CN103149425B - MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device - Google Patents
MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device Download PDFInfo
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- CN103149425B CN103149425B CN201310066820.6A CN201310066820A CN103149425B CN 103149425 B CN103149425 B CN 103149425B CN 201310066820 A CN201310066820 A CN 201310066820A CN 103149425 B CN103149425 B CN 103149425B
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- microwave power
- power detector
- temperature compensation
- mems
- detecting device
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Abstract
The invention discloses an MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device. The device comprises a power distributor, a third microwave power sensor, a temperature compensation module and an operational circuit. Through the temperature compensation module and the operational circuit, the existing microwave power sensor is subjected to the temperature compensation, so that the precision of microwave power detection is improved.
Description
Technical field
The present invention relates to a kind of MEMS temp. compensation type microwave power-detecting device, belong to microelectromechanical systems field.
Background technology
In microwave technology development, microwave power is one of three large important parameters of microwave system.Microwave power detection is absolutely necessary in any microwave study.Modern wireless communication systems demand for development microwave power detector accurately can detect microwave power.
Modal microwave power detector is mainly based on seeback effect, there is high sensitivity and respond fast feature, as depicted in figs. 1 and 2, existing MEMS microwave power detector is by coplanar waveguide transmission line 1, tantalum nitride resistance 3, thermoelectric pile 4, gallium arsenide substrate 5 and press welding block 6.Coplanar waveguide transmission line 1 receives the power from microwave power source, and is transmitted to and is positioned at coplanar waveguide transmission line 1 end tantalum nitride resistance 3.By tantalum nitride resistance 3, power absorption is converted into heat.Heat, due to seeback effect, can be transferred to voltage and export by thermoelectric pile 4.But shortcoming is that heat can be scattered and disappeared by substrate and air, and wherein substrate dispersed heat is maximum.The DC voltage exported and temperature have stronger dependence, thus the degree of accuracy that impact detects, limit the scope of application.
Summary of the invention
Goal of the invention: the present invention proposes a kind of MEMS temp. compensation type microwave power-detecting device, can do temperature compensation, improve its accuracy of detection to existing microwave power detector.
Technical scheme: the technical solution used in the present invention is a kind of MEMS temp. compensation type microwave power-detecting device, and it comprises power divider, microwave power detector three, temperature compensation module and computing circuit; Described power divider distributes to microwave power detector three by 1/3rd of input microwave power, and 2/3rds distribute to temperature compensation module; Temperature compensation module carries out temperature compensation by computing circuit to microwave power detector three.
Described temperature compensation module comprises microwave power detector two, and is isolated the microwave power detector one of ring encirclement; Microwave power detector one and microwave power detector two respectively input the input microwave power of 1/3rd; Microwave power detector one, microwave power detector two and microwave power detector three all output to computing circuit and all output to computing circuit.Described computing circuit comprises asks poor subtracter to microwave power detector one and microwave power detector two output voltage, by the totalizer that subtracter output voltage is added with microwave power detector three, adder output signal is multiplied by the multiplier of three.
Beneficial effect: a kind of MEMS temp. compensation type of the present invention microwave power-detecting device, carries out temperature compensation by temperature compensation module and computing circuit to existing microwave power detector, thus improves the precision of microwave power detection.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing microwave power detector;
Fig. 2 is the A-A face sectional view of existing microwave power detector;
Fig. 3 is the structural representation of a kind of MEMS temp. compensation type of the present invention microwave power-detecting device.
Embodiment
Below in conjunction with the drawings and specific embodiments, illustrate the present invention further, these embodiments should be understood only be not used in for illustration of the present invention and limit the scope of the invention, after having read the present invention, the amendment of those skilled in the art to the various equivalent form of value of the present invention has all fallen within the application's claims limited range.
The present invention includes power divider 16, microwave power detector three C, temperature compensation module and computing circuit.Wherein temperature compensation module comprises microwave power detector two B and microwave power detector one A.Computing circuit comprises subtracter, totalizer and multiplier.
