CN103149425A - MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device - Google Patents
MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device Download PDFInfo
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- CN103149425A CN103149425A CN2013100668206A CN201310066820A CN103149425A CN 103149425 A CN103149425 A CN 103149425A CN 2013100668206 A CN2013100668206 A CN 2013100668206A CN 201310066820 A CN201310066820 A CN 201310066820A CN 103149425 A CN103149425 A CN 103149425A
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- microwave power
- power detector
- temperature compensation
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- detecting device
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Abstract
The invention discloses an MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device. The device comprises a power distributor, a third microwave power sensor, a temperature compensation module and an operational circuit. Through the temperature compensation module and the operational circuit, the existing microwave power sensor is subjected to the temperature compensation, so that the precision of microwave power detection is improved.
Description
Technical field
The present invention relates to a kind of MEMS temp. compensation type microwave power-detecting device, belong to the microelectromechanical systems field.
Background technology
In the microwave technology development, microwave power is one of three large important parameters of microwave system.Microwave power detection is absolutely necessary in any microwave study.Modern wireless communication systems demand for development microwave power detector can accurately detect microwave power.
Modal microwave power detector is mainly based on the seeback effect, have high sensitivity and the fast characteristics of response, as depicted in figs. 1 and 2, existing MEMS microwave power detector is by coplanar waveguide transmission line 1, tantalum nitride resistance 3, thermoelectric pile 4, gallium arsenide substrate 5 and press welding block 6.Coplanar waveguide transmission line 1 receives the power from microwave power source, and is transmitted to and is positioned at coplanar waveguide transmission line 1 end tantalum nitride resistance 3.By tantalum nitride resistance 3 with power absorption and be converted into heat.Thermoelectric pile 4 can transfer heat to Voltage-output due to the seeback effect.But shortcoming is that heat can be lost by substrate and air, and wherein the substrate dispersed heat is maximum.DC voltage and the temperature of output have stronger dependence, thereby the degree of accuracy that impact detects has limited the scope of application.
Summary of the invention
Goal of the invention: the present invention proposes a kind of MEMS temp. compensation type microwave power-detecting device, can do temperature compensation to existing microwave power detector, improves its accuracy of detection.
Technical scheme: the technical solution used in the present invention is a kind of MEMS temp. compensation type microwave power-detecting device, and it comprises power divider, microwave power detector three, temperature compensation module and computing circuit; Described power divider will be inputted 1/3rd of microwave power and distribute to microwave power detector 2/3rds, three and distribute to temperature compensation module; Temperature compensation module is carried out temperature compensation by computing circuit to microwave power detector three.
Described temperature compensation module comprises microwave power detector two, and is isolated the microwave power detector one that ring surrounds; Microwave power detector one and microwave power detector two are respectively inputted 1/3rd input microwave power; Microwave power detector one, microwave power detector two and microwave power detector three all output to computing circuit and all output to computing circuit.Described computing circuit comprises asks poor subtracter to microwave power detector one and microwave power detector two output voltages, and the totalizer with subtracter output voltage and microwave power detector three additions multiply by three multiplier to adder output signal.
Beneficial effect: a kind of MEMS temp. compensation type of the present invention microwave power-detecting device, carry out temperature compensation by temperature compensation module and computing circuit to existing microwave power detector, thereby improved the precision of microwave power detection.
Description of drawings
Fig. 1 is the structural representation of existing microwave power detector;
Fig. 2 is the A-A face sectional view of existing microwave power detector;
Fig. 3 is the structural representation of a kind of MEMS temp. compensation type of the present invention microwave power-detecting device.
Embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the present invention, should understand these embodiment only is used for explanation the present invention and is not used in and limits the scope of the invention, after having read the present invention, those skilled in the art all fall within the application's claims limited range to the modification of the various equivalent form of values of the present invention.
The present invention includes power divider 16, microwave power detector three C, temperature compensation module and computing circuit.Wherein temperature compensation module comprises microwave power detector two B and microwave power detector one A.Computing circuit comprises subtracter, totalizer and multiplier.
As shown in Figure 3, microwave power to be measured is ingoing power divider 16 at first, is divided into three microwave signals that power is identical by power divider 16, and is input to respectively microwave power detector one A, microwave power detector two B and microwave power detector three C.Wherein the outer shading ring 11 that is formed by the plasma dry etch process etching that is arranged with of microwave power detector one A, make microwave power detector one A consist of heat insulation isolated island structure.The degree of depth of described shading ring 11 is 90um, and width is 5um.Be full of air in shading ring 11, because air is adiabatic medium preferably, make the output of microwave power detector one A more accurate.Due to the thermolysis of substrate, make the voltage of microwave power detector two B and microwave power detector three C outputs can comprise certain error.The error size of microwave power detector two B and these two sensors of microwave power detector three C equates, and is positive and negative identical.
Microwave power detector two B and the microwave power detector one equal output voltage of A are in the subtracter of computing circuit, and subtracter is asked poor to both and calculated by the caused error of temperature.Subtracter outputs to totalizer, and another input end of totalizer connects microwave power detector three C.Totalizer is added to the error that subtracter obtains on the output voltage of microwave power detector three C again, realizes temperature compensation.Adder output is connected to multiplier.Because the measured power of microwave power detector is only 1/3rd of input microwave power, so multiplier multiply by three again to the voltage of inputting, obtain final output voltage.
Claims (3)
1. a MEMS temp. compensation type microwave power-detecting device, is characterized in that, comprises power divider (16), microwave power detector three (C), temperature compensation module and computing circuit;
Described power divider (16) will be inputted 1/3rd of microwave power and distribute to microwave power detector three (C), and 2/3rds of input microwave power is distributed to temperature compensation module;
Temperature compensation module is carried out temperature compensation by computing circuit to the output voltage of microwave power detector three (C).
2. MEMS temp. compensation type microwave power-detecting device according to claim 1, is characterized in that, described temperature compensation module comprises microwave power detector two (B), and be isolated the microwave power detector one (A) that ring (1) surrounds; Microwave power detector one (A) and microwave power detector two (B) are respectively inputted 1/3rd input microwave power; Microwave power detector one (A), microwave power detector two (B) and microwave power detector three (C) all output to computing circuit.
3. MEMS temp. compensation type microwave power-detecting device according to claim 2, it is characterized in that, described computing circuit comprises asks poor subtracter to microwave power detector one (A) and microwave power detector two (B) output voltage, totalizer with subtracter output voltage and microwave power detector three (C) addition multiply by three multiplier to adder output signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310066820.6A CN103149425B (en) | 2013-03-01 | 2013-03-01 | MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201310066820.6A CN103149425B (en) | 2013-03-01 | 2013-03-01 | MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device |
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| Publication Number | Publication Date |
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| CN103149425A true CN103149425A (en) | 2013-06-12 |
| CN103149425B CN103149425B (en) | 2015-05-06 |
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| CN201310066820.6A Expired - Fee Related CN103149425B (en) | 2013-03-01 | 2013-03-01 | MEMS (micro-electromechanical systems) temperature compensation type microwave power-detecting device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111049597A (en) * | 2019-12-30 | 2020-04-21 | 东南大学 | Thermoelectric self-detection MEMS microwave power divider and preparation method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2233580Y (en) * | 1995-02-21 | 1996-08-21 | 煤炭科学研究总院唐山分院 | Microwave density meter for testing syrup density |
| WO2005112256A1 (en) * | 2004-05-18 | 2005-11-24 | Yuejun Yan | Temerature compensation attenuator |
| CN101726661A (en) * | 2009-12-02 | 2010-06-09 | 东南大学 | Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power |
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2013
- 2013-03-01 CN CN201310066820.6A patent/CN103149425B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2233580Y (en) * | 1995-02-21 | 1996-08-21 | 煤炭科学研究总院唐山分院 | Microwave density meter for testing syrup density |
| WO2005112256A1 (en) * | 2004-05-18 | 2005-11-24 | Yuejun Yan | Temerature compensation attenuator |
| CN101726661A (en) * | 2009-12-02 | 2010-06-09 | 东南大学 | Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111049597A (en) * | 2019-12-30 | 2020-04-21 | 东南大学 | Thermoelectric self-detection MEMS microwave power divider and preparation method thereof |
| CN111049597B (en) * | 2019-12-30 | 2022-03-11 | 东南大学 | Thermoelectric self-detection MEMS microwave power divider and preparation method thereof |
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| CN103149425B (en) | 2015-05-06 |
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Granted publication date: 20150506 Termination date: 20180301 |