CN103157565B - Atomization device and control method thereof - Google Patents
Atomization device and control method thereof Download PDFInfo
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- CN103157565B CN103157565B CN201210207690.9A CN201210207690A CN103157565B CN 103157565 B CN103157565 B CN 103157565B CN 201210207690 A CN201210207690 A CN 201210207690A CN 103157565 B CN103157565 B CN 103157565B
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- 238000000889 atomisation Methods 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000007788 liquid Substances 0.000 claims abstract description 184
- 239000007921 spray Substances 0.000 claims abstract description 16
- 230000001105 regulatory effect Effects 0.000 claims description 16
- 239000012530 fluid Substances 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 6
- 230000008054 signal transmission Effects 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 117
- 238000005507 spraying Methods 0.000 description 13
- 239000010408 film Substances 0.000 description 6
- 241000209094 Oryza Species 0.000 description 5
- 235000007164 Oryza sativa Nutrition 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 5
- 235000009566 rice Nutrition 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 235000013339 cereals Nutrition 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 210000001951 dura mater Anatomy 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000009689 gas atomisation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000032696 parturition Effects 0.000 description 1
- 238000009527 percussion Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
An atomization device and a control method thereof. The atomization device comprises a control unit, a closed liquid container and a spray head which are connected with each other, a first gas pipeline which is connected with the spray head and used for allowing first gas to enter the spray head, a first pressure sensor which senses gas pressure in the first gas pipeline to generate a first signal, a second gas pipeline which is connected with the closed liquid container and used for allowing second gas to enter the closed liquid container, a second pressure sensor which senses back pressure in the closed liquid container to generate a second signal, and a second flow control piece which controls the flow of the second gas, wherein liquid flowing into the spray head is atomized through the collision of the first gas. The control unit receives the first signal and the second signal and carries out operation, so that the second flow control part adjusts the flow of the second gas entering the closed liquid container according to the operation result to control the back pressure of the closed liquid container, and further control the flow of the atomized liquid sprayed from the spray head.
Description
Technical field
The present invention relates to a kind of atomising device and control method thereof, espespecially a kind of can even spraying to produce atomising device and the control method thereof of micro-how rice film.
Background technology
Atomization coating technique is that collisions principle makes liquid transition be mist state, and it mainly utilizes a high-speed gas to clash into drop, makes drop form the molecule water smoke molecule of the vector-oriented percussion of a tool, to erupt on target object.The material that its object is to that object is enclosed one or more layers has specific function, to improve photoelectric characteristic or the structure on surface, promotes utilizability whereby, improves the use value of product simultaneously.The industry of atomization coating technique application is very extensive, as thin-film solar cells, OLED and giving birth to cures how rice sprayed product exploitation etc.
The basic building block of general atomising device is liquid supply tank and shower nozzle, its control method enters shower nozzle for utilizing a high-speed gas, because entering of gas is caused flow velocity to rise and produced negative pressuren zone in shower nozzle, and then the liquid in drive supply tank is sucked in shower nozzle, then through high-speed gas shock and then atomization thus.Due in the process of atomization, gas flow rate is faster, and the degree that liquid is knocked is higher, and gas velocity also determines the negative pressure in shower nozzle, and then the flow of impact spraying.If gas velocity too soon, the negative pressure in shower nozzle increases, and excessive liquid will be forced to be sucked into shower nozzle, then the easy problem producing spraying splashing and backflow on workpiece; If gas velocity is too slow, except fogging degree is low, the flow of spraying also needs point-device control, just can produce excellent fog.
Current sprayer unit all directly controls the gas flow entering shower nozzle, is taken out of to shower nozzle to clash into atomization by liquid from supply tank, and the flow sprayed cannot precisely be controlled by trace, and the atomizing particle size causing the atomization of liquid to spray is often excessive.Therefore in micro-how rice film coated now, the gun spraying mode of traditional type cannot have been reached precisely and the equally distributed spraying coating of nominal particle size, and industry thus cannot be supplied effectively to utilize.
Summary of the invention
In view of the disadvantages of above-mentioned prior art, main purpose of the present invention is to provide a kind of atomising device and control method thereof, accurately can control flow and the spouting velocity of atomized liquid.
