CN103157583A - Trough body bubble discharging device and method - Google Patents
Trough body bubble discharging device and method Download PDFInfo
- Publication number
- CN103157583A CN103157583A CN2012105376892A CN201210537689A CN103157583A CN 103157583 A CN103157583 A CN 103157583A CN 2012105376892 A CN2012105376892 A CN 2012105376892A CN 201210537689 A CN201210537689 A CN 201210537689A CN 103157583 A CN103157583 A CN 103157583A
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- cell body
- liquid
- holes
- bubble
- row
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- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000007599 discharging Methods 0.000 title claims abstract 3
- 239000007788 liquid Substances 0.000 claims abstract description 140
- 239000003814 drug Substances 0.000 claims abstract description 27
- 210000005056 cell body Anatomy 0.000 claims description 117
- 239000006260 foam Substances 0.000 claims description 10
- 238000004581 coalescence Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000000576 coating method Methods 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 abstract description 5
- 238000001914 filtration Methods 0.000 abstract description 4
- 238000005192 partition Methods 0.000 abstract 2
- 230000001788 irregular Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 241000264877 Hippospongia communis Species 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 210000002421 cell wall Anatomy 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Coating Apparatus (AREA)
- Medicines Containing Material From Animals Or Micro-Organisms (AREA)
- Medical Preparation Storing Or Oral Administration Devices (AREA)
Abstract
The invention relates to a trough body bubble discharge device and a method, in the coating process, a trough body for storing liquid medicine is arranged in a coating device, the trough body can be provided with at least one reticular bubble filtering device by a plurality of partition plates, and the reticular bubble filtering device can effectively block and intercept bubbles in the liquid medicine, so that the liquid medicine flowing out of the trough body has the optimal bubble-free stable characteristic; and the number of the partition plates is increased to increase the flow path of the liquid medicine, so as to enhance the bubble-discharging effect of the liquid medicine; furthermore, the liquid inlet and the liquid outlet are both disposed at the bottom of the tank body, so as to reduce the disturbance of the liquid when flowing and reduce the chance of gas mixing and forming bubbles.
Description
Technical field
The present invention is relevant cell body row's bulb apparatus and method, espespecially a kind of in coating process, the cell body of one liquid medicine storage is set in its apparatus for coating, this cell body can be by being provided with at least a netted folliculus device on plural dividing plate, and this netted folliculus device can effectively intercept the bubble in the interception liquid, makes the liquid that flows out cell body have best still stable characteristic.
Background technology
It is inner that the folliculus device of known semiconductor liquid is located at the production board more; for example: the device of Photoresisting coating machines, developing machine and Wet-type etching machine; if when needing to change liquid; after must first shutting down replacing; through certain procedures, the bubble in liquid is got rid of fully again; this row's bubble process must spend the time of several hours, the bubble in liquid can be discharged fully.When if the bubble of liquid is not discharged fully, bubble will directly be attached on product, to cause negative effect to reduce product yield to processing procedure, and the impact that causes includes: ghost (Mura), watermark (Water Mark), pin hole (Pin Hole) and allly relevantly be subjected to aeration and cause the not defective of complete (for example: underdevelopment, etching are incomplete) of reaction, cause product yield significantly to reduce, solve and remain to be engaged in this journey dealer.
Summary of the invention
Based on the disappearance that solves the above prior art, the present invention is a kind of cell body row's bulb apparatus and method, the present invention's main purpose is in coating process, the cell body of one liquid medicine storage is set in its apparatus for coating, this cell body can be by being provided with at least a netted folliculus device on plural dividing plate, and this netted folliculus device can effectively intercept the bubble in the interception liquid, makes the liquid that flows out cell body have the function of best still stability characteristic (quality).
Another object of the present invention is to increase by the dividing plate number and arranges, and the flow path of liquid is increased, and increases row's bubble chance of liquid, reaches row's bubble effect.
The present invention's a purpose again is all to be arranged at by this liquid entrance and this medicine liquid outlet the bottom of this cell body, and the disturbance when flowing to reduce liquid sneaks into to reduce gas the chance that forms bubble.
For reaching above-mentioned purpose, the present invention is a kind of cell body row bulb apparatus, contains the liquid of bubble in order to folliculus, and it is to include:
One cell body be one to have the casing of chamber, and its chamber has a liquid entrance and a medicine liquid outlet in order to take up liquid, and has a space in the liquid upper surface; And
A plurality of dividing plates are arranged in this cell body, make to become a regular runner in cell body, are provided with at least a netted folliculus device on those plural dividing plates.
The preferably, this cell body is more to be provided with an exhaust apparatus, and this exhaust apparatus is arranged at the position in cell body space.
The preferably, this exhaust apparatus can be natural air-exhaust device or forced exhaust unit.
The preferably, this natural air-exhaust device is a hole.
The preferably, this forced exhaust unit is a fan motor.
The preferably, this netted folliculus device is that a plurality of hexagon bee slot shape holes consist of.
The preferably, this netted folliculus device is that arbitrary polygon, polygonal or circular opening consist of.
The preferably, this netted folliculus device is that a cavernous body consists of.
The preferably, different sizes can be designed in the aperture of the hole of this netted folliculus device, or multiple setting, to coordinate relevant liquid characteristic.For larger near this liquid entrance, and less near this medicine liquid outlet.
The preferably, this netted folliculus device cording has a thickness.
The preferably, this liquid entrance and this medicine liquid outlet all are arranged at the bottom of this cell body.
The preferably, this liquid means a photoresistance liquid or is other industrial liquids.
The preferably, it is can loop back receiving apparatus by one to be reclaimed that this medicine liquid outlet flows out liquid.
For reaching above-mentioned purpose, the present invention is a kind of cell body row foam method method, and it is to include:
One cell body is provided, is provided with a plurality of dividing plates with a plurality of holes in this cell body and presets runner to form one;
Liquid is injected by one of this cell body liquid entrance form a cell body liquid plane, this cell body liquid plane system makes liquid follow this default flow passage in cell body higher than this liquid entrance and lower than the cell body height;
Utilize these a plurality of holes to be adsorbed on bubble in the liquid of this default flow passage, complete row's bubble and process to discharge bubble so that a plurality of bubble coalescence is understood the liquid level that moves to this cell body on to a certain degree backward thoroughly in this plurality of holes; And
The liquid of being processed by row's bubble is discharged by a medicine liquid outlet.
For further the present invention being had more deep explanation, be that the Ji can be benefited in censorship to some extent to your juror by following diagram, figure number explanation and detailed description of the invention.
Description of drawings
Fig. 1 is the cross-sectional view of overlooking of cell body row bulb apparatus of the present invention;
Fig. 2 A is the cross-sectional view of facing of cell body row bulb apparatus of the present invention;
Fig. 2 B be cell body of the present invention row bulb apparatus overlook the runner schematic diagram;
Fig. 3 is the structural representation of the single dividing plate of the present invention;
Fig. 4 is the structure for amplifying schematic diagram of the netted folliculus device of dividing plate of the present invention;
Fig. 5 is that the netted folliculus device of dividing plate of the present invention adopts first of irregular holes structure to implement illustration;
Fig. 6 is that the netted folliculus device of dividing plate of the present invention adopts second of irregular holes structure to implement illustration;
Fig. 7 is that the netted folliculus device of dividing plate of the present invention adopts the 3rd of irregular holes structure to implement illustration;
Fig. 8 is the enforcement structural representation that the bottom of cell body of the present invention can be a uneven inclined-plane;
Fig. 9 is the flow chart of the present invention's cell body row foam method method.
Description of reference numerals:
L1～flow channel length
L2～liquid level
L3～cell body height
1～cell body
11～liquid entrance
12～medicine liquid outlet
13～space
2～dividing plate
21～netted folliculus device
211～hexagon bee slot shape hole
212～the first irregular holes
213～the second irregular holes
214～the 3rd irregular holes
3～liquid
The cell body that 41～bottom is irregular
The dividing plate of 42～irregular holes
51～cell body is provided, be provided with a plurality of dividing plates with a plurality of holes in this cell body and preset runner to form one
52～liquid is injected by one of this cell body liquid entrance forming a cell body liquid plane, this cell body liquid plane system makes liquid follow this default flow passage in cell body higher than this liquid entrance and lower than the cell body height
53～utilize these a plurality of holes to be adsorbed on bubble in the liquid of this default flow passage, complete row's bubble and process to discharge bubble so that a plurality of bubble coalescence is understood the liquid level that moves to this cell body on to a certain degree backward thoroughly in this plurality of holes
54～will be discharged by a medicine liquid outlet by the liquid of row's bubble processing.
The specific embodiment
The invention will be further described below in conjunction with the drawings and specific embodiments, can be implemented so that those skilled in the art can better understand the present invention also, but illustrated embodiment is not as a limitation of the invention.
See also shown in Fig. 1, Fig. 2 A, be overlooking and facing cross-sectional view of cell body row's bulb apparatus of the present invention, wherein cell body row bulb apparatus contains the liquid of bubble in order to filtration, this liquid means a photoresistance liquid or is other industrial liquids, it is to include: a cell body 1, be one to have the casing of chamber, the runner of interior formation one rule of this cell body 1, the flow channel length that discloses cell body 1 in Fig. 2 B is L1; Liquid level is L2(such as Fig. 2 A); The cell body height is L3(such as Fig. 2 A).this flow channel length L1 is at least greater than 1.5 times of cell body length L 3, and this flow channel length L1 can do change according to liquid viscosity and cell body 1 external form, make liquid can walk longer distance at same cell body 1, mean that also the holdup time is more of a specified duration, the bottom of cell body 1 can be a uneven inclined-plane, also has the effect that increases the mobile distance of liquid, and its chamber is in order to take up liquid 3, have a liquid entrance 11 and a medicine liquid outlet 12, this liquid entrance 11 and this medicine liquid outlet 12 all are arranged at the bottom of this cell body 1, but medicine liquid outlet 12 can upper also can under, the present invention does not limit certainly with this, to reduce the flow-disturbing phenomenon, it is can loop back the receiving apparatus (not shown) by one to be reclaimed that this medicine liquid outlet 12 flows out liquid 3, and have a space 13(in liquid 3 upper surfaces and be the space that L3 deducts L2), a plurality of dividing plates 2, be arranged in this cell body 1, make the regular runner of the interior one-tenth one of cell body 1, at least be provided with a netted folliculus device 21 on those plural dividing plates 2, and increase setting by the number of dividing plate 2, and the flow path of liquid 3 is increased, effectively improve the probability that surface increase bubble nucleating is grown up, be beneficial to discharge the bubble in liquid 3 and can rule control fluid bubbles, strengthening row's bubble effect of liquid 3.
Above-mentioned this cell body 1 is more to be provided with an exhaust apparatus (not shown), and this exhaust apparatus is arranged at the position in cell body 1 space, this exhaust apparatus can be natural air-exhaust device (not shown) or forced exhaust unit (not shown), and this natural air-exhaust device is a hole; This forced exhaust unit is a fan motor.
see also Fig. 3, shown in Figure 4, it is the structure for amplifying schematic diagram of the netted folliculus device of the structural representation of the single dividing plate of the present invention and dividing plate, set one netted folliculus device 21 on a dividing plate 2 wherein, these netted folliculus device 21 cordings have a thickness, increase the area of bubble absorption by this thickness, and can be multiple field, dividing plate 2 consists of every version every version or individual layer, but has certain (hole) thickness, and the aperture of every layer can be single aperture, also can be the aperture not of uniform size that is staggered, this netted folliculus device 21 is that a plurality of hexagon bee slot shape hole 211 consists of, this netted folliculus device 21 can be designed to a cavernous body (not shown) and consist of, be beneficial to several bubble coalescence in netted folliculus device 21, this will be hampered by cell walls (reducing the bubble surface energy) because of bubble, increase the chance that several bubbles collect in this filter.Bubble will further reduce energy after collecting and grow up that (bubbles number reduces, single bubble volume increases), the principle of bubble nucleating is that surface energy reduces, being a natural tendency forms, be subjected to larger buoyancy to be beneficial to bubble after volume increases and float and leave processing procedure solution, or grow up eventually till the bubble disengagement liquid level.Intercepting the top bubble with dividing plate 2 again passes through; Thereby air bubble content in the minimizing liquid.
The aperture of the hole of upper this netted folliculus device 21 can utilize multiple netted folliculus device to strengthen resistance bubble row bubble effect.Can be designed to close this liquid entrance 11 less, and larger near this medicine liquid outlet 12, so when liquid 3 passes through leading portion dividing plate 2, can increase absorption and intercept the less bubble of diameter; During by stage casing dividing plate 2, i.e. the bubble of the medium-sized diameter of adsorbable obstruct; During by back segment dividing plate 2, the bubble of the large-scale diameter of adsorbable obstruct, to reach the function of the various different size bubbles of interception, pore size is used for the resistance shelves or collects bubble, aperture length is to provide bubble and is attached to chance on Kong Bi, and the surface area of passage is increased, the effect that can reach similar activated carbon is with the most absolutely bubble of filtering.
See also Fig. 5, Fig. 6, shown in Figure 7, it is first, second and third enforcement illustration of the netted folliculus device employing irregular holes structure of dividing plate of the present invention, be different from the regular honey comb structure of Fig. 4, netted folliculus device also can be designed to arbitrary polygon, polygonal or circular opening with this netted folliculus device 21.Disclosing this netted folliculus device 21 as Fig. 5 is a circle, but its inner first irregular hole 212 is consisted of by circular or ellipse; Disclosing this netted folliculus device 21 as Fig. 6 is a rectangle, but its inner second irregular hole 213 is also consisted of by circular or ellipse; Disclosing this netted folliculus device 21 as Fig. 7 is a rectangle, but its inner the 3rd irregular hole 213 consisted of by arbitrary polygon, polygonal, also can reach bubble is adsorbed the function that stays on dividing plate 2, therefore propose in the lump as the enforcement structure.
See also shown in Figure 8, it is the enforcement structural representation that the bottom of cell body of the present invention can be a uneven inclined-plane, the present embodiment and Fig. 2 A and Fig. 2 B illustrated embodiment are compared, this enforcement structure has the dividing plate 42 of the irregular cell body in a bottom 41 and an irregular holes, can implement in response to different cell body row bubble operating environments, also can reach the effect identical with Fig. 2 A and Fig. 2 B illustrated embodiment.
Seeing also shown in Figure 9ly, is the flow chart of the present invention's cell body row foam method method, and it is to include:
51～cell body is provided, be provided with a plurality of dividing plates with a plurality of holes in this cell body forming a default runner, this default flow channel length is at least greater than 1.5 times of cell body length; The aperture of those holes can be single aperture, also can be the aperture not of uniform size that is staggered; The bottom of this cell body is a non-level inclined-plane.
52～liquid is injected by one of this cell body liquid entrance forming a cell body liquid plane, this cell body liquid plane system makes liquid follow this default flow passage in cell body higher than this liquid entrance and lower than the cell body height; The liquid level of this liquid higher than this liquid entrance and lower than this cell body the height.
53～utilize these a plurality of holes to be adsorbed on bubble in the liquid of this default flow passage, complete row's bubble and process to discharge bubble so that a plurality of bubble coalescence is understood the liquid level that moves to this cell body on to a certain degree backward thoroughly in this plurality of holes; These a plurality of holes are that a plurality of hexagon bee slot shape holes consist of; These a plurality of holes are that arbitrary polygon, polygonal or circular opening consist of.
54～will be discharged by a medicine liquid outlet by the liquid of row's bubble processing.
Exposure by above-mentioned Fig. 1 to Fig. 9, can understand the present invention is a kind of cell body row bulb apparatus, the cell body of one liquid medicine storage is set in the apparatus for coating in coating process, this cell body can be by being provided with at least a netted folliculus device on plural dividing plate, and this netted folliculus device can effectively be tackled the bubble in liquid, makes the liquid that flows out cell body have best still stable function.Arrange and increase by the dividing plate number, and the flow path of liquid is increased, strengthen row's bubble effect of liquid.And all be arranged at the bottom of this cell body by this liquid entrance and this medicine liquid outlet, the flow-disturbing when flowing to reduce liquid sneaks into to reduce gas the chance that forms bubble.In automatic producing device, it has high practicality, also can reach the function that improves product yield and reduce costs, therefore propose patent application to seek the protection of patent right.
The above embodiment is the preferred embodiment that proves absolutely that the present invention lifts, and protection scope of the present invention is not limited to this.Being equal to that those skilled in the art do on basis of the present invention substitutes or conversion, all within protection scope of the present invention.Protection scope of the present invention is as the criterion with claims.
Claims (21)
1. a cell body is arranged bulb apparatus, contains the liquid of bubble in order to removal, it is characterized in that, it is to include:
One cell body has a hollow chamber in order to take up liquid to form a liquid plane;
One liquid entrance and a medicine liquid outlet; And
A plurality of dividing plates are spaced and are arranged in this cell body, and wherein, the two ends of each these a plurality of dividing plate all contact with this cell body, and have a plurality of holes.
2. cell body is arranged bulb apparatus as claimed in claim 1, it is characterized in that, wherein this cell body is more to be provided with an exhaust apparatus, and the position of this exhaust apparatus is at least higher than 1/2nd of this cell body height.
3. cell body is arranged bulb apparatus as claimed in claim 2, it is characterized in that, wherein this exhaust apparatus can be natural air-exhaust device or forced exhaust unit.
4. cell body is arranged bulb apparatus as claimed in claim 1, it is characterized in that, wherein these a plurality of holes are made of a cavernous body.
5. cell body is arranged bulb apparatus as claimed in claim 1, it is characterized in that, wherein each dividing plate is that a multiple field consists of every version.
6. cell body row bulb apparatus as claimed in claim 1, is characterized in that, wherein, is more greater than the aperture away from this a plurality of holes of this dividing plate of this liquid entrance near the aperture of this a plurality of holes of this dividing plate of this liquid entrance.
7. cell body is arranged bulb apparatus as claimed in claim 6, it is characterized in that, wherein these a plurality of holes are that a plurality of hexagon bee slot shape holes consist of.
8. cell body is arranged bulb apparatus as claimed in claim 6, it is characterized in that, wherein these a plurality of holes are that arbitrary polygon, polygonal or circular opening consist of.
9. cell body is arranged bulb apparatus as claimed in claim 7, it is characterized in that, wherein the aperture of these a plurality of holes is single aperture or arrangement not of uniform size.
10. cell body is arranged bulb apparatus as claimed in claim 1, it is characterized in that, wherein the bottom of this cell body is a non-level inclined-plane.
11. cell body row bulb apparatus, is characterized in that as claimed in claim 1, wherein the liquid level of this liquid is higher than this liquid entrance and lower than this cell body height.
12. cell body row bulb apparatus, is characterized in that as claimed in claim 1, wherein this liquid means a photoresistance liquid or is other industrial liquids.
13. cell body row bulb apparatus as claimed in claim 1 comprises more that wherein one loops back receiving apparatus and connects this medicine liquid outlet, be directed into this liquid entrance in order to discharging a liquid from this medicine liquid outlet.
14. cell body row bulb apparatus, is characterized in that as claimed in claim 1, wherein this a plurality of dividing plates are with formation liquid runner, and this flow channel length is at least greater than 1.5 times of cell body length.
15. a cell body row foam method method is characterized in that, it is to include:
One cell body is provided, is provided with a plurality of dividing plates with a plurality of holes in this cell body and presets runner to form one;
Liquid is injected by one of this cell body liquid entrance form a cell body liquid plane, this cell body liquid plane system makes liquid follow this default flow passage in cell body higher than this liquid entrance and lower than the cell body height;
Utilize these a plurality of holes to be adsorbed on bubble in the liquid of this default flow passage, complete row's bubble and process to discharge bubble so that a plurality of bubble coalescence is understood the liquid level that moves to this cell body on to a certain degree backward thoroughly in this plurality of holes; And
The liquid of being processed by row's bubble is discharged by a medicine liquid outlet.
16. cell body row foam method method as described in claims 15 is characterized in that wherein the aperture of those holes can be single aperture, also can be the aperture not of uniform size that is staggered.
17. cell body row foam method method as described in claims 15 is characterized in that wherein the bottom of this cell body is a non-level inclined-plane.
18. cell body row foam method method as described in claims 15 is characterized in that wherein these a plurality of holes are that a plurality of hexagon bee slot shape holes consist of.
19. cell body row foam method method as described in claims 15 is characterized in that wherein these a plurality of holes are that arbitrary polygon, polygonal or circular opening consist of.
20. as described in claims 15 cell body row foam method method is characterized in that, wherein the liquid level of this liquid is higher than this liquid entrance and lower than this cell body height.
21. as described in claims 15 cell body row foam method method is characterized in that, wherein should default flow channel length at least greater than 1.5 times of cell body length.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100146002A TWI440607B (en) | 2011-12-13 | 2011-12-13 | Vacuum Elimination Device and Method |
| TW100146002 | 2011-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103157583A true CN103157583A (en) | 2013-06-19 |
| CN103157583B CN103157583B (en) | 2016-12-21 |
Family
ID=48581414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210537689.2A Active CN103157583B (en) | 2011-12-13 | 2012-12-13 | Trough body bubble discharging device and method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103157583B (en) |
| TW (1) | TWI440607B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104841613A (en) * | 2015-04-07 | 2015-08-19 | 烟台天奕电子有限公司 | Novel multifunctional dip coating gluing tank and use method thereof |
| CN108296134A (en) * | 2018-01-27 | 2018-07-20 | 武汉华星光电半导体显示技术有限公司 | Defoaming device and bubble removing method |
| CN108543640A (en) * | 2018-04-02 | 2018-09-18 | 深圳市华星光电技术有限公司 | A kind of liquid discharge device |
| CN110947578A (en) * | 2018-09-27 | 2020-04-03 | 细美事有限公司 | Chemical liquid supply device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US3596881A (en) * | 1967-08-14 | 1971-08-03 | Fuji Photo Film Co Ltd | Ultrasonic defoaming apparatus |
| JPH07126874A (en) * | 1993-11-02 | 1995-05-16 | Takasago Thermal Eng Co Ltd | Method and device for decreasing dissolved oxygen of water in heat storage tank |
| JP2005246183A (en) * | 2004-03-03 | 2005-09-15 | Hitachi Industries Co Ltd | Oil separation apparatus |
| CN200998609Y (en) * | 2007-01-23 | 2008-01-02 | 章大初 | Separator for water and vapor |
| JP2009160489A (en) * | 2007-12-28 | 2009-07-23 | Kazuaki Owada | Purification apparatus of waste liquid |
| CN101670215A (en) * | 2008-09-10 | 2010-03-17 | 细美事有限公司 | A segregator that separates liquid vapor mixture and a cardinal plate processing equipment containing the segregator |
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2011
- 2011-12-13 TW TW100146002A patent/TWI440607B/en active
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2012
- 2012-12-13 CN CN201210537689.2A patent/CN103157583B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3596881A (en) * | 1967-08-14 | 1971-08-03 | Fuji Photo Film Co Ltd | Ultrasonic defoaming apparatus |
| JPH07126874A (en) * | 1993-11-02 | 1995-05-16 | Takasago Thermal Eng Co Ltd | Method and device for decreasing dissolved oxygen of water in heat storage tank |
| JP2005246183A (en) * | 2004-03-03 | 2005-09-15 | Hitachi Industries Co Ltd | Oil separation apparatus |
| CN200998609Y (en) * | 2007-01-23 | 2008-01-02 | 章大初 | Separator for water and vapor |
| JP2009160489A (en) * | 2007-12-28 | 2009-07-23 | Kazuaki Owada | Purification apparatus of waste liquid |
| CN101670215A (en) * | 2008-09-10 | 2010-03-17 | 细美事有限公司 | A segregator that separates liquid vapor mixture and a cardinal plate processing equipment containing the segregator |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104841613A (en) * | 2015-04-07 | 2015-08-19 | 烟台天奕电子有限公司 | Novel multifunctional dip coating gluing tank and use method thereof |
| CN104841613B (en) * | 2015-04-07 | 2017-03-01 | 烟台天奕电子有限公司 | A kind of multi-functional dip-coating coating groove and its using method |
| CN108296134A (en) * | 2018-01-27 | 2018-07-20 | 武汉华星光电半导体显示技术有限公司 | Defoaming device and bubble removing method |
| CN108543640A (en) * | 2018-04-02 | 2018-09-18 | 深圳市华星光电技术有限公司 | A kind of liquid discharge device |
| CN108543640B (en) * | 2018-04-02 | 2020-07-03 | 深圳市华星光电技术有限公司 | Liquid discharge device |
| CN110947578A (en) * | 2018-09-27 | 2020-04-03 | 细美事有限公司 | Chemical liquid supply device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201323341A (en) | 2013-06-16 |
| CN103157583B (en) | 2016-12-21 |
| TWI440607B (en) | 2014-06-11 |
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