CN103147060A - Vacuum coating system and coating method thereof - Google Patents
Vacuum coating system and coating method thereof Download PDFInfo
- Publication number
- CN103147060A CN103147060A CN2013101068524A CN201310106852A CN103147060A CN 103147060 A CN103147060 A CN 103147060A CN 2013101068524 A CN2013101068524 A CN 2013101068524A CN 201310106852 A CN201310106852 A CN 201310106852A CN 103147060 A CN103147060 A CN 103147060A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- vacuum chamber
- control part
- assisted decompression
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention provides a vacuum coating system and a coating method thereof, capable of reducing the pressure of a vacuum chambers before a vacuum pump begins to work and capable of really lowering the energy consumption of the vacuum pump. The vacuum coating system disclosed by the invention comprises a vacuum coating machine which consists of a coating part, a vacuum chamber and a vacuum pump. The vacuum coating system is characterized by further comprising an auxiliary pressure reducing device and a control part, wherein the auxiliary pressure reducing device is used for sucking the air out of the vacuum chamber before the vacuum pump begins to work until the pressure in the vacuum chamber is in a balance sate; and the control part is used for controlling the vacuum coating machine and the auxiliary pressure reducing device; the auxiliary pressure reducing device comprises an auxiliary pressure reducing cabin, a connecting pipe and a valve, wherein the auxiliary pressure reducing cabin is a sealed cabin of which the volume corresponds to the volume of the vacuum chamber, one end of the connecting pipe is communicated with the vacuum chamber, the other end of the connecting pipe is communicated with the auxiliary pressure reducing cabin; the valve is installed on the connecting pipe. The control part is used for controlling the work of the vacuum coating machine, controlling open or close of the valve and controlling the vacuum pump to suck the vacuum chamber to the vacuum state.
Description
Technical field
The present invention relates to a kind of vacuum coating system and with this vacuum coating system, many batches of substrates are carried out the film coating method of plated film.
Background technology
In existing vacuum coating system, all comprise have plated film section, the vacuum plating unit of vacuum chamber and vacuum pump.
When using this vacuum plating unit to carry out plated film to many batches of substrates, the operator opens the chamber door of vacuum chamber substrate is put into vacuum chamber before plated film, shut again the chamber door, then use vacuum pump to be pumped to vacuum state to vacuum chamber, the operator need to open the hatch door of vacuum chamber after plated film is completed, the substrate that plated film is completed takes out, then puts into another batch substrate and shut the chamber door, then adopts vacuum pump that vacuum chamber is aspirated.
But in said process, vacuum pump is before work, and internal vacuum chamber pressure is standard atmospheric pressure, and so each employing vacuum plating unit carries out plated film to a collection of substrate, vacuum pump all must be pumped to the vacuum chamber that reaches standard atmospheric pressure and reach vacuum state, very power consumption.
Summary of the invention
In view of above problem, the object of the present invention is to provide a kind of pressure that can reduce vacuum chamber before vacuum pump is started working, play vacuum coating system and the film coating method of saving the effect of energy consumption into vacuum pump.
The present invention has adopted following structure in order to reach the above object.
The invention provides a kind of vacuum coating system, comprise have plated film section, vacuum chamber and the vacuum plating unit that the air in this vacuum chamber is pumped to the vacuum pump of vacuum state, it is characterized in that, also comprise: the assisted decompression device, be used for before vacuum pump work, air in vacuum chamber is aspirated, reach the air pressure balance state with vacuum chamber; And control part, be used for vacuum plating unit and assisted decompression device are controlled, wherein, the assisted decompression device contains: the assisted decompression cabin, be airtight cavity, volume is corresponding with the volume of vacuum chamber; Pipe connecting, an end is connected with vacuum chamber, and the other end is connected with the assisted decompression cabin; And valve, being arranged on pipe connecting, control part be used for to be controlled vacuum plating unit work, and the unlatching of valve, closes, and based on the corresponding relation control vacuum pump of the volume in assisted decompression cabin and the volume of vacuum chamber, vacuum chamber is pumped to vacuum state.
