CN100587892C - Impedance matching method and device - Google Patents
Impedance matching method and device Download PDFInfo
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- CN100587892C CN100587892C CN200710062686A CN200710062686A CN100587892C CN 100587892 C CN100587892 C CN 100587892C CN 200710062686 A CN200710062686 A CN 200710062686A CN 200710062686 A CN200710062686 A CN 200710062686A CN 100587892 C CN100587892 C CN 100587892C
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Abstract
The invention relates to an impedance matching method and an impedance matching the same, wherein the method comprises the following steps of: separating the harmonic frequency signals from the fundamental frequency signals in the radio frequency input signals, performing frequency division processing on the harmonic frequency signals by using frequency division unit and transforming the harmonicfrequency signals into sub fundamental frequency signals which have the same frequency as the fundamental frequency, and impedance matching the fundamental frequency signals and the sub fundamental frequency signals into a matching state. Therefore, the implementing of the invention can reduce the reflection power to the lowest and thus guarantees the yield rate of the semi-conduct production crafts.
Description
Technical field
The present invention relates to microelectronics technology, relate in particular to a kind of method and impedance-matching device of impedance matching.
Background technology
Impedance matching is a microelectronic part, be mainly used on the transmission line, reach the purpose that all high-frequency microwave signals all can transfer to POL, do not have the signal reflex source point of returning, thereby improve the using energy source benefit, prolong the radio system life-span and improve the wafer yields.
Along with the development of microelectric technique, plasma apparatus is widely used in the production process of semiconductor device, and impedance matching box is the critical component that is applied to plasma apparatus, its concrete application as shown in Figure 1:
Radio-frequency power supply output radio-frequency power is a plasma so that the gas in the reative cell is excited, semiconductor device is carried out etching, but because the output impedance of radio-frequency power supply is a certain specific resistance (being generally 50 Ω), and the impedance of reative cell is not equal to the output impedance of radio-frequency power supply, can cause very big power reflection like this.And adaptation is connected between radio-frequency power supply and the reative cell, by regulating the variable reactive element in the adaptation, can make the output impedance that equals radio-frequency power supply from the sending-end impedance of adaptation, carry out plasma exciatiaon in the reative cell thereby make the power output of radio-frequency power supply as often as possible to be sent to.
Impedance matching box is provided in the prior art, and it constitutes as shown in Figure 2, comprises phase place/amplitude transducer, control system, motor and variable reactive element Z1 and Z2; Its operation principle of carrying out impedance matching is to utilize phase place/amplitude sensor to go out by the phase place of the radio-frequency power of adaptation input and amplitude signal, and these two signals are delivered to control system, control system utilizes its specific control mode to phase place with amplitude signal is judged and calculation process, and, drive variable reactive element (electric capacity or inductance) by motor respectively according to the result of calculation process; The impedance of variable reactive element is changed; Then phase place and amplitude signal are corresponding changes, and control system is judged and computing once more, drives variable reactive element then; So repeatedly, consistent until the impedance (0 ° of 50 Ω ∠) that the phase place that is detected and amplitude signal and impedance matching box are calibrated, reach matching status this moment, and reactance component shuts down.
Although conventional impedance matching device can suppress the reflection of radio-frequency power supply power output to a certain extent, and make the radio-frequency power supply power big reative cell that outputs to of trying one's best, but because load variations can cause radio-frequency power supply filtering characteristic variation, at this moment harmonic frequency signal can appear in the power output of radio-frequency power supply, the impedance matching box of prior art can't respond this harmonic frequency signal, can produce very big reflection power, thereby influence the stability of plasma, the semiconductor manufacturing process technology has been caused ill effect.
In sum, conventional impedance matching device can not be carried out corresponding coupling to the harmonic frequency signal that radio-frequency power supply produces, and can't satisfy the requirement that suppresses power reflection.
Summary of the invention
The method and the impedance-matching device that the purpose of this invention is to provide a kind of impedance matching, thus make adaptation to respond by this method to harmonic signal, the harmonic signal energy is exported to transducer, thereby can reduce reflection power greatly.
The objective of the invention is to be achieved through the following technical solutions:
A kind of method of impedance matching comprises:
Harmonic frequency signal in the radio-frequency input signals is separated from fundamental frequency signal, and harmonic frequency signal is carried out frequency division handle and to be converted into the inferior fundamental frequency signal identical with the fundamental frequency signal frequency;
Described fundamental frequency signal is carried out impedance matching with time fundamental frequency signal reach matching status.
Described harmonic frequency signal is: even that produces on the fundamental frequency signal of radio-frequency power supply output frequency or odd harmonic frequencies signal.
Described frequency division is handled and is comprised a plurality of frequency divisions processing, is respectively applied for the multiple harmonic frequency signal that comprises in the radiofrequency signal is carried out the frequency division processing.
A kind of impedance-matching device comprises transducer, control system, motor and variable reactive element, and transducer is connected with variable reactive element, and transducer connects rf inputs, and variable reactive element connects radio-frequency (RF) output end; Control system is judged and calculation process the radio-frequency power supply signal in the fundamental frequency signal of sensor acquisition, and is passed through the Electric Machine Control variable reactive element; And also comprise frequency unit, one end connects the radio frequency input, the other end connects transducer, is used for the radio-frequency input signals harmonic frequency signal is separated from fundamental frequency signal, and harmonic frequency signal is carried out frequency division handle and be converted into the inferior fundamental frequency signal identical with the fundamental frequency signal frequency.
Described frequency unit comprises frequency divider or frequency dividing circuit.
Described frequency divider or frequency dividing circuit comprise a plurality of frequency dividers or frequency dividing circuit, are respectively applied for the multiple harmonic frequency signal that comprises in the radiofrequency signal is carried out the frequency division processing.
As seen from the above technical solution provided by the invention, the present invention has added frequency unit in adaptation, described frequency unit can be with owing to the harmonic waves that reason caused such as load are converted into fundamental frequency signal and send transducer to, make transducer to produce response, thereby make whole system reach matching status the variation of load.Therefore, realization of the present invention can be reduced to reflection power minimum, thereby can guarantee the yield of semiconductor fabrication process.
Description of drawings
Fig. 1 is the application schematic diagram of prior art middle impedance adaptation;
Fig. 2 is the formation schematic diagram of conventional impedance matching device;
Fig. 3 is the formation schematic diagram of impedance matching box provided by the invention;
Fig. 4 is for realizing the formation schematic diagram of the impedance matching box that the embodiment of the invention provides;
The processing procedure schematic diagram that Fig. 5 provides for the embodiment of the invention.
Embodiment
The invention provides a kind of method of impedance matching, specifically comprise: at first harmonic frequency signal in the radio-frequency input signals is separated from fundamental frequency signal, and harmonic frequency signal is carried out frequency division handle and to be converted into the inferior fundamental frequency signal identical with the fundamental frequency signal frequency; Then described fundamental frequency signal is carried out impedance matching with time fundamental frequency signal and reach matching status, thereby reflection power is reduced to minimum.
Its processing procedure mainly comprises: when near the filter characteristic the radio-frequency power supply output changes, will on the fundamental frequency signal of radio-frequency power supply output frequency, produce even or odd harmonic frequencies signal, if the harmonic frequency signal that will produce is not handled, will cause the reflection of radio-frequency power, can carry out described harmonic frequency signal frequency division and handle in order to reduce reflection power this moment; Described frequency division is handled and is comprised a plurality of frequency divisions processing that need carry out owing to the diversity of complexity that produces the harmonic frequency signal reason so that harmonic frequency signal, through after a plurality of frequency divisions processing harmonic frequency signal being converted into the inferior fundamental frequency signal identical with the fundamental frequency signal frequency, described time fundamental frequency signal can be detected by the transducer in the adaptation, and detected radio-frequency power supply signal delivered to control system, control system utilizes its specific control mode that described radio-frequency power supply signal is judged and calculation process, and according to the result of calculation process, to drive variable reactive element by motor respectively, the impedance of variable reactive element is changed, corresponding the changing of then described radio-frequency power supply signal, control system is judged and computing once more, drives variable reactive element then; So repeatedly, consistent until the impedance that radiofrequency signal that is detected and impedance matching box are calibrated, reach matching status this moment.
The present invention also provides a kind of impedance matching box, as shown in Figure 3, comprises transducer, frequency unit, control system, motor and variable reactive element; Described transducer one end is connected with variable reactive element, and the other end connects rf inputs, and described variable reactive element connects radio-frequency (RF) output end; Described control system judges and calculation process the radio-frequency power supply signal in the fundamental frequency signal of gathering in the transducer, and by described Electric Machine Control variable reactive element; Described frequency unit one end connects the radio frequency input, the other end connects transducer, be used for the radio-frequency input signals harmonic frequency signal is separated from fundamental frequency signal, and harmonic frequency signal carried out frequency division handle and to be converted into the inferior fundamental frequency signal identical with the fundamental frequency signal frequency.
For the ease of understanding technical scheme of the present invention, now 4 be treated to embodiment the implementation of the technology of the present invention is described in detail in conjunction with the accompanying drawings second harmonic is carried out frequency division.
When the load impedance of radio-frequency power supply and its output impedance are inconsistent, near the radio-frequency power supply output filter characteristic has fluctuation to a certain degree, at this moment, can on the fundamental frequency of radio-frequency power supply output frequency (being generally 13.56MHz), produce even or odd harmonic.Described harmonic wave is generally based on second harmonic, and for 13.56MHz, second harmonic is 27.12MHz.
Impedance matching box schematic diagram for the realization embodiment of the invention shown in Figure 4 comprises: transducer, frequency divider, control system, motor and variable reactive element (electric capacity or inductance); The second harmonic that wherein said frequency divider mainly will produce on the fundamental frequency signal of radio-frequency power supply output frequency carries out frequency division and handles and be converted into the inferior fundamental frequency signal that can carry out match responding, described transducer comprises phase place/amplitude transducer, one end is connected with Z2 with variable reactive element Z1, the other end connects the radio frequency input, the other end of described variable reactive element Z2 is connected with radio frequency output, the other end of variable reactive element Z1 connects ground, described control system judges and calculation process the phase place/amplitude signal in the fundamental frequency signal of gathering in the transducer, and by described Electric Machine Control variable reactive element.
It realizes flow process of the present invention as shown in Figure 5, comprising:
Whether the phase place of step 54, detection/amplitude signal is consistent through the impedance (being generally 0 ° of 50 Ω ∠) of calibrating with impedance matching after the calculation process, in this way, then reaches matching status, carries out radio frequency output, otherwise execution in step 53.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection range of claim.
Claims (6)
1, a kind of method of impedance matching is characterized in that, comprising:
Harmonic frequency signal in the radio-frequency input signals is separated from fundamental frequency signal, and harmonic frequency signal is carried out frequency division handle and to be converted into the inferior fundamental frequency signal identical with the fundamental frequency signal frequency;
Described fundamental frequency signal is carried out impedance matching with time fundamental frequency signal reach matching status.
2, the method for a kind of impedance matching according to claim 1 is characterized in that, described harmonic frequency signal is: even that produces on the fundamental frequency signal of radio-frequency power supply output frequency or odd harmonic frequencies signal.
3, the method for a kind of impedance matching according to claim 1 is characterized in that, described frequency division is handled and comprised a plurality of frequency divisions processing, is respectively applied for the multiple harmonic frequency signal that comprises in the radio-frequency input signals is carried out the frequency division processing.
4, a kind of impedance-matching device comprises transducer, control system, motor and variable reactive element, and transducer is connected with variable reactive element, and transducer connects rf inputs, and variable reactive element connects radio-frequency (RF) output end; Control system is judged and calculation process the radio-frequency power supply signal in the fundamental frequency signal of sensor acquisition, and is passed through the Electric Machine Control variable reactive element; It is characterized in that, also comprise frequency unit, an end connects the radio frequency input, and the other end connects transducer, be used for the radio-frequency input signals harmonic frequency signal is separated from fundamental frequency signal, and harmonic frequency signal carried out frequency division handle and to be converted into the inferior fundamental frequency signal identical with the fundamental frequency signal frequency.
5, a kind of impedance-matching device according to claim 4 is characterized in that, described frequency unit comprises frequency divider or frequency dividing circuit.
6, a kind of impedance-matching device according to claim 5 is characterized in that, described frequency divider or frequency dividing circuit comprise a plurality of frequency dividers or frequency dividing circuit, is respectively applied for the multiple harmonic frequency signal that comprises in the radio-frequency input signals is carried out the frequency division processing.
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| Application Number | Priority Date | Filing Date | Title |
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| CN200710062686A CN100587892C (en) | 2007-01-12 | 2007-01-12 | Impedance matching method and device |
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| CN200710062686A CN100587892C (en) | 2007-01-12 | 2007-01-12 | Impedance matching method and device |
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| CN101221881A CN101221881A (en) | 2008-07-16 |
| CN100587892C true CN100587892C (en) | 2010-02-03 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101754566B (en) * | 2008-12-10 | 2012-07-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Impedance matching device, impedance matching method and plasma processing system |
| CN102534524B (en) * | 2010-12-14 | 2015-04-15 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction chamber for PVD (Physical Vapor Deposition) process and PVD system |
| CN103025041A (en) * | 2011-09-28 | 2013-04-03 | 中国科学院微电子研究所 | Radio frequency impedance matcher |
| US9230779B2 (en) * | 2012-03-19 | 2016-01-05 | Lam Research Corporation | Methods and apparatus for correcting for non-uniformity in a plasma processing system |
| US9923530B2 (en) * | 2015-11-25 | 2018-03-20 | Mediatek Inc. | Matching network circuit and radio-frequency power amplifier with odd harmonic rejection and even harmonic rejection and method of adjusting symmetry of differential signals |
| US10026592B2 (en) * | 2016-07-01 | 2018-07-17 | Lam Research Corporation | Systems and methods for tailoring ion energy distribution function by odd harmonic mixing |
| CN111371473B (en) * | 2020-03-10 | 2021-09-28 | 捷开通讯(深圳)有限公司 | Debugging method of radio frequency circuit |
| CN112532198B (en) * | 2020-12-03 | 2023-06-27 | 南华大学 | Radio frequency ion source impedance matching method and device |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016, building 2, block M5, No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |