CN103100730A - Computer-aided centering assembly and calibration device and method for diffraction element - Google Patents
Computer-aided centering assembly and calibration device and method for diffraction element Download PDFInfo
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- CN103100730A CN103100730A CN2013100332727A CN201310033272A CN103100730A CN 103100730 A CN103100730 A CN 103100730A CN 2013100332727 A CN2013100332727 A CN 2013100332727A CN 201310033272 A CN201310033272 A CN 201310033272A CN 103100730 A CN103100730 A CN 103100730A
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000003384 imaging method Methods 0.000 claims abstract description 34
- 230000004069 differentiation Effects 0.000 claims abstract description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims abstract description 12
- 239000000741 silica gel Substances 0.000 claims abstract description 12
- 229910002027 silica gel Inorganic materials 0.000 claims abstract description 12
- 230000008859 change Effects 0.000 claims description 24
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 6
- 230000004313 glare Effects 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 4
- 238000005286 illumination Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 238000012856 packing Methods 0.000 claims description 3
- 230000011514 reflex Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 description 10
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 238000003556 assay Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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Abstract
The invention relates to a computer-aided centering assembling and correcting device and a computer-aided centering assembling and correcting method for a diffraction element, which comprise a lathe spindle, a position sensor, a chuck, a special clamp, a driver, a threaded pressing ring, a lens base, silica gel, the diffraction element, a lathe guide rail, a turning tool, a differentiation plate, an ultra-long working distance microscope objective, a light source, a semi-reflecting and semi-transmitting lens, a CCD camera, a CCD imaging lens group, a computer and a cross mark, wherein the lathe spindle is provided with a lathe head; a special cross mark for centering is processed in the center of the diffraction element, the centering detection unit detects the centering deviation, and meanwhile the computer automatically adjusts the position of the chuck according to position data fed back by the position sensor until the centering precision meets the tolerance requirement, and the automatic adjustment of the chuck is stopped. Finally, the lens seat provided with the diffraction element is centered and turned, and then the lens cone is installed. The method and the device solve the problems that a central spherical center image cannot be generated when the diffraction element is subjected to central alignment, the efficiency and the precision of manually adjusting the chuck are low and the like, and realize the computer-assisted control of the central alignment of the diffraction element.
Description
Technical field
The invention belongs to high accuracy optical-mechanical system dress school technical field, relate to a kind of folding and spread out the area of computer aided of diffraction element in hybrid imaging system to the improvement and bring new ideas of heart dress calibration method and device.
Background technology
Folding spreads out in hybrid imaging system, substitutes the traditional optical element with diffraction element, can obviously reduce the use number of optical element, makes that system architecture is simple, volume is little, lightweight.Utilize diffraction element wavefront modulation capability, high design freedom and position phase inversion characteristic flexibly, roll over the effectively aberrations such as correcting chromatic aberration, spherical aberration, astigmatism of hybrid imaging system that spread out, obtain than the better picture element of conventional optical systems.The spread out appearance of hybrid imaging system of folding becomes a reality the application of small-sized, array, integrated optical-mechanical system.
Usually the better folding of performance the higher to heart required precision of its diffraction element of hybrid imaging system of spreading out is therefore diffraction element is to realize the spread out key of hybrid imaging system of high-performance folding to heart dress school.Existing optical element will be regulated the eyeglass displacement with manual mode to heart dress calibration method, and precision and efficient are lower.In addition, existing optical element needs the image of spherical center of the subjective interpretation optical element of human eye to heart dress calibration method, and the diffraction element surface has fine structure, can't produce for the image of spherical center to the heart.Therefore, existing optical element is not suitable for the high-precision aligning dress school of diffraction element to heart dress calibration method.
Summary of the invention
The present invention seeks to solve traditional optical element to needing the subjective interpretation element of human eye to be used for image of spherical center to the heart in heart dress school, and diffraction element can't produce image of spherical center; The traditional optical element needs the displacement of manual adjustments eyeglass in heart dress school, and the large and inefficient technical problem of error for overcoming the above problems, the invention provides a kind of folding and spreads out the area of computer aided of diffraction element in hybrid imaging system to heart dress calibration method and device.
