CN103104529A - Device and method of bus control of molecular pump - Google Patents
Device and method of bus control of molecular pump Download PDFInfo
- Publication number
- CN103104529A CN103104529A CN2011103598600A CN201110359860A CN103104529A CN 103104529 A CN103104529 A CN 103104529A CN 2011103598600 A CN2011103598600 A CN 2011103598600A CN 201110359860 A CN201110359860 A CN 201110359860A CN 103104529 A CN103104529 A CN 103104529A
- Authority
- CN
- China
- Prior art keywords
- molecular pump
- bus
- plc
- control
- programmable logic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Testing And Monitoring For Control Systems (AREA)
Abstract
The invention provides a device of bus control of a molecular pump. The device of the bus control of the molecular pump comprises a master control programmable logic controller, a communication module, a switching power supply, a bus cable, a monitoring computer and the molecular pump. The monitoring computer is connected with the master control programmable logic controller through an Ethernet. The communication module of the master control programmable logic controller is connected with the bus cable through the molecular pump. A bus protocol accords with a protocol of the master control programmable logic controller or is compatible with the protocol of the master control programmable logic controller, and can adopt a CONTROLNET protocol, a PROFIBUS protocol or a DEVICENET protocol. The device of the bus control of the molecular pump saves hundreds of control lines, and greatly reduces a failure rate of equipment. Due to the fact that a method of the bus control of the molecular pump is adopted, the device and the method of the bus control of the molecular pump avoid the problem of disturbance brought by the control lines when the control lines interlace in the equipment, increase reliability of the equipment, save a plurality of modules, thereby reducing cost of the equipment, are capable of reading various parameters of the molecular pump and alarming so as to participate in control, and are capable of greatly improving capacity of normal operation of the equipment.
Description
Technical field
The present invention relates to a kind of detection and control gear and method of photovoltaic electro-conductive glass production line, particularly bus control device and the method for molecular pump on a kind of solar film battery electro-conductive glass magnetron sputtering apparatus.
Background technique
Solar film battery electro-conductive glass magnetron sputtering apparatus production line is called for short photovoltaic electro-conductive glass production line, it can plate simple glass one deck conductive metal film, is coated with the PIN semiconductive thin film and installs backboard additional at this TCO glass face to form thin-film solar cell panel.The present invention relates to detection and the control of molecular pump in this production line.Molecular pump is arranged on a certain cavity, it is a kind ofly by High Rotation Speed (20000 rev/mins), momentum to be passed to gas molecule, make gas molecule produce high active force and gas molecule in cavity can be discharged along the specific direction operation, cavity being become the device of a kind of modern vacuum technique to producing without the innage vacuum environment requires of vacuum environment.Tens more than of such devices are arranged on the photovoltaic production line; It is determining the vacuum environment in sputtering chamber, and the film coating sputtering process is had conclusive impact.On photovoltaic coating film production line in the past, each molecular pump is by the 10 core cable (digital quantity signals of control signal, alarm signal; The feedback of the analog signals of rotating speed) be connected in electric cabinet, take tens input/output modules, and numerous cable nodes when causing equipment to install workload increase; Equipment failure rate is raise.Nonetheless, the signals such as the state that some are real-time such as the temperature of molecular pump, current electric current in this case, must find a kind of better method to solve these problems because the circuit restriction can't be obtained.
Chinese patent CN201010529343 relates to a kind of quadrupole rod mass spectrum TT﹠C system and method based on virtual instrument technique, its system comprises upper-position unit and quadrupole rod mass spectrometric measurement equipment, and described quadrupole rod mass spectrometric measurement equipment comprises at least one solenoid valve, at least one pneumatic valve, a quadrupole rod analyzer, a part pump, an iron pump, a vacuum unit, a USB-CAN transducer and a ultrahigh vacuum cavity; Described upper-position unit comprises main control module, data signal analysis module, memory module, I/O card, USB interface and display device, and described main control module comprises valve switch control module and serial communication modular.Adopt the present invention can give full play to the advantages such as simple and friendly interface of virtual instrument technique LabVIEW programming, and the advantage of quadrupole rod mass spectrometer, realize that cost performance is higher, measurement and control program simply and be easy to the mass spectrum TT﹠C system of debugging and safeguarding.
