CN103116276A - Piezoelectric ceramic objective driver control method - Google Patents
Piezoelectric ceramic objective driver control method Download PDFInfo
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Abstract
A piezoelectric ceramic objective driver control method includes the steps of separating a process of optimizing initial parameters of a proportion integration differentiation (PID) controller from a process of online adjustment, and configuring the optimized initial parameters to an online control algorithm to accurately control a piezoelectric ceramic objective driver quickly. In an off-line state, global optimization of the initial parameters of the PID controller is completed by a genetic algorithm in advance, the optimized initial parameters are configured into a process of online fuzzy PID control and are subjected to online feedback and real-time control, and accordingly, the piezoelectric ceramic objective driver is subjected to micro-stepping location under drive. By the piezoelectric ceramic objective driver control method, the piezoelectric ceramic objective driver can be controlled accurately and is low in output overshot, high in stability and response speed.
Description
One, technical field
The present invention relates to the accurate control technique field of piezoelectric ceramic actuator, specifically a kind of control method of piezoelectric ceramics objective driver.
Two, background technology
Digital confocal microscope technology is occur the nineties in last century a kind of on the microscopical basis of Photobiology, adopts the technology of the method acquisition high resolution sequence biological micro-image of optical section technology and image restoration.This technology depends on by the relative stepping micrometric displacement of micro-displacement driving element driving object lens with objective table, and biological cell is carried out the sequence section image acquisition.So the driving quality of micro-displacement driving element is the key of collection image quality.At present, the micro-displacement driving element that adopts in practice has a variety of, and piezoelectric ceramic actuator is little with its volume, thrust is large, precision and displacement resolution is high, frequency response soon, do not generate heat, do not produce the characteristic such as noise, become one of most widely used driving element of microposition control field.But the inherent characteristics such as that piezoceramic material has is non-linear, sluggish, creep, for so non-linear, multivariate factor, the time the complicated piezoelectric ceramics system that becomes, for it sets up relatively difficulty of accurate mathematical model.Therefore, must could realize the precision of piezoelectric ceramic actuator is controlled in conjunction with certain control algolithm.Mostly early stage piezoelectric ceramics control method is proportion integration differentiation PID control and improved proportion integration differentiation PID closed-loop control, so but owing to setting up accurate model and the coarse error of parameter tuning is larger, overshoot is large, and response speed is slow.This has all limited the further raising of piezoelectric ceramics objective driver bearing accuracy greatly.Therefore, error how to improve piezoelectricity pottery object lens porcelain driver control method is larger, and overshoot is large, and response speed waits slowly defective to become us and realizes that ultraprecise piezoelectric ceramics object lens locate the major issue of required solution.
Three, summary of the invention
The object of the present invention is to provide a kind of control method of piezoelectric ceramics objective driver, it can improve the deficiency of existing piezoelectric ceramics objective driver control method, reduce departure and overshoot, improve response speed, it is steady and accurate to control output, makes quick, accurate, stable control of piezoelectric ceramics objective driver become possibility.
The present invention is achieved through the following technical solutions above-mentioned purpose: a kind of control method of piezoelectric ceramics objective driver comprises the steps:
(1) under off-line state, carries out in advance the optimization of genetic algorithm initial parameter, at first three initial parameter K of Comparative Examples integral differential PID controller
P0, K
I0And K
D0With 10 binary code representations, by parameter K
P0, K
I0And K
D0The coded sequence of serial connection forms individual, takes advantage of integral of absolute value of error ITAE to determine fitness function as Performance Evaluating Indexes with the time again, then number of samples Size=30 in the genetic algorithm is set, crossover probability P
c=0.80, the variation probability P
m=0.10-[1:1:Size] * 0.01/Size, evolve the final optimization initial parameter K that obtains through 100 generations
P0, K
I0And K
D0, and output to fuzzy controller,
(2) under the On-line Control state, actual output quantity y by current setup control amount r and piezoelectric ceramics objective driver, calculate departure e and error rate ec, output in fuzzy controller and the proportion integration differentiation PID controller, carry out online feedback and adjust in real time, fuzzy controller as input, utilizes fuzzy rule to carry out fuzzy reasoning with departure e and error rate ec, inquiry fuzzy matrix table is adjusted output parameter adjustment amount △ K in real time to parameter
p, △ K
iWith △ K
dTo proportion integration differentiation PID controller,
(3) proportion integration differentiation PID controller is according to departure e and error rate ec and parameter adjustment amount △ K
p, △ K
iWith △ K
d, calculating the output controlled quentity controlled variable by digital incremental proportion integration differentiation pid control algorithm, control piezoelectric ceramics objective driver carries out micro-stepping and enters the location,
(4) after each accurately location end, by demand for control, next time positioning control is carried out in repeating step (2) and (3), until reach demand for control, driver control finishes.
Described genetic algorithm initial parameter is optimized under the off-line state to be finished, and does not participate in online adjustment.
Described fuzzy controller is the versions of two inputs, three outputs, with systematic error e and error rate ec as the input language variable, with △ K
p, △ K
iWith △ K
dAs the output language variable, and they are divided into 7 domains are the fuzzy subset of [3,3], subordinate function all adopts triangle, non-homogeneous stage method and full crossover form.
Described micro-stepping advances to orientate as nanoscale, and stepping is 100nm, and precision is 0.1%, and the single step response time is 0.7s.
The actuator of described driver for making with piezoceramic material, driven object is the optical microphotograph endoscope objective lens.
The outstanding effect of the inventive method is:
Under off-line state, carry out in advance the optimization of genetic algorithm initial parameter, do not take the online adjustment time, initial parameter after optimizing so that in the process of control the output overshoot almost nil, and adjust online the time and adjust number of times and reduce, shorten driver single positioning time, improved response speed.Fuzzy controller is chosen two inputs, three output forms in the On-line Control, complexity and precision have been taken into account, so that the piezoelectric ceramics objective driver has good dynamic property and static properties, eliminated to a certain extent the static error of digital incremental proportion integration differentiation pid control algorithm, driver displacement output is steady and accurate so that adjust online quick to add the little advantage that is easy to realize of digital incremental proportion integration differentiation pid control algorithm calculated amount.When the output location displacement of setting piezoelectric ceramics objective driver was 100nm in experiment, the stable output time was 0.07s, fast response time, and the location displacement of control driver is stabilized in the 0.100um place, and precision is 0.1%.
Four, description of drawings
Fig. 1 is the control structure block scheme of whole piezoelectric ceramics objective driver control method, and its initial parameter with the PID controller is separated to place and carried out global optimization under the off-line state.
Fig. 2 is the control structure block scheme of the online PID of adjustment controller initial parameter control method, and its initial parameter with the PID controller is placed in the line traffic control to be adjusted.
Fig. 3 is whole piezoelectric ceramics objective driver control system the general frame, is piezoelectric ceramics objective driver control method of the present invention part of living in the dotted line frame wherein.
Fig. 4 is the Shi Jian – displacement response curve of piezoelectric ceramics objective driver in the control method of the present invention.
Five, embodiment
Below be described in further detail by accompanying drawing and the example control method to piezoelectric ceramics objective driver of the present invention.
As shown in Figure 1, the control method of piezoelectric ceramics objective driver of the present invention comprises the steps:
(1) under off-line state, carries out in advance the optimization of genetic algorithm initial parameter, at first three initial parameter K of Comparative Examples integral differential PID controller
P0, K
I0And K
D0With 10 binary code representations, by parameter K
P0, K
I0And K
D0The coded sequence of serial connection forms individual, takes advantage of integral of absolute value of error ITAE to determine fitness function as Performance Evaluating Indexes with the time again, then number of samples Size=30 in the genetic algorithm is set, crossover probability P
c=0.80, the variation probability P
m=0.10-[1:1:Size] * 0.01/Size, evolve the final optimization initial parameter K that obtains through 100 generations
P0, K
I0And K
D0, and output to fuzzy controller,
(2) under the On-line Control state, actual output quantity y by current setup control amount r and piezoelectric ceramics objective driver, calculate departure e and error rate ec, output in fuzzy controller and the proportion integration differentiation PID controller, carry out online feedback and adjust in real time, fuzzy controller as input, utilizes fuzzy rule to carry out fuzzy reasoning with departure e and error rate ec, inquiry fuzzy matrix table is adjusted output parameter adjustment amount △ K in real time to parameter
p, △ K
iWith △ K
dTo proportion integration differentiation PID controller,
(3) proportion integration differentiation PID controller is according to departure e and error rate ec and parameter adjustment amount △ K
p, △ K
iWith △ K
d, calculating the output controlled quentity controlled variable by digital incremental proportion integration differentiation pid control algorithm, control piezoelectric ceramics objective driver carries out micro-stepping and enters the location,
(4) after each accurately location end, by demand for control, next time positioning control is carried out in repeating step (2) and (3), until reach demand for control, driver control finishes.