The present invention also provides the above-mentioned vacuum coating system of a kind of use many batches of substrates to be carried out the film coating method of plated film, it is characterized in that, comprises the steps: to allow the operator that a collection of substrate is put into vacuum chamber; The chamber door that adopts control part to control vacuum chamber is closed; Adopt the control part by-pass valve control to open, make vacuum chamber and assisted decompression cabin reach the first air pressure balance state; Adopt the control part by-pass valve control to close; Adopt control part to control vacuum pump the air in the vacuum chamber that reaches the first air pressure balance state is pumped to vacuum state; Employing control part control plated film section carries out plated film to a collection of substrate; After plated film is completed, adopt the control part by-pass valve control to open, make vacuum chamber and assisted decompression cabin reach the second air pressure balance state, reduce the air pressure in the assisted decompression cabin; The chamber door that adopts control part to control vacuum chamber is opened, and allows the operator take out to have plated a collection of substrate of film; Repeat above-mentioned steps, the substrate of other batch is carried out plated film.
Effect and the effect of invention
According to the vacuum coating system that the present invention relates to and film coating method, because vacuum coating system not only has vacuum plating unit, also have assisted decompression device and control part, so control part utilizes pressure reduction that the air in vacuum chamber is aspirated before can controlling the vacuum pump work of assisted decompression device in vacuum plating unit, thereby can reduce the air pressure in vacuum chamber, play the effect of assisted decompression, therefore the purpose of the energy consumption that reduces vacuum pump can be reached, and the energy consumption of whole vacuum coating system can be reduced.
Description of drawings
Fig. 1 is the vacuum coating system structured flowchart in an embodiment that the present invention relates to; With
Fig. 2 is vacuum chamber and the assisted decompression device cooperation figure in an embodiment that the present invention relates to.
Embodiment
Below in conjunction with accompanying drawing, the preferred embodiment of vacuum coating system involved in the present invention is done and elaborated.
Embodiment
Fig. 1 is the vacuum coating system structured flowchart in an embodiment that the present invention relates to.
As shown in Fig. 1, vacuum coating system 10 comprises vacuum plating unit 11, assisted decompression device 12 and control part 13.
Fig. 2 is vacuum chamber and the assisted decompression device cooperation figure in an embodiment that the present invention relates to.
As shown in Fig. 1,2, assisted decompression device 12 is used for before vacuum pump 11c work, the air in vacuum chamber 11b being aspirated, and reaches the air pressure balance state with vacuum chamber 11b.This assisted decompression device 12 contains: assisted decompression cabin 12a, pipe connecting 12b and valve 12c.Assisted decompression cabin 12a is airtight cavity, and volume is corresponding with the volume of vacuum chamber 11b, and in the present embodiment, the volume of this assisted decompression cabin 12a equates with the volume of vacuum chamber 11b.The end of pipe connecting 12b is connected with vacuum chamber 11b, and the other end is connected with assisted decompression cabin 12a.Valve 12c is arranged on pipe connecting 12b.
The below illustrates the film coating method of this vacuum coating system so that two batches of substrates are carried out plated film as example, the above-mentioned vacuum coating system of a kind of use carries out the film coating method of plated film to two batches of substrates, comprise the steps:
Step 1 allows the operator that first substrate is put into vacuum chamber 11b;
Step 2, the chamber door that adopts control part 13 to control vacuum chamber 11b is closed;
Step 3 adopts control part 13 by-pass valve control 12c to open, and makes vacuum chamber 11b and assisted decompression cabin 12a reach the first air pressure balance state;
Step 4 adopts control part 13 by-pass valve control 12c to close;
Step 5 adopts control part 13 to control vacuum pump 11c the air in the vacuum chamber 11b that reaches the first air pressure balance state is pumped to vacuum state;
Step 6 adopts control part 13 to control the plated film 11a of section a collection of substrate is carried out plated film;
Step 7 after plated film is completed, adopts control part 13 by-pass valve control 12c to open, and makes vacuum chamber 11b and assisted decompression cabin 12a reach the second air pressure balance state, reduces the air pressure in assisted decompression cabin 12a;
Step 8, the chamber door that adopts control part 13 to control vacuum chamber 11b is opened, and allows the operator take out to have plated a collection of substrate of film;
Step 9 allows the operator that the second batch substrate is put into vacuum chamber 11b;
Step 14 adopts control part 13 to control the plated film 11a of section the second batch substrate is carried out plated film;
Step 15 after plated film is completed, adopts control part 13 by-pass valve control 12c to open, and makes vacuum chamber 11b and assisted decompression cabin 12a reach the 4th air pressure balance state, reduces the air pressure in assisted decompression cabin 12a;
Step 16, the chamber door that adopts control part 13 to control vacuum chamber 11b is opened, and allows the operator take out to have plated the second batch substrate of film, and plated film is completed.