First aspect present invention provides a kind of folding to spread out, and the area of computer aided of diffraction element fills calibration device to the heart in hybrid imaging system, described device comprises: lathe spindle, position sensor, chuck, special fixture, driver, threaded ring, microscope base, silica gel, diffraction element, lathe guide rail, lathe tool, to the paired heart dress of heart groups of sensor elements calibration device comprise differentiation plate, overlength working distance microcobjective, light source, half-reflecting half mirror, CCD camera, CCD imaging lens group, computer, cross mark to heart detecting unit; Wherein:
Position sensor is placed in the chuck hub position, and position sensor is used for registration card disk center position real-time change value;
Chuck is installed with the lathe spindle coaxial line, and chuck has a vertical plane vertical with main shaft;
Special fixture is clamped in position in the middle of chuck by four pawls of chuck, and the bottom face of special fixture leans against on the vertical plane of chuck, and the upper surface of special fixture is threaded with microscope base one end;
Four drivers are evenly arranged on the face of cylinder of chuck, in order to drive chuck;
Threaded ring screws by self screw thread with microscope base, and diffraction element is fixed between microscope base and trim ring;
Silica gel is annotated in microscope base hole radially;
Lathe guide rail, below main shaft, and parallel with main shaft;
Cross mark utilizes the lathe tool embossment at the surperficial concentrically ringed center of diffraction element;
Overlength working distance microcobjective, differentiation plate, half-reflecting half mirror, light source, CCD imaging lens group, CCD camera and lathe spindle coaxial line and be arranged on successively on lathe guide rail;
Overlength working distance microcobjective is positioned near diffraction element, is used for cross figure on observation differentiation plate through the cross mark at the picture of the diffraction surfaces reflection of diffraction element and diffraction element center;
On the differentiation plate, the cross figure is arranged, this cross figure is projected on the diffraction element diffraction surfaces by overlength working distance microcobjective, and be imaged on the CCD camera after diffracted reflection, judge by the imaging situation whether the diffraction surfaces of diffraction element accurately is positioned on the focal plane of long working distance microcobjective;
Half-reflecting half mirror reflexes to the illumination light of light source on differentiation plate and diffraction element;
The CCD imaging lens group, the picture that overlength working distance microcobjective is observed projects on the CCD camera;
Computer is connected with four drivers respectively, is used for trace and controls chuck in the displacement of horizontal and vertical direction, to change on diffraction element cross mark with respect to the position of main-shaft axis;
Computer, the link position sensor reads the chuck hub position real-time change value of position sensor feedback and automatically regulates chuck, automatically stops after being adjusted in required real-time change value scope;
The port of computer is connected with the port of CCD camera; The cross mark that CCD camera single frames gathers on diffraction element is revolved the image information of N the position of turning around and sends computer to, computer is processed through image and is drawn on diffraction element cross mark and revolve the orbital radius value that turns around, and automatically obtain heart deviate, N is integer.
The method of the area of computer aided that second aspect present invention provides a kind of diffraction element to heart dress school, described step to heart dress school is as follows:
Step S1: process for the cross mark to the heart at the diffraction element center by photoetching technique, described cross mark does not affect imaging and can not produce veiling glare;
Step S2: microscope base is radially punched, and by the mode that the hole is annotated silica gel and threaded ring is installed, have the diffraction element of cross mark to be fixed in microscope base at the center, microscope base radially leaves machining allowance;
Step S3: will be fixed on chuck with special fixture with the microscope base of diffraction element;
Step S4: utilize simultaneously position sensor with the center data feedback of the center real-time change of chuck to computer; Simultaneous computer is according to the center data and heart deviate is sent instruction automatically regulate chuck, in order to change the position of diffraction element, make the center of cross mark move on to gradually on main shaft, simultaneously to heart detecting unit still the cross mark at automatic detection of diffracted element center and main shaft to heart deviation, do not continue automatically to regulate if do not satisfy the tolerance chuck, stop if satisfying the automatic adjusting of tolerance chuck;
Step S5: will be with the microscope base of the diffraction element lens barrel of packing into.
The invention has the beneficial effects as follows: the method and device adopt computer control, have realized that diffraction element fills school automated closed-loop FEEDBACK CONTROL to the heart.Solve the foldings such as microscope, the large relative aperture telescope high-precision aligning that diffraction element needs in hybrid imaging system that spreads out and filled the school problem.Cross mark solves diffraction element without the problem of image of spherical center for not affecting imaging and can not producing veiling glare with this.