As shown in Figure 2, in the online resize ratio integral differential PID controller initial parameter control method, initial parameter is adjusted adjuster place on line real time control, the piezoelectric ceramics objective driver in control procedure, in conjunction with fuzzy controller and proportion integration differentiation PID controller initial parameter carried out the on-line optimization adjustment, so that can reach the control effect of expection.This control mode need to repeatedly be optimized and revised initial parameter, adjusts often, and institute's elapsed time is long and precision is not high.
Embodiment 1
As shown in Figure 3, piezoelectric ceramics objective driver control system mainly partly is comprised of Single Chip Microcomputer (SCM) system, proportion integration differentiation PID controller, A/D and D/A conversion, driving power, piezoelectric ceramics objective driver and micro-displacement sensor etc.Described piezoelectric ceramics objective driver control method is in proportion integration differentiation PID controller part.Described piezoelectric ceramics objective driver control method is in piezoelectric ceramics objective driver control system, and implementation is as follows:
The output of setting control system location shift value in Single Chip Microcomputer (SCM) system, with its input as the proportion integration differentiation PID controller in the inventive method, the output of proportion integration differentiation PID controller connects the D/A converter input, convert controlled quentity controlled variable to analog quantity by digital quantity, D/A converter output connects the driving power input, further controlled quentity controlled variable is converted to the corresponding voltage that can directly control the piezoelectric ceramics objective driver, driving power output voltage 0-150V connects the piezoelectric ceramics objective driver, the piezoelectric ceramics objective driver is carried out 0-100um drive the location, utilize micro-displacement sensor to piezoelectric ceramics objective driver progress microdisplacement measurement, gather the real-time displacement of piezoelectric ceramics objective driver, the recycling signal converter, convert displacement to voltage, signal converter output connects the A/D converter input, convert voltage to single-chip microcomputer accessible corresponding digital quantity, A/D converter output connects the Single Chip Microcomputer (SCM) system input, the margin of error between the shift value that utilization feeds back and the output of the setting location shift value is controlled adjustment in real time to the driver displacement, readjusts output location displacement.Under off-line state, carry out in advance the optimization of genetic algorithm initial parameter, the initial parameter that is optimized is disposed in the proportion integration differentiation PID controller.The micro-displacement sensor real time output data, Single Chip Microcomputer (SCM) system is periodically controlled A/D converter conversion and these data of reading back, according to initial controlled quentity controlled variable and the current actual output quantity of reading back, calculate departure e and error rate ec, output in the proportion integration differentiation PID controller, carry out online feedback and adjust in real time the output controlled quentity controlled variable, control piezoelectric ceramics objective driver carries out micro-stepping and enters the location, according to this circulation is until reach the control requirement.
As shown in Figure 4, this figure is for utilizing the resulting piezoelectric ceramics objective driver of control method of the present invention Shi Jian – displacement response output curve diagram.By the piezoelectric ceramics objective driver to the optical microphotograph endoscope objective lens from 0um drive navigate to 0.1um test obtain.
As can be seen from the figure, the stable output of piezoelectric ceramics objective driver and accurate, be 0.07s stabilization time, fast response time, Therapy lasted is to 0.5s, and the location displacement of control driver is stabilized in the 0.100um place, and precision is 0.1%.And output need not carried out the multiple oscillation adjustment in the control procedure, directly drives object lens and approaches gradually displacement of targets, and almost the non-overshoot amount realizes controlling quickly and accurately the piezoelectric ceramics objective driver.