In above step, owing to just beginning, air pressure in vacuum chamber 11b and assisted decompression cabin 12a is standard atmospheric pressure, and therefore during the first air pressure balance state in step 3, the interior air pressure of vacuum chamber 11b and assisted decompression cabin 12a is still standard atmospheric pressure (namely, 1atm).in step 7, utilize both pressure reduction that assisted decompression cabin 12a is aspirated due to vacuum chamber 11b, therefore when the second air pressure balance state, the air pressure of vacuum chamber 11b and assisted decompression cabin 12a is 0.5atm, then the valve 12c air pressure of closing assisted decompression cabin 12a maintains 0.5atm always, until in step 11, valve 12c opens again, at this moment assisted decompression cabin 12 utilizes pressure reduction that the vacuum chamber 11b of air pressure for 1atm aspirated, make the air pressure in vacuum chamber 11b be down to 0.75atm, then just only need the vacuum chamber 11b that is 0.75atm to air pressure to vacuumize at step 11 intermediate pump 11c, therefore, can reduce the energy consumption of vacuum pump.
Certainly, the film coating method that the present embodiment relates to can also to three batches, ten batches, 20 batches etc. arbitrarily the substrate of many batches carry out plated film, and the number of times of plated film is more, air pressure in the 12a of assisted decompression cabin is just lower, assisted decompression cabin 12a just can utilize pressure reduction to be drawn into the air pressure in vacuum chamber 11b lower before vacuum pump 11c work like this, the energy consumption of vacuum pump is just less, and energy-saving effect is more remarkable.
The effect of embodiment and effect
The vacuum coating system related according to the present embodiment, because vacuum coating system not only has vacuum plating unit, also have assisted decompression device and control part, so control part utilizes pressure reduction that the air in vacuum chamber is aspirated before can controlling the vacuum pump work of assisted decompression device in vacuum plating unit, thereby can reduce the air pressure in vacuum chamber, play the effect of assisted decompression, therefore the purpose of the energy consumption that reduces vacuum pump can be reached, and the energy consumption of whole vacuum coating system can be reduced.
In addition, because the film coating method that the present invention relates to can carry out plated film to the substrate of any many batches, and the number of times of plated film is more, air pressure in the assisted decompression cabin is just lower, therefore the assisted decompression cabin just can be drawn into the air pressure in vacuum chamber lowlyer before vacuum pump work like this, not only can make the energy consumption of vacuum pump less, thereby significantly improve the energy-saving effect of vacuum coating system, and alleviated the working strength of vacuum pump, thereby can also extend the work-ing life of vacuum pump.
Certainly, vacuum coating system involved in the present invention and film coating method not merely are defined in structure in the present embodiment.
In the vacuum coating system that the present embodiment adopts, the volume in assisted decompression cabin equates with the volume of vacuum chamber, and control part equates with the volume of vacuum chamber that according to the volume in assisted decompression cabin this corresponding relation controls vacuum pump vacuum chamber is pumped to vacuum state.In vacuum coating system of the present invention, use or install needs according to reality, the volume in assisted decompression cabin and the volume of vacuum chamber also can be any corresponding relation, control part also can be controlled vacuum pump according to different corresponding relations vacuum chamber is pumped to vacuum state, therefore, feasible too.
Claims (2)
1. vacuum coating system, comprise have plated film section, vacuum chamber and the vacuum plating unit that the air in this vacuum chamber is pumped to the vacuum pump of vacuum state, it is characterized in that, also comprise:
The assisted decompression device is used for before described vacuum pump work, the air in described vacuum chamber being aspirated, and reaches the air pressure balance state with described vacuum chamber; With
Control part is used for described vacuum plating unit and described assisted decompression device are controlled,
Wherein, described assisted decompression device contains: the assisted decompression cabin, be airtight cavity, and volume is corresponding with the volume of described vacuum chamber; Pipe connecting, an end is connected with described vacuum chamber, and the other end is connected with described assisted decompression cabin; And valve, be arranged on described pipe connecting,
Described control part, be used for controlling described vacuum plating unit work, with the unlatching of described valve, close, and control described vacuum pump based on the corresponding relation of the volume of the volume in described assisted decompression cabin and described vacuum chamber described vacuum chamber be pumped to vacuum state.