(1) in the special cross mark of diffraction element center processing, neither affect imaging and can not produce veiling glare again.With this inventive method and device solves diffraction element can't produce during to heart dress school bulbus cordis imago, the problem such as manual adjustments chuck efficient is low and precision is low, realized the computer-aided control of diffraction element to heart dress school.
(2) self-control is housed to heart detection system on lathe guide rail, cross mark sends computer by system imaging to by the collection of high-speed CCD single frames, and computer is processed to such an extent that locate cross mark radius of motion value through image, obtains heart deviation.Solved the large problem of human eye subjective judgement diffraction element centre mark image point position error.
(3) adopt electronic interior bulb chuck, change the position of diffraction element central cross mark by computer control chuck drive device, solve the problem that manual adjustments efficient is low, error is large.
(4) computer can come automatic regulating electric chuck according to the position data of chuck upper position sensor feedback, has solved the problem that manual adjustments chuck efficient is low, precision is low.
(5) to the detection of heart deviation, the feedback of position data and the automatic adjusting of chuck, these three are carried out simultaneously.Realized the automated closed-loop FEEDBACK CONTROL of diffraction element area of computer aided to heart dress school.
Description of drawings
Fig. 1 is that a kind of folding of the present invention spreads out the area of computer aided of diffraction element in hybrid imaging system to heart dress calibration device schematic diagram;
Fig. 2 is that a kind of folding of the present invention spreads out the area of computer aided of diffraction element in hybrid imaging system to the operational flowchart of heart dress calibration method;
Fig. 3 is the cross mark schematic diagram of diffraction element center processing in the present invention;
Fig. 4 is that in the present invention, diffraction element central cross mark warp gathers to the heart detection system high speed CCD single frames image schematic diagram that it revolves the individual position of the N that turns around (this figure N gets 8);
Fig. 5 is the image that draws after in the present invention, diffraction element central cross mark turns around the individual location drawing picture of N (this figure N gets 8) machine is processed as calculated.
Description of reference numerals
The 1st, lathe spindle
The 2nd, position sensor;
The 3rd, chuck;
The 4th, special fixture;
The 5th, driver;
The 6th, threaded ring;
The 7th, microscope base;
The 8th, silica gel;
The 9th, diffraction element;
The 10th, lathe guide rail;
The 11st, lathe tool;
The 12nd, the differentiation plate;
The 13rd, overlength working distance microcobjective;
The 14th, light source;
The 15th, half-reflecting half mirror;
The 16th, CCD camera;
The 17th, CCD imaging lens group;
The 18th, computer;
The 19th, the cross mark at diffraction element center;
191～198th, diffraction element central cross mark revolves the image of 8 positions of turning around.
The specific embodiment
For the advantage that makes purpose of the present invention, technical scheme and device etc. is clearer, below in conjunction with accompanying drawing, the present invention is described in further details.
Adopt in the inventive method and device the computer control diffraction element to the heart, improved precision and the efficient of diffraction element to heart dress school, realized the automated closed-loop FEEDBACK CONTROL of diffraction element to heart dress school.
Traditional optical mirror slip lathe is improved and innovates heart dress calibration method.Process for the special cross mark to the heart at the diffraction element center by photoetching technique.Employing fills calibration device conduct mainly to heart dress calibration equipment to the self-control assemblings such as heart detection system, electronic interior bulb chuck, driver, position sensor and computer to the heart by lathe with high precision, self-control.It is plane, sphere or aspheric diffraction element 9 that the method is applicable to basal surface shape.
