CN103092450A - Touch screen and manufacturing method thereof and display device - Google Patents

Touch screen and manufacturing method thereof and display device Download PDF

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Publication number
CN103092450A
CN103092450A CN2013100324896A CN201310032489A CN103092450A CN 103092450 A CN103092450 A CN 103092450A CN 2013100324896 A CN2013100324896 A CN 2013100324896A CN 201310032489 A CN201310032489 A CN 201310032489A CN 103092450 A CN103092450 A CN 103092450A
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touch
screen
module
layer
conductive membrane
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CN103092450B (en
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刘英明
王海生
杨盛际
邓立广
段亚锋
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BOE Technology Group Co Ltd
Beijing BOE Optoelectronics Technology Co Ltd
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Beijing BOE Optoelectronics Technology Co Ltd
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Abstract

The invention relates to the field of liquid crystal display, in particular to a touch screen, a manufacturing method of the touch screen and a display screen. The problems that according to an existing touch screen, in a working state, due to the signal interference of a display module and a touch module, touch sensitivity of the existing touch screen is affected, and further the performance of the existing touch screen is affected are solved. The touch screen comprises a display module, a touch module and at least one conductive thin film positioned between the display module and the touch module. The total stay capacitance between the display module and the touch module is reduced.

Description

A kind of touch-screen and manufacture method thereof, display device
Technical field
The present invention relates to field of liquid crystal display, particularly a kind of touch-screen and manufacture method thereof, display device.
Background technology
Thin-film transistor LCD device (Thin Film Transistor Liquid Crystal Display, TFT-LCD) have the advantages such as volume is little, low in energy consumption, radiationless, occupied leading position in current panel display apparatus market, be widely used in the fields such as desktop computer, notebook computer, personal digital assistant (Personal Digital Assistant, PDA), mobile phone, TV, monitor.Along with the application of touch technology at display panel, touch-screen (Touch Screen Panel) arises at the historic moment, and develops into gradually the screen of main flow flat-panel monitor.At present, touch-screen can be divided into according to principle of work: resistance-type, condenser type, infrared-type and surface acoustic wave type; Wherein, capacitive touch screen relies on the advantages such as high sensitivity, long-life, high transmission rate with its unique touch-control principle, is pursued in the industry to be the new lover.
Capacitive touch screen commonly used comprises at present: the touch module that is used for showing the demonstration module of image and is used for the perception touch-control; Wherein, show that module further comprises: tft array substrate, color film (Color Filter, CF) substrate and the liquid crystal between tft array substrate and CF substrate (Liquid Crystal, LC); Touch module further comprises mutually insulated and touch-control drive electrode and touch-control sensing electrode arranged in a crossed manner.At present, diverse location according to touch module in touch-screen, touch-screen further comprises again: the Add-On(external hanging type) touch-screen, On-Cell(externally embedded type) touch-screen and In-Cell(embedded) the touch-screen three types, wherein, touch module in In-Cell formula touch-screen is arranged between tft array substrate and CF substrate, and in On-Cell formula touch-screen, touch module is arranged between CF substrate and polaroid.
take the On-Cell touch-screen as example, referring to Fig. 1, the On-Cell touch-screen comprises: tft array substrate 1, CF substrate 2, the liquid crystal layer 3 between tft array substrate 1 and CF substrate 2, be positioned at the touch module 4 on CF substrate 2 and be positioned at polaroid 5 on touch module 4, owing to comprising pixel electrode layer in tft array substrate 1 or CF substrate 2, touch module 4 comprises be used to the touch control electrode layer of responding to extraneous touch signal, touch-screen in working order under, the voltage that shows the pixel electrode layer of module is U1, the voltage of the touch control electrode layer of touch module is U2, there is certain voltage difference △ U between the two, can produce between signal on pixel electrode layer and touch control electrode layer so and disturb, thereby form stray capacitance between pixel electrode layer and touch control electrode layer, referring to Fig. 2, thereby affect the touch sensitivity of touch-screen, and then affect the performance of touch-screen.
In sum, existing touch-screen in working order under, owing to showing the signal interference of module with touch module, thereby affect the touch sensitivity of touch-screen, and then affect the performance of touch-screen.
Summary of the invention
The embodiment of the present invention provides a kind of touch-screen and manufacture method thereof, display device, be used for to solve existing touch-screen in working order under, because the signal of demonstration module to touch module disturbs, thereby affect the touch sensitivity of touch-screen, and then affect the problem of the performance of touch-screen.
The embodiment of the present invention provides a kind of touch-screen, comprising: show module and touch module, wherein, this touch-screen also comprises:
At least one conductive membrane layer between described demonstration module and described touch module.
If the touch control electrode layer of above-mentioned touch module contacts with a described conductive membrane layer, described touch-screen also comprises the first insulation course between the touch control electrode layer of described touch module and this conductive membrane layer.
If the quantity of above-mentioned conductive membrane layer is not less than 2, described touch-screen also comprises the second insulation course between any two adjacent conductive membrane layers.
Above-mentioned conductive membrane layer adopts the transparent conductivity material.
Above-mentioned transparent conductive material is tin indium oxide ITO or indium-zinc oxide IZO.
Above-mentioned the first insulation course and described the second insulation course adopt the transparent insulating material.
Above-mentioned transparent insulation material is a kind of or compound in silicon nitride, monox and resin-insulated material.The embodiment of the present invention provides a kind of display device, comprises above-mentioned touch-screen.
The embodiment of the present invention provides a kind of manufacture method of touch-screen, comprising:
After completing the making that shows module, on a side that deviates from liquid crystal layer of the color membrane substrates of described demonstration module, deposit at least the layer of transparent conductive film, form conductive membrane layer;
Form touch module on last conductive membrane layer that forms.
The touch-screen of the embodiment of the present invention comprises demonstration module, touch module and at least one conductive membrane layer between this demonstration module and this touch module; Because the embodiment of the present invention has increased at least one conductive membrane layer between the electrode layer of the pixel electrode layer that shows module and touch module, show between the pixel electrode layer and conductive membrane layer of module, all formed stray capacitance between the electrode layer of conductive membrane layer and touch module, and between the stray capacitance that forms for being connected in series, owing to being connected in series, make the capacitance of the total stray capacitance between demonstration module and touch module less than the capacitance of the stray capacitance of the minimum that forms, thereby reduced the total stray capacitance that shows between module and touch module.
Description of drawings
Fig. 1 is the cross-sectional view of touch-screen in background technology;
Fig. 2 is the equivalent structure schematic diagram of the stray capacitance of touch-screen in background technology;
Fig. 3 is the cross-sectional view of embodiment of the present invention the first touch-screen;
Fig. 4 is the equivalent structure schematic diagram of the stray capacitance of embodiment of the present invention the first touch-screen;
Fig. 5 is the cross-sectional view of embodiment of the present invention the second touch-screen;
Fig. 6 is the cross-sectional view of the third touch-screen of the embodiment of the present invention;
Fig. 7 is the equivalent structure schematic diagram of the stray capacitance of the third touch-screen of the embodiment of the present invention;
Fig. 8 is the cross-sectional view of the 4th kind of touch-screen of the embodiment of the present invention;
Fig. 9 is the manufacture method schematic flow sheet of embodiment of the present invention touch-screen;
Figure 10 is the manufacture method schematic flow sheet of the 4th kind of touch-screen of the embodiment of the present invention.
Embodiment
The touch-screen of the embodiment of the present invention by at least one conductive membrane layer being set showing between module and touch module, thereby has reduced the total stray capacitance that shows between module and touch module.
Embodiment of the present invention touch-screen can be Add-On touch-screen or On-Cell touch-screen; The embodiment of the present invention all describes as an example of the On-Cell touch-screen example, and Add-On touch-screen and On-Cell touch-screen are similar, will not enumerate explanation herein.
Below in conjunction with Figure of description, the embodiment of the present invention is described in further detail.
The touch-screen of the embodiment of the present invention comprises: show module, touch module and at least one conductive membrane layer between this demonstration module and this touch module;
Wherein, show module comprise array base palte, color membrane substrates, at the liquid crystal between this array base palte and color membrane substrates and be positioned at polaroid on this color membrane substrates; Show that module comprises pixel electrode layer, touch module comprises touch control electrode layer.
The conductive membrane layer of the embodiment of the present invention adopts the transparent conductivity material;
Preferably, this transparent conductivity material is ITO(Indium-Tin Oxide, tin indium oxide) or IZO(Indium Zinc Oxide, indium-zinc oxide) etc. oxide;
Wherein, the thickness of each conductive membrane layer is 200 Ethylmercurichlorendimides ~ 400 Ethylmercurichlorendimides.
Embodiment one, describe as example to comprise a conductive membrane layer between the demonstration module of embodiment of the present invention touch-screen and touch module.
Referring to Fig. 3, the touch-screen in the present embodiment comprises: array base palte 1, color membrane substrates 2, at the liquid crystal layer 3 between array base palte 1 and color membrane substrates 2, be positioned at conductive membrane layer 6 on the side that deviates from liquid crystal layer 3 of color membrane substrates 2, be positioned at the touch module 4 on this conductive membrane layer 6 and be positioned at polaroid 5 on this touch module 4;
Wherein, conductive membrane layer 6 adopts the transparent conductivity material; The thickness of conductive membrane layer 6 is 200 Ethylmercurichlorendimides ~ 400 Ethylmercurichlorendimides.
Preferably, this transparent conductivity material is the oxides such as ITO or IZO.
referring to Fig. 4, comprise a conductive membrane layer in the present embodiment between color membrane substrates and touch module, because array base palte or color membrane substrates comprise pixel electrode layer, touch module comprises touch control electrode layer, conductive membrane layer is in vacant state, therefore, form the first stray capacitance C1 between pixel electrode layer and conductive membrane layer, conductive membrane layer and touch control electrode layer form the second stray capacitance C2, due between the first stray capacitance C1 and the second stray capacitance C2 for being connected in series, therefore, the value of stray capacitance C between pixel electrode layer and touch control electrode layer is less than the value of stray capacitance less in the first stray capacitance C1 and the second stray capacitance C2, therefore, comprise a conductive membrane layer between color membrane substrates and touch module, because array base palte or color membrane substrates comprise a pixel electrode layer, the value of stray capacitance C between pixel electrode layer and touch control electrode layer can be reduced at least half of value of original stray capacitance, thereby reduced the total stray capacitance C between pixel electrode layer and touch control electrode layer.
Further, referring to Fig. 5, if the touch control electrode layer of touch module 4 contacts with a conductive membrane layer 6, also comprise the first insulation course 7 between this touch control electrode layer and this conductive membrane layer 6;
Wherein, this first insulation course 7 adopts the transparent insulating material.
Preferably, this transparent insulating material is a kind of or compound in silicon nitride SiNx, silicon oxide sio x and resin-insulated material.
Need to prove, because the material that adopts is different, the thickness of the first insulation course also can corresponding difference; For example, if the first insulation course adopts SiNx, the thickness of first this insulation course is about 4000 Ethylmercurichlorendimides; If the first insulation course adopts resin-insulated material, the thickness of this first insulation course is 1 micron left and right.
In the present embodiment due to a conductive membrane layer being set between pixel electrode layer and touch control electrode layer, therefore, the value of total stray capacitance C between pixel electrode layer and touch control electrode layer can be reduced at least half of value of original stray capacitance, thereby reduced the stray capacitance between pixel electrode layer and touch control electrode layer.
Comprise two or more conductive membrane layers between the color membrane substrates of embodiment two, embodiment of the present invention touch-screen and touch module, wherein, comprise the first insulation course between any two adjacent conductive membrane layers.
The below describes as example to comprise two conductive membrane layers between the color membrane substrates of embodiment of the present invention touch-screen and touch module.
As shown in Figure 6, the touch-screen in the present embodiment comprises: array base palte 1, color membrane substrates 2, the conductive membrane layer 6a on the liquid crystal layer 3 between array base palte 1 and color membrane substrates 2, a side that deviates from liquid crystal layer 3 at color membrane substrates 2 and 6b, at the second insulation course 8 between conductive membrane layer 6a and 6b, be positioned at the touch module 4 on this conductive membrane layer 6 and be positioned at polaroid 5 on this touch module 4;
Wherein, conductive membrane layer 6a and 6b adopt the transparent conductivity material; The thickness of this conductive membrane layer 6 is 200 Ethylmercurichlorendimides ~ 400 Ethylmercurichlorendimides;
Preferably, this transparent conductivity material is the oxides such as ITO or IZO;
The second insulation course 8 adopts the transparent insulating material;
Preferably, this transparent insulating material is a kind of or compound in silicon nitride SiNx, silicon oxide sio x and resin-insulated material.
Need to prove, because the material that adopts is different, the thickness of the second insulation course also can corresponding difference; For example, if the second insulation course adopts SiNx, the thickness of second this insulation course is about 4000 Ethylmercurichlorendimides; If the second insulation course adopts resin-insulated material, the thickness of this second insulation course is 1 micron left and right.
referring to Fig. 7, comprise two conductive membrane layers in the present embodiment between color membrane substrates and touch module, because array base palte or color membrane substrates comprise pixel electrode layer, touch module comprises touch control electrode layer, two conductive membrane layers all are in vacant state, therefore, form the first stray capacitance C1 between pixel electrode layer and conductive membrane layer, conductive membrane layer and touch control electrode layer form the second stray capacitance C2, form the first stray capacitance C3 between two conductive membrane layers, due to the first stray capacitance C1, between the second stray capacitance C2 and trixenie capacitor C 3 for being connected in series, therefore, the value of stray capacitance C between pixel electrode layer and touch control electrode layer is less than the first stray capacitance C1, the value of minimum stray capacitance in the second stray capacitance C2 and trixenie capacitor C 3, therefore, comprise a conductive membrane layer between color membrane substrates and touch module, because array base palte or color membrane substrates comprise two conductive membrane layers, the value of stray capacitance C between pixel electrode layer and touch control electrode layer can be reduced at least original stray capacitance value 1/3rd, thereby reduced the total stray capacitance C between pixel electrode layer and touch control electrode layer.
Further, referring to Fig. 8, if the touch control electrode layer of touch module 4 contacts with a conductive membrane layer 6a or 6b, also comprise the first insulation course 7 between this touch control electrode layer and this conductive membrane layer;
Wherein, this first insulation course 7 adopts the transparent insulating material.
Preferably, this transparent insulating material is a kind of or compound in silicon nitride SiNx, silicon oxide sio x and resin-insulated material.
Need to prove, because the material that adopts is different, the thickness of the first insulation course also can corresponding difference; For example, if the first insulation course adopts SiNx, the thickness of first this insulation course is about 4000 Ethylmercurichlorendimides; If the first insulation course adopts resin-insulated material, the thickness of this first insulation course is 1 micron left and right.
In the present embodiment due to two conductive membrane layers being set between pixel electrode layer and touch control electrode layer, therefore, the value of stray capacitance C between pixel electrode layer and touch control electrode layer can be reduced at least original stray capacitance value 1/3rd, thereby more effectively reduced total stray capacitance between pixel electrode layer and touch control electrode layer
Need to prove, if a plurality of conductive membrane layers are set between pixel electrode layer and touch control electrode layer, can more effectively reduce the total stray capacitance between pixel electrode layer and touch control electrode layer, but, consider that the stack of a plurality of conductive membrane layers, the first insulation course and the second insulation course can reduce the transmitance of visible light, preferably, comprise two conductive membrane layers between the color membrane substrates of touch-screen and touch module, and comprise second insulation course between two conductive membrane layers.
The embodiment of the present invention also provides a kind of display device, and wherein, this display device comprises above-mentioned arbitrary touch-screen.
Referring to Fig. 9, the embodiment of the present invention also provides a kind of manufacture method of touch-screen, and the method comprises the following steps:
Step 91, after completing the making that shows module, on a side that deviates from liquid crystal layer of the color membrane substrates of this demonstrations module, deposit at least the layer of transparent conductive film, the formation conductive membrane layer;
Wherein, transparent conductive film adopts the transparent conductivity material; The thickness of this conductive film is 200 Ethylmercurichlorendimides ~ 400 Ethylmercurichlorendimides;
Preferably, this transparent conductive film is the oxides such as ITO or IZO.
Further, adopt magnetron sputtering, thermal evaporation or other film-forming process, on a side that deviates from liquid crystal layer of color membrane substrates, deposit layer of transparent conductive film at least.
Step 92, form touch module on last conductive membrane layer that forms.
Further, if the quantity of the conductive membrane layer that forms in step 91 is not less than 2, before one deck transparent conductive film, also comprise in step 91 after deposition layer of transparent conductive film, and under depositing:
Deposition layer of transparent insulation film, form the first insulation course on last conductive membrane layer that forms;
Wherein, insulation film adopts the transparent insulating material;
Preferably, this insulation film is a kind of or compound in silicon nitride SiNx, silicon oxide sio x and resin-insulated material;
Need to prove, because the material that adopts is different, the thickness of deposition insulation film also can corresponding difference; For example, if insulation film is SiNx, the thickness of deposition is about 4000 Ethylmercurichlorendimides; If insulation film is resin-insulated material, the thickness of deposition is 1 micron left and right.
Further, adopt magnetron sputtering, thermal evaporation or other film-forming process, deposition one deck insulation film, form the first insulation course on conductive membrane layer.
Further, if the touch control electrode layer of touch module contacts with last conductive membrane layer of formation, after the last layer of conductive film of deposition, and before forming touch module, also comprise:
Deposition one deck insulation film, form the second insulation course on last conductive membrane layer that forms;
Wherein, insulation film adopts the transparent insulating material;
Preferably, this insulation film is a kind of or compound in silicon nitride SiNx, silicon oxide sio x and resin-insulated material;
Need to prove, because the material that adopts is different, the thickness of deposition insulation film also can corresponding difference; For example, if insulation film is SiNx, the thickness of deposition is about 4000 Ethylmercurichlorendimides; If insulation film is resin-insulated material, the thickness of deposition is 1 micron left and right.
Further, adopt magnetron sputtering, thermal evaporation or other film-forming process, deposition layer of transparent insulation film, form the second insulation course on last conductive membrane layer that forms.
The below is take the structure of touch-screen shown in Figure 8 as example, and the manufacture process of this touch-screen is elaborated.Referring to Figure 10, the manufacture method of touch-screen shown in Figure 8 comprises the following steps:
Step 101, after completing the making that shows module, on a side that deviates from liquid crystal layer of the color membrane substrates of this demonstrations module, deposit the layer of transparent conductive film, form first conductive membrane layer;
Step 102, on this first conductive membrane layer, adopt magnetron sputtering, thermal evaporation or other film-forming process, deposition layer of transparent insulation film forms the second insulation course;
Step 103, employing magnetron sputtering, thermal evaporation or other film-forming process, deposition layer of transparent conductive film, form second conductive membrane layer on the second insulation course that forms;
Step 104, employing magnetron sputtering, thermal evaporation or other film-forming process, on second conductive membrane layer that forms, deposition layer of transparent insulation film forms the first insulation course;
Step 105, form touch module on the first insulation course that forms;
Step 106, paste polaroid on the touch module that forms.
The conductive membrane layer of the touch-screen of the embodiment of the present invention, the first insulation course and the second insulation course are when making, only need to adopt magnetron sputtering, thermal evaporation or other film-forming process, depositing electrically conductive film, insulation film on the relevant position, can form conductive membrane layer, the first insulation course and the second insulation course, and not need to use mask plate (mask) to make figure to conductive film and/or insulation film.
