CN103091648A - Magnetic sensing device - Google Patents
Magnetic sensing device Download PDFInfo
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- CN103091648A CN103091648A CN2011103401946A CN201110340194A CN103091648A CN 103091648 A CN103091648 A CN 103091648A CN 2011103401946 A CN2011103401946 A CN 2011103401946A CN 201110340194 A CN201110340194 A CN 201110340194A CN 103091648 A CN103091648 A CN 103091648A
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Abstract
The invention discloses a magnetic sensing device. The magnetic sensing device comprises a substrate, a plurality of magnetic resistance sensing units, a compensating coil and a resetting coil. The plurality of magnetic resistance sensing units are respectively arranged on the substrate. The compensating coil is arranged above the magnetic resistance sensing units. The compensating coil is used for guiding a compensating electric current. The resetting coil is arranged above the magnetic resistance sensing units. The resetting coil is used for guiding a resetting electric current. The resetting electric current is used for resetting the magnetic resistance sensing units. The resetting coil is provided with a plurality of gap structures which are arranged at a corner of the resetting coil.
Description
Technical field
The invention relates to that a kind of magnetic strength surveys device, and particularly relevant for a kind of loop construction design of reluctance type sensing apparatus.
Background technology
Magnetoresistance (Magnetoresistance Effect, MR) refers to the effect that the resistance of specific magnetoresistance material changes along with the variation of externally-applied magnetic field.Due to above-mentioned characteristic, magnetoresistance material is used in the middle of the sensing apparatus in various magnetic force or magnetic field usually, locates the occasions such as (compassing), metal detection and position probing such as can be used for solid-state compass.
At present carry out with magnetoresistance material the device that magnetic strength is surveyed, more common as giant magnetoresistance (Giant Magnetoresistance, GMR) Magnetic Sensor and anisotropy magnetic resistance (Anisotropic Magnetoresistance, AMR) Magnetic Sensor etc.
Giant magnetoresistance effect is present in ferromagnetism (as: Fe, Co, Ni) with nonferromagnetic (as: Cr, Cu, Ag, Au) formed multilayer film system is due to the multi-layer film structure that giant magnetoresistance (GMR) sensor needs ferromagnetism and nonferromugnetic material to be arranged alternately, comparatively complicated on making.
The anisotropy magnetoresistance is present on ferromagnetism (as: Fe, Co, Ni) material and alloy cube matherial or film.The working current that the magnetic resistance change rate amount of anisotropy magnetic resistance (AMR) sensor is passed through on the anisotropy magnetoresistance material is relevant.
Magnetoresistance material in magnetoresistive transducer has a direction of magnetization, and along with the variation in surrounding environment magnetic field, the direction of magnetization of magnetoresistance material out of the ordinary will change accordingly, and therefore, under different environmental baselines, magnetoresistance material initial magnetization direction separately is with different.
On the other hand, temperature variation also may cause the sensitivity variations that magnetoresistive transducer generation magnetic strength is surveyed.Make magnetoresistive transducer present different sensing result under high temperature and low-temperature operation.Thus, will cause the Output rusults distortion of magnetoresistive transducer.
Summary of the invention
For addressing the above problem, the present invention discloses a kind of magnetic strength and surveys device, and it comprises a plurality of magnetic-resistance sensings unit, compensating coil and replacement coil.Wherein, compensating coil is in order to import offset current to set up the compensating field, to proofread and correct the sensitivity variations under different temperatures.The replacement coil is in order to import reset current to set up replacement magnetic field, and whereby before carrying out sensing, the direction of magnetization of replacement magnetic-resistance sensing unit makes the direction of magnetization of magnetic-resistance sensing unit consistent, guarantees that whereby magnetic strength surveys the sensing accuracy of device.In addition, also further has the turning point that a plurality of gap structures are positioned at this replacement coil on the replacement coil of this case, whereby, can guarantee that reset current evenly distributes, and avoids on the same side of reset current concentrations each line segment in the replacement coil when flowing through the replacement coil.
An aspect of of the present present invention is to provide a kind of magnetic strength to survey device, and it comprises substrate, a plurality of magnetic-resistance sensings unit, compensating coil and replacement coil.A plurality of magnetic-resistance sensings unit is arranged at respectively on this substrate.Compensating coil is arranged at those tops, magnetic-resistance sensing unit, and this compensating coil is in order to import an offset current.The replacement coil is arranged at top, those magnetic-resistance sensings unit, and this replacement coil is in order to importing a reset current, and this reset current is in order to reset those magnetic-resistance sensings unit, and this replacement coil has the turning point that a plurality of gap structures are positioned at this replacement coil.
