CN103116195B - Silica-based gradient-index lens - Google Patents
Silica-based gradient-index lens Download PDFInfo
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- CN103116195B CN103116195B CN201110365711.5A CN201110365711A CN103116195B CN 103116195 B CN103116195 B CN 103116195B CN 201110365711 A CN201110365711 A CN 201110365711A CN 103116195 B CN103116195 B CN 103116195B
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- silica
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Abstract
The invention relates to a silica-based gradient-index lens which comprises a silica-based base body. A gradient-index lens is formed on the silica-based base body. The silica-based base body is adopted to be as the lens base body, and moreover, the gradient-index lens is formed on the silica-based base body, and therefore the silica-based gradient-index lens can be used for the silica-based optoelectronic integration technology.
Description
Technical field
The present invention relates to a kind of silica-based gradient-index lens.
Background technology
Gradient-index lens is as important micro optical element, it is of a size of micron to millimeter magnitude, it is the particular components that ordinary optical is not replaced, it is lenticule or the lens arra that the nonhomogeneous media material by different refractivity is prepared into, its index distribution section is divided into radially, axially and ball to nonlinear curve.The property having according to gradient-index lens, gradient-index lens not only can be applicable to micro-optic image device, as multiple small imageing sensors such as facsimile recorder, duplicating machine, scanner and medical and industrial endoscopes, and at optical communication field, the core component of and passive device active as optics, has a wide range of applications at aspects such as optical collimator, connectors, isolator, optical filter, photoswitch and fiber couplers.Current, the gradient-index lens using in optoelectronic information field mainly adopts ion exchange process or sol-gal process, because the gradient-index lens of preparation is only applicable to the encapsulation of single device, and package dimension is larger, is difficult to for Si-based OEIC technology.
Summary of the invention
Problem to be solved by this invention is to provide a kind of silica-based gradient-index lens, and this silica-based gradient-index lens can be used for Si-based OEIC technology.
The invention provides a kind of silica-based gradient-index lens, comprise silica-based matrix, on silica-based matrix, form gradient-index lens.
Said silica-based gradient-index lens has nano-scale porous structure.
Described gradient-index lens matrix material is monocrystalline silicon.
The present invention adopts silica-based matrix as lens matrix, and forms gradient-index lens on silica-based matrix, can be used for Si-based OEIC technology.
Accompanying drawing explanation
Fig. 1 is the silica-based gradient-index lens structural representation that the present invention proposes.
Embodiment
Below in conjunction with accompanying drawing, the technical program is further illustrated.
Refer to Fig. 1, the technical program provides a kind of silica-based gradient-index lens 10, and it comprises the lens matrix 11 of a reservation shape; And described lens matrix forms 12 by nano-pore, make the lensed graded index profile of its refractive index tool.
Below in conjunction with embodiment, each step is elaborated.
Step (1), provides the lens matrix 11 of a reservation shape.The material of described lens matrix 11 consists of monocrystalline silicon, and its crystal lattice orientation is (110).
Step (2), described lens matrix forms 12 by nano-pore.In the present embodiment, step (1) lens matrix 10 is placed on chemical corrosion device, the corrosive liquid adopting is hydrofluorite and sulfuric acid mixture liquid.
Step (3), according to step (1) and step (2), by changing strength of current and etching time, thereby controls nano-pore size (to form described gradient-index lens 10.
Claims (2)
1. a silica-based gradient-index lens, is characterized in that: comprise silica-based matrix, on silica-based matrix, form gradient-index lens; Described silica-based matrix material is monocrystalline silicon, and the crystal lattice orientation of monocrystalline silicon is (110).
2. silica-based gradient-index lens according to claim 1, is characterized in that: said silica-based gradient-index lens has nano-scale porous structure; It is by silica-based matrix is placed on chemical corrosion device and is obtained that described silica-based gradient-index lens has nano-scale porous structure, and the corrosive liquid adopting is hydrofluorite and sulfuric acid mixture liquid; And by changing strength of current and etching time, thereby control nano-pore size to form described gradient-index lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110365711.5A CN103116195B (en) | 2011-11-17 | 2011-11-17 | Silica-based gradient-index lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110365711.5A CN103116195B (en) | 2011-11-17 | 2011-11-17 | Silica-based gradient-index lens |
Publications (2)
| Publication Number | Publication Date |
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| CN103116195A CN103116195A (en) | 2013-05-22 |
| CN103116195B true CN103116195B (en) | 2014-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110365711.5A Active CN103116195B (en) | 2011-11-17 | 2011-11-17 | Silica-based gradient-index lens |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1862289A (en) * | 2005-05-13 | 2006-11-15 | 鸿富锦精密工业（深圳）有限公司 | Gradient refractive index lens and preparing method thereof |
| CN1946999A (en) * | 2004-04-30 | 2007-04-11 | 金伯利-克拉克环球有限公司 | Electroluminescent illumination source for optical detection systems |
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2011
- 2011-11-17 CN CN201110365711.5A patent/CN103116195B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1946999A (en) * | 2004-04-30 | 2007-04-11 | 金伯利-克拉克环球有限公司 | Electroluminescent illumination source for optical detection systems |
| CN1862289A (en) * | 2005-05-13 | 2006-11-15 | 鸿富锦精密工业（深圳）有限公司 | Gradient refractive index lens and preparing method thereof |
Non-Patent Citations (5)
| Title |
|---|
| 余科，姜浩等.聚合物乳液离子制备纳米多孔增透膜.《高分子材料科学与工程》.2008,第24卷(第5期),第1页左栏第1段，第2页左栏第1段，右栏第1段. * |
| 吕昊.梯度折射率球透镜的制备及其光学性能研究.《长春理工大学博士学位论文》.2009,全文. |
| 梯度折射率球透镜的制备及其光学性能研究;吕昊;《长春理工大学博士学位论文》;20091127;全文 * |
| 纳米孔二氧化钛超薄薄膜的制备方法和减反特性;邹丽娜;《中国优秀硕士学位论文全文数据库》;20070915;全文 * |
| 邹丽娜.纳米孔二氧化钛超薄薄膜的制备方法和减反特性.《中国优秀硕士学位论文全文数据库》.2007,全文. |
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| CN103116195A (en) | 2013-05-22 |
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Address after: 432000 No. 272 traffic Avenue, Hubei, Xiaogan Patentee after: HUBEI ENGINEERING University Address before: 432000 No. 272 traffic Avenue, Hubei, Xiaogan Patentee before: Xiaogan University |
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