CN103166595A - Impedance matcher, semiconductor equipment and impedance matching method - Google Patents

Abstract

The invention discloses an impedance matcher, semiconductor equipment and an impedance matching method. The impedance matcher comprises an impedance sensor, an impedance matching network, a computing control unit and an execution unit. The impedance sensor comprises a sampling module, a filter module and a signal processing module. The sampling module is used for detecting an input end of the impedance matching network and obtains impedance detecting signals. The filter module is used for filtering out interference signals with specific frequency in the impedance detecting signals. The signal processing module is used for carrying out computing processing on the impedance detecting signals after filter processing to generate input impedance relevant signals of the impedance matching network. The computing control unit is used for carrying out computing processing on the input impedance relevant signals to generate impedance adjusting data. The execution unit is used for adjusting the impedance matching network according to the impedance adjusting data so that input impedance of the adjusted impedance matching network and output impedance of a radio-frequency power supply are matched in a conjugate mode. The impedance matcher can accurately achieve impedance matching.

Description

Impedance matching box, semiconductor equipment and impedance matching methods

Technical field

The present invention relates to microelectronics technology, particularly a kind of impedance matching box, semiconductor equipment and impedance matching methods.

Background technology

Plasma is widely used in the production process of semiconductor device.In plasma apparatus, radio-frequency power supply provides radio frequency energy to produce plasma to reaction chamber.The atom, molecule and the free radical isoreactivity particle that contain a large amount of electronics, ion, excitation state in plasma, these active particles interact with the wafer that is placed in reaction chamber and expose to the open air under plasma environment, make wafer surface that various physical and chemical reactions occur, thereby the wafer surface performance is changed, complete etching or other technical processs of wafer.

Impedance phase coupling for the output impedance that makes radio-frequency power supply and reaction chamber, an impedance matching box (Impedance Match) need to be set between radio-frequency power supply and reaction chamber, radio-frequency power supply provides radio frequency energy by impedance matching box to reaction chamber, and the radio frequency energy of radio-frequency power supply is loaded in reaction chamber by impedance matching box.Fig. 1 is a kind of structural representation of impedance matching box, as shown in Figure 1, this impedance matching box can comprise impedance transducer 51, the impedance matching network 52 that is connected with impedance transducer 51, the Operations Analysis 53 that is connected with impedance matching network 52 and the performance element 54 that is connected with Operations Analysis 53, wherein, impedance matching network 52 also is connected with radio-frequency power supply with reaction chamber 55 and is connected.Impedance transducer 51 is used for the input of impedance matching box is measured the relevant signal of input impedance of impedance matching network 52, Operations Analysis 53 carries out calculation process according to the output impedance of radio-frequency power supply 56 to the relevant signal of input impedance and generates the impedance adjustment data, and performance element 54 according to the impedance adjustment data, impedance network is regulated so that the output impedance conjugate impedance match of the input impedance of the impedance matching network 52 after regulating and radio-frequency power supply 56.Wherein, the input impedance of impedance matching network is that the input of impedance matching network is to the impedance of reaction chamber.Performance element 54 is regulated impedance matching network according to the impedance adjustment data and is made the input impedance of impedance matching network and the output impedance conjugate impedance match of radio-frequency power supply, thereby reaches the purpose of impedance matching.For example: if the output impedance of radio-frequency power supply is 50 Ω, the input impedance of impedance matching network is 40 Ω, can make the input impedance of impedance matching network according to the impedance matching network that the impedance adjustment data are regulated impedance matching box inside is 50 Ω, thereby make the input impedance of impedance matching network and the output impedance conjugate impedance match of radio-frequency power supply, to reach the purpose of impedance matching.

In plasma etch process, along with the raising to technological requirement, increasing plasma apparatus adopts the top-bottom electrode structures of double frequency mode.Fig. 2 is a kind of structural representation of plasma apparatus, as shown in Figure 2, this plasma equipment comprises reaction chamber 1, electrostatic chuck 6, inductance-coupled coil 8, the first impedance matching box 2, high frequency electric source 3, the second impedance matching box 4 and low-frequency power 5, electrostatic chuck 6 is arranged in reaction chamber 1, and wafer 9 is installed on electrostatic chuck 6.Reaction chamber 1 top is provided with medium window 7, and inductance-coupled coil 8 is positioned at the top of medium window 7.High frequency electric source 3 is connected with electrostatic chuck 6 by the first impedance matching box 2, and low-frequency power 5 is connected with inductance-coupled coil 8 by the second impedance matching box 4.Wherein, the frequency of low-frequency power 5 can be 2MHz, and the frequency of high frequency electric source 3 can be 13.56MHz.The first impedance matching box 2 and the second impedance matching box 4 can adopt the impedance matching box in Fig. 1, and difference is: the input impedance of the first impedance matching box 2 and the second impedance matching box 4 is different.

But, plasma apparatus adopts the structure of Double RF power supply, two radio-frequency power supplies can produce the double frequency disturbing effect, the double frequency disturbing effect makes impedance transducer can't measure accurately the input impedance of impedance matching box, for example: high-frequency interferencing signal can disturb the impedance transducer in the second impedance matching box, makes this impedance transducer can't measure accurately the relevant signal of input impedance of the second impedance matching box; Low-frequency interference signal can disturb the impedance transducer in the first impedance matching box, make this impedance transducer can't measure accurately the relevant signal of input impedance of the first impedance matching box, reduced the certainty of measurement of impedance transducer, thereby made impedance matching box can't realize impedance matching.

Summary of the invention

The invention provides a kind of impedance matching box, semiconductor equipment and impedance matching methods, it can be eliminated when equipping due to the plasma etching that adopts the double frequency top-bottom electrode structures, impedance transducer is subject to the interference of two-frequency signal and can't measures accurately the problem of the relevant signal of input impedance of impedance matching network, improve the certainty of measurement of impedance transducer, the described impedance matching network of fine adjustment, thus make impedance matching box realize accurately impedance matching.

For achieving the above object, the invention provides a kind of impedance matching box, comprise impedance transducer, with radio-frequency power supply be connected impedance matching network, the Operations Analysis that is connected with described impedance transducer and the performance element that is connected with described Operations Analysis and described impedance matching network that impedance transducer is connected, described impedance transducer comprises: the sampling module that is connected with described impedance matching network, the filtration module that is connected with described sampling module and the signal processing module that is connected with described filtration module and described Operations Analysis;

Described sampling module is used for the input of described impedance matching network is measured, and draws impedance measurement signal;

Described filtration module is used for that described impedance measurement signal is carried out filtering and processes, with the interference signal of the characteristic frequency in the described impedance measurement signal of filtering;

Described signal processing module, the impedance measurement signal after being used for filtering is processed carries out calculation process, generates the relevant signal of input impedance of described impedance matching network;

Described Operations Analysis is used for according to the output impedance of described radio-frequency power supply, the relevant signal of described input impedance being carried out calculation process, generates the impedance adjustment data;

Described performance element is used for according to described impedance adjustment data, described impedance matching network being regulated, so that the input impedance of the described impedance matching network after regulating and the output impedance conjugate impedance match of described radio-frequency power supply.

Further, described filtration module comprises low-pass filter circuit, high-frequency band pass filter circuit or high frequency rejector circuit, and the interference signal of described characteristic frequency comprises high-frequency interferencing signal.

Further, if described filtration module comprises low-pass filter circuit, described low-pass filter circuit comprises the first inductance and the first electric capacity;

The input of described the first inductance is connected to described sampling module, the output of described the first inductance is connected to input and the described signal processing module of described the first electric capacity, the input of the first electric capacity is connected to described signal processing module, the output head grounding of described the first electric capacity.

Further, if described filtration module comprises the high-frequency band pass filter circuit, described high-frequency band pass filter circuit comprises the second electric capacity, the second inductance, the 3rd electric capacity, the 3rd inductance, the 4th electric capacity and the 4th inductance;

The input of described the second electric capacity is connected to described sampling module, the output of described the second electric capacity is connected to the input of described the second inductance, the input of the input of the input of the output of described the second inductance, described the 3rd electric capacity, described the 3rd inductance and described the 4th electric capacity interconnects, the output head grounding of described the 3rd electric capacity, the output head grounding of described the 3rd inductance, the output of described the 4th electric capacity is connected to the input of described the 4th inductance, and the output of described the 4th inductance is connected to described signal processing module.

Further, if described filtration module comprises described high frequency rejector circuit, described high frequency band resistance circuit comprises the 5th electric capacity, the 5th inductance, the 6th electric capacity, the 6th inductance, the 7th electric capacity and the 7th inductance;

described the 5th inductance be connected the 5th Capacitance parallel connection and connect, described the 7th inductance be connected the 7th Capacitance parallel connection and connect, the input of the input of described the 5th inductance and described the 5th electric capacity is connected to described sampling module, the output of described the 5th inductance, the output of described the 5th electric capacity, the input of described the 6th electric capacity, the input of the input of described the 7th inductance and described the 7th electric capacity interconnects, the output of described the 6th electric capacity is connected to the input of described the 6th inductance, the output head grounding of described the 6th inductance, the output of the output of described the 7th electric capacity and described the 7th inductance is connected to described signal processing module.

Further, described filtration module comprises high-pass filtering circuit, low frequency bandwidth-limited circuit or low frequency rejector circuit, and the interference signal of described characteristic frequency comprises low-frequency interference signal.

Further, if described filtration module comprises high-pass filtering circuit, described high-pass filtering circuit comprises the 8th electric capacity and the 8th inductance;

The input of described the 8th electric capacity is connected to described sampling module, the output of described the 8th electric capacity is connected to input and the described signal processing module of described the 8th inductance, the input of the 8th inductance is connected to described signal processing module, the output head grounding of described the 8th inductance.

Further, if described filtration module comprises the low frequency bandwidth-limited circuit, described low frequency bandwidth-limited circuit comprises the 9th electric capacity, the 9th inductance, the tenth electric capacity, the tenth inductance, the 11 electric capacity and the 11 inductance;

The input of described the 9th electric capacity is connected to described sampling module, the output of described the 9th electric capacity is connected to the input of described the 9th inductance, the input of the input of the output of described the 9th inductance, described the tenth electric capacity, described the tenth inductance and the input of described the 11 electric capacity interconnect, the output head grounding of described the tenth electric capacity, the output head grounding of described the tenth inductance, the output of described the 11 electric capacity is connected to the input of described the 11 inductance, and the output of described the 11 inductance is connected to described signal processing module.

Further, if described filtration module comprises low frequency rejector circuit, described low-frequency band resistance circuit comprises the 12 electric capacity, the 12 inductance, the 13 electric capacity, the 13 inductance, the 14 electric capacity and the 14 inductance;

described the 12 inductance be connected the 12 Capacitance parallel connection and connect, described the 14 inductance be connected the 14 Capacitance parallel connection and connect, the input of described the 12 inductance and the input of described the 12 electric capacity are connected to described sampling module, the output of described the 12 inductance, the output of described the 12 electric capacity, the input of described the 13 electric capacity, the input of described the 14 inductance and the input of described the 14 electric capacity interconnect, the output of described the 13 electric capacity is connected to the input of described the 13 inductance, the output head grounding of described the 13 inductance, the output of described the 14 electric capacity and the output of described the 14 inductance are connected to described signal processing module.

For achieving the above object, the present invention also provides a kind of semiconductor equipment, comprise: reaction chamber, the first impedance matching box, high frequency electric source, the second impedance matching box and low-frequency power, described high frequency electric source provides higher frequency signal energy by described the first impedance matching box to described reaction chamber, and described low-frequency power provides the low frequency signal energy by described the second impedance matching box to described reaction chamber;

described the first impedance matching box comprises the first impedance transducer, with described high frequency electric source be connected the first impedance matching network that the first impedance transducer is connected, the first Operations Analysis that is connected with described the first impedance transducer and the first performance element that is connected with described the first Operations Analysis and described the first impedance matching network, described the first impedance transducer comprises: the first sampling module that is connected with described the first impedance matching network, the first filtration module that is connected with described the first sampling module and the first signal processing module that is connected with described the first filtration module and described the first Operations Analysis, described the first sampling module is used for the input of described the first impedance matching network is measured, and draws the first impedance measurement signal, described the first filtration module is used for that described the first impedance measurement signal is carried out filtering to be processed, with the low-frequency interference signal in described the first impedance measurement signal of filtering, the first impedance measurement signal after described first signal processing module is used for filtering is processed carries out calculation process, generates the relevant signal of the first input impedance of described the first impedance matching network, described the first Operations Analysis is used for according to the output impedance of described high frequency electric source, the relevant signal of described the first input impedance being carried out calculation process, generates the first impedance adjustment data, described the first performance element is used for according to described the first impedance adjustment data, described the first impedance matching network being regulated, so that the input impedance of described the first impedance matching network after regulating and the output impedance conjugate impedance match of described high frequency electric source,

described the second impedance matching box comprises the second impedance transducer, with described low-frequency power be connected the second impedance matching network that the second impedance transducer is connected, the second Operations Analysis that is connected with described the second impedance transducer and the second performance element that is connected with described the second Operations Analysis and described the second impedance matching network, described the second impedance transducer comprises: with described high frequency electric source be connected the second sampling module that the second impedance matching network is connected, the second filtration module that is connected with described the second sampling module and the secondary signal processing module that is connected with described the second filtration module and described the second Operations Analysis, described the second sampling module is used for the input of described the second impedance matching network is measured, and draws the second impedance measurement signal, described the second filtration module is used for that described the second impedance measurement signal is carried out filtering to be processed, with the high-frequency interferencing signal in described the second impedance measurement signal of filtering, the second impedance measurement signal after described secondary signal processing module is used for filtering is processed carries out calculation process, generates the relevant signal of the second input impedance of described the second impedance matching network, described the second Operations Analysis is used for according to the output impedance of described high frequency electric source, the relevant signal of described the second input impedance being carried out calculation process, generates the second impedance adjustment data, described the second performance element is used for according to described the second impedance adjustment data, described the second impedance matching network being regulated, so that the input impedance of described the second impedance matching network after regulating and the output impedance conjugate impedance match of described high frequency electric source.

