CN103175867A - Checking method and checking system - Google Patents

Checking method and checking system Download PDF

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Publication number
CN103175867A
CN103175867A CN2012105764968A CN201210576496A CN103175867A CN 103175867 A CN103175867 A CN 103175867A CN 2012105764968 A CN2012105764968 A CN 2012105764968A CN 201210576496 A CN201210576496 A CN 201210576496A CN 103175867 A CN103175867 A CN 103175867A
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mentioned
electrode
insulation course
stacked film
defective
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切明健志
吉田清
三浦聪纪
木村爱佳
水田政智
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Nissan Motor Co Ltd
Automotive Energy Supply Corp
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Nissan Motor Co Ltd
Automotive Energy Supply Corp
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Priority to CN201610185921.9A priority Critical patent/CN105866181B/en
Publication of CN103175867A publication Critical patent/CN103175867A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/20Investigating the presence of flaws
    • G01N27/205Investigating the presence of flaws in insulating materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/043Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0096Testing material properties on thin layers or coatings

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

The invention relates to a checking method and a checking system, which can check the defects of the non-through laminated film in a laminated film. The laminated film is formed by the laminated insulating layers on the two sides of a metal layer. The checking method is used for checking the defects of the laminated film. The laminated film is formed by laminating the insulating layers on the two sides of the metal layer. The checking method includes a voltage applying process and a detecting process. In the voltage applying process, on one hand, conductive liquid is applied on the surfaces of the laminated layer, and on the other hand, voltage is applied between a first electrode and a second electrode. The first electrode is contacted with the surface of the laminated film supplying the liquid, and the second electrode is contacted with the end part of the metal layer exposed at the end of the laminated film. In the checking process, the power-up state between the first electrode and the second electrode applied the voltage is detected.

Description

Inspection method and check system
Technical field
The present invention relates to inspection method and check system that the defective to the stacked film that forms at the stacked insulation course in the two sides of metal level checks.
Background technology
In recent years, under this background of environmental protection kinematic mounting, Speeding up development electric automobile (EV) and mixed power electric car (HEV).As these direct motor drive power supplys, the lithium rechargeable battery that concern can repeat to discharge and recharge.Lithium rechargeable battery is accommodated the insulativity case member with generating element and is formed, and wherein this generating element is folded laminar positive pole and negative pole multilayer and forms across membrane layer.
As relevant therewith technology, this viewpoint of reliability based on the insulativity parts that improve film-form has proposed following patent documentation 1 such testing fixture has been shown.The disclosed testing fixture of patent documentation 1 has: the first electrode, and its mounting is as the insulativity parts that check object; Electrolytic solution provides section, and its top to the insulativity parts provides electrolytic solution; And second electrode, its surface with the insulativity parts contacts.According to this structure, in the situation that the insulativity parts have formed through hole, therefore if apply voltage between the first electrode and the second electrode, the first electrode and the second electrode are switched on by electrolytic solution, can detect the defectives such as the pin hole that connects the insulativity parts, damage.
Patent documentation 1: TOHKEMY 2006-275816 communique
Summary of the invention
The problem that invention will solve
Yet, in above-mentioned testing fixture, dispose respectively the first and second electrodes in face side and the rear side of insulativity parts.Therefore, in above-mentioned testing fixture, there is following problem: the defective such as pin hole, damage that can't detect for the stacked film of the insulativity that forms at the stacked insulation course in the two sides of metal level non-through stacked film.
The present invention completes be used to addressing the above problem.Thereby its purpose is to provide a kind of inspection method and check system, can check for the stacked film that forms at the stacked insulation course in the two sides of metal level the defective of non-through stacked film.
For the scheme of dealing with problems
Reach by the following method above-mentioned purpose of the present invention.
Inspection method of the present invention is the inspection method that the defective to stacked film checks, this stacked film is to form by stacked insulation course on the two sides of metal level, this inspection method is characterised in that, comprise: voltage applies operation, surface to above-mentioned stacked film provides conductive liquid on one side, on one side to applying voltage between the first electrode and the second electrode, wherein, this first electrode contacts with the surface of the above-mentioned stacked film that is provided this liquid, and this second electrode contacts with the end of the above-mentioned metal level that exposes from the end of above-mentioned stacked film; And the detection operation, detect and be applied in above-mentioned first electrode of above-mentioned voltage and the "on" position between above-mentioned the second electrode.
Check system of the present invention is the check system for the defective that checks stacked film, this stacked film is to form by stacked insulation course on the two sides of metal level, this check system is characterised in that to have: liquid carrying confession section, and its surface to above-mentioned stacked film provides conductive liquid; The first electrode, its surface with the above-mentioned stacked film that is provided aforesaid liquid contacts; The second electrode, its end with the above-mentioned metal level that exposes from the end of above-mentioned stacked film contacts; Voltage application portion, it is to applying voltage between above-mentioned the first electrode and above-mentioned the second electrode; And test section, its detection has been applied in above-mentioned first electrode of above-mentioned voltage and the "on" position between above-mentioned the second electrode.
The effect of invention
According to the present invention, detect the "on" position between the end of the metal level that the surface of stacked film and end from stacked film expose, so can check the defective of non-through stacked film.
Description of drawings
Figure 1A ~ Fig. 1 C utilizes the figure of the defective of stacked film that the related check system of an embodiment of the invention checks and stacked film for explanation.
Fig. 2 means the figure of the Sketch of the check system that an embodiment of the invention are related.
Fig. 3 A ~ Fig. 3 B is the partial enlarged drawing of Fig. 2.
Fig. 4 means the process flow diagram of the process of the inspection processing of being carried out by the check system shown in Fig. 2.
Fig. 5 A ~ Fig. 5 B is the figure for the vibration between explanation the first probe and the second probe.
Fig. 6 means the figure of the relation between the degree of depth of the time of penetration of electrode solution and defective.
Fig. 7 means the process flow diagram of the process that the related inspection of variation is processed.
Fig. 8 A ~ Fig. 8 B means the figure of the impedance waveform between the probe of first in the situation that applies low-voltage and the second probe.
Description of reference numerals
10: stacked film; 20: metal level; 30: sealant (insulation course); 40: protective seam (insulation course); 41: the first insulation courses (the first insulation course); 42: the second insulation courses (the second insulation course); 50a, 50b, 50c: defective; 100: check system; 110: the first probes (the first electrode, liquid carrying confession section); 111: liquid case section; 112: electrode-fixing section; 113: Porous rubber section (porous part); 120: the second probes (the second electrode); 130: voltage bringing device (voltage application portion, test section); 140: arithmetic unit (test section, calculating part)
Embodiment
Below, illustrate referring to the drawings embodiments of the present invention.In the present embodiment, illustrate kind and the degree of depth thereof that checks the defective that exists at the stacked film of lithium rechargeable battery with check system of the present invention and inspection method.In addition, in the drawings, identical parts have been used identical Reference numeral.
Figure 1A ~ Fig. 1 C utilizes the figure of the defective of stacked film that the related check system of one embodiment of the present invention checks and stacked film for explanation.As shown in Figure 1, the stacked film 10 of present embodiment has metal level 20, is formed at the sealant 30 of one side of metal level 20 and the protective seam 40 that is formed at the another side of metal level 20.
Metal level 20 is formed by aluminium, stops electrolytic solution, gas.Sealant 30 is formed by polypropylene (PP), is used for the mutual welding of two stacked films 10.
Protective seam 40 has the first insulation course 41 of protection metal level 20 and the second insulation course 42 that forms between the first insulation course 41 and metal level 20.The first insulation course 41 is formed by polyethylene terephthalate (PET).The second insulation course 42 is formed by nylon, is used for improving the connectivity between the first insulation course 41 and metal level 20.In addition, the material of formation metal level 20, sealant 30, the first insulation course 41 and the second insulation course 42 is not limited to above-mentioned material.