The invention provides a kind of atomising device, there is shower nozzle and be connected this shower nozzle and be equipped with the enclosed liquid container of predeterminable quantity of liquid, this atomising device comprises: the first gas piping, it connects this shower nozzle, enter this shower nozzle with for the first gas, to make the liquid thereby flowing to this shower nozzle be atomized by this first gas, and spray from this shower nozzle, when the liquid of this enclosed liquid container reduces, the back pressure of this enclosed liquid container can drop to a negative pressure by atmospheric pressure; First pressure sensor, it is connected to this first gas piping, in order to sense the pressure of the first gas entering this shower nozzle in this first gas piping, and produces the first signal according to this; Second gas piping, it connects this enclosed liquid container, with for the second gas flow to this enclosed liquid container, to adjust back pressure in this enclosed liquid container; Second flow control member, it is connected to this second gas piping, in order to control the flow entering this second gas of this enclosed liquid container; Second pressure sensor, it is connected to this enclosed liquid container, in order to sense the back pressure of this enclosed liquid container, and produces the second signal according to this; And control unit, it receives this first signal and this second signal and to go forward side by side row operation, to send the second flow-control signal according to operation result, this second flow control member is made to enter the flow of this enclosed liquid container by this second gas in this second gas piping of adjustment, and adjust the back pressure of this enclosed liquid container, and then the fluid flow through atomization that control sprays from this shower nozzle.
Described atomising device also comprises the vacuum generator being connected to this enclosed liquid container, this control unit sends vacuum control signal according to this operation result, with the back pressure making this vacuum generator adjust this enclosed liquid container, and then the fluid flow through atomization that control sprays from this shower nozzle.
Secondly, the invention provides a kind of control method of atomising device, this atomising device comprise control unit, shower nozzle, connect this shower nozzle and be equipped with predeterminable quantity of liquid enclosed liquid container, connect this shower nozzle the first gas piping and be connected to the first pressure sensor of this first gas piping, the second gas piping connecting this enclosed liquid container and the second pressure sensor, this control method comprises the following steps: 1) make this liquid flow into this shower nozzle from this enclosed liquid container; 2) the first gas is made to flow into this shower nozzle through this first gas piping, and make the pressure entering the first gas of this shower nozzle in this first gas piping of this first pressure sensor senses, to produce the first signal and by this first signal transmission to this control unit, and make the second gas flow into this enclosed liquid container through this second gas piping, with by the back pressure in this enclosed liquid container of this second pressure sensor senses, and produce the second signal and by this second signal transmission to this control unit; And 3) make this control unit receive this first and second signal going forward side by side row operation, the flow of this enclosed liquid container is entered to adjust this second gas in this second gas piping according to operation result, and adjust the back pressure of this enclosed liquid container, and then the fluid flow through atomization that control sprays from this shower nozzle.
Compared to prior art, atomising device of the present invention and control method thereof, can according to the back pressure of enclosed liquid container and enter shower nozzle the first gas pressure between pressure reduction, control the gas flow of the second gas entering enclosed liquid container, to control flow velocity or the flow of the atomized liquid sprayed.
Accompanying drawing explanation
Fig. 1 outline illustrates the basic building block block diagram of atomising device of the present invention;
Fig. 2 is the component diagram of an embodiment of atomising device of the present invention.
Primary clustering symbol description
10 shower nozzles
11, the 11 ' first pressure sensor
12 first flow control pieces
13 first pressure regulating member
20 enclosed liquid containers
20a, 20b, 20c switch valve
21, the 21 ' second pressure sensor
22, the 22 ' second flow control member
23 second pressure regulating member
30,30 ' control unit
301 controllers
302 processors
31 vacuum generators
4 substrates
41 films
A1 first gas piping
A2 second gas piping
A3 vacuum line
S1 first signal
S2 second signal
C2 second flow-control signal
C3 vacuum control signal
L liquid.
Detailed description of the invention
By specific embodiment, embodiments of the present invention are described below, person skilled in the art scholar can understand other advantage of the present invention and effect easily by content disclosed in the present specification.The present invention also can be implemented by other different specific embodiment or be applied.