According to one embodiment of the invention, wherein should comprise a plurality of main line segments and a plurality of connecting line segment by the replacement coil, wherein those main line segments are arranged in parallel and leave to each other the space, wherein each connecting line segment is connected between the adjacent end points of two main line segments wherein, and makes those main line segments and those connecting line segments in this replacement coil be connected to a spiral coil.
According to one embodiment of the invention, wherein this spiral coil is a clockwise spiral or a counterclockwise spiral.
According to one embodiment of the invention, wherein flow through spiral helicinely should the replacement coil time when this reset current, set up a replacement magnetic field to reset those magnetic-resistance sensings unit.
According to one embodiment of the invention, wherein the turning point at those gap structures place is the intersection of those main line segments and those connecting line segments.
According to one embodiment of the invention, wherein each those main line segment has the inboard side at the center that is close to this spiral coil and relative outside side, and those gap structures are to be arranged on the inboard side of those main line segments.In practical application, those gap structures can be in order to avoid this reset current concentrations in the inboard side of those main line segments.
According to one embodiment of the invention, wherein the line width of those main line segments is greater than the line width of those connecting line segments.
According to one embodiment of the invention, wherein each those magnetic resistance inductive component is a strip, and the two ends of each those magnetic resistance inductive component are respectively the acute angle tip.
According to one embodiment of the invention, wherein to survey device be an anisotropy magnetic resistance (Anisotropic Magnetoresistance, AMR) sensing apparatus for this magnetic strength, and those magnetic-resistance sensings unit comprises respectively an anisotropy magnetoresistance material.
Description of drawings
For above and other objects of the present invention, feature, advantage and embodiment can be become apparent, appended the description of the drawings is as follows:
Fig. 1 illustrates the schematic top plan view of surveying device according to a kind of magnetic strength in one embodiment of the invention;
Fig. 2 illustrates its separation schematic diagram of magnetic-resistance sensing unit in Fig. 1;
Fig. 3 illustrates its separation schematic diagram of compensating coil in Fig. 1;
Fig. 4 illustrates its separation schematic diagram of replacement coil in Fig. 1; And
Fig. 5 illustrates its separation schematic diagram of replacement coil in Fig. 1.
[primary clustering symbol description]
100: magnetic strength is surveyed device
120: substrate
140a, 140b: magnetic-resistance sensing unit
160: compensating coil
162: offset current
180: the replacement coil
182: reset current
184: main line segment
186: connecting line segment
184a: inboard side
184b: outside side
188: gap structure
188a: taper unfilled corner
188b: slit
Embodiment
See also Fig. 1, it illustrates the schematic top plan view of surveying device 100 according to a kind of magnetic strength in one embodiment of the invention.As shown in Figure 1, magnetic strength survey device 100 comprises substrate 120, a plurality of magnetic- resistance sensings unit 140a, 140b, compensating coil 160 and replacement coil 180 at least.
In practical application, magnetic strength is surveyed device 100 can further comprise output/input interface end points (not illustrating) and corresponding connection line (not illustrating), be used for the curtage signal is imported above-mentioned magnetic-resistance sensing unit 140a, in the middle of 140b, compensating coil 160 and replacement coil 180, because the people who is set to known skill of interface end points and connection line knows, therefore separately do not give unnecessary details at this.
See also Fig. 2, it illustrates magnetic-resistance sensing unit 140a in Fig. 1, and it separates schematic diagram 140b.As Fig. 1 and shown in Figure 2, in the present embodiment, magnetic strength survey device 100 comprises a plurality of magnetic- resistance sensings unit 140a, and 140b is arranged at respectively on substrate 120.In this embodiment, magnetic strength is surveyed device 100 and is had 16 groups of magnetic- resistance sensing unit 140a, 140b, but the present invention is the magnetic-resistance sensing unit 140a of this given number not, and 140b is limited, in practical application, magnetic-resistance sensing unit 140a, the visual actual magnetic of the quantity of 140b is responded to demand and is ordered.As shown in Figure 2, each magnetic- resistance sensing unit 140a, 140b is respectively a strip, and magnetic resistance inductive component 140a, and the two ends of 140b are respectively the acute angle tip.
Due to, the two ends of known magnetic resistance inductive component are square end, and the limit, two ends is easier to online polarization and forms static magnetic field, and this static magnetic field will make the sensitivity of magnetic resistance inductive component descend.Magnetic resistance inductive component 140a in this case, the two ends of 140b are respectively the acute angle tip, can reduce whereby in the online generation that polarization phenomena occurs and avoid above-mentioned static magnetic field of end.
In this embodiment, magnetic strength is surveyed device 100 and be can be anisotropy magnetic resistance (Anisotropic Magnetoresistance, AMR) sensing apparatus, and magnetic- resistance sensing unit 140a, 140b can comprise respectively the anisotropy magnetoresistance material.Magnetic-resistance sensing unit 140a, the resistance of 140b will change with the magnetic field that is applied thereto, and therefore, magnetic strength is surveyed device 100 and is seen through magnetic- resistance sensing unit 140a, and 140b can be in order to the magnetic field around sensing.
See also Fig. 3, it illustrates compensating coil 160 its separation schematic diagram in Fig. 1.As Fig. 1 and shown in Figure 3, in the present embodiment, compensating coil 160 is arranged at those magnetic-resistance sensings unit 140a, and above 140b, at least one part of compensating coil 160 covers those magnetic-resistance sensings unit 140a, 140b.Compensating coil 160 is in order to import offset current 162 (as shown in Figure 3).Offset current 162 flows through this compensating coil 160 and is used for setting up a compensating field to magnetic-resistance sensing unit 140a, 140b.This compensating field can be used to environment temperature and changes magnetic-resistance sensing unit 140a, the impact that 140b causes, and the effect of its correction can see through the size of current of offset current 162 and control.
What should be specified is, in the present embodiment, compensating coil 160 has double-spiral structure, and the left side of compensating coil 160 is clockwise spiral, and right-hand part is counterclockwise spiral.By this reverse double helix design, and compensating coil 160 and magnetic-resistance sensing unit 140a in cooperation this case, the configuration relation of 140b, in this example, by magnetic-resistance sensing unit 140a, the offset current 162 above 140b all has identical current direction, in the embodiment as Fig. 3, by magnetic-resistance sensing unit 140a, the offset current 162 above 140b is all from top to bottom and flows.Whereby, make offset current 162 can set up unidirectional compensating field to all magnetic-resistance sensing unit 140a, 140b.In addition, in this case, the compensating coil 160 of reverse double-helix design can be saved coil width and entire area, can improve whereby the area service efficiency that magnetic strength is surveyed device 100.
What must remark additionally is, in above-described embodiment, by magnetic-resistance sensing unit 140a, the offset current 162 of 140b top is to flow from top to bottom, but the present invention is not as limit, adopt reverse offset current also can reach similar effect, depending in the side circuit demand must the compensation magnetic direction and order.
See also Fig. 4 and Fig. 5, it illustrates replacement coil 180 its separation schematic diagram in Fig. 1.As shown in Figure 4, replacement coil 180 is in order to import reset current 182, and at least one part of replacement coil 180 covers those magnetic- resistance sensings unit 140a, 140b, and reset current 182 is in order to the magnetic-resistance sensing unit 140a that resets, 140b.
As shown in Figure 5, replacement coil 180 comprises a plurality of main line segments 184 and a plurality of connecting line segment 186, wherein main line segment 184 is arranged in parallel and leaves to each other the space, wherein connecting line segment 186 is connected between the adjacent end points of two main line segments 184 wherein, and makes main line segment 184 and connecting line segment 186 in replacement coil 180 be connected to spiral coil.This spiral coil can be a clockwise spiral or a counterclockwise spiral, and what illustrated for example in this embodiment is clockwise spiral, but the present invention is not as limit.
Based on the magnetoresistance material characteristic, each magnetic-resistance sensing unit 140a comprises many sectors in 140b, and each sector has a direction of magnetization.As shown in Figure 4, for being positioned at eight groups of magnetic-resistance sensing unit 140a of diagram top, the reset current 182 of replacement coil 180 of flowing through has current direction from left to right, reset current 182 can be in order to set up a replacement magnetic field, direction of magnetization to each sector in magnetic-resistance sensing unit 140a is reset, and makes the direction of magnetization of magnetic-resistance sensing unit 140a reset to an identical direction of magnetization.
On the other hand, for being positioned at eight groups of magnetic-resistance sensing unit 140b of accompanying drawing below, the reset current 182 of replacement coil 180 of flowing through has current direction from right to left, at this moment, reset current 182 can be in order to set up another replacement magnetic field, direction of magnetization to each sector in magnetic-resistance sensing unit 140b is reset, and makes the direction of magnetization of magnetic-resistance sensing unit 140b reset to another identical direction of magnetization.
Whereby, magnetic-resistance sensing unit 140a and magnetic-resistance sensing unit 140b can have respectively unified direction of magnetization after resetting.Carry out resetting before sensing each time whereby, or periodically reset, just can guarantee that magnetic-resistance sensing unit 140a and magnetic-resistance sensing unit 140b have consistent direction of magnetization separately consistent, guarantee whereby the sensing accuracy of magnetic strength survey device, very important in the precision apparatus of high-precision compass systems or hypersensitivity.
In addition, as Fig. 4 and shown in Figure 5, the line width of the main line segment 184 in replacement coil 180 is wider, and main line segment 184 is greater than the line width of connecting line segment 186.
In the actual current flow process, the glide path in the path that reset current 182 meeting trends are shorter is advanced.That is to say, on general spiral helicine replacement coil, reset current will flow along the inboard side at close spiral center on the replacement coil, thus, to make reset current can't be evenly distributed on each line segment of replacement coil, and concentrate on the inboard side of replacement coil.Especially main line segment 184 its wider width affect more obvious.
Therefore, replacement coil 180 of the present invention has a plurality of gap structures 188, and gap structure 188 lays respectively at the turning point of replacement coil 180.As shown in Figure 5, each those main line segment 184 has inboard side 184a and outside side 184b.The contiguous spiral helicine replacement coil of inboard side 184a 180 centers, and outside side 184b is relative with inboard side 184a.As shown in the figure, being positioned at the gap structure 188 of the turning point of replacement coil 180, be the intersection that is positioned at main line segment 184 and connecting line segment 186, and gap structure 188 is to be arranged on the inboard side 184a of main line segment 184.
As shown in Figure 5, in the present embodiment, each group gap structure 188 on replacement coil 180 can comprise a taper unfilled corner 188a and a contiguous slit 188b, and wherein the setting party of slit 188b is to can be roughly parallel with one of them side of taper unfilled corner 188a.In this embodiment, gap structure 188 is to comprise taper unfilled corner 188a and slit 188b, but the present invention is not as limit, in another embodiment, gap structure 188 also can only comprise the unfilled corner that is arranged at inboard side, or the various difform equivalence breach of inboard side is set, all should be considered as category of the present invention.
Simultaneously with reference to Fig. 4 and Fig. 5 as can be known, utilize the design of above-mentioned gap structure 188, can avoid reset current 182 concentrations in the inboard side 184a of main line segment 184.When reset current 182 is flowed through the turning point of replacement coil 180, taper unfilled corner 188a and slit 188b will make reset current 182 flow path on replacement coil 180 comparatively be evenly distributed in each position of coil.In the schematic diagram that illustrates as Fig. 5, the flow path of reset current 182 can roughly be assigned to the positions such as inboard, central authorities and the outside of replacement coil 180 on replacement coil 180.In Fig. 4, succinct for drawing only illustrates the distribution of current path in the turning point of replacement coil 180 innermost circles, in fact at the gap structure 188 of replacement coil 180 each turning points, all can reach similar effect.
In practical application, above-mentioned magnetic-resistance sensing unit 140, compensating coil 160 and replacement coil 180 can be respectively a membrane structure, be arranged on this substrate 120, and in the above embodiment of the present invention, the arrangement of each film is only illustrative, magnetic-resistance sensing unit 140, compensating coil 160 and replacement coil 180 is not defined in specific upper-lower position and arranges.
In sum, magnetic strength of the present invention is surveyed device it is comprised a plurality of magnetic-resistance sensings unit, compensating coil and replacement coil.Wherein, compensating coil is in order to import offset current to set up the compensating field, to proofread and correct the sensitivity variations under different temperatures.The replacement coil is in order to import reset current to set up replacement magnetic field, and whereby before carrying out sensing, the direction of magnetization of replacement magnetic-resistance sensing unit makes the direction of magnetization of magnetic-resistance sensing unit consistent, guarantees that whereby magnetic strength surveys the sensing accuracy of device.In addition, also further has the turning point that a plurality of gap structures are positioned at this replacement coil on the replacement coil of this case, whereby, can guarantee that reset current evenly distributes, and avoids on the same side of reset current concentrations each line segment in the replacement coil when flowing through the replacement coil.
Although the present invention discloses as above with embodiment; so it is not to limit the present invention; anyly be familiar with this skill person; without departing from the spirit and scope of the present invention; when can be used for a variety of modifications and variations, so protection scope of the present invention is as the criterion when looking the scope that appending claims defines.