The initial parameter that piezoelectric ceramics objective driver control method provided by the invention adopts the genetic algorithm initial parameter to optimize Comparative Examples integral differential PID controller under off-line state is in advance carried out global optimization, and the optimization initial parameter after optimizing is disposed in the fuzzy controller, passing ratio integral differential PID controller carries out online in real time adjustment to controller parameter again, the piezoelectric ceramics objective driver is carried out online feedback control in real time, the control driver carries out micro-stepping and enters the location.Whole process can realize that overshoot is little to the accurate control of piezoelectric ceramics objective driver, good stability, and fast response time satisfies the needs that the piezoelectric ceramics objective driver drives.
Claims (5)
1. the control method of a piezoelectric ceramics objective driver is characterized in that, the method comprises the steps:
(1) under off-line state, carries out in advance the optimization of genetic algorithm initial parameter, at first three initial parameter K of Comparative Examples integral differential PID controller
P0, K
I0And K
D0With 10 binary code representations, by parameter K
P0, K
I0And K
D0The coded sequence of serial connection forms individual, takes advantage of integral of absolute value of error ITAE to determine fitness function as Performance Evaluating Indexes with the time again, then number of samples Size=30 in the genetic algorithm is set, crossover probability P
c=0.80, the variation probability P
m=0.10-[1:1:Size] * 0.01/Size, evolve the final optimization initial parameter K that obtains through 100 generations
P0, K
I0And K
D0, and output to fuzzy controller,
(2) under the On-line Control state, actual output quantity y by current setup control amount r and piezoelectric ceramics objective driver, calculate departure e and error rate ec, output in fuzzy controller and the proportion integration differentiation PID controller, carry out online feedback and adjust in real time, fuzzy controller as input, utilizes fuzzy rule to carry out fuzzy reasoning with departure e and error rate ec, inquiry fuzzy matrix table is adjusted output parameter adjustment amount △ K in real time to parameter
p, △ K
iWith △ K
dTo proportion integration differentiation PID controller,
(3) proportion integration differentiation PID controller is according to departure e and error rate ec and parameter adjustment amount △ K
p, △ K
iWith △ K
d, calculating the output controlled quentity controlled variable by digital incremental proportion integration differentiation pid control algorithm, control piezoelectric ceramics objective driver carries out micro-stepping and enters the location,
(4) after each accurately location end, by demand for control, next time positioning control is carried out in repeating step (2) and (3), until reach demand for control, driver control finishes.
2. piezoelectric ceramics objective driver control method according to claim 1 is characterized in that, described genetic algorithm initial parameter is optimized under the off-line state to be finished, and does not participate in online adjustment.
3. piezoelectric ceramics objective driver control method according to claim 1 is characterized in that, described fuzzy controller is the versions of two inputs, three outputs, with systematic error e and error rate ec as the input language variable, with △ K
p, △ K
iWith △ K
dAs the output language variable, and they are divided into 7 domains are the fuzzy subset of [3,3], subordinate function all adopts triangle, non-homogeneous stage method and full crossover form.
4. piezoelectric ceramics objective driver control method according to claim 1 is characterized in that described micro-stepping advances to orientate as nanoscale, and stepping is 100nm, and precision is 0.1%, and the single step response time is 0.7s.
