CN103148787B - A kind of Gu Sihanxin displacement sensing measuring method and system - Google Patents
A kind of Gu Sihanxin displacement sensing measuring method and system Download PDFInfo
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Abstract
The invention discloses a kind of Goos-Haenchen shift measuring method and a measuring system thereof.The method and system utilize time varying signal to be modulated adjustable Polarization Controller part, and the Gu Sihanxin displacement information relevant for polarization carries out conllinear detection.The present invention realizes the Differential Detection of measured signal and reference signal by the polarization modulation method of conllinear, can effectively eliminate common-mode noise and the baseline drift caused thereof, be obviously enhanced the stability of system.
Description
Technical field
The present invention relates to sensing detection field.Present invention relates particularly to Gu Sihanxin displacement measurement method, and
Realize the measurement system of the method.
Background technology
Ancient this Haenchen effect (Goos-Effect, is called for short GH effect) it is a kind of special optics
Phenomenon.When there is total reflection at interface in Finite diameter Light Beam, it would be possible to occur a series of non-mirror reflection existing
As, this Haenchen effect ancient is exactly one of which, shows as linear polarized light and experiences one during total reflection
Segment displacement: i.e. pip has a sudden change relative to incidence point in phase place, and reflects light relative to incidence
Light spatially has one section of lateral distance, and this distance is referred to as Gu Sihanxin displacement.This phenomenon is by Fritz
Goos and Hilda Lindberg-Nineteen forty-seven is verified the most in an experiment, gains the name for some reason.
In terms of theoretical research, before the sixties in 20th century, after observing Gu Sihanxin displacement experimentally,
K.Artmann and Fragstein is deduced the calculating formula of Gu Sihanxin displacement the most respectively by different methods,
Wherein the computing formula of Artmann is used till today.1961 and 1977, R.H.Renard et al. carried again
Method and angular spectrum method are gone out to flow.Hereafter, the object that Gu Sihanxin displacement occurs also is expanded to multilamellar by single interface
Membrane structure or periodic structure, membrane structure, even photonic crystal etc..PR.Berman report in 2002
Gu Sihanxin displacement in Medium with Negative-refractive Index.
And more efficient way is to strengthen GH effect by excitating surface ripple.The reflection of GH effect can be produced,
Must first excite generation evanescent wave, and so-called GH displacement also can be imagined as owing to incident illumination is at reflecting surface,
Propagate with the form of surface wave and in incident medium, penetrate what certain distance back reflection caused, and in system
Exciting and strengthening of surface wave, can strengthen GH effect.Schreier et al. Theoretical Calculation in 1998
GH displacement during two kinds of different diffraction structure generation oscillating conditions.2004, Yin of Stanford University et al.
Use Position-Sensitive Detector and lock-in amplifier, at a typical surface plasma resonance (Surface
Plasmon Resonance, SPR) detecting system has been measured the GH displacement of 50 times of wavelength magnitude.
Bloch surface wave (BSW) is a kind of in photon crystal structure surface area method, along the transmission of direction, interface
Surface wave.As the one of surface electromagnetic wave (Surface Electromagnetic Wave, SEW), cloth
The conspicuous surface wave in Lip river has many similarities with surface plasma wave, has bigger Application in Sensing potentiality.Closely
Nian Lai, causes increasing concern, and is expected to become in fields such as including sensing and integrated photon waveguide
A kind of substitute technology of SPP.
Photonic crystal is to be the structure of periodic arrangement in space by the dielectric material of differing dielectric constant.Work as electricity
When magnetic wave is propagated wherein, it then follows reflect, reflect, transmission principle, the Bragg diffraction of electron period makes
Electromagnetic wave is modulated and forms the band structure of similar electronics.This band structure is referred to as photonic band gap.
Under conditions of applicable lattice paprmeter and dielectric constant ratio, between the photonic band gap of photonic crystal, may occur in which certain
The frequency field that the electromagnetic wave of a little characteristic frequency cannot pass through, similar electronic energy band gap, this frequency zones is referred to as
Photon band gap (photonic band gap, PBG) or forbidden photon band.Therefore photon crystal material also by
It is referred to as photonic bandgap material.
Direction according to periodic arrangement is different with dimension, and photonic crystal can be divided into one-dimensional, two and three dimensions.