Should be appreciated that structure, ratio, size etc. that this description institute accompanying drawings illustrates, content all only in order to coordinate description to disclose, for the understanding of personage and the reading of being familiar with this skill, and be not used to limit the enforceable qualifications of the present invention, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the present invention can produce and the object that can reach, still all should drop on disclosed technology contents and obtain in the scope that can contain.Meanwhile, quote in this description as the term such as " first " and " second ", be also only be convenient to describe understand, and be not used to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the present invention.
Refer to Fig. 1, it is the basic building block schematic diagram of atomising device of the present invention.
As shown in Figure 1, atomising device has the enclosed liquid container 20 of shower nozzle 10 and containing liquid L, mainly comprises the first gas piping A1, the first pressure sensor 11, second gas piping A2, the second pressure sensor 21, second flow control member 22 and control unit 30.
First gas piping A1, connects shower nozzle 10, flows into shower nozzle, to make the liquid L of inflow shower nozzle 10, be atomized by this first gas with for the first gas.Specifically, liquid L flows into enclosed liquid container 20 from switch valve 20b, shower nozzle 10 is flow to again through switch valve 20a, first gas (such as nitrogen or air) proceeds to shower nozzle 10 through the first gas piping A1 simultaneously, liquid L is made to be subject to the shock of the first gas and to be atomized, again, the interior high speed due to the first gas of shower nozzle 10 enters and in wherein producing negative pressure, causes the liquid L in enclosed liquid container 20 to enter in shower nozzle 10 by the attraction of this negative pressure.Therefore, the first gas enters the speed of shower nozzle 10, can affect liquid L through the particle size of atomization and the flow from shower nozzle 10 ejection.
First pressure sensor 11, is connected to the first gas piping A1, produces the first signal S1 in order to the pressure sensed in the first gas piping A1.As shown in Figure 1, first pressure sensor 11 is connected to contiguous first gas piping A1 and connects shower nozzle 10 part, to sense the pressure of the first gas being about to enter shower nozzle 10 in the first gas piping A1, and produce the first signal S1 according to sensed pressure and transmit it to control unit 30.
Because enclosed liquid container 20 is confined space, when liquid L from this enclosed liquid container 20 flow to shower nozzle 10 and ejection after, the space of this enclosed liquid container 20 remainder will produce a vacuum state, and now the back pressure of this enclosed liquid container 20 is a little less than an atmospheric pressure.Second gas piping A2, connects enclosed liquid container 20, flow to enclosed liquid container 20 with for the second gas (such as nitrogen or air).Second gas passes in enclosed liquid container 20, the back pressure in adjustable enclosed liquid container 20, and the large I of back pressure affects the flow that liquid flows into shower nozzle 10.
Second flow control member 22, is connected to the second gas piping A2, in order to control the flow entering the second gas of enclosed liquid container 20.Second flow control member 22 can be such as using mass flow controllers (massflowcontroller; MFC).
Second pressure sensor 21, is connected to enclosed liquid container 20 and the second gas piping A2, produces the second signal S2 in order to sense the back pressure of enclosed liquid container 20, and the second signal S2 is transferred to control unit 30.
Control unit 30, receive the first signal S1 and the second signal S2, and computing is carried out to the first signal S1 and the second signal S2, wherein, using the first signal S1 as baseline signal, compare the second signal S2 and this baseline signal again and obtain operation result, so as to learning the back pressure needed for enclosed liquid container 20.Thus control unit 30 can according to this operation result, send the second flow-control signal C2, make the second flow control member 22 adjust the flow of the second gas in the second gas piping A2, control the back pressure of enclosed liquid container 20, and then control the liquid L through atomization from shower nozzle 10 ejection.
Embodiment is as shown in Figure 1 known, and the first gas enters shower nozzle 10 through the first gas piping A1 can produce negative pressure in shower nozzle 10, and the pressure of what the first pressure sensor 11 sensed enter the first gas of shower nozzle, can be converted into the negative pressure in shower nozzle; Second gas enters enclosed liquid container 20 through the second gas piping A2, the back pressure in adjustable enclosed liquid container 20, and the second pressure sensor 21 can sense the back pressure of enclosed liquid container 20.Therefore, adjust the balance of this negative pressure and this back pressure, the flow that rearrange liquids L sprays shower nozzle 10 can be reached.In other words, enter the flow of enclosed liquid container 20 by control second gas, the back pressure of adjustable enclosed liquid container 20, to control the flow that liquid L flows into shower nozzle.