The area of computer aided of diffraction element of the present invention fills calibration device to the heart as shown in Figure 1, described device comprises: lathe spindle 1, position sensor 2, chuck 3, fixture 4, driver 5, threaded ring 6, microscope base 7, silica gel 8, diffraction element 9, lathe guide rail 10, lathe tool 11, to the paired heart dress of heart groups of sensor elements calibration device describedly are comprised of differentiation plate 12, microcobjective 13, light source 14, half-reflecting half mirror 15, CCD camera 16, CCD imaging lens group 17, computer 18, cross mark 19 heart detecting unit; Wherein:
Position sensor 2 is placed in chuck 3 centers, and position sensor 2 is used for recording chuck 3 center real-time change values; Chuck 3 is installed with lathe spindle 1 coaxial line, and chuck 3 has a vertical plane vertical with main shaft; Special fixture 4 is clamped in position in the middle of chuck 3 by four pawls of chuck 3, and the bottom face of special fixture 4 leans against on the vertical plane of chuck 3, and the upper surface of special fixture 4 is threaded with microscope base 7 one ends; Four drivers 5 are evenly arranged on the face of cylinder of chuck 3, in order to drive chuck 3; Threaded ring 6 screws by self screw thread with microscope base 7, and diffraction element 9 is fixed between microscope base 7 and trim ring 6; Silica gel 8 is annotated in microscope base 7 hole radially; Lathe guide rail 10, below main shaft 1, and parallel with main shaft 1; Cross mark 19 utilizes lathe tool 11 embossments at the surperficial concentrically ringed center of diffraction element 9; Overlength working distance microcobjective 13, differentiation plate 12, half-reflecting half mirror 15, light source 14, CCD imaging lens group 17, CCD camera 16 is with lathe spindle 1 coaxial line and be arranged on successively on lathe guide rail 10; Overlength working distance microcobjective 13 is positioned near diffraction element 9, is used for cross figure on observation differentiation plate 12 through the cross mark 19 at the picture of the diffraction surfaces reflection of diffraction element 9 and diffraction element 9 centers; On differentiation plate 12, the cross figure is arranged, this cross figure is projected on diffraction element 9 diffraction surfaces by overlength working distance microcobjective 13, and be imaged on CCD camera 16 after diffracted reflection, judge by the imaging situation whether the diffraction surfaces of diffraction element 9 accurately is positioned on the focal plane of long working distance microcobjective; Half-reflecting half mirror 15 reflexes to the illumination light of light source 14 on differentiation plate 12 and diffraction element 9; CCD imaging lens group 17, the picture that overlength working distance microcobjective 13 is observed projects on CCD camera 16; Computer 18 is connected with four drivers 5 respectively, is used for trace and controls chuck 3 in the displacement of horizontal and vertical direction, to change on diffraction element 9 cross mark 19 with respect to the position of main shaft 1 axis; Computer 18, link position sensor 2 reads the chuck 3 center real-time change values of position sensor 2 feedbacks and automatically regulates chuck, is adjusted in required real-time change value scope automatically to stop afterwards; The port of computer 18 is connected with the port of CCD camera 16; The cross mark 19 that CCD camera 16 single frames gather on diffraction element 9 is revolved the image information of N the position of turning around and sends computer 18 to, computer 18 is processed through images and is drawn on diffraction element 9 cross mark 19 and revolve the orbital radius value that turns around, and automatically obtain heart deviate, N is integer.
Described chuck is to adopt electronic interior bulb chuck 3, and its drive principle is similar to the drive principle of boring bar in numerical control coordinate borer.
The cross mark 19 at described diffraction element 9 centers is through system imagings, revolves the image information of the N that turns around (N is integer) individual position and sends computer 18 to again but high-speed CCD camera 16 single frames gather cross marks 19.Computer 18 is processed through image, draws the radius value of cross mark 19 movement locus on diffraction element 9, and automatically obtains heart deviation.
4 drivers 5 of uniform arrangement on the face of cylinder of chuck 3, driver 5 is controlled by computer 18, is used for trace and controls chuck 3 in the displacement of its horizontal and vertical direction, to change on diffraction element 9 cross mark 19 with respect to the position of device main shaft 1.
A high sensitivity position sensor 2 is equipped with at chuck 3 centers, and position sensor 2 feeds back to computer 18 with chuck 3 center real-time change values.Computer 18 can according to the position data of position sensor 2 feedback and obtain heart deviate is regulated chuck 3 automatically, automatically stop after being adjusted in required scope.
