detecting tubular sputtered target material is dried again, can't be applicable to the problem of the sputtered target material that can not soak.
Technical solution of the present invention is:
A kind of tubular sputtered target material testing agency is provided, and it comprises:
One carrier, it comprises the water string that a pedestal and two has openend, two described water strings are with relative being arranged on the pedestal of its openend, internal lining pipe in order to the tubular sputtered target material of relative clamping, at least one water string in the two described water strings is provided with a liquid injection port and a leakage fluid dram, described liquid injection port is higher than leakage fluid dram, make coupling liquid reach the predetermined fluid level height via the hypomere that described liquid injection port is injected the internal lining pipe inside of this tubular sputtered target material, after ultrasound examination, coupling liquid is discharged from described leakage fluid dram;
One target rotating driving device, be arranged on the pedestal, be held the tubular sputtered target material rotation that is positioned between the two described water strings in order to driving, the driving shaft and one that described target rotating driving device comprises more than one drives the driven unit that described driving shaft rotates, with the tubular sputtered target material of described driving shaft butt;
One inspection vehicle, it comprises a car body, a plurality of wheel and that is hubbed on the car body is installed in the ultrasonic detector bottom the car body, described inspection vehicle moves around between can be driven inner from the described water string internal lining pipe inside with tubular sputtered target material, and described ultrasonic detector also can stretch in the coupling liquid of internal lining pipe inside hypomere of tubular sputtered target material; And
One inspection vehicle drive unit is located on the pedestal, and is mobile between water string inside and tubular sputtered target material inside in order to drive described inspection vehicle.
In the described tubular sputtered target material testing agency, a target carriage is set on the described pedestal, the target carriage is in order to support tubular sputtered target material.
In the described tubular sputtered target material testing agency, the water string fixed point in the two described water strings is mounted on the target positioning area of pedestal, and the sleeve pipe driven unit is mobilizable is mounted on the pedestal in conjunction with one to surplus a water string.
In the described tubular sputtered target material testing agency, described target rotating driving device has two driving shafts, and this two driving shaft is parallel to be hubbed on the pedestal, can drive tubular sputtered target material rotation in order to provide tubular sputtered target material on it.
In the described tubular sputtered target material testing agency, described inspection vehicle drive unit comprises a driving group, a mobile member and a magnetic assembly, described driving is mounted on the pedestal, the driving group includes an operating member, mobile member is located on the operating member, the magnetic assembly comprise a magnetic member and one can by magnetic by the magnetic member, the magnetic member be mounted at mobile member and inspection vehicle bottom respectively by the magnetic member, make between mobile member and the inspection vehicle energy interlock by the Magnetic force tracting effect.
The attainable beneficial effect of the present invention is: described tubular sputtered target material testing agency takes via water string the inner hypomere of the internal lining pipe of tubular sputtered target material to be injected coupling liquid such as a spot of water, it is inner mobile in internal lining pipe that other drives inspection vehicle, inspection vehicle bottom ultrasonic detector stretches into coupling liquid and detects, tubular sputtered target material is not contacted with water in testing process fully in the target of internal lining pipe outer peripheral face, the problem that causes oxidation so can effectively avoid the target of the internal lining pipe outer peripheral face of tubular sputtered target material to contact water is for the target particularly suitable that can't soak.
Secondly, the present invention is in implementation process, and only privileged site injects coupling liquid such as a spot of water, and discharges immediately after detecting, and makes target not contact water and can omit the step that tubular sputtered target material is dried, and improves the detection operating efficiency of tubular sputtered target material.
Description of drawings
Fig. 1 is the schematic top plan view of a preferred embodiment before fixing tubular sputtered target material of the tubular sputtered target material of the present invention testing agency;
Fig. 2 is the front side view plane synoptic diagram of tubular sputtered target material shown in Figure 1 testing agency preferred embodiment;
Fig. 3 is the left side view plane synoptic diagram of tubular sputtered target material shown in Figure 1 testing agency preferred embodiment;
Fig. 4 is the left side view plane synoptic diagram of tubular sputtered target material shown in Figure 1 testing agency preferred embodiment;
Fig. 5 is the schematic top plan view of tubular sputtered target material testing agency's preferred embodiment shown in Figure 1 after gripping tubular sputtered target material;
To be that the inspection vehicle in the preferred embodiment of tubular sputtered target material shown in Figure 1 testing agency is driven enter tubular sputtered target material from water string and detect the forward sight floor map Fig. 6;
Fig. 7 is that the preferred embodiment of tubular sputtered target material shown in Figure 1 testing agency is in the enforcement view of the tubular sputtered target material of rotation.
The main element label declaration:
1 carrier, 10 pedestals, 101 target positioning areas
11 water strings, 111 liquid injection port, 112 leakage fluid drams
12 target carriages, 13 slide rails, 14 slide blocks
15 sleeve pipe driven units, 2 target rotating driving devices, 20 driving shafts
21 driven units, 3 inspection vehicles, 30 car bodies
31 wheels, 32 ultrasonic detectors, 4 inspection vehicle drive units
401 operating members, 41 mobile members are organized in 40 drivings
42 magnetic assemblies, 421 magnetic members 422 are by the magnetic member
5 tubular sputtered target material 50 targets 51 internal lining pipes
6 water
Embodiment
Below cooperate graphic and of the present invention preferred embodiment, further setting forth the present invention is to reach the technological means that predetermined goal of the invention is taked.
As shown in Figures 1 to 4, it is a preferred embodiment that discloses the tubular sputtered target material of the present invention testing agency, by seeing in this preferred embodiment and tubular sputtered target material of the present invention testing agency comprises a carrier 1, a target rotating driving device 2, an inspection vehicle 3 and an inspection vehicle drive unit 4, wherein:
Described carrier 1 comprises a pedestal 10 and two water strings 11, definition has a target positioning area 101 on the described pedestal 10, pedestal 10 also can arrange target carriage 12 in target positioning area 101, target carriage 12 is in order to supporting tubular sputtered target material 5, and tubular sputtered target material 5 can be rotated on target carriage 12.
One end of water string 11 is closing end, the other end of water string 11 is openend, two described water strings 11 arbitrary or two arranges a liquid injection port 111 and a leakage fluid dram 112, liquid injection port 111 is last, leakage fluid dram 112 is following, liquid injection port 111 all is communicated with water string 11 inner spaces with leakage fluid dram 112, two described water strings 11 are to be arranged on the pedestal, and the tubular sputtered target material 5 of the relative clamping of the openend of two described water strings 11, water string 11 inner spaces can be communicated with tubular sputtered target material 5 inner spaces, but liquid injection port 111 is in order to the liquid injection pipe of external switch, but leakage fluid dram 112 is in order to the discharging tube of external switch.
Two described water strings 11 are arranged at the target positioning area 101 of pedestal 10 all movably, perhaps, arbitrary water string 11 fixed points in the described water string 11 are mounted on the target positioning area 101 of pedestal 10, and 11 of another water strings are arranged on the target positioning area 101 of pedestal 10 movably.In aforementioned, mobilizable water string 11 can be arranged on the pedestal 10 in conjunction with manually adjusting structure, make water string 11 can manually adjust its position, be parallel to the axial slide rail 13 of target positioning area 101 as arranging on the pedestal 10, water string 11 sides arrange slide block 14, slide block 14 is connected on the slide rail 13, makes water string 11 can utilize fixed component to be fixed in addition in pedestal 10 top offsets; Perhaps, water string 11 can be mounted on pedestal 10 in conjunction with a sleeve pipe driven unit 15, described sleeve pipe driven unit 15 can be motor in conjunction with screw rod, motor combination gear and tooth bar, or the design of drive member such as pneumatic cylinder as shown in Figure 1, drive mobilizable water string 11 in pedestal 10 top offsets by driven unit 21, and then make the two water strings 11 tubular sputtered target material 5 of clamping relatively, tubular sputtered target material 5 can be rotated between this two water string 11, and discharge tubular sputtered target material 5.
Described target rotating driving device 2 is to be arranged on the pedestal 10, be held tubular sputtered target material 5 rotations that are positioned 11 of two described water strings in order to driving, the driving shaft 20 and one that described target rotating driving device 2 comprises more than one drives the driven unit 21 that driving shaft 20 rotates, driven unit 21 includes a motor and a train transmission group, the train transmission group is connected in the axle of driving shaft and motor, make motor drive driving shaft 20 rotations via the train transmission group, in this preferred embodiment, as shown in Figure 1 to Figure 3, described target rotating driving device 2 has two driving shafts, the 20 parallel target positioning areas 101 that are hubbed at pedestal 10, with two driving shafts 20 provide tubular sputtered target material 5 against its on, in order to drive 5 rotations of tubular sputtered target material.
Described inspection vehicle 3 is the pick-up units that can move around between water string 11 inside and tubular sputtered target material 5 inside, described inspection vehicle 3 comprises a car body 30, a plurality of wheel 31 and a ultrasonic detector 32, a plurality of wheels 31 are hubbed on the car body 30, and be resisted against internal lining pipe 51 internal faces of tubular sputtered target material 5, described ultrasonic detector 32 is to be located at car body 30 bottoms, and with the ultrasound examination means tubular sputtered target material 5 is carried out non-destructive and detect.
Described inspection vehicle drive unit 4 is in order to drive the driving mechanism that inspection vehicle 3 moves between water string 11 inside and tubular sputtered target material 5 inside, as Fig. 2 and shown in Figure 6, in this preferred embodiment, described inspection vehicle drive unit 4 is a magnetic-type drive unit, described inspection vehicle drive unit 4 comprises a driving group 40, one mobile member 41 and a magnetic assembly 42, described driving group 40 can be motor in conjunction with screw rod, motor combination gear and tooth bar or other equivalent driving mechanisms, driving group 40 is located on the pedestal, driving group 40 includes an operating member 401, mobile member 41 is located on the operating member 401, magnetic assembly 42 comprise a magnetic member 421 and can be magnetic conductivity or have magnetic by magnetic member 422, from magnetic member 421 with selected one by magnetic member 422 in the two and be mounted on the mobile member, another then is mounted on inspection vehicle 3 bottoms, be located on the mobile member 41 as magnetic member 421, be located at inspection vehicle 3 bottoms by 422 of magnetic members, vice versa, so, making between mobile member 41 and the inspection vehicle 3 by the Magnetic force tracting effect can interlock, when driving group 40 drives the mobile member displacement, can utilize on the mobile member 41 magnetic member 421 from inspection vehicle 3 bottoms of tubular sputtered target material 5 external magnetic suction pipe shape sputtered target materials 5 inside by magnetic member 422, make the inspection vehicle 3 can be in company with mobile member 41 displacement together.
When this tubular sputtered target material testing agency is applied to tubular sputtered target material 5 and carries out ultrasound examination, as shown in Figures 1 and 2, be to make tubular sputtered target material 5 be installed between two water strings 11, as shown in Figure 5, the driving shaft 20 of tubular sputtered target material 5 butt target rotating driving devices 2 and being driven in rotation, secondly inject the coupling liquid such as water 6 of scheduled volume from the liquid injection port 111 of water string 11, make water 6 enter the internal lining pipe 51 inner lower sections of tubular sputtered target material 5, make the liquid level of internal lining pipe 51 inside of tubular sputtered target material 5 just make the ultrasonic detector 32 of inspection vehicle 3 be enough to stretch in the water 6, the coupling liquid of using as ultrasound examination with water 6, as shown in Figure 6, continue and drive inspection vehicle 3 moves into tubular sputtered target material 5 in water string 11 internal lining pipe 51 inside with inspection vehicle drive unit 4, and in the process that tubular sputtered target material 5 moves, via internal lining pipe 51 target 50 of its outer peripheral face is carried out ultrasound examination by water 6 by the ultrasonic detector 32 of inspection vehicle 3 bottoms, to judge whether defectiveness of tubular sputtered target material 5, as shown in Figure 7, and collocation target rotating driving device 2 drives tubular sputtered target material 5 and rotates an angle in regular turn, makes the ultrasonic detector 32 of inspection vehicle 3 bottoms be able to fully the target 50 of internal lining pipe 51 outer peripheral faces of tubular sputtered target material 5 is carried out comprehensive ultrasound examination.In this ultrasound examination process, can make the target 50 of internal lining pipe 51 outer peripheral faces not contact with water, make it go for detecting the target that can't soak.
After tubular sputtered target material 5 is finished ultrasound examination, leakage fluid dram 112 via water string 11 is discharged the water of internal lining pipe 51 inside of tubular sputtered target material 5, between two water strings 11, take out tubular sputtered target material 5 again, can carry out the ultrasound examination operation of next tubular sputtered target material 5 again.
The present invention is with this tubular sputtered target material testing agency design, it is to take to inject coupling liquid such as a spot of water in the inner hypomere of the internal lining pipe of tubular sputtered target material, tubular sputtered target material is not contacted with water in testing process fully in the target of internal lining pipe outer peripheral face, the problem that causes oxidation so can effectively avoid target contact water, for the target particularly suitable that can't soak, and the present invention is in implementation process, only privileged site injects coupling liquid such as a spot of water, and after detecting, discharge immediately, make target not contact water and can omit the step of tubular sputtered target material oven dry, improve the detection operating efficiency of tubular sputtered target material.
The above only is preferred embodiment of the present invention; be not that the present invention is done any pro forma restriction; though the present invention discloses as above with preferred embodiment; yet be not in order to limit the present invention; any those skilled in the art; in the scope that does not break away from technical solution of the present invention; when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations; in every case be the content that does not break away from technical solution of the present invention; any simple modification that foundation technical spirit of the present invention is done above embodiment; equivalent variations and modification all still belong in the protection domain of technical solution of the present invention.
Claims (7)
1. one kind tubular sputtered target material testing agency is characterized in that it comprises:
One carrier, it comprises the water string that a pedestal and two has openend, two described water strings are with relative being arranged on the pedestal of its openend, internal lining pipe in order to the tubular sputtered target material of relative clamping, at least one water string in the two described water strings is provided with a liquid injection port and a leakage fluid dram, described liquid injection port is higher than leakage fluid dram, make coupling liquid reach the predetermined fluid level height via the hypomere that described liquid injection port is injected the internal lining pipe inside of this tubular sputtered target material, after ultrasound examination, coupling liquid is discharged from described leakage fluid dram;
One target rotating driving device, be arranged on the pedestal, be held the tubular sputtered target material rotation that is positioned between the two described water strings in order to driving, the driving shaft and one that described target rotating driving device comprises more than one drives the driven unit that described driving shaft rotates, with the tubular sputtered target material of described driving shaft butt;
One inspection vehicle, it comprises a car body, a plurality of wheel and that is hubbed on the car body is installed in the ultrasonic detector bottom the car body, described inspection vehicle moves around between can be driven inner from the described water string internal lining pipe inside with tubular sputtered target material, and described ultrasonic detector also can stretch in the coupling liquid of internal lining pipe inside hypomere of tubular sputtered target material; And
One inspection vehicle drive unit is located on the pedestal, and is mobile between water string inside and tubular sputtered target material inside in order to drive described inspection vehicle.
2. tubular sputtered target material according to claim 1 testing agency is characterized in that a target carriage is set on the described pedestal, and the target carriage is in order to support tubular sputtered target material.
3. tubular sputtered target material according to claim 1 testing agency, it is characterized in that, water string fixed point in the two described water strings is mounted on the target positioning area of described pedestal, and another described water string also can be mounted on the pedestal versatilely in conjunction with a sleeve pipe driven unit.
4. tubular sputtered target material according to claim 2 testing agency, it is characterized in that, water string fixed point in the two described water strings is mounted on the target positioning area of described pedestal, and another described water string also can be mounted on the pedestal versatilely in conjunction with a sleeve pipe driven unit.
5. according to each described tubular sputtered target material testing agency in the claim 1 to 4, it is characterized in that, described target rotating driving device has two driving shafts, two described driving shafts are parallel to be hubbed on this pedestal, can drive this tubular sputtered target material rotation in order to provide this tubular sputtered target material on it.
6. according to each described tubular sputtered target material testing agency in the claim 1 to 4, it is characterized in that, described inspection vehicle drive unit comprises a driving group, one mobile member and a magnetic assembly, described driving is mounted on this pedestal, described driving group includes an operating member, this mobile member is located on the described operating member, this magnetic assembly comprise a magnetic member and one can by magnetic by the magnetic member, described magnetic member be mounted at described mobile member and inspection vehicle bottom respectively by the magnetic member, make between described mobile member and the inspection vehicle energy interlock by the Magnetic force tracting effect.
7. tubular sputtered target material according to claim 5 testing agency, it is characterized in that, described inspection vehicle drive unit comprises a driving group, one mobile member and a magnetic assembly, described driving is mounted on this pedestal, described driving group includes an operating member, this mobile member is located on the described operating member, this magnetic assembly comprise a magnetic member and one can by magnetic by the magnetic member, described magnetic member and the bottom that is mounted on described mobile member and inspection vehicle by the magnetic member respectively, making can interlock by the Magnetic force tracting effect between described mobile member and the inspection vehicle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110446501.9A CN103185743B (en) | 2011-12-28 | 2011-12-28 | Tubular sputtering coating target material detection mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110446501.9A CN103185743B (en) | 2011-12-28 | 2011-12-28 | Tubular sputtering coating target material detection mechanism |
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| Publication Number | Publication Date |
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| CN103185743A true CN103185743A (en) | 2013-07-03 |
| CN103185743B CN103185743B (en) | 2015-06-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110446501.9A Active CN103185743B (en) | 2011-12-28 | 2011-12-28 | Tubular sputtering coating target material detection mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106442732A (en) * | 2016-10-28 | 2017-02-22 | 北京安泰中科金属材料有限公司 | Ultrasonic detection device and method for multi-layered composite interface of metal pipe fitting |
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| CN2565842Y (en) * | 2002-07-11 | 2003-08-13 | 中国科学院物理研究所 | Plane magnetic control sputtering target |
| TW201033607A (en) * | 2009-01-08 | 2010-09-16 | Jun Ueno | Ultrasonic flaw detector |
| CN201740766U (en) * | 2010-06-18 | 2011-02-09 | 浙江科宇金属材料有限公司 | Digital ultrasonic flaw detection device |
| CN102221577A (en) * | 2010-04-14 | 2011-10-19 | 中国科学院金属研究所 | Movable high-accuracy silk material ultrasonic detection system |
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| JPS61128160A (en) * | 1984-11-27 | 1986-06-16 | Kobe Steel Ltd | Method and apparatus for ultrasonic flaw detection of tubular material to be inspected |
| JPS62198755A (en) * | 1986-02-27 | 1987-09-02 | Hokkaido Electric Power Co Inc:The | In-thin-pipe ultrasonic flaw detecting device |
| CN2565842Y (en) * | 2002-07-11 | 2003-08-13 | 中国科学院物理研究所 | Plane magnetic control sputtering target |
| TW201033607A (en) * | 2009-01-08 | 2010-09-16 | Jun Ueno | Ultrasonic flaw detector |
| CN102221577A (en) * | 2010-04-14 | 2011-10-19 | 中国科学院金属研究所 | Movable high-accuracy silk material ultrasonic detection system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106442732A (en) * | 2016-10-28 | 2017-02-22 | 北京安泰中科金属材料有限公司 | Ultrasonic detection device and method for multi-layered composite interface of metal pipe fitting |
| CN106442732B (en) * | 2016-10-28 | 2019-03-15 | 北京安泰中科金属材料有限公司 | The supersonic detection device and supersonic detection method at metal tube MULTILAYER COMPOSITE interface |
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| CN103185743B (en) | 2015-06-17 |
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