Consult Fig. 2, it is the component diagram of an embodiment of atomising device of the present invention.Need expositor, the first pressure sensor 11 ', the second pressure sensor 21 ', the second flow control member 22 ', control unit 30 ' are respectively an embodiment of the first pressure sensor 11, second pressure sensor 21, second flow control member 22 shown in Fig. 1, control unit 30.
Enclosed liquid container 20 separately can connect a vacuum generator 31, in order to through vacuum line A3 and switch valve 20c, makes to produce vacuum state in enclosed liquid container 20.Control unit 30 ' according to this operation result, can send vacuum control signal C3, produces vacuum to adjust the back pressure of enclosed liquid container 20 to make in vacuum generator 31.
Control unit 30 ' can comprise controller 301 (such as PID controller) and processor 302 (such as computer).
First gas piping A1 is provided with the first pressure regulating member 13 of the pressure of adjustable first gas and can controls the first flow control piece 12 of flow of the first gas, and wherein, the first pressure sensor 11 ' is arranged between shower nozzle 10 and first flow control piece 12.Control unit 30 ' can send the first pressure adjusting signal according to this operation result, the pressure controlling in the first gas piping to make the first pressure regulating member 13.Control unit 30 ' also can send first flow according to this operation result and control signal, to make first flow control piece 12 control flow check to the fluid flow of shower nozzle 10.Control flow and pressure that the first gas enters shower nozzle 10, the negative pressure in shower nozzle 10 can be controlled.Such as, first flow control piece 12 can be needle-valve or choke valve, and the first pressure regulating member 13 can be pressure regulator valve.
Second gas piping A2 is provided with the second pressure regulating member 23 of the pressure of adjustable second gas.Control unit 30 ' can send the second pressure adjusting signal according to this operation result, the gas pressure controlling in the second gas piping A2 to make the second pressure regulating member 23.Such as, the second pressure regulating member 23 can be pressure regulator valve.Control unit 30 ' can according to this operation result, send the second flow-control signal C2, the second flow control member 22 ' is made to adjust the flow of the second gas entering enclosed liquid container 20 in the second gas piping A2, control the back pressure of enclosed liquid container 20, and then control the liquid L through atomization from shower nozzle 10 ejection.
In detail, first gas enters shower nozzle 10 and produces high velocity impact with the liquid L in shower nozzle 10, liquid L is atomized, and produces small liquid L atomizing particle size, now the liquid L in enclosed liquid container 20 can be continued to be sucked in shower nozzle 10 because of internal negative pressure at shower nozzle 10.
When the speed that the first gas proceeds to shower nozzle 10 is faster, although the fogging degree of liquid L can be made to improve, but also cause the negative pressure in shower nozzle 10 to increase, the amount making liquid L be brought in shower nozzle 10 increases, therefore the micro-vacuum that must produce through vacuum generator 31, control the back pressure in enclosed liquid container 20, flow into the flow of shower nozzle 10 to maintain liquid L in enclosed liquid container 20, what make can not be taken out of in a large number by the negative pressure in shower nozzle 10.In addition, if the first gas enters the excessive velocities of shower nozzle 10, in some trace sprayings, established film on workpiece can be caused to be destroyed, and produce the problem of a large amount of liquid splash and backflow, this can control by first flow control piece 12 and the first pressure regulating member 13 speed that first gas enters shower nozzle 10, controls the flow that liquid L enters shower nozzle 10.
On the other hand, when the speed of the first gas reduces, the negative pressure that shower nozzle 10 can be made to export reduces, the amount that liquid L is brought in shower nozzle 10 just reduces, and when the liquid L in enclosed liquid container 20 reduces gradually, under the impact of the back pressure of enclosed liquid container 20, liquid L is gradually stagnated and does not flow, occur spraying intermittently or the situation of no liquid ejection.Now must drive the second flow control member 22 ', control the second gas by the second flow control member 22 ' and enter the gas flow of enclosed liquid container 20 to control the back pressure of enclosed liquid container 20, and then generation one power flows in shower nozzle 10 by the first gas atomization by liquid L.