The Physical Mechanism that there is forbidden photon band in photonic crystal is that Bloch based on solid-state physics is theoretical.Work as electromagnetic wave
When a node space with discrete, translational symmetry is propagated, from Theory of Electromagnetic Field, on edge
The form of the magnetic distribution of the refractive index cycle change direction plane wave by being modulated by periodic function, becomes
For Bloch state (Bloch State), be noteworthy characterized by its wave vector and have periodically in the direction, and its
Without considering further that scattering effect when photonic crystal is propagated.
According to Bloch principle, similar with the principle that electronic band gap occurs, periodically variable in photonic crystal
Index distribution can regard the effect of draw refractive index and Periodic Perturbation as, and this perturbation i.e. causes Bu Luo
He Bianyuan frequency of occurrences band gap.In this frequency band gap, the wave vector of light wave does not has real part, it means that at this
In band gap, light wave is not able to wave and propagates, but exists with the form of light waves of electromagnetic field exponential damping.
In order to excite this pattern, can pass through in the middle of perfect photon crystal structure, introduce a defect layer, from
And at photonic crystal internal excitation local pattern；Can also be by introducing one at photon crystal structure face extremities
Layer dielectric material, thus at photon crystal surface excitating surface ripple.
By building 1-D photon crystal structure, can be at the one-dimensional pbg structure surface excitation Bloch table blocked
Face ripple, produces the Gu Sihanxin displacement being obviously enhanced, and on the other hand forms by nondestructive material due to this structure,
Optical loss is much smaller than structures such as the SPR structure being made up of metal material or metal gratings, thus can obtain simultaneously
Gu Sihanxin displacement that must be bigger and less optical loss.Utilize the Gu strengthened by surface wave of this super large
It is a kind of new high sensitivity sensing detection scheme that Si Hanxin displacement carries out sensing detection: use similar SPR inspection
The coupled modes of examining system, by position and the change thereof of detection reflection light point, it is thus achieved that with Bloch surface wave
The change in physical properties (such as refractive index etc.) of the external agency that structure is adjacent.And existing Gu Sihanxin displacement inspection
Survey method, owing to there is the signal drift that mechanical vibration and long variations in temperature etc. cause, detects
There is bigger noise and drift in light spot position result, system is more fragile and systematic error is bigger.
Summary of the invention
Therefore, the defect existed according to prior art, the task of the present invention is to provide one, and to improve system steady
Gu Sihanxin displacement measurement method qualitatively；
Another task of the present invention is to provide a kind of measurement system using above-mentioned measuring method.
On the one hand, the invention provides the measuring method of a kind of Gu Sihanxin displacement, comprise the following steps:
(1) by there is the homogeneous beam of certain polarization state after adjustable Polarization Controller part, by optics coupling
Locking device incides the optical device under test that can produce Gu Sihanxin displacement, then to reflection or transmitted light beam
Position is detected；
(2) the adjustable Polarization Controller part in step (1) is driven by time varying signal so that by this device
The polarization state of light beam change over and repeatedly change between the polarization state that at least two is different；
(3) for different polarization states, the optics in step (1) is under the conditions of described light beam incidence
Different Gu Sihanxin displacements can be produced；
(4) according in step (2) to changing the rule of time varying signal of light polarization, measure reflection or
The position of transmitted light beam, and pass through to analyze reflection the most in the same time or the position of transmitted light beam, it is thus achieved that Gu Sihan
Glad displacement information.
In said method, the change in physical properties energy of the described optical device under test that can produce Gu Sihanxin displacement
Produce the Gu Sihanxin displacement of respective change therewith.
In said method, when the physical characteristic of optical device under test is (such as the sample with optical device under test surface
Refractive index or sample thickness of thin layer etc.) when changing, can obtain in step (4) Gu Sihanxin displacement and
Its change information.
In said method, the angle inciding optical device under test is that incident illumination can excite under a certain polarization state
The angle of Gu Sihanxin displacement, during measuring, this angle is constant.
In said method, it is line polarized light by the light beam of adjustable Polarization Controller part, is preferably mutually perpendicular to
S polarization and p-polarization state.
In said method, the described optics that can produce Gu Sihanxin displacement can be to include table by exciting
Surface plasma ripple and Bloch surface wave, at interior optical surface wave device, can be by excitation wave guided mode
Formula is to produce the optics of Gu Sihanxin displacement, it is also possible to be to utilize to include that weak absorbing medium, weak gain are situated between
Matter, left hand artificial material structure etc. are at the interior optics that can produce Gu Sihanxin displacement.
In one example, by controlling the driving signal of tunable polarizer part so that the polarization state of emergent light
Cyclically-varying.
In one example, by controlling the driving signal of tunable polarizer part so that the polarization state of emergent light
It is being respectively s polarization and p-polarization, the Gu Sihanxin position of optics under the two polarization state the most in the same time
Move size be respectively negligible and be more than ten times of wavelength magnitude.
In one example, the optics producing Gu Sihanxin displacement is surface plasma body resonant vibration device,
Under resonance angle incidence, its Gu Sihanxin displacement size produced under s polarization and p-polarization respectively may be used
Ignore and about 50 times of wavelength.
In one example, the optics producing Gu Sihanxin displacement is Bloch surface wave device, at certain
Under one fixed angle incidence, its Gu Sihanxin displacement size produced under s polarization and p-polarization respectively may be used
Ignore and about 1000 times of wavelength.
On the other hand, present invention also offers a kind of Gu Sihan that can effectively suppress mechanical vibration, baseline drift
Glad displacement measurement system, including narrow-band light source, adjustable Polarization Controller part, time varying signal source, optical coupled
Device, the optics of Gu Sihanxin displacement, detector, signal processing system can be produced.
In said system, narrow-band light source can be laser instrument, it is also possible to be by wide spectrum light source and narrow band pass filter
The light source of composition.
In said system, the described optics that can produce Gu Sihanxin displacement can be to include table by exciting
Surface plasma ripple and Bloch surface wave, at interior optical surface wave device, can be by excitation wave guided mode
Formula is to produce the optics of Gu Sihanxin displacement, it is also possible to be to utilize to include that weak absorbing medium, weak gain are situated between
Matter, left hand artificial material structure etc. are at the interior optics that can produce Gu Sihanxin displacement.
In said system, described adjustable Polarization Controller includes spatial light modulator (SLM), Polarization Controller
Or light polarization modulator etc..
In said system, described detector is beam position detector, including Position-Sensitive Detector (PSD),
Bicell or charge coupled cell (CCD) etc..
In said system, described signal processing system include described detector being recorded signal implement computing,
The signal amplifier amplified and lock-in amplifier.
In one example, described optical couping device uses traditional Kretschmann prism-coupled devices.
In one example, the output signal in time varying signal source drives adjustable Polarization Controller, simultaneously as ginseng
Examine signal to be input in the lock-in amplifier in described signal processing system.
In one example, time varying signal source is produced by software, and adjustable Polarization Controller is produced by software
Signal controls, and this signal is converted into analog electrical signal output, and is input at described signal as reference signal
In lock-in amplifier in reason system.
Gu Sihanxin displacement measurement method and the measurement system thereof of the present invention have the advantage that
In the sensing and detecting system realized the most in the present inventive method, realized by the polarization modulation method of conllinear
Measured signal and the Differential Detection of reference signal, can effectively eliminate common-mode noise and the baseline drift caused thereof,
It is obviously enhanced the stability of system.
Light source, optical element and device in the sensor-based system realized the most in the present inventive method, detection equipment
Etc. maintaining static, it is simple to realize integrated, miniaturization and portability.
Accompanying drawing explanation
Fig. 1 is a kind of Gu Sihanxin displacement measurement system composition frame chart.
Fig. 2 is the Cleaning Principle schematic diagram of the Gu Sihanxin displacement measurement system described in example.
Fig. 3 is the long-time testing result of the signal comprising Gu Sihanxin displacement information in example.
Detailed description of the invention
Fig. 1 gives a kind of Gu Sihanxin displacement detection system schematic diagram that the present invention provides.This system includes
In light path order arrange narrow-band light source 101, adjustable Polarization Controller part 102, comprise optical device under test
Coupled system 103, detector 104, time varying signal source 105 and signal processing system 106.The most adjustable
Polarization Control device 102 is driven control by time varying signal source 105, and the output in time varying signal source 105 is as ginseng
Examine signal and be input to signal processing system 106.
Fig. 2 gives a kind of Gu Sihanxin displacement detection system and the operation principle schematic diagram that the present invention provides,
Including narrow-band light source 201, adjustable Polarization Controller part 202, optical coupling system 203, optical device under test
204, detector 205, time varying signal source 206 and signal processing system 207.