To the detection of heart deviation, the feedback of position data and the automatic adjusting of chuck 3, these three are carried out simultaneously.When detecting heart deviation to heart detecting unit, computer 18 sends instruction according to detected position data to heart deviate and position sensor 2 feedbacks and automatically regulates chuck 3 positions, until when heart precision was satisfied tolerance, the automatic adjusting of chuck 3 stopped.Realized the automated closed-loop FEEDBACK CONTROL of diffraction element 9 area of computer aided to heart dress school.
According to lens barrel inner diameter values used and diffraction element 9 needed to heart precision to the turning of feeling relieved of microscope base 7 cylindricals and end face.The lens barrel of after turning is completed, it being packed into.
The cross mark 19 at the center of diffraction element 9 is as shown in Figure 3: cross mark 19 contains the dicyclo body structure, and wherein the radius of first ring body structure is R1, and the radius of first ring body structure is R
2, and R
2＞R
1Mark overall length and beam overall are b.Overall length and beam overall b are caught in for the ease of cross mark, by R
1And R
2The dicyclo body that forms is used for the auxiliary catch of cross.
This cross mark 19 is that a bandwidth a is the cross mark that there is ring at the 0.002mm center.A=0.002mm wherein, b=0.1mm, R
1=0.008mm, R
2=0.01mm.
Fill school device used as shown in Figure 1: adopt the area of computer aided that the self-controls such as lathe with high precision, automatic centering detecting unit, electronic interior bulb chuck 3, driver 5, position sensor 2 and computer 18 are assembled into to fill calibration device as mainly the heart being filled calibration equipment to the heart.
Be transformed into high-accuracy computer numerical control to heart lathe by lathe with high precision, adopt electronic interior bulb chuck 3,4 drivers 5 of uniform arrangement on the face of cylinder of chuck 3, driver 5 is controlled by computer 18, be used for trace and control electric chuck 3 in the displacement of horizontal and vertical direction, to change on diffraction element 9 cross mark 19 with respect to the position of device main shaft 1.
A high sensitivity position sensor 2 is equipped with at electric chuck 3 centers, and position sensor 2 feeds back to computer 18 with chuck 3 center real-time change values.Computer 18 is regulated chuck 3 according to the position data of position sensor 2 feedbacks by controlling driver 5.
The self-control that is comprised of overlength working distance microcobjective 13, differentiation plate 12, half-reflecting half mirror 15, CCD imaging lens group 17, light source 14 and high-speed CCD camera 16 is housed to heart detecting unit on lathe guide rail 10, this detecting unit is by computer 18 controls.This to heart detecting unit for detection of in diffraction element 9 central cross mark 19 rotary courses because there being pair heart deviation to form the radius value of circular trace.
The area of computer aided of diffraction element fills the school flow process to the heart as shown in Figure 2:
Step S1: process for the cross mark 19 to the heart at diffraction element 9 centers by photoetching technique, described cross mark 19 does not affect imaging and can not produce veiling glare; Solve diffraction element 9 without the problem of image of spherical center with this.
Step S2: microscope base 7 is radially punched, and by the mode that the hole is annotated silica gel 8 and threaded ring 6 is installed, have the diffraction element 9 of cross mark 19 to be fixed in microscope base 7 at the center, microscope base 7 radially leaves machining allowance;
Step S3: will be fixed on chuck 3 with the microscope base 7 use special fixtures 4 of diffraction element 9; Microscope base 7 with diffraction element 9 connects by this fixture 4 and is positioned on the chuck 3 of lathe spindle 1 front end.
Step S4: utilize simultaneously position sensor 2 with the center data feedback of the center real-time change of chuck 3 to computer 18; Simultaneous computer 18 is according to the center data and heart deviate is sent instruction automatically regulate chuck 3, in order to change the position of diffraction element 9, the center of cross mark 19 is moved on on main shaft 1 gradually; Simultaneously to heart detecting unit still the cross mark 19 at automatic detection of diffracted element 9 centers and main shaft 1 to heart deviation, continue automatically to regulate if do not satisfy tolerance chuck 3, stop if satisfying the automatic adjusting of tolerance chuck 3.
Step S5: will be with the microscope base 7 of diffraction element 9 lens barrel of packing into.
Before the dress school, the machine components such as the diffraction element 9 of center band cross mark 19 and microscope base 7, threaded ring 6, lens barrel are tested.
After the assay was approved, annotate silica gel 8 fixed diffraction elements 9 in wherein by microscope base 7 hole radially, then assist fixed diffraction element 9 with threaded ring 6.
After fixedly completing between diffraction element 9 and microscope base 7, the microscope base 7 with diffraction element 9 is positioned on the electronic interior bulb chuck 3 of lathe spindle 1 front end by self-control special fixture 4.
In the present invention, diffraction element 9 central cross marks 19 warps gather to heart detecting unit high speed CCD camera 16 single frames the image image information that it revolves the individual position of the N that turns around (this figure N gets 8) as shown in Figure 4; Rotating chuck 3, by high-speed CCD camera 16 single frames in heart detection system are gathered the image information that cross mark 19 is revolved the individual position of the N that turns around (this time N gets 8), send computer 18 to, the image information central cross mark 19 of diffraction element 9 is as shown in Figure 4 revolved the image 191～198 of 8 positions of turning around again;
191～198 revolve the image of 8 positions of turning around for cross mark 19.18 pairs, computer with epigraph automatically process after, draw the orbital radius value that cross mark 19 is revolved 8 positions of turning around, obtain heart deviate R
0, the diffraction element 9 central cross marks 19 individual location drawing picture of N (this figure N the gets 8) image that draws after processing of machine 18 as calculated that turns around in the present invention as shown in Figure 5.
If try to achieve radius value R
0Greater than desired deviation, computer 18 will continue the position data according to position sensor 2 feedbacks, regulate chuck 3 by controlling driver 5, to change the position of diffraction element 9 central cross marks 19.
To heart deviation R
0Detection, the feedback of position data and the automatic adjusting of chuck 3, these three are carried out simultaneously.Heart detecting unit is detected heart deviation R
0The time, computer 18 is according to R
0Value and the position data of position sensor 2 feedback send instruction and automatically regulate chuck 3 positions, until when heart precision was satisfied tolerance, the automatic adjusting of chuck 3 stopped.
At last according to lens barrel inner diameter values used and diffraction element 9 needed to heart precision to microscope base 7 cylindricals and end face with lathe tool 11 turning of feeling relieved.The lens barrel of after turning is completed, it being packed into.
The above only be the specific embodiment in the present invention, but protection scope of the present invention is not limited to this.Any people who is familiar with this technology can understand conversion or the replacement expected in the disclosed technical scope of the present invention, all be encompassed in of the present invention comprise scope within.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (5)
1. the area of computer aided of a diffraction element fills calibration device to the heart, it is characterized in that, described device comprises: lathe spindle, position sensor, chuck, special fixture, driver, threaded ring, microscope base, silica gel, diffraction element, lathe guide rail, lathe tool, to the paired heart dress of heart groups of sensor elements calibration device comprise differentiation plate, overlength working distance microcobjective, light source, half-reflecting half mirror, CCD camera, CCD imaging lens group, computer, cross mark to heart detecting unit; Wherein:
Position sensor is placed in the chuck hub position, and position sensor is used for registration card disk center position real-time change value;
Chuck is installed with the lathe spindle coaxial line, and chuck has a vertical plane vertical with main shaft;
Special fixture is clamped in position in the middle of chuck by four pawls of chuck, and the bottom face of special fixture leans against on the vertical plane of chuck, and the upper surface of special fixture is threaded with microscope base one end;
Four drivers are evenly arranged on the face of cylinder of chuck, in order to drive chuck;
Threaded ring screws by self screw thread with microscope base, and diffraction element is fixed between microscope base and trim ring;
Silica gel is annotated in microscope base hole radially;
Lathe guide rail, below main shaft, and parallel with main shaft;
Cross mark utilizes the lathe tool embossment at the surperficial concentrically ringed center of diffraction element;
Overlength working distance microcobjective, differentiation plate, half-reflecting half mirror, light source, CCD imaging lens group, CCD camera and lathe spindle coaxial line and be arranged on successively on lathe guide rail;
Overlength working distance microcobjective is positioned near diffraction element, is used for cross figure on observation differentiation plate through the cross mark at the picture of the diffraction surfaces reflection of diffraction element and diffraction element center;
On the differentiation plate, the cross figure is arranged, this cross figure is projected on the diffraction element diffraction surfaces by overlength working distance microcobjective, and be imaged on the CCD camera after diffracted reflection, judge by the imaging situation whether the diffraction surfaces of diffraction element accurately is positioned on the focal plane of long working distance microcobjective;
Half-reflecting half mirror reflexes to the illumination light of light source on differentiation plate and diffraction element;
The CCD imaging lens group, the picture that overlength working distance microcobjective is observed projects on the CCD camera;
Computer is connected with four drivers respectively, is used for trace and controls chuck in the displacement of horizontal and vertical direction, to change on diffraction element cross mark with respect to the position of main-shaft axis;
Computer, the link position sensor reads the chuck hub position real-time change value of position sensor feedback and automatically regulates chuck, automatically stops after being adjusted in required real-time change value scope;
The port of computer is connected with the port of CCD camera; The cross mark that CCD camera single frames gathers on diffraction element is revolved the image information of N the position of turning around and sends computer to, computer is processed through image and is drawn on diffraction element cross mark and revolve the orbital radius value that turns around, and automatically obtain heart deviate, N is integer.
2. the area of computer aided of diffraction element as claimed in claim 1 fills calibration device to the heart, it is characterized in that, described chuck is electronic interior bulb chuck.
3. the area of computer aided of diffraction element as claimed in claim 1 fills calibration device to the heart, it is characterized in that, described diffraction element has a basal surface, and the face shape of described basal surface is a kind of in plane, sphere, aspheric surface.
4. the method for the area of computer aided of a diffraction element to heart dress school, is characterized in that, described step to the heart is as follows:
Step S1: process for the cross mark to the heart at the diffraction element center by photoetching technique, described cross mark does not affect imaging and can not produce veiling glare;
Step S2: microscope base is radially punched, and by the mode that the hole is annotated silica gel and threaded ring is installed, have the diffraction element of cross mark to be fixed in microscope base at the center, microscope base radially leaves machining allowance;
Step S3: will be fixed on chuck with special fixture with the microscope base of diffraction element;
Step S4: utilize simultaneously position sensor with the center data feedback of the center real-time change of chuck to computer; Simultaneous computer is according to the center data and heart deviate is sent instruction automatically regulate chuck, in order to change the position of diffraction element, make the center of cross mark move on to gradually on main shaft, simultaneously to heart detecting unit still the cross mark at automatic detection of diffracted element center and main shaft to heart deviation, do not continue automatically to regulate if do not satisfy the tolerance chuck, stop if satisfying the automatic adjusting of tolerance chuck;
Step S5: will be with the microscope base of the diffraction element lens barrel of packing into.
5. as claimed in claim the area of computer aided of diffraction element fills calibration method to the heart, it is characterized in that, described diffraction element has a substrate, and the face shape of described substrate is a kind of in plane, sphere or aspheric surface.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105405115A (en) * | 2014-08-19 | 2016-03-16 | 宁波舜宇光电信息有限公司 | Image module group alignment system and method thereof |
| CN107096928A (en) * | 2017-06-05 | 2017-08-29 | 中国矿业大学 | Centering car lens barrel processing unit (plant) and its method based on optical decentration system |
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| CN2031931U (en) * | 1988-01-26 | 1989-02-01 | 中国科学院长春光机所 | Photoelectric automatic centering device for optical lenses |
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| CN2031931U (en) * | 1988-01-26 | 1989-02-01 | 中国科学院长春光机所 | Photoelectric automatic centering device for optical lenses |
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| RU2181198C2 (en) * | 2000-01-28 | 2002-04-10 | Физический институт им. П.Н. Лебедева РАН | X-ray monochromator |
| CN1381044A (en) * | 2000-03-27 | 2002-11-20 | 皇家菲利浦电子有限公司 | Optical scanning device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105405115A (en) * | 2014-08-19 | 2016-03-16 | 宁波舜宇光电信息有限公司 | Image module group alignment system and method thereof |
| CN105405115B (en) * | 2014-08-19 | 2018-11-23 | 宁波舜宇光电信息有限公司 | A kind of image mould group is to heart system and method |
| CN107096928A (en) * | 2017-06-05 | 2017-08-29 | 中国矿业大学 | Centering car lens barrel processing unit (plant) and its method based on optical decentration system |
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