Therefore, first flow control piece 12 and the first pressure regulating member 13 is utilized to control the speed of the first gas, and utilize the first pressure sensor 11 ' to sense the pressure of the first gas, the second pressure sensor 21 ' is utilized to sense the back pressure of enclosed liquid container, do a computing by both pressure reduction aforementioned to judge, and control the second flow control member 22 ' through control unit 30 ' or control the switch valve 20c of vacuum generator 31, to control gas flow or the pull of vacuum that the second gas enters enclosed liquid container 20, so as to controlling the back pressure of enclosed liquid container 20, reach the uninterrupted precisely controlling ejection atomization quantity.
In addition, for Fig. 2, in a specific embodiment, in the first gas piping A1, in the pressure of the first gas, flow and the second gas piping A2, the pressure of the second gas can be set as fixing, only control the flow of the second gas, with the back pressure of stable enclosed liquid container 20.In other words, the pressure of the first gas in the first gas piping 20, flow are through the initially adjustment or just no longer change after controlling of the first pressure regulating member 13 and first flow control piece 12.
Processor 302 receives the first signal S1 that the first gas produces and carries out computing, the a reference value calculated is reached controller 301 as baseline signal, and control the flow of the second gas to adjust the back pressure of enclosed liquid container 20 by the second flow control member 22 ' (such as using mass flow controllers), recycle the second pressure sensor 21 ' and sense the back pressure of enclosed liquid container to be sent to control unit 30 ', through comparing with this baseline signal and performing proportional-integral-differential (proportion-integral-ifferential via controller 301; PID) computing, controls to control the second flow control member 22 ' flow that the second gas enters enclosed liquid container 20, reaches required stable back pressure, and then controls the fluid flow entering shower nozzle 10.
Therefore, enter liquid L in shower nozzle 10 is formed micro-how grain of rice footpath atomisation by the first gas collisions of flowing into through the first gas piping A1, even spray coating to form micro-how rice film 41 on the surface of substrate 4, and can eliminate the problems such as the liquid spitting back that produces when being sprayed onto substrate 4 surface and sinuous flow.
Below utilize Fig. 2 that the control method of atomising device of the present invention is described.
First, the inlet port switch valve 20b opening enclosed liquid container 20 makes liquid stream in enclosed liquid container 20, and closes inlet port switch valve 20b when the liquid L in enclosed liquid container 20 reaches a scheduled volume.
Then, make the first gas flow into shower nozzle 10 through the first gas piping A1, and make the first pressure sensor 11 ' sense the pressure of the first gas in the first gas piping A1 to produce the first signal S1 and the first signal S is transferred to control unit 30 '; Because the first gas enters shower nozzle 10 at a high speed, produce negative pressure, now open the flow export switch valve 20a of enclosed liquid container 20 in shower nozzle 10, the liquid L in enclosed liquid container 20 can enter in shower nozzle 10 by the attraction of this negative pressure.
Make the second gas flow into enclosed liquid container 20 through the second gas piping A2, and make the second pressure sensor 21 ' sense back pressure in enclosed liquid container 20 to produce the second signal S2 and the second signal S2 is transferred to control unit 30 '.
Finally, control unit 30 ' receives the first signal S1 and the second signal S2 and to go forward side by side row operation, enter the flow of enclosed liquid container 20 to control the second gas in the second gas piping A2 according to operation result, and then control the flow of the liquid through atomization sprayed from shower nozzle 10.In other words, when the speed of the first gas slows down, negative pressure in shower nozzle 10 also with minimizing, the flow making liquid L flow into shower nozzle 10 reduces, add the back pressure impact of enclosed liquid container 20, there is situation that is intermittent or no liquid ejection of spraying, the second flow control member 22 ' now can be made to control to enter the amount of liquid of enclosed liquid container 20 to control the back pressure of enclosed liquid container, make generation one power order about liquid L and flow into shower nozzle 10 from enclosed liquid container 20.
Secondly, control unit 30 ' also can control according to this operation result the vacuum generator 31 that is connected to enclosed liquid container 20, make to make vacuum generator 31 to produce vacuum state in enclosed liquid container 20, adjust the back pressure of enclosed liquid container 20, and then control the fluid flow flowing into shower nozzle 10.In other words, negative pressure can be produced in shower nozzle 10 when first gas is to enter shower nozzle 10 at a high speed, the liquid L in enclosed liquid container 20 is caused to be continued to enter in shower nozzle 10 by this vacuum suction, although the speed that the first gas enters shower nozzle 10 is faster, the degree be atomized through the liquid of atomization is better, but this too increases the negative pressure in shower nozzle 10, cause the liquid flowing into shower nozzle 10 excessive.Therefore, can control to produce extra vacuum in vacuum generator 31 pairs of enclosed liquid containers 20 according to this operation result by control unit 30 ', to maintain the stability of its back pressure, and then maintain the fluid flow flowing to shower nozzle 10 from enclosed liquid container 20.
