CN103184413A - Vacuum coater and vacuum coating method - Google Patents
Vacuum coater and vacuum coating method Download PDFInfo
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- CN103184413A CN103184413A CN2011104468977A CN201110446897A CN103184413A CN 103184413 A CN103184413 A CN 103184413A CN 2011104468977 A CN2011104468977 A CN 2011104468977A CN 201110446897 A CN201110446897 A CN 201110446897A CN 103184413 A CN103184413 A CN 103184413A
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Abstract
The invention relates to coating technology and discloses a vacuum coater and a vacuum coating method. According to the invention, an initial vacuum transmission cavity may be connected with at least two parallel vacuum process chambers at the same time; according to process requirements, the rear parts of the two parallel vacuum process chambers may be connected with a pair of or a plurality of pairs of parallel vacuum process chambers, and a plurality of tandem vacuum process chambers form a vacuum process chamber group, and the rear end of a last vacuum process chamber in each vacuum process chamber group is connected with a final vacuum transmission cavity; thus, at least two substrates can be simultaneously input into the vacuum coater, realizing a continuous technical process. The two substrates may undergo two different or two identical technical processes at the same time. Therefore, under the condition of a same equipment installation area, output of the vacuum coater is increased by one time, cost of the vacuum coater is reduced by 40%, so generation efficiency is substantially improved and production cost is reduced.
Description
Technical field
The present invention relates to coating technique, particularly vacuum coating technology.
Background technology
Prepare rete in a vacuum, comprise simple substance or compound films such as the metal that is coated with crystalline state, semi-conductor, isolator, comprise types such as physical deposition plated film, electroless plating plated film and evaporation coating.Present vacuum coater comprises: a vacuum is advanced sheet cavity, initial vacuum transmission cavity, a vacuum technology cavity group (the vacuum technology cavity that comprises one or more series connection in the vacuum technology cavity group), a final vacuum transmission cavity and a vacuum slice cavity.
Need carry out the inlet end that the substrate of plated film advances the sheet cavity from vacuum and enter, after substrate enters into vacuum and advances the sheet cavity, close vacuum and advance vacuum valve on the sheet cavity, and vacuum is advanced the sheet cavity vacuumize.After vacuum is advanced the sheet cavity and is in vacuum state, substrate is advanced the sheet cavity from vacuum to be transferred to the vacuum technology cavity group via initial vacuum transmission cavity, by the one or more vacuum technology cavitys in the vacuum technology cavity group this substrate being carried out coating process handles, after finishing the coating process processing, the substrate of finishing coating process is transferred to final vacuum transmission cavity, and final vacuum transmission cavity transfers to this substrate vacuum slice cavity again and carries out slice.
Yet the present inventor finds, present vacuum coater can only carry out coating film treatment to a slice substrate in coating process process, therefore all not ideal enough on output capacity and cost.
Summary of the invention
The object of the present invention is to provide a kind of vacuum coater and method thereof, make vacuum coater to carry out two kinds of identical or different technological processs at least two substrates simultaneously, thereby improved formation efficiency greatly, reduced production cost.
For solving the problems of the technologies described above, embodiments of the present invention provide a kind of vacuum coater, comprise: an initial vacuum transmission cavity, at least two vacuum technology cavity groups arranged side by side, a final vacuum transmission cavity;
Transmission cavity in described initial vacuum links to each other with each described vacuum technology cavity group arranged side by side, near few two substrates of this initial vacuum transmission cavity simultaneously or priority transfer to each described vacuum technology cavity group arranged side by side respectively; A slice substrate transfers in the described vacuum technology cavity group, in each described vacuum technology cavity group, comprises at least one vacuum technology cavity;
Each described vacuum technology cavity group all links to each other with described final vacuum transmission cavity, and the substrate that each described vacuum technology cavity group will be finished coating process transfers to described final vacuum and transmits slice behind the cavity;
Wherein, being provided with the vacuum pressure controller in the initial vacuum transmission cavity, when this pressure controller carries out identical coating process at need to described each substrate, is uniform pressure in each described vacuum technology cavity group with the pressure-controlling in the described initial vacuum transmission cavity; When this vacuum pressure controller carries out different coating process at need to described each substrate, be the pressure in the target vacuum process cavity group successively with the pressure-controlling in the described initial vacuum transmission cavity, the vacuum technology cavity group of described target vacuum process cavity group for needing instantly substrate is transferred to.