Further, described the first filtration module comprises high-pass filtering circuit, low frequency bandwidth-limited circuit or low frequency rejector circuit, and described the second filtration module comprises low-pass filter circuit, high-frequency band pass filter circuit or high frequency rejector circuit.

for achieving the above object, the present invention also provides a kind of impedance matching methods, described method is based on impedance matching box, described impedance matching box comprises impedance transducer, with radio-frequency power supply be connected the impedance matching network that impedance transducer is connected, the Operations Analysis that is connected with described impedance transducer and the performance element that is connected with described Operations Analysis and described impedance matching network, described impedance transducer comprises: the sampling module that is connected with described impedance matching network, the filtration module that is connected with described sampling module and the signal processing module that is connected with described filtration module and described Operations Analysis,

Described method comprises:

Described sampling module is measured the input of described impedance matching network, draws impedance measurement signal;

Described filtration module carries out filtering to described impedance measurement signal to be processed, with the interference signal of the characteristic frequency in the described impedance measurement signal of filtering;

Impedance measurement signal after described signal processing module is processed filtering carries out calculation process, generates the relevant signal of input impedance of described impedance matching network;

Described Operations Analysis carries out calculation process according to the output impedance of described radio-frequency power supply to the relevant signal of described input impedance, generates the impedance adjustment data;

Described performance element is regulated described impedance matching network according to described impedance adjustment data, so that the input impedance of the described impedance matching network after regulating and the output impedance conjugate impedance match of described radio-frequency power supply.

The present invention has following beneficial effect:

1. impedance matching box of the present invention, semiconductor equipment and impedance matching methods can improve the certainty of measurement of impedance transducer, make the described impedance matching network of impedance transducer fine adjustment, thereby make impedance matching box realize accurately impedance matching.

2. impedance matching box of the present invention, semiconductor equipment and impedance matching methods, by filter circuit is set in impedance transducer, make impedance matching box simple in structure, have the characteristics such as low cost, high-performance, easy care, miniaturization, can the most simply solve the two-frequency signal interference problem.

3. impedance matching box of the present invention, semiconductor equipment and impedance matching methods, by filter circuit is set in impedance transducer, rather than filter circuit is arranged in main circuit, makes the structural requirement of filter circuit itself simpler, the circuit load of bearing still less, longer service life.

Description of drawings

Fig. 1 is a kind of structural representation of impedance matching box;

Fig. 2 is a kind of structural representation of plasma apparatus;

The structural representation of the impedance matching box that Fig. 3 provides for the embodiment of the present invention one;

Fig. 4 is the structural representation of a kind of filtration module in Fig. 3;

Fig. 5 is the structural representation of another kind of filtration module in Fig. 3;

Fig. 6 is the structural representation of another kind of filtration module in Fig. 3;

Fig. 7 is the structural representation of another kind of filtration module in Fig. 3;

Fig. 8 is the structural representation of another kind of filtration module in Fig. 3;

Fig. 9 is the structural representation of another kind of filtration module in Fig. 3;

The structural representation of a kind of semiconductor equipment that Figure 10 provides for the embodiment of the present invention seven;

Figure 11 is the structural representation of the first impedance matching box in Figure 10;

Figure 12 is the structural representation of the second impedance matching box in Figure 10;

The flow chart of a kind of impedance matching methods that Figure 13 provides for the embodiment of the present invention eight.

Embodiment

For making those skilled in the art understand better technical scheme of the present invention, below in conjunction with accompanying drawing, impedance matching box provided by the invention, semiconductor equipment and impedance matching methods are described in detail.

the structural representation of the impedance matching box that Fig. 3 provides for the embodiment of the present invention one, as shown in Figure 3, this impedance matching box comprises impedance transducer 11, are connected the impedance matching network 12 that is connected with impedance transducer with radio-frequency power supply, the Operations Analysis 13 that is connected with impedance transducer 11 and the performance element 14 that is connected with Operations Analysis 13 and impedance matching network 12, impedance transducer 11 comprises: the sampling module 111 that is connected with impedance matching network 12, the filtration module 112 that is connected with sampling module 111 and the signal processing module 113 that is connected with filtration module 112 and Operations Analysis 13.Wherein, the radio-frequency power supply (not shown) can provide radio frequency energy to impedance matching network 12.

Sampling module 111 is used for the input 121 of impedance matching network 12 is measured, and draws impedance measurement signal.In the present embodiment, impedance measurement signal is analog signal.

Filtration module 112 is used for that impedance measurement signal is carried out filtering to be processed, with the interference signal of the characteristic frequency in the filtering impedance measurement signal.

Impedance measurement signal after signal processing module 113 is used for filtering is processed carries out calculation process, generates the relevant signal of input impedance of impedance matching network.In the present embodiment, the relevant signal of input impedance is analog signal.

Operations Analysis 13 is used for according to the output impedance of radio-frequency power supply, the relevant signal of input impedance being carried out calculation process, generates the impedance adjustment data.

Performance element 14 is used for according to the impedance adjustment data, impedance matching network 12 being regulated, so that the input impedance of the impedance matching network 12 after regulating and the output impedance conjugate impedance match of radio-frequency power supply, thereby make impedance matching box realize impedance matching.In the present embodiment, the impedance adjustment data are digital signal.

The present invention makes impedance matching box simple in structure by filter circuit is set in impedance transducer, has the characteristics such as low cost, high-performance, easy care, miniaturization, can the most simply solve the two-frequency signal interference problem.

In addition, because filter circuit is not arranged in main circuit, make the structural requirement of filter circuit itself simpler, the circuit load of bearing still less, longer service life.

In the present embodiment, radio-frequency power supply is low-frequency power, and this low-frequency power provides the low frequency signal energy to impedance matching box 12, and high-frequency interferencing signal can disturb impedance transducer, causes impedance transducer to measure impedance matching network 12 accurately.Therefore, the signal of the characteristic frequency of filtration module 112 filterings is high-frequency interferencing signal.Fig. 4 is the structural representation of a kind of filtration module in Fig. 3, as shown in Figure 4, filtration module 112 is low-pass filter circuit, this low-pass filter circuit comprises the first inductance L 1 and the first capacitor C 1, the input 11a of the first inductance L 1 is connected to sampling module 111, the input 11c that the output 11b of the first inductance L 1 is connected to the input 11c of the first capacitor C 1 and signal processing module 113, the first capacitor C 1 is connected to the output 11d ground connection of signal processing module 113, the first capacitor C 1.But the high-frequency interferencing signal in this low-pass filter circuit filtering impedance measurement signal transfers to signal processing module 113 to prevent the high-frequency interferencing signal in impedance measurement signal, do not comprised the high-frequency interferencing signal of interference effect in the impedance measurement signal that signal processing module 113 receives, make signal processing module 113 can generate accurately the relevant signal of input impedance of impedance matching network, thereby make impedance transducer realize measuring accurately the relevant signal of input impedance of impedance matching network.

the embodiment of the present invention two provides a kind of impedance matching box, Fig. 5 is the structural representation of another kind of filtration module in Fig. 3, as shown in Figure 3 and Figure 5, the difference of the impedance matching box in the present embodiment and above-described embodiment one is: filtration module 112 is the high-frequency band pass filter circuit, this high-frequency band pass filter circuit comprises the second capacitor C 2, the second inductance L 2, the 3rd capacitor C 3, the 3rd inductance L 3, the 4th capacitor C 4 and the 4th inductance L 4, the input 12a of the second capacitor C 2 is connected to sampling module 111, the output 12b of the second capacitor C 2 is connected to the input 12c of the second inductance L 2, the output 12d of the second inductance L 2, the input 13a of the 3rd capacitor C 3, the input 14a of the input 13b of the 3rd inductance L 3 and the 4th capacitor C 4 interconnects, the output 13c ground connection of the 3rd capacitor C 3, the output 13d ground connection of the 3rd inductance L 3, the output 14b of the 4th capacitor C 4 is connected to the input 14c of the 4th inductance L 4, the output 14d of the 4th inductance L 4 is connected to signal processing module 113.But the high-frequency interferencing signal in this high-frequency band pass filter circuit filtering impedance measurement signal transfers to signal processing module 113 to prevent the high-frequency interferencing signal in impedance measurement signal, do not comprised the high-frequency interferencing signal of interference effect in the impedance measurement signal that signal processing module 113 receives, make signal processing module 113 can generate accurately the relevant signal of input impedance of impedance matching network, thereby make impedance transducer realize measuring accurately the relevant signal of input impedance of impedance matching network.This high-frequency band pass filter circuit is multi-stage filter circuit, adopt the filtration module of high-frequency band pass filter circuit to have better frequency selectivity, can better reduce high-frequency interferencing signal, make impedance transducer measure more accurately the relevant signal of input impedance of impedance matching network.

the embodiment of the present invention three provides a kind of impedance matching box, Fig. 6 is the structural representation of another kind of filtration module in Fig. 3, as Fig. 3 and shown in Figure 6, the difference of impedance matching box in the present embodiment and embodiment one is: filtration module is high frequency rejector circuit, this high frequency band resistance circuit comprises the 5th capacitor C 5, the 5th inductance L 5, the 6th capacitor C 6, the 6th inductance L 6, the 7th capacitor C 7 and the 7th inductance L 7, the 5th inductance L 5 and the 5th capacitor C 5 are connected in parallel, the 7th inductance L 7 and the 7th capacitor C 7 are connected in parallel, the input 15c of the input 15a of the 5th inductance L 5 and the 5th capacitor C 5 is connected to sampling module 111, the output 15b of the 5th inductance L 5, the output 15d of the 5th capacitor C 5, the input 16a of the 6th capacitor C 6, the input 17c of the input 17a of the 7th inductance L 7 and the 7th capacitor C 7 interconnects, the output 16b of the 6th capacitor C 6 is connected to the input 16c of the 6th inductance L 6, the output 16d ground connection of the 6th inductance L 6, the output 17d of the output 17b of the 7th capacitor C 7 and the 7th inductance L 7 is connected to signal processing module 113.But the high-frequency interferencing signal in this high frequency rejector circuit filtering impedance measurement signal transfers to signal processing module to prevent the high-frequency interferencing signal in impedance measurement signal, do not comprised the high-frequency interferencing signal of interference effect in the impedance measurement signal that signal processing module receives, make signal processing module can generate accurately the relevant signal of input impedance of impedance matching network, thereby make impedance transducer realize measuring accurately the relevant signal of input impedance of impedance matching network.

The embodiment of the present invention four provides a kind of impedance matching box, Fig. 7 is the structural representation of another kind of filtration module in Fig. 3, as Fig. 3 and shown in Figure 7, the difference of the impedance matching box in the present embodiment and above-described embodiment one is: in the present embodiment, radio-frequency power supply is high frequency electric source, this high frequency electric source provides higher frequency signal energy to impedance matching box 12, and high-frequency interferencing signal can disturb impedance transducer, causes impedance transducer to measure impedance matching network 12 accurately.Therefore, the signal of the characteristic frequency of filtration module 112 filterings is low-frequency interference signal.Filtration module 112 is high-pass filtering circuit, this high-pass filtering circuit comprises the 8th capacitor C 8 and the 8th inductance L 8, the input 18b of the 8th capacitor C 8 is connected to sampling module 111, the output 18b of the 8th capacitor C 8 is connected to input 18c and the signal processing module 113 of the 8th inductance L 8, the input 18c of the 8th inductance L 8 is connected to the output 18d ground connection of signal processing module 113, the eight inductance L 8.But the low-frequency interference signal in this high-pass filtering circuit filtering impedance measurement signal transfers to signal processing module 113 to prevent the low-frequency interference signal in impedance measurement signal, do not comprised the low-frequency interference signal of interference effect in the impedance measurement signal that signal processing module 113 receives, make signal processing module 113 can generate accurately the relevant signal of input impedance of impedance matching network, thereby make impedance transducer realize measuring accurately the relevant signal of input impedance of impedance matching network.