This example use the Bloch surface wave optical chip for the design of p-polarization state as treating photometry device
Part, and use traditional prism-coupled mode exciting light surface wave (Kretschmann coupling device), with this
Polarization state incides the light beam on chip, only can excite under a certain angle Bloch surface wave and produce ancient this
The glad displacement of the Chinese.The FP laser instrument that narrow-band light source 201 is 980nm that experiment uses, optical coupling system 203
In couple prism be Tp, material is SF10 glass, and optical device under test 204 is by Bloch table
Face wave optical chip 208 and microfluidic sample pond 209 form.Sample 210 in microfluidic sample pond and optical core
Sheet 208 surface is adjacent.
The base material of Bloch surface wave optical chip is ZF10 glass, and its refractive index is 1.668, composition
The structure of Bloch surface wave optical chip is 10 cycle height low-refractions dielectric layer alternately with a layer
Dielectric buffer layer terminates.Be close to substrate for high refractive index medium material thin-layer, high refractive index medium thin layer
Material is titanium dioxide, and its refractive index is 2.3, and thickness is 163nm, and the material of low refractive index dielectric thin layer is
Silicon dioxide, its refractive index is 1.434, and thickness is 391nm, and the material of dielectric buffer layer is titanium dioxide,
Its refractive index is 2.3, and thickness is 23nm.Under p-polarization incident illumination, when microfluidic sample 210 is water, cloth
When the conspicuous surface wave in Lip river is excited, maximum can produce the Gu Sihanxin displacement of nearly 800 microns.And work as microfluidic sample
Refractive index when changing, the angle position respective change that maximum Gu Sihanxin displacement produces, the most same angle
Gu Sihanxin displacement size under Du changes.
The tunable polarizer part 202 used in experimental system is liquid crystal spatial modulator (LCM, CRi128D),
Detector 205 uses Position-Sensitive Detector (PSD, Hamamastsu S3979), the position to output luminous point
Put and detect.Entered by the polarization state using time varying signal source 206 that liquid crystal spatial modulator exports light
Row modulation so that output polarization state switches between s polarization and p-polarization, and the position sensing therefore obtained is visited
Survey device and be output as AC modulated signals.
In this example, the signal processing system 207 shown in Fig. 2 is by PSD signal amplifier (ON-Trac OT-301)
Form with lock-in amplifier (Stanford Research530).The output to PSD of the PSD signal amplifier
Signal is amplified obtaining, with computing, the signal of telecommunication 211 that position is relevant, and this signal is phase-locked as measured signal input
Amplifier, the output 212 in time varying signal source 206 inputs as the reference signal of lock-in amplifier.
When carrying out sensing experiment, the sample in microfluidic sample pond is the glycerine water solution (volume of variable concentrations
Specific concentration is from 0.1%-0.5%), the variations in refractive index difference of each neighboring samples is 1.17*10-4RIU.Continuous time
The Gu Sihanxin displacement information recorded is as shown in Figure 3.
The detection method of above-mentioned Gu Sihanxin displacement detection system is as follows:
First, FP laser instrument produces the arrowband monochromatic light of 980nm, through battery of lens etc. through optical beam transformation and
Collimation, incides polaroid by the light beam after collimation, it is thus achieved that have the homogeneous beam of certain polarization state.Use
Signal generator drives LCD space light modulator as time varying signal source, makes the defeated of LCD space light modulator
Going out light is polarization state the most alternately switching between p and s polarizes.
Then polarized light is by using prism-coupled to as described before for the Bloch table of p-polarization light design
Face wave optical chip surface, changes incident angle and makes light beam excite Bloch surface wave to produce under p-polarization state
Gu Sihanxin displacement, and this angle is fixed, under this angle, s polarized light can not produce.Use position sensing
Detector PSD(S3979) outgoing beam is detected, it is thus achieved that the modulated signal of reflection position signalling change；
By through PSD amplifier modulated signal access lock-in amplifier, simultaneously using the output of signal generator as
Reference signal accesses lock-in amplifier, can extract the signal comprising Gu Sihanxin displacement information of low noise.
Finally it should be noted that above example is only in order to illustrate the Gu Sihanxin displacement measurement method of the present invention
And measure the structure of system and technical scheme, only the preferred embodiment of the present invention, but present invention protection
Scope is not limited thereto.Although the present invention being described in detail with reference to embodiment, this area common
It will be appreciated by the skilled person that technical scheme is modified or equivalent, without departure from this
The spirit and scope of inventive technique scheme, it all should be contained within protection scope of the present invention.