As shown in Figure 3, microwave power to be measured is ingoing power divider 16 first, is divided into the identical microwave signal of three power by power divider 16, and is input to microwave power detector one A, microwave power detector two B and microwave power detector three C respectively.Wherein the outer of microwave power detector one A is arranged with the shading ring 11 etched by plasma dry etch process, makes microwave power detector one A form heat insulation isolated island structure.The degree of depth of described shading ring 11 is 90um, and width is 5um.Be full of air in shading ring 11, because air is good insulating medium, make the output of microwave power detector one A more accurate.Due to the thermolysis of substrate, the voltage that microwave power detector two B and microwave power detector three C is exported can comprise certain error.The error size of microwave power detector two B and these two sensors of microwave power detector three C is equal, positive and negative identical.
Microwave power detector two B and the equal output voltage of microwave power detector one A are in the subtracter of computing circuit, and subtracter asks the poor error calculated caused by temperature to both.Subtracter outputs to totalizer, and another input end of totalizer connects microwave power detector three C.The error that subtracter obtains by totalizer is added on the output voltage of microwave power detector three C again, realizes temperature compensation.Adder output is connected to multiplier.Power measured by a microwave power detector is only 1/3rd of input microwave power, so the voltage of multiplier to input is multiplied by three again, obtains final output voltage.
Claims (3)
1. a MEMS temp. compensation type microwave power-detecting device, is characterized in that, comprises power divider (16), microwave power detector three (C), temperature compensation module and computing circuit;
Described power divider (16) distributes to microwave power detector three (C) by 1/3rd of input microwave power, and 2/3rds of input microwave power distributes to temperature compensation module;
Temperature compensation module carries out temperature compensation by the output voltage of computing circuit to microwave power detector three (C).
2. MEMS temp. compensation type microwave power-detecting device according to claim 1, it is characterized in that, described temperature compensation module comprises microwave power detector two (B), and is isolated the microwave power detector one (A) that ring (1) surrounds; Microwave power detector one (A) and microwave power detector two (B) respectively input the input microwave power of 1/3rd; Microwave power detector one (A), microwave power detector two (B) and microwave power detector three (C) all output to computing circuit.
3. MEMS temp. compensation type microwave power-detecting device according to claim 2, it is characterized in that, described computing circuit comprises asks poor subtracter to microwave power detector one (A) and microwave power detector two (B) output voltage, by the totalizer that subtracter output voltage is added with microwave power detector three (C), adder output signal is multiplied by the multiplier of three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310066820.6A CN103149425B (en) | 2013-03-01 | 2013-03-01 | MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310066820.6A CN103149425B (en) | 2013-03-01 | 2013-03-01 | MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device |
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| Publication Number | Publication Date |
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| CN103149425A CN103149425A (en) | 2013-06-12 |
| CN103149425B true CN103149425B (en) | 2015-05-06 |
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| CN201310066820.6A Expired - Fee Related CN103149425B (en) | 2013-03-01 | 2013-03-01 | MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111049597B (en) * | 2019-12-30 | 2022-03-11 | 东南大学 | Thermoelectric self-detection MEMS microwave power divider and preparation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2233580Y (en) * | 1995-02-21 | 1996-08-21 | 煤炭科学研究总院唐山分院 | Microwave density meter for testing syrup density |
| CN101726661A (en) * | 2009-12-02 | 2010-06-09 | 东南大学 | Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100486110C (en) * | 2004-05-18 | 2009-05-06 | 阎跃军 | Temperature compensation attenuator |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2233580Y (en) * | 1995-02-21 | 1996-08-21 | 煤炭科学研究总院唐山分院 | Microwave density meter for testing syrup density |
| CN101726661A (en) * | 2009-12-02 | 2010-06-09 | 东南大学 | Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power |
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| CN103149425A (en) | 2013-06-12 |
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Granted publication date: 20150506 Termination date: 20180301 |