5. piezoelectric ceramics objective driver control method according to claim 1 is characterized in that, the actuator of described driver for making with piezoceramic material, and driven object is the optical microphotograph endoscope objective lens.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336429A (en) * | 2013-06-24 | 2013-10-02 | 中国科学院长春光学精密机械与物理研究所 | High-precision control method for piezoelectric ceramic executor |
| CN103365213A (en) * | 2013-07-15 | 2013-10-23 | 温州大学 | Extreme value optimization self-adjusting digital PID control method used for megawatt inverter system |
| CN103399494A (en) * | 2013-08-14 | 2013-11-20 | 武汉华夏精冲技术有限公司 | Method for controlling constant speed travel of large-tonnage full-automatic hydraulic fine blanking machine through fuzzy PID |
| CN104317193A (en) * | 2014-09-19 | 2015-01-28 | 北京空间机电研究所 | PID control parameter off-line tuning method based on hidden Markov model |
| CN104678765A (en) * | 2015-01-28 | 2015-06-03 | 浙江理工大学 | Piezoelectric ceramic actuator hysteretic model and control method thereof |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN107102223A (en) * | 2017-03-29 | 2017-08-29 | 江苏大学 | NPC photovoltaic DC-to-AC converter method for diagnosing faults based on improved hidden Markov model GHMM |
| CN107688292A (en) * | 2017-08-28 | 2018-02-13 | 广东工业大学 | A kind of flexible nano localization method, apparatus and system based on piezoelectric ceramics |
| CN110838590A (en) * | 2019-11-21 | 2020-02-25 | 山东大学 | Gas supply control system and method for proton exchange membrane fuel cell |
| CN115755589A (en) * | 2022-12-16 | 2023-03-07 | 上海第二工业大学 | Optimization method based on genetic algorithm in reaction kettle fuzzy control system |
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| CN103336429A (en) * | 2013-06-24 | 2013-10-02 | 中国科学院长春光学精密机械与物理研究所 | High-precision control method for piezoelectric ceramic executor |
| CN103336429B (en) * | 2013-06-24 | 2016-08-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of high-accuracy control method of piezoelectric ceramic actuator |
| CN103365213A (en) * | 2013-07-15 | 2013-10-23 | 温州大学 | Extreme value optimization self-adjusting digital PID control method used for megawatt inverter system |
| CN103365213B (en) * | 2013-07-15 | 2015-10-21 | 温州大学 | For the extremal optimization Self-tuning System digital PID control method of megawatt inverter system |
| CN103399494A (en) * | 2013-08-14 | 2013-11-20 | 武汉华夏精冲技术有限公司 | Method for controlling constant speed travel of large-tonnage full-automatic hydraulic fine blanking machine through fuzzy PID |
| CN103399494B (en) * | 2013-08-14 | 2016-05-04 | 武汉华夏精冲技术有限公司 | Large-tonnage fully automatic hydraulic essence impact machine fuzzy constant speed stroke control method |
| CN104317193B (en) * | 2014-09-19 | 2017-04-05 | 北京空间机电研究所 | A kind of pid control parameter off-line setting calculation method based on HMM |
| CN104317193A (en) * | 2014-09-19 | 2015-01-28 | 北京空间机电研究所 | PID control parameter off-line tuning method based on hidden Markov model |
| CN104678765A (en) * | 2015-01-28 | 2015-06-03 | 浙江理工大学 | Piezoelectric ceramic actuator hysteretic model and control method thereof |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN106767406B (en) * | 2016-12-20 | 2022-08-16 | 华南理工大学 | Micro-nano positioning system and full closed-loop online control method for compliant mechanism platform by micro-nano positioning system |
| CN107102223A (en) * | 2017-03-29 | 2017-08-29 | 江苏大学 | NPC photovoltaic DC-to-AC converter method for diagnosing faults based on improved hidden Markov model GHMM |
| CN107688292A (en) * | 2017-08-28 | 2018-02-13 | 广东工业大学 | A kind of flexible nano localization method, apparatus and system based on piezoelectric ceramics |
| CN107688292B (en) * | 2017-08-28 | 2020-11-13 | 广东工业大学 | Flexible nano positioning method, device and system based on piezoelectric ceramics |
| CN110838590A (en) * | 2019-11-21 | 2020-02-25 | 山东大学 | Gas supply control system and method for proton exchange membrane fuel cell |
| CN110838590B (en) * | 2019-11-21 | 2021-07-30 | 山东大学 | Gas supply control system and method for proton exchange membrane fuel cell |
| CN115755589A (en) * | 2022-12-16 | 2023-03-07 | 上海第二工业大学 | Optimization method based on genetic algorithm in reaction kettle fuzzy control system |
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Application publication date: 20130522 |