Claims (10)
1. Yi Zhong Gu Sihanxin displacement sensing measuring method, comprises the following steps:
(1) by there is the homogeneous beam of certain polarization state after adjustable Polarization Controller part, by optics coupling
Locking device incides the optical device under test that can produce Gu Sihanxin displacement, then to reflection or transmitted light beam
Position is detected；
(2) the adjustable Polarization Controller part in step (1) is driven by time varying signal so that by this device
The polarization state of light beam change over and repeatedly change between the polarization state that at least two is different；
(3) for different polarization states, the optics in step (1) is under the conditions of described light beam incidence
Different Gu Sihanxin displacements can be produced；
(4) according in step (2) to changing the rule of time varying signal of light polarization, measure reflection or
The position of transmitted light beam, and pass through to analyze reflection the most in the same time or the position of transmitted light beam, it is thus achieved that Gu Sihan
Glad displacement information.
Measuring method the most according to claim 1, it is characterised in that described can produce Gu Sihanxin position
The change in physical properties of the optical device under test moved can produce the Gu Sihanxin displacement of corresponding change, described
By analyzing reflection optical position the most in the same time in step (4), it is thus achieved that Gu Sihanxin displacement and change information thereof.
Measuring method the most according to claim 1, it is characterised in that the output of adjustable Polarization Controller part
Light beam is line polarized light, is orthogonal s polarization state and p-polarization state.
Measuring method the most according to claim 1, it is characterised in that described can produce Gu Sihanxin displacement
Optics be by exciting the optical surface ripple including surface plasma wave and Bloch surface wave
Device, or by excitation wave waveguide mode to produce the optics of Gu Sihanxin displacement, or utilization includes weak suction
Receive medium, weak gain media, left hand artificial material structure at the interior optics device that can produce Gu Sihanxin displacement
Part.
5. Yi Zhong Gu Sihanxin displacement sensing measure system, including narrow-band light source, adjustable Polarization Controller part,
Time varying signal source, optical couping device, the optics of Gu Sihanxin displacement, detector, signal can be produced
Processing system.
Measurement system the most according to claim 5, it is characterised in that described can produce Gu Sihanxin displacement
Optics be by exciting the optical surface ripple including surface plasma wave and Bloch surface wave
Device, or by excitation wave waveguide mode to produce the optics of Gu Sihanxin displacement, or utilization includes weak suction
Receive medium, weak gain media, left hand artificial material structure at the interior optics device that can produce Gu Sihanxin displacement
Part.
Measurement system the most according to claim 5, it is characterised in that described narrow-band light source be laser instrument or
The light source being made up of wide spectrum light source and narrow band pass filter.
Measurement system the most according to claim 5, it is characterised in that described adjustable Polarization Controller bag
Include spatial light modulator (SLM), Polarization Controller or light polarization modulator.
Measurement system the most according to claim 5, it is characterised in that described detector is light-beam position
Detector, including Position-Sensitive Detector (PSD), bicell or charge coupled cell (CCD).
Measurement system the most according to claim 5, it is characterised in that described signal processing system includes
Described detector can be recorded signal and implement computing, the signal amplifier of amplification and lock-in amplifier.
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| JP6226496B2 (en) * | 2013-12-20 | 2017-11-08 | ホアウェイ・テクノロジーズ・カンパニー・リミテッド | Polarizer and polarization modulation system |
| CN105158208B (en) * | 2015-06-23 | 2018-03-02 | 中北大学 | A kind of Gu Sihanxin displacements SPR high sensitivity medium refraction index detection methods |
| CN105278186A (en) * | 2015-11-09 | 2016-01-27 | 复旦大学 | Surface evanescent field intensity-tunable composite planar optical waveguide |
| CN106018289B (en) * | 2016-07-01 | 2018-06-05 | 西北工业大学 | A kind of method using Gu Si-Han Xin displacement measurement graphene carrier concentrations |
| CN106247953B (en) * | 2016-09-20 | 2018-11-02 | 中北大学 | Method and device that is a kind of while measuring phase and Gu Si-Han Xin displacements |
| CN109323661B (en) * | 2018-12-06 | 2020-06-09 | 湖北科技学院 | High-sensitivity angular displacement sensor based on beam space Gus-Hansen displacement |
| CN111442729B (en) * | 2020-04-16 | 2022-04-05 | 中国科学院上海微系统与信息技术研究所 | Displacement sensing device based on bloch surface wave one-way coupling effect |
| CN112763421B (en) * | 2021-01-18 | 2021-09-28 | 太原理工大学 | Graphene GH displacement and photothermal effect-based solution detection device and method |
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