Embodiments of the present invention also provide a kind of vacuum coating method, comprise following steps:
Transmit near few two substrates of cavity simultaneously or successively transfer at least two vacuum technology cavity groups arranged side by side respectively by an initial vacuum; A slice substrate transfers in the described vacuum technology cavity group;
By the vacuum technology cavity that comprises in the described vacuum technology cavity group, the substrate that receives is carried out coating process handle;
Described vacuum technology cavity group transfers to slice behind the final vacuum transmission cavity with the substrate of finishing coating process after finishing coating process that substrate is carried out and handling;
Wherein, at least two substrates whiles or priority are being transferred to respectively in the step of two described vacuum technology cavity groups arranged side by side at least, are comprising following substep:
Judge whether each described substrate needs to carry out identical coating process, if then be the uniform pressure in each described vacuum technology cavity group with the pressure-controlling in the described initial vacuum transmission cavity; Need carry out different coating process if judge each substrate, then be the pressure in the target vacuum process cavity group successively with the pressure-controlling in the described initial vacuum transmission cavity, the vacuum technology cavity group of described target vacuum process cavity group for needing instantly substrate is transferred to.
Embodiment of the present invention in terms of existing technologies, initial vacuum transmission cavity can connect at least two vacuum technology cavity groups arranged side by side simultaneously, comprises at least one vacuum technology cavity in each vacuum technology cavity group.Such as, an initial vacuum transmission cavity can connect two vacuum technology cavitys arranged side by side simultaneously, according to process requirements, can connect one or more pairs of vacuum technology cavitys arranged side by side behind the process cavity arranged side by side again, a plurality of vacuum technology cavitys of series connection are a vacuum technology cavity group, last vacuum technology cavity rear end in each vacuum technology cavity group connects same final vacuum transmission cavity.By be provided with the vacuum pressure controller in initial vacuum transmission cavity, the pressure-controlling of utilizing this vacuum pressure controller that the initial vacuum is transmitted in the cavity is the pressure of current needs.
Because this vacuum coater can be imported at least two substrates simultaneously, carries out continuous technological process.Two substrates can carry out two kinds of different technological processs simultaneously, also can carry out two kinds of identical technological processs simultaneously.Therefore on same equipment erection space, the output that this device can double reaches 40% with reducing cost, and has improved formation efficiency greatly, has reduced production cost.
Preferably, be provided with well heater or water cooler in the vacuum technology cavity that in initial vacuum transmission cavity, vacuum technology cavity group, comprises, the final vacuum transmission cavity any one or a plurality of cavity, make substrate can be before carrying out plated film, in the coating process or heat behind the plated film or cooling process.
Preferably, substrate material is following any one type: glass, stainless steel, carbon steel, aluminium, plastics and pottery.Vacuum plating comprises the plated film of following any one type: physical deposition plated film, electroless plating plated film and evaporation coating.Make this vacuum coater have application scenarios widely, can be used for the thin film solar industry (as copper indium gallium selenium solar cell, cadmium telluride solar cell and non-crystal silicon solar cell), also can be used for the glass coating industry, semiconductor industry and other plated film industry.
Description of drawings
Fig. 1 is the structural representation according to the vacuum coater of first embodiment of the invention;
Fig. 2 is the vacuum coating method schema according to third embodiment of the invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing the embodiments of the present invention are explained in detail.Yet, persons of ordinary skill in the art may appreciate that in each embodiment of the present invention, in order to make the reader understand the application better many ins and outs have been proposed.But, even without these ins and outs with based on many variations and the modification of following each embodiment, also can realize each claim of the application technical scheme required for protection.
First embodiment of the present invention relates to a kind of vacuum coater.Concrete structure as shown in Figure 1, comprise: a vacuum is advanced sheet cavity 2, an initial vacuum transmission cavity 3, two vacuum technology cavity groups arranged side by side (as the vacuum technology cavity group 4 among the figure and vacuum technology cavity group 5, comprise vacuum technology cavity 6 and vacuum technology cavity 7 in the vacuum technology cavity group 4, comprise vacuum technology cavity 8 and vacuum technology cavity 9 in the vacuum technology cavity group 5), final vacuum transmission cavity 10, vacuum slice cavity 11.Being provided with the vacuum pressure controller in initial vacuum transmission cavity 3, is the pressure of current needs with the pressure-controlling of the initial vacuum being transmitted in the cavity.
Wherein, vacuum is advanced the front end that sheet cavity 2 is connected described initial vacuum transmission cavity 3, and transmission cavity 3 in initial vacuum advances the sheet cavity 2 simultaneously or successively receives two substrates 1 from described vacuum.Transmission cavity 3 in initial vacuum links to each other with vacuum technology cavity group 4, vacuum technology cavity group 5 arranged side by side, this initial vacuum transmission cavity with two substrates 1 simultaneously or priority transfer to each vacuum technology cavity group arranged side by side respectively; A slice substrate transfers in the described vacuum technology cavity group.Vacuum technology cavity group 4 all links to each other with final vacuum transmission cavity 10 for 5 groups with vacuum technology cavity group, and the substrate that vacuum technology cavity group 4 and vacuum technology cavity group 5 will be finished coating process transfers to final vacuum transmission cavity 10.In the present embodiment, each vacuum technology cavity group comprises 2 vacuum technology cavitys, and 2 vacuum technology cavitys that comprise are connected with series system.As shown in Figure 1, vacuum technology cavity group 4 comprises vacuum technology cavity 6 and the vacuum technology cavity 7 of series connection, comprises vacuum technology cavity 8 and the vacuum technology cavity 9 of series connection in the vacuum technology cavity group 5.
Vacuum slice cavity 11 is connected the rear end of final vacuum transmission cavity 10, and final vacuum transmission cavity 10 will be finished the substrate while of coating process or successively transfer to vacuum slice cavity 11.Certainly, on initial vacuum transmission cavity, each vacuum technology cavity, final vacuum transmission cavity, also be provided with vacuum pump 13, also be provided with rotary target or planar target 14 according to arts demand at each vacuum technology cavity, in each cavity, be provided with vacuum valve 15.The design of these vacuum pumps, rotary target or planar target, vacuum valve is same as the prior art, does not repeat them here.
Specifically, in the present embodiment, can advance two substrates 1 of sheet cavity 2 inputs to vacuum simultaneously or successively, after vacuum was advanced sheet cavity 2 and is in vacuum state, these two substrates 1 can simultaneously or successively enter initial vacuum transmission cavity 3.
If what these two substrates 1 need carry out is identical coating process, illustrate that then the pressure in the follow-up vacuum technology cavity group that enters of substrate is identical, so the pressure-controlling that the vacuum pressure controller in the initial vacuum transmission cavity 3 transmits the initial vacuum in the cavity is the uniform pressure in each vacuum technology cavity group.If what these two substrates 1 need carry out is different coating process, illustrate that then the pressure in the follow-up vacuum technology cavity group that enters of substrate may be inequality, at this moment, pressure controller in the initial vacuum transmission cavity 3 is the pressure in the target vacuum process cavity group successively with the pressure-controlling in this initial vacuum transmission cavity 3, the vacuum technology cavity group of described target vacuum process cavity group for needing instantly substrate is transferred to.
Such as, pressure in the vacuum technology cavity 6 in the vacuum technology cavity group 4 is P1, pressure in the vacuum technology cavity 8 in the vacuum technology cavity group 5 is P2, current substrate 1 need being transferred in the vacuum technology cavity 6, then vacuum technology cavity group 4 is target vacuum process cavity group, and the pressure-controlling that the pressure controller in the initial vacuum transmission this moment cavity 3 transmits the initial vacuum in the cavity is pressure P 1 required in the vacuum technology cavity group 4.After substrate 1 is transferred to vacuum technology cavity 6, instantly need another sheet substrate 1 is transferred in the vacuum technology cavity 8, vacuum technology cavity group 5 is target vacuum process cavity group at this moment, so the pressure-controlling that the pressure controller in the initial vacuum transmission cavity 3 transmits the initial vacuum in the cavity is pressure P 2 required in the vacuum technology cavity group 5.
If the pressure difference in the follow-up vacuum technology cavity group that enters of substrate, then two substrates in the initial vacuum transmission cavity 3 need a slice a slice successively to enter separately vacuum technology cavity group; If the pressure in the follow-up vacuum technology cavity group that enters of substrate is identical, then two substrates in the initial vacuum transmission cavity 3 can enter vacuum technology cavity group separately simultaneously.In each vacuum technology cavity group, the vacuum technology cavity that comprises carries out art breading with this to the substrate that enters this cavity.At above-mentioned case, 6 pairs of vacuum technology cavitys in the vacuum technology cavity group 4 enter the coating process that the substrate of this cavity is correlated with and handle, and after finishing, this substrate is sent into vacuum technology cavity 7, handled by the coating process that vacuum technology cavity 7 continues this substrate is correlated with.Vacuum technology cavity 8 and 9 in the vacuum technology cavity group 5 also will similarly be handled another substrate.
When last the vacuum technology cavity in the vacuum process cavity group (as the vacuum technology cavity 7 in the vacuum technology cavity group 4, vacuum technology cavity 8 in the vacuum technology cavity group 5) finish the coating process of substrate after, substrate is transferred to final vacuum transmission cavity 10.Because independent two vacuum technology cavity groups arranged side by side can be carried out with a kind of technology or two kinds of different process, and the time of two kinds of different process possibility length difference, therefore last vacuum technology cavity in two vacuum technology cavity groups, can be simultaneously or the substrate that successively will finish coating process transfer to final vacuum transmission cavity 10.Certainly, the pressure-controlling of final vacuum transmission cavity 10 is similar to the pressure-controlling of initial vacuum transmission cavity 3.Final vacuum transmission cavity 10 can carry out slice with finishing the substrate while of coating process or successively transferring to vacuum slice cavity 11.
What deserves to be mentioned is, in the present embodiment, only with two vacuum technology cavity groups arranged side by side, it is that example describes that each vacuum technology cavity group comprises two vacuum technology cavitys, in actual applications, can and show more vacuum technology cavity groups, each vacuum technology cavity group also can have more vacuum technology cavitys or have only a vacuum technology cavity.But its principle of work and present embodiment are similar, do not repeat them here.
In addition, in the present embodiment, vacuum coater also can comprise be used to time sheet loop 12 that recycles substrate frame, and an end in this time sheet loop 12 links to each other with vacuum slice cavity 11, and the other end advances sheet cavity 2 with vacuum and links to each other, as shown in Figure 1.Substrate is installed in and carries out plated film in the substrate frame, and the unloading of substrate on the substrate frame, installation can be carried out any one position on this time sheet loop 12.
Need to prove that the substrate material in the present embodiment can be for being any one type: glass, stainless steel, carbon steel, aluminium, pottery, plastics.The vacuum coater of present embodiment can be applicable to physical deposition plated film, electroless plating plated film or evaporation coating.
Be not difficult to find, because the vacuum coater of present embodiment can be imported at least two substrates simultaneously, carry out continuous technological process.Two substrates can carry out two kinds of different technological processs simultaneously, also can carry out two kinds of identical technological processs simultaneously.Therefore on same equipment erection space, the output that this device can double reaches 40% with reducing cost, and has improved formation efficiency greatly, has reduced production cost.And, this vacuum coater has application scenarios widely, can be used for thin film solar industry (as copper indium gallium selenium solar cell, cadmium telluride solar cell and non-crystal silicon solar cell), also can be used for glass coating industry and semiconductor industry or other plated film industry.
Second embodiment of the present invention relates to a kind of vacuum coater.Second embodiment and first embodiment are roughly the same, key distinction part is: in second embodiment of the invention, in in each vacuum technology cavity that can also in cavity, vacuum technology cavity group are transmitted in the initial vacuum, comprise, the final vacuum transmission cavity any one or a plurality of cavity well heater or water cooler are set, make substrate can be before carrying out plated film, in the coating process or heat behind the plated film or cooling process.
Third embodiment of the invention relates to a kind of vacuum coating method, and idiographic flow as shown in Figure 2.
In step 210, transmit near few two substrates of cavity simultaneously or successively transfer at least two vacuum technology cavity groups arranged side by side respectively by an initial vacuum; A slice substrate transfers in the described vacuum technology cavity group.
Specifically, transmission cavity in initial vacuum advances to receive the substrate that need carry out coating process the sheet cavity from vacuum, and wherein, transmission cavity in initial vacuum can advance to receive at least two substrates the sheet cavity from vacuum simultaneously or successively.Initial vacuum transmission cavity judges whether each substrate needs to carry out identical coating process after receiving at least two substrates, if the pressure-controlling of then initial vacuum being transmitted in the cavity is the uniform pressure in each vacuum technology cavity group; Need carry out different coating process if judge each substrate, then successively the initial vacuum be transmitted pressure-controlling in the cavity and be the pressure in the target vacuum process cavity group, the vacuum technology cavity group of target vacuum process cavity group for needing instantly substrate is transferred to.
Then, in step 220, by the vacuum technology cavity that comprises in the vacuum technology cavity group, the substrate that receives is carried out coating process handle.Wherein, if comprise two or more vacuum technology cavitys in the vacuum technology cavity group, then each the vacuum technology cavity in the vacuum technology cavity group carries out art breading to substrate successively.
Then, in step 230, vacuum technology cavity group transfers to slice behind the final vacuum transmission cavity with the substrate of finishing coating process after finishing coating process that substrate is carried out and handling.Specifically, final vacuum transmission cavity will be finished the substrate while of coating process or successively transfer to vacuum slice cavity, carry out slice by this vacuum slice cavity.
Be not difficult to find that present embodiment is the method embodiment corresponding with first embodiment, present embodiment can with the enforcement of working in coordination of first embodiment.The correlation technique details of mentioning in first embodiment is still effective in the present embodiment, in order to reduce repetition, repeats no more here.Correspondingly, the correlation technique details of mentioning in the present embodiment also can be applicable in first embodiment.
Persons of ordinary skill in the art may appreciate that the respective embodiments described above are to realize specific embodiments of the invention, and in actual applications, can do various changes to it in the form and details, and without departing from the spirit and scope of the present invention.
Claims (12)
1. a vacuum coater is characterized in that, comprises: an initial vacuum transmission cavity, at least two vacuum technology cavity groups arranged side by side, a final vacuum transmission cavity;
Transmission cavity in described initial vacuum links to each other with each described vacuum technology cavity group arranged side by side, near few two substrates of this initial vacuum transmission cavity simultaneously or priority transfer to each described vacuum technology cavity group arranged side by side respectively; A slice substrate transfers in the described vacuum technology cavity group, in each described vacuum technology cavity group, comprises at least one vacuum technology cavity;
Each described vacuum technology cavity group all links to each other with described final vacuum transmission cavity, and the substrate that each described vacuum technology cavity group will be finished coating process transfers to described final vacuum and transmits slice behind the cavity;
Wherein, be provided with the vacuum pressure controller in the initial vacuum transmission cavity, when this vacuum pressure controller carries out identical coating process at need to described each substrate, be uniform pressure in each described vacuum technology cavity group with the pressure-controlling in the described initial vacuum transmission cavity; When this vacuum pressure controller carries out different coating process at need to described each substrate, be the pressure in the target vacuum process cavity group successively with the pressure-controlling in the described initial vacuum transmission cavity, the vacuum technology cavity group of described target vacuum process cavity group for needing instantly substrate is transferred to.
2. vacuum coater according to claim 1 is characterized in that,
When comprising two or more vacuum technology cavity in the described vacuum technology cavity group, each vacuum technology cavity is connected with series system.
3. vacuum coater according to claim 1 is characterized in that, well heater or water cooler are set in the cavity of following any one or its arbitrary combination:
The vacuum technology cavity that comprises in described initial vacuum transmission cavity, the described vacuum technology cavity group, final vacuum transmission cavity.
4. vacuum coater according to claim 1 is characterized in that, described vacuum coater also comprises a vacuum and advances sheet cavity and a vacuum slice cavity;
Described vacuum is advanced the front end that the sheet cavity is connected described initial vacuum transmission cavity; Described vacuum slice cavity is connected the rear end of described final vacuum transmission cavity;
Described initial vacuum transmission cavity advances to receive described at least two substrates the sheet cavity from described vacuum;
The substrate that described final vacuum transmission cavity will be finished coating process transfers to described vacuum slice cavity.
5. vacuum coater according to claim 4 is characterized in that,
Described vacuum is advanced the sheet cavity with described at least two substrates while or is successively transferred to described initial vacuum transmission cavity;
Described final vacuum transmission cavity will be finished the substrate while of coating process or successively transfer to described vacuum slice cavity.
6. vacuum coater according to claim 4, it is characterized in that, described vacuum coater also comprises be used to time sheet loop that recycles substrate frame, and an end in described time sheet loop links to each other with described vacuum slice cavity, and the other end advances the sheet cavity with described vacuum and links to each other.
7. according to each described vacuum coater in the claim 1 to 5, it is characterized in that described substrate is following any one material type:
Glass, stainless steel, carbon steel, aluminium, plastics and pottery.
8. according to each described vacuum coater in the claim 1 to 5, it is characterized in that described vacuum plating comprises the plated film of following any one type:
Physical deposition plated film, electroless plating plated film and evaporation coating.
9. a vacuum coating method is characterized in that, comprises following steps:
Transmit near few two substrates of cavity simultaneously or successively transfer at least two vacuum technology cavity groups arranged side by side respectively by an initial vacuum; A slice substrate transfers in the described vacuum technology cavity group;
By the vacuum technology cavity that comprises in the described vacuum technology cavity group, the substrate that receives is carried out coating process handle;
Described vacuum technology cavity group transfers to slice behind the final vacuum transmission cavity with the substrate of finishing coating process after finishing coating process that substrate is carried out and handling;
Wherein, at least two substrates whiles or priority are being transferred to respectively in the step of two described vacuum technology cavity groups arranged side by side at least, are comprising following substep:
Judge whether each described substrate needs to carry out identical coating process, if then be the uniform pressure in each described vacuum technology cavity group with the pressure-controlling in the described initial vacuum transmission cavity; Need carry out different coating process if judge each substrate, then be the pressure in the target vacuum process cavity group successively with the pressure-controlling in the described initial vacuum transmission cavity, the vacuum technology cavity group of described target vacuum process cavity group for needing instantly substrate is transferred to.
10. vacuum coating method according to claim 9 is characterized in that, if comprise two or more vacuum technology cavitys in the described vacuum technology cavity group, then each vacuum technology cavity carries out art breading to described substrate successively.
11. vacuum coating method according to claim 9 is characterized in that,
Described initial vacuum transmission cavity advances to receive the substrate that need carry out coating process the sheet cavity from vacuum;
The substrate that described vacuum technology cavity group will be finished coating process transfers to and comprises following substep in the step of slice behind the final vacuum transmission cavity:
The substrate that described final vacuum transmission cavity will be finished coating process transfers to vacuum slice cavity, carries out described slice by described vacuum slice cavity.
12. vacuum coating method according to claim 11 is characterized in that,
Described initial vacuum transmission cavity advances to receive the substrate that need carry out coating process the sheet cavity from vacuum simultaneously or successively
Described final vacuum transmission cavity will be finished the substrate while of coating process or successively transfer to described vacuum slice cavity.
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| CN2011104468977A CN103184413A (en) | 2011-12-28 | 2011-12-28 | Vacuum coater and vacuum coating method |
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| CN2011104468977A CN103184413A (en) | 2011-12-28 | 2011-12-28 | Vacuum coater and vacuum coating method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104342624A (en) * | 2014-03-21 | 2015-02-11 | 宁波海燕家电玻璃技术有限公司 | Method for manufacturing high-temperature-resisting black borosilicate glass |
| CN107099781A (en) * | 2017-04-20 | 2017-08-29 | 邵海平 | A kind of filming equipment and film plating process |
| WO2022218142A1 (en) * | 2021-04-16 | 2022-10-20 | 北京北方华创微电子装备有限公司 | Control method for pressure of multiple process chambers, and semiconductor process device |
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Application publication date: 20130703 |