Form defective 50a, 50b, the 50c such as pin hole, damage in the stacked film 10 with this structure.According to its degree of depth, these defectives 50a, 50b, 50c are categorized as three kinds.
At this, the first defective is the defective 50a (with reference to Figure 1A) of non-through the first insulation course 41, the second defective arrives the defective 50b (with reference to Figure 1B) of the part of the second insulation course 42 for connecting the first insulation course 41, the 3rd defective arrives the defective 50c (with reference to Fig. 1 C) of metal level 20 for connecting the first and second insulation courses 41,42.
Laminar positive pole and negative pole are housed in patch laminate film 10 and in the case member that forms, form thus lithium rechargeable battery 200 (with reference to Fig. 2) across the generating element that the stacked multilayer of barrier film forms.In the present embodiment, the defective of the stacked film 10 on inspection lithium rechargeable battery 200 surfaces.The following describes the check system of the defective that checks above-mentioned stacked film 10.
Fig. 2 means the figure of the Sketch of the check system that an embodiment of the invention are related, and Fig. 3 A ~ Fig. 3 B is the partial enlarged drawing of Fig. 2.As shown in Figures 2 and 3, the check system 100 of present embodiment possesses the first and second probes 110,120, voltage bringing device 130 and arithmetic unit 140.
The first probe 110 contacts while the surface that provides conductive liquid with stacked film 10.The first probe 10 has liquid case section 111, electrode-fixing section 112 and Porous rubber section 113.Conductive liquid take ethanol as principal ingredient (below be called electrode solution) is accommodated by liquid case section 111.Electrode-fixing section 112 is formed by ferrite, and inside maintains copper cash (not shown).In addition, electrode-fixing section 112 prevent from liquid case section 111 the electrode solution volatilization, discharge.Porous rubber section 113 is formed by the Porous elastomeric material, keeps electrode solution.Porous rubber section 113 is pressed into the surface (with reference to Fig. 3 A) of stacked film 10, provides electrolytic solution to the surface of stacked film 10.
The second probe 120 contacts with end face 20e (Fig. 3 B) from the metal level 20 of the end face 10e of stacked film 10 exposure.The second probe 120 is formed by the conducting rubber material with V word shape slot part, and the end of clamping lithium rechargeable battery 200 contacts with end face 20e from the metal level 20 of the end face 10e exposure of stacked film 10.
Voltage bringing device 130 applies fixing voltage between first probe the 110 and second probe 120.The positive side of voltage bringing device 130 is connected with the first probe 110, and the minus side of voltage bringing device 130 is connected with the second probe 120.In addition, voltage bringing device 130 has the function as the impedance measurement machine, can measure the resistance value between the first and second probes 110,120.
Arithmetic unit 140 detects the defective that exists in stacked film 10.Arithmetic unit 140 is determined the kind of the defective of existence in stacked film 10 according to the resistance value between the first and second probes 110,120.In addition, arithmetic unit 140 detects time till the resistance value between the first and second probes 110,120 vibrates from the surface of the first probe 110 contact lithium rechargeable batteries 200 (below be called the starting of oscillation time).Store the depth of defect of the degree of depth and the relation of starting of oscillation between the time of expression defective-starting of oscillation tune conversion chart in arithmetic unit 140, can calculate according to the starting of oscillation time degree of depth of defective.
In the check system 100 with said structure, by detecting the "on" position between the first and second probes 110,120, check kind and the degree of depth of the defective of stacked film 10.Below, with reference to the method for Fig. 4 ~ Fig. 6 explanation defective on inspection lithium rechargeable battery 200 surfaces in the check system 100 of present embodiment.
Fig. 4 means the process flow diagram of the process of the inspection processing of being carried out by check system.Before the inspection shown in Fig. 4 is processed, use camera to carry out visual examination to lithium rechargeable battery, be categorized as the lithium rechargeable battery of observing defective and the lithium rechargeable battery of not observing defective.In the inspection of present embodiment is processed, check kind and the degree of depth of this defective for the lithium rechargeable battery of observing defective.
At first, the second probe 120 contact with the end of lithium rechargeable battery 200 (step S101).In the present embodiment, by the conducting rubber material with V word shape slot part consist of second the probe 120 clamping lithium rechargeable batteries 200 the end.The end of the second probe 120 clamping lithium rechargeable batteries 200, the end face 20e and second of the metal level 20 that exposes from the end face 10e of stacked film 10 thus pops one's head in and 120 contacts.
Then, the first probe 110 contact with the surface of lithium rechargeable battery 200 (step S102).In the present embodiment, the Porous rubber section 113 of the first probe 110 is pressed into the zone of the defective that comprises stacked film 10.Porous rubber section 113 keeps electrode solution, therefore is pressed into stacked film 10 by Porous rubber section 113, oozes out from Porous rubber section 113 surface that electrode solution is provided to stacked film 10.The first probe 110 contacts with the surface of lithium rechargeable battery 200, and applies fixing voltage by voltage bringing device 130 between the first and second probes 110,120.
Then, judge whether the resistance value between the first and second probes 110,120 is setting following (step S103).In the present embodiment, measure the resistance value between the first and second probes 110,120 that applied fixed voltage, judge whether resistance value is below setting (determined level).At this, setting is for the "on" position between judgement the first and second probes 110,120 and the value of state of insulation, is for example 50 Ω.
In the situation that the resistance value that is judged as between the first and second probes 110,120 is not (step S103: "No"), as being in state of insulation between the first and second probes 110,120, transfer to the processing of step S105 below setting.
On the other hand, in the situation that the resistance value that is judged as between the first and second probes 110,120 is (step S103: "Yes"), be judged as substandard products (step S104), end process below setting.In the present embodiment, be in "on" position between the first and second probes 110,120, be judged as and have the defective 50c (with reference to Fig. 1 C) that connects the first and second insulation courses 41,42 arrival metal levels 20 in stacked film 10.Exist the lithium rechargeable battery 200 of the defective 50c that arrives metal level 20 to be judged as substandard products.
As mentioned above, according to the processing shown in the step S101 of Fig. 4 ~ S104, detect the "on" positions between the first and second probes 110,120.By detecting the "on" position between the first and second probes 110,120, detect and have the defective 50c that connects the first and second insulation courses 41,42 arrival metal levels 20 in stacked film 10.
On the other hand, in the processing shown in step S103, in the situation that the resistance value that is judged as between the first and second probes 110,120 is not (step S103: "No"), judge whether to have occured vibration (step S105) below setting.In the present embodiment, the first and second cataclysmal vibrations of resistance value of popping one's head between 110,120 have been judged whether to occur.
Fig. 5 is the figure for the vibration between explanation the first and second probes.Fig. 5 A means the figure that the impedance waveform of vibration does not occur, and Fig. 5 B means the figure of the impedance waveform that vibration occurs.The longitudinal axis of Fig. 5 A and Fig. 5 B is resistance value, and transverse axis is the time.In the situation that exist the defective 50b (with reference to Figure 1B) of a part that connects first insulation course 41 arrival the second insulation courses 42 to vibrate in stacked film 10.Electrode solution take ethanol as principal ingredient is penetrated into the second insulation course 42 that is made of nylon, if therefore electrode solution is penetrated into the second insulation course 42 and arrives metal level 20, is changed to "on" position from state of insulation between the first and second probes 110,120.Can vibrate when being changed to "on" position from state of insulation between the first and second probes 110,120.Electrode solution will just be penetrated into the second insulation course 42 through some times, if through certain hour (for example a few minutes), and the roughly vanishing of resistance value between the first and second probes 110,120.Vibration is to be caused by the state of peeling off between metal level 20 and the second insulation course 42.
In processing shown in step S105, in the situation that be judged as, vibration (step S105: "No"), transfer to the processing of step S109 occurs not.
On the other hand, in the situation that be judged as vibration (step S105: "Yes"), detect vibration time of origin (step S106) occured.In the present embodiment, for the degree of depth of the defective 50b that calculates a part that arrives the second insulation course 42, detect from the surface of the first probe 110 contact lithium rechargeable batteries 200 the time (starting of oscillation time) till vibrate.
Then, calculate the degree of depth (step S107) of defective 50b.In the present embodiment, according to the detected starting of oscillation time in the processing shown in step S106, calculate the degree of depth of the defective 50b of a part that arrives the second insulation course 42.
Fig. 6 means the figure of the relation between the degree of depth of the time of penetration of electrode solution and defective.The longitudinal axis of Fig. 6 is the degree of depth of defective, and transverse axis is the time of penetration of electrode solution.As shown in Figure 6, arrive the degree of depth and the darker time of penetration of the degree of depth that time of penetration that electrode solution is penetrated into the second insulation course 42 has following relation: defective 50b of defective 50b of a part of the second insulation course 42 shorter.Thereby, the degree of depth of the defective of making expression in advance and the depth of defect of the relation of starting of oscillation between the time-starting of oscillation tune conversion chart, thus can be according to by in the processing shown in step S106 and the detected starting of oscillation time is calculated the degree of depth of defective 50b.
Then, (step S108), end process are repaired in indication.In the present embodiment, when having the defective 50b of a part that arrives the second insulation course 42 in stacked film 10, indication is repaired.In addition, in the situation that there is the defective 50b of a part that arrives the second insulation course 42 in stacked film 10, can not get sufficient water resistance characteristic.
As mentioned above, according to the processing shown in the step S105 of Fig. 4 ~ step S108, electrode solution sees through the second insulation course 42 and arrives metal level 20, detects thus between the first and second probes 110,120 and is changed to "on" position from state of insulation.Be changed to "on" position by detecting between the first and second probes 110,120 from state of insulation, detect the defective 50b that has a part that arrives the second insulation course 42 in stacked film 10.In addition, calculate the degree of depth of defective 50b by detecting the starting of oscillation time.
On the other hand, in the processing shown in step S105, in the situation that be judged as, vibration (step S105: "No"), judge whether through stipulated time (step S109) occurs not.At this, the stipulated time is enough to confirm the time of vibration does not occur between the first and second probes 110,120, is for example five minutes.
Do not pass through the stipulated time (step S109: "No"), turn back to the processing of step S105 in the situation that be judged as.
On the other hand, in the situation that be judged as through stipulated time (step S109: "Yes"), indicate and repair (step S110), end process.In the present embodiment, keep state of insulation (with reference to Fig. 5 A) between the first and second probes 110,120, have the defective 50a (with reference to Figure 1A) of non-through the first insulation course 41 in stacked film 10, indication is repaired.
As mentioned above, according to the step S109 of Fig. 4 and the processing shown in step S110, do not detect the "on" position between the first and second probes 110,120, detect thus as there being the defective 50a of non-through the first insulation course 41 in stacked film 10.
And, according to check system and the inspection method of present embodiment, the surface by detecting stacked film 10 with from the "on" position between the end face 20e of the metal level 20 of the end face 10e exposure of stacked film 10, check the defective of non-through stacked film 10.Specifically, check non-through the first and second insulation courses 41 to be arranged, the 42 defective 50c that arrive metal levels 20, to connect the first insulation course 41 and arrive the defective 50b of a part of the second insulation courses 42 and the defective 50a of non-through the first insulation course 41.
(variation)
In the above-described embodiment, connect by utilizing the first and second vibrations of probe between 110,120, calculating the degree of depth of defective 50b that the first insulation course 41 arrives the part of the second insulation courses 42.Yet, the processing that can also omit the degree of depth of calculating defective 50b.
Fig. 7 means the process flow diagram of the process that the related inspection of variation is processed.In the related inspection of variation is processed, will be applied between the first and second probes 110,120 lower than the voltage (for example 25V) that applies that applies voltage (for example 50V) in above-mentioned embodiment.Owing to applying low-voltage, so surge current diminishes, and can not vibrate between the first and second probes 110,120.