The embodiment of the present invention five provides a kind of impedance matching box, Fig. 8 is the structural representation of another kind of filtration module in Fig. 3, as Fig. 3 and shown in Figure 8, the difference of the impedance matching box in the present embodiment and above-described embodiment one is: in the present embodiment, radio-frequency power supply is high frequency electric source, this high frequency electric source provides higher frequency signal energy to impedance matching box 12, and high-frequency interferencing signal can disturb impedance transducer, causes impedance transducer to measure impedance matching network 12 accurately.Therefore, the signal of the characteristic frequency of filtration module 112 filterings is low-frequency interference signal.filtration module 112 is the low frequency bandwidth-limited circuit, this low frequency bandwidth-limited circuit comprises the 9th capacitor C 9, the 9th inductance L 9, the tenth capacitor C 10, the tenth inductance L 10, the 11 capacitor C 11 and the 11 inductance L 11, the input 19a of the 9th capacitor C 9 is connected to sampling module 111, the output 19b of the 9th capacitor C 9 is connected to the input 19c of the 9th inductance L 9, the output 19d of the 9th inductance L 9, the input 20a of the tenth capacitor C 10, the input 20b of the tenth inductance L 10 and the input 21a of the 11 capacitor C 11 interconnect, the output 20c ground connection of the tenth capacitor C 10, the output 20d ground connection of the tenth inductance L 10, the output 21b of the 11 capacitor C 11 is connected to the input 21c of the 11 inductance L 11, the output 21c of the 11 inductance L 11 is connected to signal processing module 113.But the low frequency power in these low frequency bandwidth-limited circuit filtering impedance measurement data transfers to signal processing module 113 to prevent the low frequency power in the impedance measurement data, do not comprised the low-frequency interference signal of interference effect in the impedance measurement signal that signal processing module 113 receives, make signal processing module 113 can generate accurately the relevant signal of input impedance of impedance matching network, thereby make impedance transducer realize measuring accurately the relevant signal of input impedance of impedance matching network.This low frequency bandwidth-limited circuit is multi-stage filter circuit, adopt the filtration module of low frequency bandwidth-limited circuit to have better frequency selectivity, can better reduce high-frequency interferencing signal, make impedance transducer measure more accurately the relevant signal of input impedance of impedance matching network.

The embodiment of the present invention six provides a kind of impedance matching box, Fig. 9 is the structural representation of another kind of filtration module in Fig. 3, as Fig. 3 and shown in Figure 9, the difference of impedance matching box in the present embodiment and embodiment one is: in the present embodiment, radio-frequency power supply is high frequency electric source, this high frequency electric source provides higher frequency signal energy to impedance matching box 12, and high-frequency interferencing signal can disturb impedance transducer, causes impedance transducer to measure impedance matching network 12 accurately.Therefore, the signal of the characteristic frequency of filtration module 112 filterings is low-frequency interference signal.filtration module is low frequency rejector circuit, this low-frequency band resistance circuit comprises the 12 capacitor C 12, the 12 inductance L 12, the 13 capacitor C 13, the 13 inductance L 13, the 14 capacitor C 14 and the 14 inductance L 14, the 12 inductance L 12 and the 12 capacitor C 12 are connected in parallel, the 14 inductance L 14 and the 14 capacitor C 14 are connected in parallel, the input 22a of the 12 inductance L 12 and the input 22c of the 12 capacitor C 12 are connected to sampling module 111, the output 22b of the 12 inductance L 12, the output 22d of the 12 capacitor C 12, the input 23a of the 13 capacitor C 13, the input 24a of the 14 inductance L 14 and the input 24c of the 14 capacitor C 14 interconnect, the output 23b of the 13 capacitor C 13 is connected to the input 23c of the 13 inductance L 13, the output 23d ground connection of the 13 inductance L 13, the output 24d of the 14 capacitor C 14 and the output 24b of the 14 inductance L 14 are connected to signal processing module 113.But the low-frequency interference signal in this low frequency rejector circuit filtering impedance measurement signal transfers to signal processing module to prevent the low-frequency interference signal in impedance measurement signal, do not comprised the low-frequency interference signal of interference effect in the impedance measurement signal that signal processing module receives, make signal processing module can generate accurately the relevant signal of input impedance of impedance matching network, thereby make impedance transducer realize measuring accurately the relevant signal of input impedance of impedance matching network.

the impedance matching box that the various embodiments described above of the present invention provide comprises impedance transducer, impedance matching network, Operations Analysis and performance element, impedance transducer comprises: sampling module, filtration module and signal processing module, sampling module is used for the input of impedance matching network is measured impedance measurement signal, filtration module is used for that impedance measurement signal is carried out filtering to be processed, interference signal with the characteristic frequency in the filtering impedance measurement signal, impedance measurement signal after signal processing module is used for filtering is processed carries out calculation process, generate the relevant signal of input impedance of impedance matching network, Operations Analysis is used for according to the output impedance of radio-frequency power supply, the relevant signal of input impedance being carried out calculation process, generates the impedance adjustment data, performance element is used for according to the impedance adjustment data, impedance matching network being regulated, so that the input impedance of the impedance matching network after regulating and the output impedance conjugate impedance match of described radio-frequency power supply.but the interference signal of the characteristic frequency in the filtration module filtering impedance measurement signal in impedance matching box transfers to signal processing module with the interference signal that prevents the characteristic frequency in impedance measurement signal, do not comprised the interference signal of the characteristic frequency of interference effect in the impedance measurement signal that signal processing module receives, make signal processing module can generate accurately the relevant signal of input impedance of impedance matching network, make impedance transducer realize measuring accurately the relevant signal of input impedance of impedance matching network, improved the certainty of measurement of impedance transducer, thereby make impedance matching box realize accurately impedance matching.Compared with prior art only set up filtration module in the various embodiments described above in impedance transducer, thus this impedance transducer have simple in structure, be easy to safeguard, the characteristics such as cost is low, miniaturization and high-performance, be easy to realize.Due to the filtration module filtering in the various embodiments described above middle impedance transducer play the interference signal of interference effect, therefore thereby make impedance matching box realize accurately impedance matching, compared with prior art the various embodiments described above have improved the size of the energy signal that the radio-frequency power supply that enters reaction chamber provides greatly.

In the present invention, when in the semiconductor equipment that the impedance matching box in above-described embodiment is applied to have the double frequency structure, for the inductance value of each inductance in high-frequency band pass filter circuit shown in Figure 5 and the capacitance of each electric capacity, can precompute the inductance value of each inductance in the high-frequency band pass filter circuit and the capacitance of each electric capacity according to the frequency of high frequency electric source and the frequency of low-frequency power, so that the high-frequency band pass filter circuit possesses the ability of filtering high-frequency interferencing signal; For the inductance value of each inductance in low frequency bandwidth-limited circuit shown in Figure 8 and the capacitance of each electric capacity, can precompute the inductance value of each inductance in the low frequency bandwidth-limited circuit and the capacitance of each electric capacity according to the frequency of high frequency electric source and the frequency of low-frequency power, so that the low frequency bandwidth-limited circuit possesses the ability of filtering low-frequency interference signal; For the inductance value of each inductance in shown in Figure 6 high frequency rejector circuit and the capacitance of each electric capacity, can precompute according to the frequency of the frequency of high frequency electric source and low-frequency power the inductance value of each inductance in high frequency rejector circuit and the capacitance of each electric capacity, so that high frequency rejector circuit possesses the ability of filtering high-frequency interferencing signal; For the inductance value of each inductance in shown in Figure 9 low frequency rejector circuit and the capacitance of each electric capacity, can precompute according to the frequency of the frequency of high frequency electric source and low-frequency power the inductance value of each inductance in low frequency rejector circuit and the capacitance of each electric capacity, so that low frequency rejector circuit possesses the ability of filtering low-frequency interference signal.

The structural representation of a kind of semiconductor equipment that Figure 10 provides for the embodiment of the present invention seven, as shown in figure 10, this semiconductor equipment comprises: reaction chamber 1, the first impedance matching box 2, high frequency electric source 3, the second impedance matching box 4 and low-frequency power 5, high frequency electric source 3 provides higher frequency signal energy by the first impedance matching box 2 to reaction chamber 1, and low-frequency power 5 provides the low frequency signal energy by the second impedance matching box 4 to reaction chamber 1.

In the present embodiment, the frequency of low-frequency power can be 2MHz, and the frequency of high frequency electric source can be 13.56MHz; Perhaps, the frequency of low-frequency power can be 2MHZ, and the frequency of high frequency electric source can be 27.2MHZ; Perhaps, the frequency of low-frequency power can be 2MHz, and the frequency of high frequency electric source can be 60MHz.

Figure 11 is the structural representation of the first impedance matching box in Figure 10, as shown in figure 11, the first impedance matching box 2 comprises the first impedance transducer 21, with high frequency electric source 3 be connected the first impedance matching network 22 that impedance transducer 21 is connected, the first Operations Analysis 23 that is connected with the first impedance transducer 21 and the first performance element 24 that is connected with the first Operations Analysis 23 and the first impedance matching network 22, the first impedance transducer 21 comprises: the first sampling module 211 that is connected with the first impedance matching network 22, the first filtration module 212 that is connected with the first sampling module 211 and the first signal processing module 213 that is connected with the first filtration module 212 and the first Operations Analysis 24, the first sampling module 211 is used for the input 221 of the first impedance matching network 22 is measured, and draws the first impedance measurement signal, the first filtration module 212 is used for that the first impedance measurement signal is carried out filtering to be processed, with the low-frequency interference signal in filtering the first impedance measurement signal, the first impedance measurement signal after first signal processing module 213 is used for filtering is processed carries out calculation process, generates the relevant signal of the first input impedance of the first impedance matching network 22, the first Operations Analysis 23 is used for according to the output impedance of high frequency electric source 3, the relevant signal of the first input impedance being carried out calculation process, generates the first impedance adjustment data, the first performance element 24 is used for according to these the first impedance adjustment data, the first impedance matching network 22 being regulated, so that the input impedance of the first impedance matching network after regulating and the output impedance conjugate impedance match of high frequency electric source 3.Wherein, the first filtration module 212 can comprise high-pass filtering circuit, low frequency bandwidth-limited circuit or low frequency rejector circuit, can adopt particularly arbitrary described filtration module in embodiment four to embodiment six, repeats no more herein.

Figure 12 is the structural representation of the second impedance matching box in Figure 10, as shown in figure 12, the second impedance matching box 4 comprises the second impedance transducer 41, with low-frequency power 5 be connected the second impedance matching network 42 that impedance transducer 41 is connected, the second Operations Analysis 43 that is connected with the second impedance transducer 41 and the second performance element 44 that is connected with the second Operations Analysis 43 and the second impedance matching network 42, the second impedance transducer 41 comprises: with low-frequency power 5 be connected the second sampling module 411 that impedance matching network 42 is connected, the second filtration module 412 that is connected with the second sampling module 411 and the secondary signal processing module 413 that is connected with the second filtration module 412 and the second Operations Analysis 43, the second sampling module 411 is used for the input of the second impedance matching network 42 is measured, and draws the second impedance measurement signal, the second filtration module 412 is used for that the second impedance measurement signal is carried out filtering to be processed, with the high-frequency interferencing signal in filtering the second impedance measurement signal, the second impedance measurement signal after secondary signal processing module 413 is used for filtering is processed carries out calculation process, generates the relevant signal of the second input impedance of the second impedance matching network 42, the second Operations Analysis 43 is used for according to the output impedance of low-frequency power 5, the relevant signal of the second input impedance being carried out calculation process, generates the second impedance adjustment data, the second performance element 44 is used for according to the second impedance adjustment data, the second impedance matching network 42 being regulated, so that the input impedance of the second impedance matching network 42 after regulating and the output impedance conjugate impedance match of low-frequency power 5.Wherein, the second filtration module 412 can comprise low-pass filter circuit, high-frequency band pass filter circuit or high frequency rejector circuit, can adopt particularly arbitrary described filtration module in embodiment one to embodiment three, repeats no more herein.

In the present embodiment, this semiconductor equipment can also comprise: electrostatic chuck 6, medium window 7 and inductance-coupled coil 8, electrostatic chuck 6 are arranged in reaction chamber 1, and wafer 9 is installed on electrostatic chuck 6.Reaction chamber 1 top is provided with medium window 7, and inductance-coupled coil 8 is positioned at the top of medium window 7.The first impedance matching box 2 is connected with electrostatic chuck 6, and the second impedance matching box 4 is connected with inductance-coupled coil 8.

in the semiconductor equipment that the present embodiment provides, but the low-frequency interference signal in first filtration module filtering the first impedance measurement signal in the first impedance transducer transfers to the first signal processing module to prevent the low-frequency interference signal in the first impedance measurement signal, the low-frequency interference signal that has not comprised interference effect in the first impedance measurement signal that the first signal processing module receives, make the first signal processing module can generate accurately the relevant signal of input impedance of the first impedance matching network, make the first impedance transducer realize measuring accurately the relevant signal of input impedance of the first impedance matching network, improved the certainty of measurement of the first impedance transducer, thereby make the first impedance matching box realize accurately impedance matching, but the high-frequency interferencing signal in second filtration module filtering the second impedance measurement signal in the second impedance transducer transfers to the secondary signal processing module to prevent the high-frequency interferencing signal in the second impedance measurement signal, the high-frequency interferencing signal that has not comprised interference effect in the second impedance measurement signal that the secondary signal processing module receives, make the secondary signal processing module can generate accurately the input impedance of the second impedance matching network, make the second impedance transducer realize measuring accurately the relevant signal of input impedance of the second impedance matching network, improved the certainty of measurement of the second impedance transducer, thereby make the second impedance matching box realize accurately impedance matching.

The embodiment of the present invention eight provides a kind of semiconductor equipment, difference in semiconductor equipment in the present embodiment and embodiment seven is: high frequency electric source is connected to inductance-coupled coil by the first impedance matching box, and low-frequency power is connected to electrostatic chuck by the second impedance matching box.This kind situation no longer specifically draws.

The embodiment of the present invention eight provides a kind of impedance matching methods, the method is based on impedance matching box, impedance matching box comprise impedance transducer, with impedance matching network, the Operations Analysis that is connected with impedance transducer and the performance element that is connected with Operations Analysis and impedance matching network that radio-frequency power supply is connected with impedance transducer, impedance transducer comprises: the sampling module that is connected with impedance matching network, the filtration module that is connected with sampling module and the signal processing module that is connected with filtration module and Operations Analysis.The flow chart of a kind of impedance matching methods that Figure 13 provides for the embodiment of the present invention eight, as shown in figure 13, this impedance matching methods comprises:

Step 101, sampling module are measured the input of impedance matching network, draw impedance measurement signal.