Claims (10)
1. a magnetic strength is surveyed device, it is characterized in that, comprises:
One substrate;
A plurality of magnetic-resistance sensings unit is arranged at respectively on this substrate;
One compensating coil is arranged at those tops, magnetic-resistance sensing unit, and this compensating coil is in order to import an offset current; And
One replacement coil is arranged at top, those magnetic-resistance sensings unit, and this replacement coil is in order to importing a reset current, and this reset current is in order to reset those magnetic-resistance sensings unit, and this replacement coil has the turning point that a plurality of gap structures are positioned at this replacement coil.
2. magnetic strength according to claim 1 is surveyed device, it is characterized in that, this replacement coil comprises a plurality of main line segments and a plurality of connecting line segment, wherein those main line segments are arranged in parallel and leave to each other the space, wherein each connecting line segment is connected between the adjacent end points of two main line segments wherein, and makes those main line segments and those connecting line segments in this replacement coil be connected to a spiral coil.
3. magnetic strength according to claim 2 is surveyed device, it is characterized in that, this spiral coil is a clockwise spiral or a counterclockwise spiral.
4. magnetic strength according to claim 2 is surveyed device, it is characterized in that, flows through spiral helicinely should the replacement coil time when this reset current, sets up a replacement magnetic field to reset those magnetic-resistance sensings unit.
5. magnetic strength according to claim 2 is surveyed device, it is characterized in that, the turning point at those gap structures places is the intersection of those main line segments and those connecting line segments.
6. magnetic strength according to claim 2 is surveyed device, it is characterized in that, each those main line segment has the inboard side at the center that is close to this spiral coil and relative outside side, and those gap structures are to be arranged on the inboard side of those main line segments.
7. magnetic strength according to claim 6 is surveyed device, it is characterized in that, those gap structures are in order to avoid this reset current concentrations in the inboard side of those main line segments.
8. magnetic strength according to claim 2 is surveyed device, it is characterized in that, the line width of those main line segments is greater than the line width of those connecting line segments.
9. magnetic strength according to claim 1 is surveyed device, it is characterized in that, each those magnetic resistance inductive component is a strip, and the two ends of each those magnetic resistance inductive component are respectively the acute angle tip.
10. magnetic strength according to claim 1 is surveyed device, it is characterized in that, it is an anisotropy magnetic-resistance sensing device that this magnetic strength is surveyed device, and those magnetic-resistance sensings unit comprises respectively an anisotropy magnetoresistance material.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011103401946A CN103091648A (en) | 2011-10-28 | 2011-10-28 | Magnetic sensing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011103401946A CN103091648A (en) | 2011-10-28 | 2011-10-28 | Magnetic sensing device |
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| CN103091648A true CN103091648A (en) | 2013-05-08 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106872914A (en) * | 2015-11-27 | 2017-06-20 | 爱盛科技股份有限公司 | Magnetic field sensing device and sensing method |
| CN110345938A (en) * | 2019-06-25 | 2019-10-18 | 歌尔股份有限公司 | A kind of Magnetic Sensor and electronic equipment of wafer scale |
| CN111948583A (en) * | 2019-05-17 | 2020-11-17 | 爱盛科技股份有限公司 | Magnetic field sensing device |
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| WO2011115722A1 (en) * | 2010-03-19 | 2011-09-22 | Memsic, Inc. | Magnetometer |
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| JP2002286822A (en) * | 2001-03-26 | 2002-10-03 | Tama Electric Co Ltd | Magnetic sensor |
| US20030132826A1 (en) * | 2002-01-15 | 2003-07-17 | Honeywell International Inc. | Integrated magnetic field strap for signal isolator |
| CN101652671A (en) * | 2007-03-30 | 2010-02-17 | Nxp股份有限公司 | Magneto-resistive sensor |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106872914A (en) * | 2015-11-27 | 2017-06-20 | 爱盛科技股份有限公司 | Magnetic field sensing device and sensing method |
| CN106872914B (en) * | 2015-11-27 | 2019-09-10 | 爱盛科技股份有限公司 | Magnetic field sensing device and sensing method |
| CN111948583A (en) * | 2019-05-17 | 2020-11-17 | 爱盛科技股份有限公司 | Magnetic field sensing device |
| CN110345938A (en) * | 2019-06-25 | 2019-10-18 | 歌尔股份有限公司 | A kind of Magnetic Sensor and electronic equipment of wafer scale |
| CN110345938B (en) * | 2019-06-25 | 2021-08-31 | 潍坊歌尔微电子有限公司 | Wafer-level magnetic sensor and electronic equipment |
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Application publication date: 20130508 |