During concrete enforcement, in implementing at processing procedure, do not have excessive and too small atomization air quantity variation, the flow and the pressure that enter the first gas of shower nozzle 10 are essentially fixed value in the atomization process of this liquid.In addition, control unit 30 ' also can control according to operation result the pressure that the second pressure regulating member 23 adjusts the second gas in the second gas piping A2.During concrete enforcement, the second gas pressure in the second gas piping A2 is essentially fixed value in the atomization process of this liquid.
In sum, atomising device of the present invention and control method thereof can control the grain size of atomized liquid, make its microminiaturization, and can control flow velocity or the flow of atomized liquid ejection, reach the ulv spraying of 1c.c. per minute.In addition, atomising device of the present invention and control method thereof, can the back pressure signal of the enclosed liquid of feedback in real time container, to maintain the uniformly dispersing of spraying, therefore, the large area spraying of microatomization can be realized, and produce micro-nanometer membrane layer of high uniformity, save consumption of materials simultaneously.The present invention can be applicable to oil rub resistance film, organic and inorganic light-emitting tunic, with on the thin film manufacture process such as anti-reflecting layer and abrasion performance dura mater.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Those skilled in the art all without prejudice under spirit of the present invention and category, can carry out modifying to above-described embodiment and change.Therefore, the scope of the present invention, should listed by claims.
Claims (8)
1. an atomising device, has shower nozzle and is connected this shower nozzle and is equipped with the enclosed liquid container of predeterminable quantity of liquid, and this atomising device comprises:
First gas piping, it connects this shower nozzle, enters this shower nozzle with for the first gas, to make the liquid thereby flowing to this shower nozzle be atomized by this first gas, and sprays from this shower nozzle;
First pressure sensor, it is connected to this first gas piping, in order to sense the pressure of the first gas entering this shower nozzle in this first gas piping, and produces the first signal according to this;
Second gas piping, it connects this enclosed liquid container, with for the second gas flow to this enclosed liquid container, to adjust the back pressure in this enclosed liquid container;
Second flow control member, it is connected to this second gas piping, in order to control the flow entering this second gas of this enclosed liquid container;
Second pressure sensor, it is connected to this enclosed liquid container, in order to sense the back pressure of this enclosed liquid container, and produces the second signal according to this;
Control unit, it receives this first signal and this second signal and to go forward side by side row operation, to send one second flow-control signal according to operation result, the flow of this enclosed liquid container is entered by this second gas in this second gas piping of adjustment to make this second flow control member, and control the back pressure of this enclosed liquid container, and then the fluid flow through atomization that control sprays from this shower nozzle; And
Vacuum generator, it is connected to this enclosed liquid container by a switch valve and does not connect this shower nozzle, and this second gas piping connects this enclosed liquid container and not through this switch valve;
Wherein, this control unit sends vacuum control signal according to this operation result, make to make this vacuum generator to produce vacuum state in this enclosed liquid container, to control the back pressure of this enclosed liquid container, and then the fluid flow through atomization that control sprays from this shower nozzle.
2. atomising device according to claim 1, it is characterized in that, this atomising device also comprises the second pressure regulating member being connected to this second gas piping, it is characterized in that, this second pressure regulating member is in order to adjust the pressure of this second gas in this second gas piping.
3. atomising device according to claim 2, is characterized in that, the pressure of the second gas in this second gas piping is essentially fixed value in the atomization process of this liquid.
4. atomising device according to claim 1, it is characterized in that, this atomising device also comprises the first flow control piece and the first pressure regulating member that are connected to this first gas piping, wherein, this first pressure sensor is arranged between this shower nozzle and this first flow control piece, to control by this first flow control piece the flow entering the first gas of this shower nozzle, and this first pressure regulating member is in order to control the pressure of the first gas in this first gas piping.