Chinese patent CN200810305976 relates to a kind of bus control method of device of overhead traveling crane material feeding, it is characterized in that: the method is that a device of overhead traveling crane material feeding control box is set near device of overhead traveling crane material feeding, and be provided with bus module in the device of overhead traveling crane material feeding control box, the signaling line that device of overhead traveling crane material feeding is connected with overhead traveling crane is connected with bus module in the device of overhead traveling crane material feeding control box nearby, to shorten the length of signaling line; By bus module, various signals are compiled into a bus signals by the bus protocol of master control programmable logic controller (PLC) (PLC), be connected with the master control programmable logic controller (PLC) (PLC) that is located at a distant place by a bus cable, realize reinforced chain control to device of overhead traveling crane material feeding and overhead traveling crane by master control programmable logic controller (PLC) (PLC), not only many but also grow problem difficult in maintenance to solve signaling line that multiple signals line remote transmission causes.
Chinese patent CN200720010128 discloses a kind of numerical control system, and wherein upper-position unit (1) and bus control unit (2) consist of main equipment; This main equipment by transmission line be connected in series successively comprise described servo driver (3) thereby, PLC from equipment and connect back main equipment and consist of a closed circuit; Main equipment and the link transmission data from passing through between equipment to connect with physical layer+transmission medium; Under normal state, upper-position unit sends that information is only unidirectional is sent to each successively from equipment, and each sends back to upper-position unit by subordinate from equipment successively from device responds information and with feedback information; Various information with the transmission of the form of datagram, mainly comprise the command information of main equipment and the data of returning from equipment and trigger from the exectorial data of equipment in transmission line.The numerical control system that realizes according to the utility model has remarkable high speed control ability, can make numerical control machine tool in the high speed feed situation, obtains high machining accuracy.
Chinese patent CN201020267699 discloses a kind of basic detonator filling automatic production line based on total line traffic control, comprise a plurality of basic detonator filling stations, each basic detonator filling station is equipped with a programmable controller PLC and a simulation station operation touch screen, also is provided with the hand-held touch screen; The analog display unit of basic detonator filling station connects with programmable controller PLC, and programmable controller PLC connects with the hand-held touch screen, and all programmable controller PLC all connect with industrial control computer IPC by bus.The bilateral that the present invention utilizes EC20PLC is the bilateral dual communication oralia card of function and process control machine casually of function, touch screen casually, by ECBUS bus and MODBUS bus, the PLC of a plurality of sub-stations is connected into a complete linkage control system, realized safe, stable, the efficient operation of detonator filling automatic production line, reduce manpower and materials, improved intrinsic safety.
Have no the bus control method about molecular pump in existing patent.The present invention has overcome that the equipment failure rate that existing molecular pump controlling method causes is high, control module expends greatly, the various dynamic parameters inconveniences of molecular pump are understood grasp by operator at any time, provide a kind of easy for installation, control more reliably, operator can control the solution of this device at any time.
Summary of the invention
In view of the above problems, the object of the present invention is to provide bus control device and the method for molecular pump on a kind of solar film battery electro-conductive glass magnetron sputtering apparatus, taked bus control method, avoided former guide line interspersed interference problem of bringing in equipment, increase the stability of equipment, be very suitable for practicality.
The object of the invention to solve the technical problems realizes by the following technical solutions.
The bus control device of a kind of molecular pump provided by the invention, this device comprises: master control programmable logic controller (PLC) (PLC), communication module, switch power, bus cable, supervisory control comuter and molecular pump, and described supervisory control comuter is connected with master control programmable logic controller (PLC) (PLC) by Ethernet; The communication module of described master control programmable logic controller (PLC) (PLC) connects described molecular pump by bus cable.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further:
Described molecular pump has bus functionality.
Described bus protocol is consistent or compatible with the agreement of master control programmable logic controller (PLC) (PLC), can adopt CONTROLNET agreement, PROFIBUS agreement or DEVICENET agreement.
The advantage of the present invention and former control program:
1. save hundreds of guide lines, greatly reduce the rate of fault of equipment.
2. take bus control method, avoided former guide line interspersed interference problem of bringing in equipment, increased the stability of equipment.
3. save a plurality of modules and reduce equipment cost.
4. various parameters and the participation of reporting to the police that can read at any time molecular pump needs are controlled, and can greatly improve the ability of the normal operation of equipment.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of specification, and for above and other purpose of the present invention, feature and advantage can be become apparent, below especially exemplified by preferred embodiment, and the cooperation accompanying drawing, be described in detail as follows.
Description of drawings
With reference to appended accompanying drawing, to describe more fully embodiments of the invention.Yet appended accompanying drawing only is used for explanation and sets forth, and does not consist of limitation of the scope of the invention.
Fig. 1 illustrates the schematic diagram of the bus control device of molecular pump on solar film battery electro-conductive glass magnetron sputtering apparatus.
Label declaration: 1. supervisory control comuter, 2. master control programmable logic controller (PLC) (PLC), 3. communication module, 4. switch power, 5. Ethernet, 6. molecular pump, 7. bus cable.
Embodiment
Reach for further setting forth the present invention technological means and the effect that predetermined goal of the invention is taked, below in conjunction with accompanying drawing and preferred embodiment, bus control device and method to molecular pump on a kind of solar film battery electro-conductive glass magnetron sputtering apparatus of foundation the present invention proposition are described in detail as follows.
Different embodiments of the invention will details are as follows, to implement different technical characteristics of the present invention, will be understood that, the unit of the specific embodiment of the following stated and configuration are in order to simplify the present invention, and it does not only limit the scope of the invention for example.
Figure 1 shows that the bus control device of molecular pump on solar film battery electro-conductive glass magnetron sputtering apparatus, this device comprises: master control programmable logic controller (PLC) (PLC), communication module, switch power, bus cable, supervisory control comuter and molecular pump, and supervisory control comuter is connected with master control programmable logic controller (PLC) (PLC) by Ethernet; The communication module of master control programmable logic controller (PLC) (PLC) connects described molecular pump by bus cable.
On implementing solar film battery electro-conductive glass magnetron sputtering apparatus of the present invention during the bus control device of molecular pump, we have used the molecular pump with bus functionality, use bus that 60 molecular pumps on current device are connected with the communication module of master control programmable logic controller (PLC) (PLC), bus protocol is consistent or compatible with the agreement of master control programmable logic controller (PLC) (PLC), can adopt CONTROLNET agreement, PROFIBUS agreement or DEVICENET agreement.Master control programmable logic controller (PLC) (PLC) by bus can the detection molecules pump rotating speed, electric current, temperature, and control signal and alarm signal and they are passed to supervisory control comuter show intuitively.Can effectively control the normal operation of molecular pump according to these signaling systems, and Real-Time Monitoring molecular pump state.
The present invention has overcome and has taked bus control method, avoids former guide line to intert the interference problem of bringing in equipment, has increased the stability of equipment, saves simultaneously a plurality of modules and reduces equipment costs.And can read at any time various parameters and the participation control of reporting to the police that molecular pump needs, and can greatly improve the ability of the normal operation of equipment, very practical.
By explanation and accompanying drawing, provided the exemplary embodiments of the specified structure of embodiment.Although foregoing invention has proposed existing preferred embodiment, yet these contents are not as limitation.For a person skilled in the art, after reading above-mentioned explanation, various changes and modifications undoubtedly will be apparent.Therefore, appending claims should be regarded whole variations and the correction of containing true intention of the present invention and scope as.Any and all scope of equal value and contents, all should think still to belong in the intent of the present invention and scope in claims scope.
Claims (4)
1. the bus control device of a molecular pump, this device comprises: master control programmable logic controller (PLC) (PLC), communication module, switch power, bus cable, supervisory control comuter and molecular pump is characterized in that: described supervisory control comuter is connected with master control programmable logic controller (PLC) (PLC) by Ethernet; The communication module of described master control programmable logic controller (PLC) (PLC) connects described molecular pump by bus cable.
2. the bus control device of molecular pump as claimed in claim 1, it is characterized in that: described molecular pump has bus functionality.
3. the bus control device of molecular pump as claimed in claim 1, it is characterized in that: described bus protocol is consistent or compatible with the agreement of master control programmable logic controller (PLC) (PLC), can adopt CONTROLNET agreement, PROFIBUS agreement or DEVICENET agreement.
4. the bus control method of the bus control device of a molecular pump as claimed in claim 1, it is characterized in that: the communication module of described master control programmable logic controller (PLC) (PLC) connects described molecular pump by bus cable, by the rotating speed of master control programmable logic controller (PLC) (PLC) by bus cable detection molecules pump, electric current, temperature and control signal and alarm signal, by Ethernet, above-mentioned signal is passed to described supervisory control comuter again, realized the normal effective control that moves of molecular pump by master control programmable logic controller (PLC) (PLC) according to signaling system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103598600A CN103104529A (en) | 2011-11-15 | 2011-11-15 | Device and method of bus control of molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103598600A CN103104529A (en) | 2011-11-15 | 2011-11-15 | Device and method of bus control of molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103104529A true CN103104529A (en) | 2013-05-15 |
Family
ID=48312647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103598600A Pending CN103104529A (en) | 2011-11-15 | 2011-11-15 | Device and method of bus control of molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103104529A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112128108A (en) * | 2019-06-24 | 2020-12-25 | 长鑫存储技术有限公司 | Molecular pump monitoring system and molecular pump monitoring method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1842655A (en) * | 2003-09-17 | 2006-10-04 | 梅科斯特拉克斯勒股份公司 | Magnetic bearing device and vacuum pump |
| CN2938186Y (en) * | 2006-07-19 | 2007-08-22 | 广东科达机电股份有限公司 | Field bus control system of ceramic tile polisher |
| DE102009045386A1 (en) * | 2009-10-06 | 2011-04-07 | Endress + Hauser Process Solutions Ag | Method for operating a fieldbus interface |
-
2011
- 2011-11-15 CN CN2011103598600A patent/CN103104529A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1842655A (en) * | 2003-09-17 | 2006-10-04 | 梅科斯特拉克斯勒股份公司 | Magnetic bearing device and vacuum pump |
| CN2938186Y (en) * | 2006-07-19 | 2007-08-22 | 广东科达机电股份有限公司 | Field bus control system of ceramic tile polisher |
| DE102009045386A1 (en) * | 2009-10-06 | 2011-04-07 | Endress + Hauser Process Solutions Ag | Method for operating a fieldbus interface |
Non-Patent Citations (1)
| Title |
|---|
| 李正军: "《现场总线与工业以太网及其应用》", 30 September 2011, 机械工业出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112128108A (en) * | 2019-06-24 | 2020-12-25 | 长鑫存储技术有限公司 | Molecular pump monitoring system and molecular pump monitoring method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107092231A (en) | A kind of areflexia wave flume wave maker | |
| CN103323686A (en) | Smart power grid power quality analyzer | |
| CN202383489U (en) | Micro-hydraulic station integrated automation system | |
| CN103454552A (en) | Transformer winding deformation on-line monitoring chip | |
| CN102299492A (en) | Intelligent anti-condensation integrated control system for transformer substation | |
| CN104600838A (en) | Diagnosis device and method for column switch feeder terminal | |
| CN103104529A (en) | Device and method of bus control of molecular pump | |
| CN202815533U (en) | Hydropower station monitoring system based on cloud computing | |
| CN203251005U (en) | Intelligent breaker | |
| CN202330594U (en) | Computer program-controlled testing platform for intelligent distribution transformer terminal | |
| CN200968981Y (en) | Battery automatic electricity checking machine | |
| CN203456949U (en) | Intelligent assembly cabinet for transformer station circuit breaker | |
| CN202524168U (en) | Power quality data monitoring device | |
| CN203071653U (en) | Power distribution equipment energy consumption monitoring device | |
| CN201976196U (en) | Embedded automatic monitoring device for transmitter | |
| CN201583579U (en) | Monitoring device for monitoring electric current of solar photovoltaic panels | |
| CN104624117A (en) | Passive automatic detection system and method for stirring production line | |
| CN201834685U (en) | Programmable logic controller (PLC) specially used for crane | |
| CN205263531U (en) | Coal ore terminal control management study simulator | |
| CN205920365U (en) | Power switch cabinet intelligent online monitoring controlling means | |
| CN202115550U (en) | Microcomputer monitoring system for railway signals | |
| CN204633819U (en) | A kind of cloud data collection station being applicable to energy consumption monitoring | |
| CN203537066U (en) | Information collector of distribution network switching station | |
| CN204568710U (en) | A kind of redundancy profibus bus coal conveyer belts control system | |
| CN214204960U (en) | Internet of things-based three-phase load unbalance sensing system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20130515 |