Processing shown in the step S101 of processing shown in step S201 ~ S204 and Fig. 4 ~ S104 is identical, and therefore description thereof is omitted.According to the processing shown in the step S201 of Fig. 7 ~ S204, detect to exist in stacked film 10 and connect the defective 50c (with reference to Fig. 1 C) that the first and second insulation courses 41,42 arrive metal levels 20.
On the other hand, in the processing shown in step S203, be not that below setting, (step S203: "No"), (step S205), end process are repaired in indication in the situation that be judged as resistance value.In this variation, exist in stacked film 10 as the defective 50b (with reference to Figure 1B) of a part that connects first insulation course 41 arrival the second insulation courses 42 or the defective 50a (with reference to Figure 1A) of non-through the first insulation course 41, indication is repaired.
Fig. 8 A ~ Fig. 8 B means the figure of the impedance waveform between the probe of first and second in the situation that applies low-voltage.In the situation that there is the defective 50b of a part that arrives the second insulation course 42 in stacked film 10, if apply voltage between the first and second probes 110,120, be changed to "on" position (with reference to Fig. 8 B) from state of insulation between the first and second probes 110,120.In this variation, by apply low-voltage between the first and second probes 110,120, prevent from vibrating when state of insulation is changed to "on" position between the first and second probes 110,120.In addition, in the situation that there is the defective 50a of non-through the first insulation course 41 in stacked film 10, keep state of insulation (with reference to Fig. 8 A) between the first and second probes 110,120.
According to this structure, do not vibrate and obtain stable impedance waveform, therefore (for example in the second) judges accurately substandard products or repairs at short notice.
Present embodiment as above plays following effect.
(a) in the check system and inspection method of present embodiment, detect the surface of stacked film and the end face of the metal level that exposes from the end face of stacked film between "on" position, therefore can check the defective of non-through stacked film.
(b) in the situation that detect "on" position between the first and second probes, be judged as and exist connect the defective that the first and second insulation courses arrive metal levels.Thereby can check non-through stacked film but the defective of arrival metal level.
(c) be penetrated into the second insulation course and arrive metal level by electrode solution, being changed to "on" position in the situation that detect between the first and second probes from state of insulation, being judged as the defective that has a part that connects first insulation course arrival the second insulation course.Thereby can check the defective that does not arrive metal level.
(d) by detecting from the surface to stacked film begins to provide electrode solution the time till vibrate, calculate the degree of depth of defective.Thereby do not destroy stacked film, just can calculate the degree of depth of the defective of a part that connects first insulation course arrival the second insulation course.
(e) apply voltage in the mode that prevents to vibrate between the first and second probes.Thereby, can check accurately at short notice to connect the defective that the first and second insulation courses arrive the defective of metal level and do not arrive metal level.Its result can be applied to the On line inspection in the installation procedure of lithium rechargeable battery.
(f) the first probe comprises the Porous rubber section that keeps electrode solution, therefore is pressed into the surface of stacked film by the Porous rubber section with the first probe, can provide electrode solution to stacked film.
(g) the second probe is the conductive elastic parts with V word shape slot part of the end of clamping stacked film, does not therefore damage the end of stacked film, and the end face of the metal level that just can expose with the end face from stacked film contacts.
In an embodiment as above, check system of the present invention and inspection method have been described.Yet, certainly can be in the scope of its technological thought, those skilled in the art suitably append, are out of shape and omit the present invention.
For example, in the above-described embodiment, by carrying out with camera the stacked film that visual examination has confirmed to exist defective in advance, exist the stacked film of defective to carry out the inspection of kind and the degree of depth of defective by check system of the present invention to these.Yet, also can come direct inspection whether to have defective by check system of the present invention, and not carry out the visual examination of camera.
In addition, in the above-described embodiment, by measuring resistance value between the first and second probes, detect the "on" position between the first and second probes.Yet, also can by measure first and second the probe between current value detect first and second the probe between "on" position.
In addition, in the above-described embodiment, the second probe contacts with end face from the end of the metal level of the end face exposure of the end of stacked film.Yet, can also remove first and second insulation courses of end of stacked film and the end that makes metal level exposes from the end of stacked film, the second probe is contacted with the end of metal level.
In addition, in the above-described embodiment, the first probe has liquid case section and a Porous rubber section, provides electrode solution to the surface of stacked film.Yet, also can the liquid generator be set dividually with the first probe, the surface from this liquid generator to stacked film provides electrode solution.
In addition, in the above-described embodiment, the second probe is formed by the conducting rubber material with V word shape slot part.Yet the second probe can be also the metal-made probe.
In addition, in the above-described embodiment, use ethanol as conductive liquid.Yet conductive liquid is not limited to ethanol, can use the various liquid with electric conductivity.

Claims (14)

1. inspection method checks that to the defective of stacked film this stacked film is to form by stacked insulation course on the two sides of metal level, and this inspection method is characterised in that, comprising:
Voltage applies operation, surface to above-mentioned stacked film provides conductive liquid on one side, on one side to applying voltage between the first electrode and the second electrode, wherein, this first electrode contacts with the surface of the above-mentioned stacked film that is provided this liquid, and this second electrode contacts with the end of the above-mentioned metal level that exposes from the end of above-mentioned stacked film; And
Detect operation, detect and be applied in above-mentioned first electrode of above-mentioned voltage and the "on" position between above-mentioned the second electrode.
2. inspection method according to claim 1, is characterized in that,
Be "on" position between above-mentioned the first electrode and above-mentioned the second electrode in the situation that detect in above-mentioned detection operation, be judged as and have the defective that connects the above-mentioned metal level of above-mentioned insulation course arrival in above-mentioned stacked film.
3. inspection method according to claim 1 and 2, is characterized in that,
Above-mentioned insulation course comprises the first insulation course of protecting above-mentioned metal level and is formed at the second insulation course between above-mentioned the first insulation course and above-mentioned metal level, and aforesaid liquid is the liquid that is penetrated into above-mentioned the second insulation course,
In the situation that because aforesaid liquid is penetrated into above-mentioned the second insulation course and arrives above-mentioned metal level and detect in above-mentioned detection operation and be changed to "on" position from state of insulation between above-mentioned the first electrode and above-mentioned the second electrode, be judged as to exist in above-mentioned stacked film to connect the defective that above-mentioned the first insulation course arrives the part of above-mentioned the second insulation course.
4. inspection method according to claim 3, is characterized in that,
When aforesaid liquid is penetrated into above-mentioned the second insulation course and arrives above-mentioned metal level, vibrate between above-mentioned the first electrode and above-mentioned the second electrode,
Above-mentioned inspection method also comprises:
Measure operation, the time that begins to provide from the surface to above-mentioned stacked film till aforesaid liquid plays the above-mentioned vibration of generation is provided; And
Calculation process, with reference to the expression degree of depth of defective and the relation table of the relation between detection time, the above-mentioned time that obtains according to detection is calculated the degree of depth of defective that above-mentioned the first insulation course of above-mentioned perforation arrives the part of above-mentioned the second insulation course.
5. inspection method according to claim 3, is characterized in that,
In the mode that prevents to vibrate to applying above-mentioned voltage between above-mentioned the first electrode and above-mentioned the second electrode,
In above-mentioned detection operation, be "on" position between above-mentioned the first electrode and above-mentioned the second electrode in the situation that be right after above-mentioned stacked film is begun to detect after aforesaid liquid is provided, be judged as and have the defective that connects above-mentioned the first insulation course and above-mentioned the second above-mentioned metal level of insulation course arrival in above-mentioned stacked film, on the other hand, be "on" position between above-mentioned the first electrode and above-mentioned the second electrode in the situation that be right after above-mentioned stacked film is begun to provide not detect after aforesaid liquid, be judged as the defective that existence in above-mentioned stacked film does not arrive above-mentioned metal level.
6. inspection method according to claim 1 and 2, is characterized in that,
Above-mentioned the first electrode comprises for the porous part that keeps aforesaid liquid.
7. inspection method according to claim 1 and 2, is characterized in that,
Above-mentioned the second electrode is the conductive elastic parts with V word shape slot part that are used for the end of the above-mentioned stacked film of clamping.
8. check system is used for checking the defective of stacked film, and this stacked film is to form by stacked insulation course on the two sides of metal level, and this check system is characterised in that to have:
Liquid carrying confession section, its surface to above-mentioned stacked film provides conductive liquid;
The first electrode, its surface with the above-mentioned stacked film that is provided aforesaid liquid contacts;
The second electrode, its end with the above-mentioned metal level that exposes from the end of above-mentioned stacked film contacts;
Voltage application portion, it is to applying voltage between above-mentioned the first electrode and above-mentioned the second electrode; And
Test section, its detection have been applied in above-mentioned first electrode of above-mentioned voltage and the "on" position between above-mentioned the second electrode.
9. check system according to claim 8, is characterized in that,
In the situation that above-mentioned test section detects as being "on" position between above-mentioned the first electrode and above-mentioned the second electrode, be judged as and have the defective that connects the above-mentioned metal level of above-mentioned insulation course arrival in above-mentioned stacked film.
10. according to claim 8 or 9 described check systems, is characterized in that,
Above-mentioned insulation course comprises the first insulation course of protecting above-mentioned metal level and is formed at the second insulation course between above-mentioned the first insulation course and above-mentioned metal level, and aforesaid liquid is the liquid that is penetrated into above-mentioned the second insulation course,
In the situation that because aforesaid liquid is penetrated into above-mentioned the second insulation course and arrives above-mentioned metal level and above-mentioned test section detects and to be changed to "on" position between above-mentioned the first electrode and above-mentioned the second electrode from state of insulation, be judged as the defective that has a part that connects above-mentioned the first above-mentioned the second insulation course of insulation course arrival in above-mentioned stacked film.
11. check system according to claim 10 is characterized in that,
When being penetrated into above-mentioned the second insulation course and arriving above-mentioned metal level, aforesaid liquid vibrates between above-mentioned the first electrode and above-mentioned the second electrode,
Above-mentioned check system also has:
Measurement section, time that begins to provide from the surface to above-mentioned stacked film till aforesaid liquid plays the above-mentioned vibration of generation is provided for it; And
Calculating part, it is with reference to the expression degree of depth of defective and the relation table of the relation between detection time, and the above-mentioned time that obtains according to detection is calculated the degree of depth of defective that above-mentioned the first insulation course of above-mentioned perforation arrives the part of above-mentioned the second insulation course.
12. check system according to claim 10 is characterized in that,
Apply above-mentioned voltage in the mode that prevents to vibrate between above-mentioned the first electrode and the second electrode,
In the situation that above-mentioned test section is "on" position being right after to detect after above-mentioned stacked film is begun to provide aforesaid liquid between above-mentioned the first electrode and above-mentioned the second electrode, be judged as and have the defective that connects above-mentioned the first insulation course and above-mentioned the second above-mentioned metal level of insulation course arrival in above-mentioned stacked film, on the other hand, be "on" position between above-mentioned the first electrode and above-mentioned the second electrode in the situation that be right after above-mentioned stacked film is begun to provide not detect after aforesaid liquid, be judged as the defective that existence in above-mentioned stacked film does not arrive above-mentioned metal level.
13. according to claim 8 or 9 described check systems is characterized in that,
Above-mentioned the first electrode comprises for the porous part that keeps aforesaid liquid.
14. according to claim 8 or 9 described check systems is characterized in that,
Above-mentioned the second electrode is the conductive elastic parts with V word shape slot part that are used for the end of the above-mentioned stacked film of clamping.
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