5. atomising device according to claim 4, is characterized in that, the flow of the first gas in this first gas piping or pressure are essentially fixed value in the atomization process of this liquid.
6. the control method of an atomising device, this atomising device comprises control unit, shower nozzle, connect this shower nozzle and be equipped with the enclosed liquid container of the liquid of scheduled volume, connect the first gas piping of this shower nozzle and be connected to the first pressure sensor of this first gas piping, connect the second gas piping of this enclosed liquid container, second pressure sensor and be connected to this enclosed liquid container by a switch valve and do not connect the vacuum generator of this shower nozzle, wherein, this second gas piping connects this enclosed liquid container and not through this switch valve, this control method comprises the following steps:
1) this liquid is made to flow into this shower nozzle from this enclosed liquid container;
2) the first gas is made to flow into this shower nozzle through this first gas piping, and make the pressure entering the first gas of this shower nozzle in this first gas piping of this first pressure sensor senses, to produce the first signal, and by this first signal transmission to this control unit, and make the second gas flow into this enclosed liquid container through this second gas piping, with by the back pressure in this enclosed liquid container of this second pressure sensor senses, and produce the second signal, and by this second signal transmission to this control unit; And
3) make this control unit receive this first and second signal to go forward side by side row operation, the flow of this enclosed liquid container is entered to adjust this second gas in this second gas piping according to operation result, and control the back pressure of this enclosed liquid container, and then the fluid flow through atomization that control sprays from this shower nozzle; Make this control unit control this vacuum generator according to this operation result, make to make this vacuum generator to produce vacuum state in this enclosed liquid container, to control the back pressure of this enclosed liquid container, and then the fluid flow through atomization that control sprays from this shower nozzle.
7. control method according to claim 6, is characterized in that, step 3) also comprise and make this control unit according to this operation result, control to enter the pressure of the first gas in the flow of the first gas of this shower nozzle or this first gas piping.
8. control method according to claim 6, it is characterized in that, step 1) also comprise the inlet port switch valve opening this enclosed liquid container, to make this liquid stream in this enclosed liquid container, and when this liquid reaches a scheduled volume, close this inlet port switch valve, open the flow export switch valve of this enclosed liquid container again, make this liquid flow into this shower nozzle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100146741 | 2011-12-16 | ||
| TW100146741A TWI538742B (en) | 2011-12-16 | 2011-12-16 | Nebulization device and control method thereof |
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| Publication Number | Publication Date |
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| CN103157565A CN103157565A (en) | 2013-06-19 |
| CN103157565B true CN103157565B (en) | 2016-01-20 |
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| CN201210207690.9A Active CN103157565B (en) | 2011-12-16 | 2012-06-18 | Atomization device and control method thereof |
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| CN105312171B (en) * | 2014-07-31 | 2017-10-03 | 技鼎股份有限公司 | Spray equipment |
| CN110773341A (en) * | 2019-10-14 | 2020-02-11 | 大族激光科技产业集团股份有限公司 | Atomization cooling device, automatic processing equipment and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US3618862A (en) * | 1969-11-21 | 1971-11-09 | Morton E Phelps | Apparatus for controlling the dispersion of liquid in an air nozzle |
| EP1522349A1 (en) * | 2003-09-25 | 2005-04-13 | Fujimori Technical Laboratory Inc. | Treatment liquid supply system |
| CN101103321A (en) * | 2004-12-17 | 2008-01-09 | 德士古发展公司 | Method and system for controlling a process in a plant |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20050045536A1 (en) * | 2003-09-03 | 2005-03-03 | Fujimori Technical Laboratory Inc. | Treatment liquid supply system |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3618862A (en) * | 1969-11-21 | 1971-11-09 | Morton E Phelps | Apparatus for controlling the dispersion of liquid in an air nozzle |
| EP1522349A1 (en) * | 2003-09-25 | 2005-04-13 | Fujimori Technical Laboratory Inc. | Treatment liquid supply system |
| CN101103321A (en) * | 2004-12-17 | 2008-01-09 | 德士古发展公司 | Method and system for controlling a process in a plant |
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| Publication number | Publication date |
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| TWI538742B (en) | 2016-06-21 |
| TW201325731A (en) | 2013-07-01 |
| CN103157565A (en) | 2013-06-19 |
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