Although described the preferred embodiments of the present invention, in a single day those skilled in the art get the basic creative concept of cicada, can make other change and modification to these embodiment.So claims are intended to all changes and the modification that are interpreted as comprising preferred embodiment and fall into the scope of the invention.
The touch-screen of the embodiment of the present invention comprises demonstration module, touch module and at least one conductive membrane layer between this demonstration module and this touch module; Because the embodiment of the present invention has increased at least one conductive membrane layer between the electrode layer of the pixel electrode layer that shows module and touch module, show between the pixel electrode layer and conductive membrane layer of module, all formed stray capacitance between the electrode layer of conductive membrane layer and touch module, and between the stray capacitance that forms for being connected in series, owing to being connected in series, make the capacitance of the total stray capacitance between demonstration module and touch module less than the capacitance of the stray capacitance of the minimum that forms, thereby reduced the total stray capacitance that shows between module and touch module.
The conductive membrane layer of the touch-screen of the embodiment of the present invention, the first insulation course and the second insulation course are when making, only need to adopt magnetron sputtering, thermal evaporation or other film-forming process, depositing electrically conductive film, insulation film on the relevant position, can form conductive membrane layer, the first insulation course and the second insulation course, and not need to use mask plate (mask) to make figure to conductive film and/or insulation film.
Obviously, those skilled in the art can carry out various changes and modification and not break away from the spirit and scope of the present invention the present invention.Like this, if within of the present invention these are revised and modification belongs to the scope of claim of the present invention and equivalent technologies thereof, the present invention also is intended to comprise these changes and modification interior.

Claims (11)

1. touch-screen comprises: show module and touch module, it is characterized in that, this touch-screen also comprises:
At least one conductive membrane layer between described demonstration module and described touch module.
2. touch-screen as claimed in claim 1, is characterized in that, if the touch control electrode layer of described touch module contacts with a described conductive membrane layer, described touch-screen also comprises:
At the touch control electrode layer of described touch module and the first insulation course between this conductive membrane layer.
3. touch-screen as claimed in claim 1 or 2, is characterized in that, if the quantity of described conductive membrane layer is not less than 2, described touch-screen also comprises:
The second insulation course between any two adjacent conductive membrane layers.
4. touch-screen as claimed in claim 1 or 2, is characterized in that, described conductive membrane layer adopts the transparent conductivity material.
5. touch-screen as claimed in claim 4, is characterized in that, described transparent conductive material is tin indium oxide ITO or indium-zinc oxide IZO.
6. touch-screen as claimed in claim 3, is characterized in that, described the first insulation course and described the second insulation course adopt the transparent insulating material.
7. touch-screen as claimed in claim 6, is characterized in that, described transparent insulation material is a kind of or compound in silicon nitride, monox and resin-insulated material.
8. the manufacture method of a touch-screen, is characterized in that, the method comprises:
After completing the making that shows module, on a side that deviates from liquid crystal layer of the color membrane substrates of described demonstration module, deposit at least the layer of transparent conductive film, form conductive membrane layer;
Form touch module on last conductive membrane layer that forms.
9. method as claimed in claim 8, is characterized in that, if the quantity of described conductive membrane layer is not less than 2, after deposition layer of transparent conductive film, and before one deck transparent conductive film under deposition, described method also comprises:
Deposition layer of transparent insulation film, form the first insulation course on last conductive membrane layer that forms.
10. method as claimed in claim 8 or 9, is characterized in that, if the electrode layer of described touch module contacts with described conductive membrane layer, after the last one deck transparent conductive film of deposition, and before forming described touch module, described method also comprises:
Deposition layer of transparent insulation film, form the second insulation course on last conductive membrane layer that forms.
11. a display device is characterized in that, this display device comprises described touch-screen as arbitrary in claim 1 ~ 7.
CN201310032489.6A 2013-01-28 2013-01-28 A kind of touch-screen and manufacture method, display device Active CN103092450B (en)

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