2. one kind is used vacuum coating system as claimed in claim 1 many batches of substrates to be carried out the film coating method of plated film, it is characterized in that, comprises the steps:
Allow the operator that a collection of substrate is put into described vacuum chamber;
The chamber door that adopts described control part to control described vacuum chamber is closed;
Adopt described control part to control described valve opening, make described vacuum chamber and described assisted decompression cabin reach the first air pressure balance state;
Adopt described control part to control described valve closes;
Adopt described control part to control described vacuum pump the air in the described vacuum chamber that reaches the first air pressure balance state is pumped to vacuum state;
Adopt described control part to control described plated film section described a collection of substrate is carried out plated film;
After plated film is completed, adopt described control part to control described valve opening, make described vacuum chamber and described assisted decompression cabin reach the second air pressure balance state, reduce the air pressure in described assisted decompression cabin;
The chamber door that adopts described control part to control described vacuum chamber is opened, and allows the operator take out to have plated a collection of substrate of film;
Repeat above-mentioned steps, the substrate of other batch is carried out plated film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310106852.4A CN103147060B (en) | 2013-03-29 | 2013-03-29 | Vacuum coating system and coating method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310106852.4A CN103147060B (en) | 2013-03-29 | 2013-03-29 | Vacuum coating system and coating method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103147060A true CN103147060A (en) | 2013-06-12 |
| CN103147060B CN103147060B (en) | 2015-04-22 |
Family
ID=48545370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310106852.4A Expired - Fee Related CN103147060B (en) | 2013-03-29 | 2013-03-29 | Vacuum coating system and coating method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103147060B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108387618A (en) * | 2016-01-14 | 2018-08-10 | 苏州大学 | A kind of preparation method of the ammonia gas sensor based on squaric acid derivertives |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04155912A (en) * | 1990-10-19 | 1992-05-28 | Nec Yamagata Ltd | Vacuum device |
| CN1594650A (en) * | 2003-12-19 | 2005-03-16 | 储继国 | Vacuum deposition equipment |
| CN102628547A (en) * | 2012-04-16 | 2012-08-08 | 上汽通用五菱汽车股份有限公司 | Vacuumizing device and method for vacuumizing by means of device |
-
2013
- 2013-03-29 CN CN201310106852.4A patent/CN103147060B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04155912A (en) * | 1990-10-19 | 1992-05-28 | Nec Yamagata Ltd | Vacuum device |
| CN1594650A (en) * | 2003-12-19 | 2005-03-16 | 储继国 | Vacuum deposition equipment |
| CN102628547A (en) * | 2012-04-16 | 2012-08-08 | 上汽通用五菱汽车股份有限公司 | Vacuumizing device and method for vacuumizing by means of device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108387618A (en) * | 2016-01-14 | 2018-08-10 | 苏州大学 | A kind of preparation method of the ammonia gas sensor based on squaric acid derivertives |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103147060B (en) | 2015-04-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105697475A (en) | Potential energy recycling system and method of higher-position extractor | |
| CN103147060B (en) | Vacuum coating system and coating method thereof | |
| CN104928646B (en) | Two-layer equation load chamber vacuum and air Fast-Balance structure | |
| CN201486861U (en) | Device for quickly pumping vacuum | |
| CN102522223B (en) | Controllable filling method for vacuum filling | |
| CN218376225U (en) | Sealing door and low-temperature storage box | |
| CN201172265Y (en) | Full automatic vacuum-pumping flat-plate vulcanizer | |
| CN204985216U (en) | High intelligent full -automatic cell -phone screen vacuum rigging machine | |
| CN202924372U (en) | Sucker used for extracting mosaic particles | |
| CN213427426U (en) | Negative pressure cooling tank for edible mushroom production | |
| CN204267848U (en) | A kind of novel vacuum locking-valve | |
| CN103233879B (en) | A kind of continous vacuum production line two-chamber switch room extract system | |
| CN203978779U (en) | On a kind of rig, adopt the air compressor system of mechanically controlled valve | |
| CN101593788A (en) | The laminating method of solar module | |
| CN204573188U (en) | A kind of changement controlled by washing solution | |
| CN110644464A (en) | Vacuum preloading drainage device with remote monitoring function | |
| CN204402784U (en) | A kind of compression pump | |
| CN204673638U (en) | Vacuum generator | |
| CN205478177U (en) | Automatically controlled formula evacuation equipment | |
| CN219792490U (en) | Alcohol conveying device easy to exhaust | |
| CN220815470U (en) | Hyperbaric oxygen cabin door | |
| CN203820625U (en) | Vacuum suction and blowback device | |
| CN204528770U (en) | A kind of vacuum automatic absorbing device of sheeting | |
| CN204100779U (en) | Efficient energy-saving sintering furnace | |
| CN207746194U (en) | A kind of vacuum plasma cavity facilitating maintenance |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150422 Termination date: 20180329 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |