CN103163104B - Periodic-array local plasma resonance sensor - Google Patents
Periodic-array local plasma resonance sensor Download PDFInfo
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- CN103163104B CN103163104B CN201310082710.9A CN201310082710A CN103163104B CN 103163104 B CN103163104 B CN 103163104B CN 201310082710 A CN201310082710 A CN 201310082710A CN 103163104 B CN103163104 B CN 103163104B
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Abstract
The invention discloses a periodic-array local plasma resonance sensor. The sensor comprises a substrate and a plurality of sensor units which are arranged on the surface of the substrate to form a periodic array structure. The periodic-array local plasma resonance sensor has the advantages of high sensitivity of sensing, low resonance line width, high signal modulation depth and large-scale detection angle tolerance.
Description
Technical field
The present invention relates to nanophotonics field of sensing technologies, relate in particular to the metal photonic crystal structure refractive index sensing device that local plasmon resonance body is relevant, it is a kind of local plasmon resonance body sensor of periodic array.
Background technology
Surface plasma is the coupled resonance form occurring on medium/metal interface, electronic population the moving back and forth of collective on this bed interface.This ripple is captured near interface, with the Plasma Interaction of electronics on metal surface.The electron charge of metal surface and the Resonant Interaction between electromagnetic wave have produced surface plasma and have caused it to have very unique character.
Local surface plasma resonance: for metal nanoparticle, surface plasma wave, by the boundary vicinity at metal nanoparticle by local, forms the surface plasmon oscillations (localized surface plasmon resonance) of localization.The surface plasma body resonant vibration of space localization, its resonance characteristics and exciting light field characteristic, metal particle size, pattern, component, the Close relation of having arranged are also relevant with surrounding medium condition of living in.
The local plasmon resonance body that utilizes metal nanoparticle to produce, can realize effective refractive index sensing.Adopt periodically metal Nano structure unit to arrange, form metal nano photon crystal structure, can modulate by regulating the characteristic parameters such as geometric feature sizes, cycle to realize effective optics response characteristic, to utilize it to obtain high-performance sensors part.In the present invention, adopt metal square array split ring periodic structure, by design optimization parameter, obtain optimum results, to realize the high sensitivity effective refractive index senser element for detection of variations in refractive index.
The susceptibility of local plasmon body to media environment refractive index is the basis of plasma resonance sensor part design.Local plasmon resonance body is because its characteristic resonances live width is wider, when as sensing element, hinder the lifting of the quality factor that has limited device, therefore, reduce feature detection position resonance line width, improve quality factor significant to the lifting of device serviceability.
Wood occurs in some critical point of incident wavelength or incident angle extremely, is often called as Rayleigh anomaly wavelength or Rayleigh incident angle.Under these conditions, the corresponding angle of diffraction of some diffracted wave is that 90 degree are plunderred and penetrated, and they,, in existing and the critical conditions of disappear (propagation wave and Shu die ripple), might as well be referred to as Rayleigh boundary wave.Because propagation wave carries energy, and the Shu ripple that dies does not carry energy, and when through critical point, all propagation waves all will regulate entrained separately energy, to keep energy conservation.Now, diffraction efficiency spectral range curve table is now in the transition of Rayleigh boundary wave strong point generation derivative, normal appearance local, very narrow peak or paddy.Under certain condition, we can utilize the very narrow peak of Rayleigh boundary wave strong point or paddy as the operation wavelength of effective detection, can obtain higher quality factor equally.
Hardware is due to electric field excitation, and the induction of the similar resonance coil forming resonance.In metal inside, can be similar to the electric current of thinking that the motion of arranging of electron charge produces in as conductor.Thereby can produce and induce electromagnetic field resonance.With the local plasmon body sensor comparison based on photon crystal structure, the senser element based on split ring resonance has higher detection sensitivity, and has also shown wider resonance line width simultaneously.The present invention utilizes both combinations, designed a kind of photon crystal structure local plasmon resonance body sensor based on split ring unit, detection sensitivity (S=Δ λ/Δ n) and detection quality factor (FOM=S/FWHM (full width at half maximum)) have been had to good improvement, device performance is obviously improved.
Due to when the embodiment, concrete optical signalling input end, by optic fibre guide, for convenient test, can change incident angle, realizes wide-angle and effectively surveys.Yet in practical application, the current mainly components and parts based on local plasmon resonance body sensing are just limited under normal incidence or the condition of limited incident angle mostly, detect degree of freedom and be subject to restriction in various degree.
General local plasmon body sensor part, due to its cycle arrange character and symmetry element characteristic, does not have larger polarization selectivity, can be used as effective in the inclined to one side or weak related sensor of polarization.But, having on the unit of certain architectural feature, because specific structure choice makes the spectral response of device excite different responses to different polarization, be unfavorable for efficient, convenient, detection fast.The sensing element of great majority based on split ring resonance has just been subject to such constraint and can only be operated under restriction condition of work.
Except doing spectral analysis test, also can use monochromatic optical wave as input light source, and corresponding detection analysis is done in working strength variation response.Now, how to improve the depth-to-width ratio of signal, be beneficial to improve signal to noise ratio (S/N ratio), improve detection signal identification, very important to improving detection performance.Due to device involved in the present invention, design result, calculating prediction shows, the intensity depth-to-width ratio of its transmitted spectrum respective resonant position is large, signal depth of modulation is high, under single wavelength detection means, when detection signal strength changes, its effective quality factor (FOM*=Δ I/ Δ n/I) also will demonstrate high quality factor.
Summary of the invention
The object of the invention is to, a kind of local plasmon resonance body sensor of periodic array is provided, there is sensing high sensitivity, narrow resonance live width, high signal depth of modulation, the on a large scale advantage of detection angle tolerance.
The local plasmon resonance body sensor that the invention provides a kind of periodic array, comprising:
One substrate;
A plurality of sensor units, it is arranged in the surface of substrate, forms periodic array structure.
The present invention has high signal depth of modulation, can be used for spectrally resolved test, also can be used for single Wavelength strength test.Have wide-angle and survey, polarization is weak relevant, and the features such as wide sensing range, can be used as high sensitivity, and high quality sensors part is efficient to realize, high-performance, and convenient, high-adaptability refractive index detects.
Accompanying drawing explanation
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail, wherein:
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of sensor unit in Fig. 1;
Fig. 3 is the transmitted spectrum response diagram of plasma resonance sensor of the present invention to varying environment variations in refractive index.
Fig. 4 and Fig. 5 are that plasma resonance sensor of the present invention is at the resonance mode state electric field Ez distribution plan of different response frequencies Fdtd Method (FDTD) method analog computation for place.
Fig. 4 is resonance mode 1 electric field Ez distribution plan, and Fig. 5 is resonance mode 2 electric field Ez distribution plans.
Fig. 6 is plasma resonance sensor provided by the invention transmitted spectrum valley resonant wavelength of living in position when varying environment refractive index, can see that it is near-linear relation.
Fig. 7 is plasma resonance sensor provided by the invention when different openings spacing size, and the variation of sensing capabilities parameter, comprises sensitivity, quality factor.
Fig. 8 is the response spectra of plasma resonance sensor provided by the invention to the transmitted spectrum of different incident field polarization angles.Only have signal intensity to be subject to the impact of polarization angle, still can do effective transmitted spectrum test, for refractive index sensing.Local plasmon resonance body sensor provided by the invention has shown polarization weak dependence.
Fig. 9 is the variation diagram of plasma resonance sensor provided by the invention transmitted spectrum when environment refractive index is air in different incident angle of light situations.
Figure 10 is that local plasmon resonance body sensor provided by the invention is in 30 degree situations at incident angle of light, polarization direction in the x-direction, during zero degree polarization angle, the corresponding transmitted light spectral response that varying environment variations in refractive index is produced.
Figure 11 is that local plasmon resonance body sensor provided by the invention is in 30 degree situations at incident angle of light, and polarization angle is 45 while spending, the corresponding transmitted light spectral response that varying environment variations in refractive index is produced.
Embodiment
Refer to shown in Fig. 1 and Fig. 2, the invention provides a kind of local plasmon resonance body sensor of periodic array, comprising:
One substrate 10, the material of described substrate 10 is transparent medium or semiconductor material, its refractive index is n=1.3-1.6;
A plurality of sensor units 20, it is arranged in the surface of substrate 10, form periodic array structure, wherein each sensor unit 20 is nanoscale split ring unit, this nanoscale split ring unit is asymmetric three sections of hatch frames, a side in split ring unit is the first opening 21, top is the second opening 22, opposite side is the 3rd opening 23, described each sensor unit 20 is nanoscale split ring unit, this split ring unit is square structure, described each opening is positioned at the center of this opening one side, described the first opening 21, the end of the second opening 22 and the 3rd opening 23 is plane, the symmetrical structure of disc or elliptical area or unsymmetric structure, described the first opening 21, the second opening 22 and the 3rd opening 23 gaps are nanoscale, the material of each sensor unit 20 is gold or silver-colored, Fig. 1 is the structural drawing of the square periodic array of a substrate 10 and four sensor unit 20 formations.
The operation wavelength of the local plasmon resonance body sensor of periodic array of the present invention is at visible ray and near-infrared band, and wavelength band is 500nm-1800nm.
Apply the detection system that the local plasmon resonance body sensor of periodic array of the present invention carries out, by the plasma sensing element of the present invention's design, comprise the surface that is arranged in substrate 10, the periodic array structure that a plurality of nanoscale split ring sensor units 20 form, be placed in detected sample environment, as test liquid, or will detect solution and drip on detecting element, and prepare to detect.
During concrete enforcement, can adopt optical fiber as signal input and signal collection channel for input/output terminal test.Utilize broad spectrum light source as detection light source, inclined to one side by certain choosing, intensity adjustment, aims at sample by light source output terminal, irradiates and is loaded with test solution to be measured, or be immersed in the local plasmon resonance body sensor of the periodic array in test solution to be measured.Next step detects collects by the transmitted spectrum signal of sample and sensor.
By spectrometer analysis, detect the transmitted spectrum response signal of being collected by output terminal optical fiber.From analyzing spectral characteristic with just obtaining sample refractive index relative changing value (consulting Fig. 3 is the transmitted spectrum response diagram of plasma resonance sensor of the present invention to varying environment variations in refractive index) the response spectra of sample variations in refractive index.
The present invention utilizes the resonance mode of split ring sensor unit 20 1 (consulting Fig. 4), and the very narrow paddy of Rayleigh boundary wave strong point, as the operation wavelength of effective detection, can obtain higher quality factor.Utilize the resonance mode 2 (consulting Fig. 5) of split ring sensor unit 20, this resonance mode is due to electric field excitation, and the induction of the similar resonance coil forming resonance, there is high field Local Characteristic, weak polarization correlated (consulting Fig. 8), weak angular selectivity (consulting Fig. 9), makes the local plasmon resonance body sensor of periodic array of the present invention have wide-angle detection, polarization is weak relevant, the features such as wide sensing range.Incident angle of light to detection light source, the requirement of polarization angle reduces greatly, reduces source alignment operation easier, has improved detection adaptability, and flexibility of operation is not lost high efficiency simultaneously.Thereby can realize high sensitivity simultaneously, and high quality factor, convenient, high-adaptability refractive index detects.
The susceptibility of local plasmon body to media environment refractive index is the basis of plasma resonance sensor part design.Local plasmon resonance body sensor provided by the invention, a plurality of sensor units 20 that comprise, it is arranged in the surface of substrate 10, form periodic array structure, wherein each sensor unit 20 is nanoscale split ring unit, and the senser element based on split ring sensor unit 20 has higher detection sensitivity.The sensing system that periodic array structural openings ring sensor unit 20 and substrate 10 form is to the transmitted spectrum response ratio of varying environment variations in refractive index more responsive (consulting Fig. 3).At different response frequencies place, with the resonance mode state electric field Ez distribution plan 4 of time domain finite difference method analog computation, be resonance mode 1 electric field Ez distribution plan, Fig. 5 is resonance mode 2 electric field Ez distribution plans.Can obviously find out, due to the first opening 21 at split ring sensor unit 20, the second opening 22, the 3rd opening 23 places have formed respectively strong electromagnetic field local and different characteristic distributes, so can produce different sensing capabilities (consulting Fig. 6) in the system of two resonance modes 1 and 2 work.
Split ring sensor unit 20 is due to electric field excitation, and the induction of the similar resonance coil forming resonance.In metal inside, can be similar to the electric current of thinking that the motion of arranging of electron charge produces in as conductor.Thereby can produce and induce electromagnetic field resonance.With the local plasmon body sensor comparison based on photon crystal structure, the senser element based on split ring resonance has higher detection sensitivity, and has also shown wider resonance line width simultaneously.The first opening 21, the second opening 22,23 of the 3rd openings effectively play the resonator system effect of nanometer chamber.When different openings spacing size, sensor senses performance parameter respective change, comprises sensitivity, quality factor (consulting Fig. 7).
Because forming respectively corresponding electric field local at the first opening 21, the second opening 22, the 3rd opening 23 places of three sections of openings, pattern 2 resonance (consulting Fig. 5) distribute, this resonance mode has high field Local Characteristic, weak polarization correlated (consulting Fig. 8), weak angular selectivity (is consulted Fig. 9, pattern 2 resonance have weak angle-dependence, and resonance mode 2 positions are because the change of incident angle of light changes).Because pattern 1 resonance forms respectively corresponding electric field local distribution (consulting Fig. 4) at the first opening 21, the second opening 22, the 3rd opening 23 places of three sections of openings, this resonance mode has a Local Characteristic, weak polarization correlated (consulting Fig. 8), weak angular selectivity (is consulted Fig. 9, pattern 1 resonance has weak angle-dependence, is subject to the abnormal impact of Wood simultaneously and when low-angle is surveyed, has narrow resonance line width).
The susceptibility of local plasmon body sensor based on photon crystal structure to probing medium variations in refractive index, the first opening 21, the second opening 22, the 3rd opening 23 structural designs in conjunction with three sections of openings of split ring sensor unit 20, availability model 1,2 resonance features, local plasmon resonance body sensor provided by the invention is in 30 degree situations at incident angle of light, polarization angle is 45 while spending, the corresponding transmitted light spectral response (consulting Figure 10, Figure 11) that varying environment variations in refractive index is produced.Local plasmon resonance body sensor provided by the invention has wide-angle to be surveyed, and polarization is weak relevant, and the features such as wide sensing range, can be used as high sensitivity, and high quality sensors part is efficient to realize, high-performance, and convenient, high-adaptability refractive index detects.
By spectrometer analysis, detect the transmitted spectrum response signal (consulting Fig. 3, Figure 10, Figure 11) of being collected by output terminal optical fiber.From analyzing spectral characteristic with just obtaining sample refractive index relative changing value the response spectra of sample variations in refractive index.Same by test, calibration system, calibration parameter, just can find the information of tested sample refractive index and the result of correlation spectrum characteristic by reference standards value.
The above be only the specific embodiment of the present invention, but protection scope of the present invention is not limited to this; any people who is familiar with this technology; in the disclosed technical scope of the present invention, the conversion that can expect easily or the replacement of employing, all should be encompassed in of the present invention comprise scope within.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (7)
1. a local plasmon resonance body sensor for periodic array, comprising:
One substrate;
A plurality of sensor units, it is arranged in the surface of substrate, forms periodic array structure;
Wherein each sensor unit is nanoscale split ring unit, and this nanoscale split ring unit is asymmetric three sections of hatch frames, and the side in split ring unit is the first opening, and top is the second opening, and opposite side is the 3rd opening.
2. the local plasmon resonance body sensor of periodic array according to claim 1, wherein this split ring unit is square structure, described each opening is positioned at the center of this opening one side.
3. the local plasmon resonance body sensor of periodic array according to claim 1, the end of wherein said the first opening, the second opening and the 3rd opening is symmetrical structure or the unsymmetric structure of plane, disc or elliptical area.
4. the local plasmon resonance body sensor of periodic array according to claim 3, the opened gap of wherein said the first opening, the second opening and the 3rd opening is nanoscale.
5. the local plasmon resonance body sensor of periodic array according to claim 1, wherein the material of each sensor unit is gold or silver-colored.
6. the local plasmon resonance body sensor of periodic array according to claim 1, the material of wherein said substrate is transparent medium or semiconductor material, its refractive index is n=1.3-1.6.
7. the local plasmon resonance body sensor of periodic array according to claim 1, wherein the operation wavelength of the local plasmon resonance body sensor of this periodic array is at visible ray and near-infrared band, and wavelength band is 500nm-1800nm.
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| CN105116489B (en) * | 2015-09-15 | 2018-08-21 | 中国计量学院 | A kind of high Q resonance device of asymmetric openings ring Meta Materials waveguiding structure |
| CN105538812B (en) * | 2015-12-11 | 2018-07-06 | 深圳大学 | A kind of sensing membrane of high sensitivity and surface plasma resonance sensing detecting system |
| CN107356999B (en) * | 2017-06-26 | 2020-03-24 | 陕西师范大学 | Single-layer nano structure for realizing long-wave band asymmetric transmission and preparation method thereof |
| CN107478597B (en) * | 2017-08-21 | 2020-07-03 | 桂林电子科技大学 | Metal rectangular slit array structure plasma optical fiber sensor based on double transmission peaks |
| CN107367488B (en) * | 2017-08-31 | 2023-04-25 | 安徽大学 | Surface plasma resonance sensor substrate with adjustable formants |
| CN115453433B (en) * | 2022-11-09 | 2023-01-20 | 南方电网数字电网研究院有限公司 | Graphene asymmetric structure magnetic sensor and parameter determination method thereof |
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| CN100543458C (en) * | 2006-10-23 | 2009-09-23 | 北京金菩嘉医疗科技有限公司 | Micro-prisms array SPR biosensor component |
| JP5397577B2 (en) * | 2007-03-05 | 2014-01-22 | オムロン株式会社 | Surface plasmon resonance sensor and chip for the sensor |
| WO2010140616A1 (en) * | 2009-06-03 | 2010-12-09 | 株式会社カネカ | Structure, chip for localized surface plasmon resonance sensor, and localized surface plasmon resonance sensor |
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| CN102156110A (en) * | 2011-05-16 | 2011-08-17 | 浙江工商职业技术学院 | Sensing method based on local surface plasma resonance |
| CN102706835A (en) * | 2012-05-14 | 2012-10-03 | 中央民族大学 | Sensing chip of dual-detecting biochemical sensing detector and preparation method thereof |
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