Step 102, filtration module carry out filtering to impedance measurement signal to be processed, with the interference signal of the characteristic frequency in the filtering impedance measurement signal.

Impedance measurement signal after step 103, signal processing module are processed filtering carries out calculation process, generates the relevant signal of input impedance of impedance matching network.

Step 104, Operations Analysis carry out calculation process according to the output impedance of radio-frequency power supply to the relevant signal of input impedance, generate the impedance adjustment data.

Step 105, performance element are regulated impedance matching network according to the impedance adjustment data, so that the input impedance of the impedance matching network after regulating and the output impedance conjugate impedance match of radio-frequency power supply.

The impedance matching box that the impedance matching methods that the present embodiment provides can adopt above-described embodiment to provide is carried out.

in the impedance matching methods that the present embodiment provides, the filtration module filtering interference signal of the characteristic frequency in the impedance measurement signal transfer to signal processing module with the interference signal that prevents the characteristic frequency in impedance measurement signal, do not comprised the interference signal of the characteristic frequency of interference effect in the impedance measurement signal that signal processing module receives, make signal processing module can generate accurately the relevant signal of input impedance of impedance matching network, make impedance transducer realize measuring accurately the relevant signal of input impedance of impedance matching network, improved the certainty of measurement of impedance transducer, thereby make impedance matching box realize accurately impedance matching.

impedance matching box provided by the invention, in the technical scheme of semiconductor equipment and impedance matching methods, impedance matching box comprises impedance transducer, impedance matching network, Operations Analysis and performance element, impedance transducer comprises: sampling module, filtration module and signal processing module, sampling module is used for the input of impedance matching network is measured impedance measurement signal, filtration module is used for that impedance measurement signal is carried out filtering to be processed, interference signal with the characteristic frequency in the filtering impedance measurement signal, impedance measurement signal after signal processing module is used for filtering is processed carries out calculation process, generate the relevant signal of input impedance of impedance matching network, Operations Analysis is used for according to the output impedance of radio-frequency power supply, the relevant signal of input impedance being carried out calculation process, generates the impedance adjustment data, performance element is used for according to the impedance adjustment data, impedance matching network being regulated, so that the input impedance of the impedance matching network after regulating and the output impedance conjugate impedance match of described radio-frequency power supply.but the interference signal of the characteristic frequency in the filtration module filtering impedance measurement signal in impedance matching box transfers to signal processing module with the interference signal that prevents the characteristic frequency in impedance measurement signal, do not comprised the interference signal of the characteristic frequency of interference effect in the impedance measurement signal that signal processing module receives, make signal processing module can generate accurately the relevant signal of input impedance of impedance matching network, make impedance transducer realize measuring accurately the relevant signal of input impedance of impedance matching network, improved the certainty of measurement of impedance transducer, thereby make impedance matching box realize accurately impedance matching.

Be understandable that, above execution mode is only the illustrative embodiments that adopts for principle of the present invention is described, yet the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement also are considered as protection scope of the present invention.

Claims (12)

1. impedance matching box, comprise impedance transducer, with radio-frequency power supply be connected impedance matching network, the Operations Analysis that is connected with described impedance transducer and the performance element that is connected with described Operations Analysis and described impedance matching network that impedance transducer is connected, it is characterized in that, described impedance transducer comprises: the sampling module that is connected with described impedance matching network, the filtration module that is connected with described sampling module and the signal processing module that is connected with described filtration module and described Operations Analysis;

Described sampling module is used for the input of described impedance matching network is measured, and draws impedance measurement signal;

Described filtration module is used for that described impedance measurement signal is carried out filtering and processes, with the interference signal of the characteristic frequency in the described impedance measurement signal of filtering;

Described signal processing module, the impedance measurement signal after being used for filtering is processed carries out calculation process, generates the relevant signal of input impedance of described impedance matching network;

Described Operations Analysis is used for according to the output impedance of described radio-frequency power supply, the relevant signal of described input impedance being carried out calculation process, generates the impedance adjustment data;

Described performance element is used for according to described impedance adjustment data, described impedance matching network being regulated, so that the input impedance of the described impedance matching network after regulating and the output impedance conjugate impedance match of described radio-frequency power supply.

2. impedance matching box according to claim 1, it is characterized in that, described radio-frequency power supply comprises low-frequency power, and described filtration module comprises low-pass filter circuit, high-frequency band pass filter circuit or high frequency rejector circuit, and the interference signal of described characteristic frequency comprises high-frequency interferencing signal.

3. impedance matching box according to claim 2, is characterized in that, if described filtration module comprises low-pass filter circuit, described low-pass filter circuit comprises the first inductance and the first electric capacity;

The input of described the first inductance is connected to described sampling module, the output of described the first inductance is connected to input and the described signal processing module of described the first electric capacity, the input of the first electric capacity is connected to described signal processing module, the output head grounding of described the first electric capacity.

4. impedance matching box according to claim 2, it is characterized in that, if described filtration module comprises the high-frequency band pass filter circuit, described high-frequency band pass filter circuit comprises the second electric capacity, the second inductance, the 3rd electric capacity, the 3rd inductance, the 4th electric capacity and the 4th inductance;

The input of described the second electric capacity is connected to described sampling module, the output of described the second electric capacity is connected to the input of described the second inductance, the input of the input of the input of the output of described the second inductance, described the 3rd electric capacity, described the 3rd inductance and described the 4th electric capacity interconnects, the output head grounding of described the 3rd electric capacity, the output head grounding of described the 3rd inductance, the output of described the 4th electric capacity is connected to the input of described the 4th inductance, and the output of described the 4th inductance is connected to described signal processing module.

5. impedance matching box according to claim 2, it is characterized in that, if described filtration module comprises described high frequency rejector circuit, described high frequency band resistance circuit comprises the 5th electric capacity, the 5th inductance, the 6th electric capacity, the 6th inductance, the 7th electric capacity and the 7th inductance;

described the 5th inductance be connected the 5th Capacitance parallel connection and connect, described the 7th inductance be connected the 7th Capacitance parallel connection and connect, the input of the input of described the 5th inductance and described the 5th electric capacity is connected to described sampling module, the output of described the 5th inductance, the output of described the 5th electric capacity, the input of described the 6th electric capacity, the input of the input of described the 7th inductance and described the 7th electric capacity interconnects, the output of described the 6th electric capacity is connected to the input of described the 6th inductance, the output head grounding of described the 6th inductance, the output of the output of described the 7th electric capacity and described the 7th inductance is connected to described signal processing module.

6. impedance matching box according to claim 1, it is characterized in that, described radio-frequency power supply comprises high frequency electric source, and described filtration module comprises high-pass filtering circuit, low frequency bandwidth-limited circuit or low frequency rejector circuit, and the interference signal of described characteristic frequency comprises low-frequency interference signal.

7. impedance matching box according to claim 6, is characterized in that, if described filtration module comprises high-pass filtering circuit, described high-pass filtering circuit comprises the 8th electric capacity and the 8th inductance;

The input of described the 8th electric capacity is connected to described sampling module, the output of described the 8th electric capacity is connected to input and the described signal processing module of described the 8th inductance, the input of the 8th inductance is connected to described signal processing module, the output head grounding of described the 8th inductance.

8. impedance matching box according to claim 6, it is characterized in that, if described filtration module comprises the low frequency bandwidth-limited circuit, described low frequency bandwidth-limited circuit comprises the 9th electric capacity, the 9th inductance, the tenth electric capacity, the tenth inductance, the 11 electric capacity and the 11 inductance;

The input of described the 9th electric capacity is connected to described sampling module, the output of described the 9th electric capacity is connected to the input of described the 9th inductance, the input of the input of the output of described the 9th inductance, described the tenth electric capacity, described the tenth inductance and the input of described the 11 electric capacity interconnect, the output head grounding of described the tenth electric capacity, the output head grounding of described the tenth inductance, the output of described the 11 electric capacity is connected to the input of described the 11 inductance, and the output of described the 11 inductance is connected to described signal processing module.

9. impedance matching box according to claim 6, it is characterized in that, if described filtration module comprises low frequency rejector circuit, described low-frequency band resistance circuit comprises the 12 electric capacity, the 12 inductance, the 13 electric capacity, the 13 inductance, the 14 electric capacity and the 14 inductance;

described the 12 inductance be connected the 12 Capacitance parallel connection and connect, described the 14 inductance be connected the 14 Capacitance parallel connection and connect, the input of described the 12 inductance and the input of described the 12 electric capacity are connected to described sampling module, the output of described the 12 inductance, the output of described the 12 electric capacity, the input of described the 13 electric capacity, the input of described the 14 inductance and the input of described the 14 electric capacity interconnect, the output of described the 13 electric capacity is connected to the input of described the 13 inductance, the output head grounding of described the 13 inductance, the output of described the 14 electric capacity and the output of described the 14 inductance are connected to described signal processing module.

10. semiconductor equipment, comprise: reaction chamber, the first impedance matching box, high frequency electric source, the second impedance matching box and low-frequency power, described high frequency electric source provides higher frequency signal energy by described the first impedance matching box to described reaction chamber, described low-frequency power provides the low frequency signal energy by described the second impedance matching box to described reaction chamber, it is characterized in that

described the first impedance matching box comprises the first impedance transducer, with described high frequency electric source be connected the first impedance matching network that the first impedance transducer is connected, the first Operations Analysis that is connected with described the first impedance transducer and the first performance element that is connected with described the first Operations Analysis and described the first impedance matching network, described the first impedance transducer comprises: the first sampling module that is connected with described the first impedance matching network, the first filtration module that is connected with described the first sampling module and the first signal processing module that is connected with described the first filtration module and described the first Operations Analysis, described the first sampling module is used for the input of described the first impedance matching network is measured, and draws the first impedance measurement signal, described the first filtration module is used for that described the first impedance measurement signal is carried out filtering to be processed, with the low-frequency interference signal in described the first impedance measurement signal of filtering, the first impedance measurement signal after described first signal processing module is used for filtering is processed carries out calculation process, generates the relevant signal of the first input impedance of described the first impedance matching network, described the first Operations Analysis is used for according to the output impedance of described high frequency electric source, the relevant signal of described the first input impedance being carried out calculation process, generates the first impedance adjustment data, described the first performance element is used for according to described the first impedance adjustment data, described the first impedance matching network being regulated, so that the input impedance of described the first impedance matching network after regulating and the output impedance conjugate impedance match of described high frequency electric source,

described the second impedance matching box comprises the second impedance transducer, with described low-frequency power be connected the second impedance matching network that the second impedance transducer is connected, the second Operations Analysis that is connected with described the second impedance transducer and the second performance element that is connected with described the second Operations Analysis and described the second impedance matching network, described the second impedance transducer comprises: with described low-frequency power be connected the second sampling module that the second impedance matching network is connected, the second filtration module that is connected with described the second sampling module and the secondary signal processing module that is connected with described the second filtration module and described the second Operations Analysis, described the second sampling module is used for the input of described the second impedance matching network is measured, and draws the second impedance measurement signal, described the second filtration module is used for that described the second impedance measurement signal is carried out filtering to be processed, with the high-frequency interferencing signal in described the second impedance measurement signal of filtering, the second impedance measurement signal after described secondary signal processing module is used for filtering is processed carries out calculation process, generates the relevant signal of the second input impedance of described the second impedance matching network, described the second Operations Analysis is used for according to the output impedance of described low-frequency power, the relevant signal of described the second input impedance being carried out calculation process, generates the second impedance adjustment data, described the second performance element is used for according to described the second impedance adjustment data, described the second impedance matching network being regulated, so that the input impedance of described the second impedance matching network after regulating and the output impedance conjugate impedance match of described low-frequency power.

11. semiconductor equipment according to claim 10, it is characterized in that, described the first filtration module comprises high-pass filtering circuit, low frequency bandwidth-limited circuit or low frequency rejector circuit, and described the second filtration module comprises low-pass filter circuit, high-frequency band pass filter circuit or high frequency rejector circuit.

12. impedance matching methods, it is characterized in that, described method is based on impedance matching box, described impedance matching box comprises impedance transducer, with radio-frequency power supply be connected the impedance matching network that impedance transducer is connected, the Operations Analysis that is connected with described impedance transducer and the performance element that is connected with described Operations Analysis and described impedance matching network, described impedance transducer comprises: the sampling module that is connected with described impedance matching network, the filtration module that is connected with described sampling module and the signal processing module that is connected with described filtration module and described Operations Analysis,

Described method comprises:

Described sampling module is measured the input of described impedance matching network, draws impedance measurement signal;

Described filtration module carries out filtering to described impedance measurement signal to be processed, with the interference signal of the characteristic frequency in the described impedance measurement signal of filtering;

Impedance measurement signal after described signal processing module is processed filtering carries out calculation process, generates the relevant signal of input impedance of described impedance matching network;

Described Operations Analysis carries out calculation process according to the output impedance of described radio-frequency power supply to the relevant signal of described input impedance, generates the impedance adjustment data;

Described performance element is regulated described impedance matching network according to described impedance adjustment data, so that the input impedance of the described impedance matching network after regulating and the output impedance conjugate impedance match of described radio-frequency power supply.

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