CN103088429A - 一种磷扩散炉的三氯氧磷排除方法 - Google Patents
一种磷扩散炉的三氯氧磷排除方法 Download PDFInfo
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- CN103088429A CN103088429A CN2013100182787A CN201310018278A CN103088429A CN 103088429 A CN103088429 A CN 103088429A CN 2013100182787 A CN2013100182787 A CN 2013100182787A CN 201310018278 A CN201310018278 A CN 201310018278A CN 103088429 A CN103088429 A CN 103088429A
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- phosphorus oxychloride
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- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 title claims abstract description 119
- 238000009792 diffusion process Methods 0.000 title claims abstract description 52
- 238000000034 method Methods 0.000 title claims abstract description 26
- 229910052698 phosphorus Inorganic materials 0.000 title abstract description 10
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 title abstract description 9
- 239000011574 phosphorus Substances 0.000 title abstract description 9
- 238000007789 sealing Methods 0.000 claims abstract description 42
- 229920006362 Teflon® Polymers 0.000 claims abstract description 20
- 239000004809 Teflon Substances 0.000 claims abstract description 19
- 238000000576 coating method Methods 0.000 claims abstract description 18
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 8
- 235000011114 ammonium hydroxide Nutrition 0.000 claims abstract description 7
- 238000006386 neutralization reaction Methods 0.000 claims abstract description 4
- 238000001816 cooling Methods 0.000 claims description 38
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims description 30
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 claims description 25
- 230000003139 buffering effect Effects 0.000 claims description 18
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 12
- 229910000030 sodium bicarbonate Inorganic materials 0.000 claims description 12
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- 239000007921 spray Substances 0.000 claims description 10
- 229910021529 ammonia Inorganic materials 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
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- 238000002156 mixing Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 abstract description 4
- 239000000872 buffer Substances 0.000 abstract description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 abstract 2
- 239000000243 solution Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
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- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 101100373011 Drosophila melanogaster wapl gene Proteins 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N EtOH Substances CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 210000004483 pasc Anatomy 0.000 description 2
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- 229910019142 PO4 Inorganic materials 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 238000010438 heat treatment Methods 0.000 description 1
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- 238000005304 joining Methods 0.000 description 1
- 231100000636 lethal dose Toxicity 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
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- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
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- 231100000614 poison Toxicity 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229960001866 silicon dioxide Drugs 0.000 description 1
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- 238000003466 welding Methods 0.000 description 1
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Abstract
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CN201310018278.7A CN103088429B (zh) | 2013-01-17 | 2013-01-17 | 一种磷扩散炉的三氯氧磷排除方法 |
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CN201310018278.7A CN103088429B (zh) | 2013-01-17 | 2013-01-17 | 一种磷扩散炉的三氯氧磷排除方法 |
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CN103088429A true CN103088429A (zh) | 2013-05-08 |
CN103088429B CN103088429B (zh) | 2015-05-06 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04152517A (ja) * | 1990-10-17 | 1992-05-26 | Hitachi Ltd | 半導体素子の製造方法 |
JP2001297988A (ja) * | 2000-04-13 | 2001-10-26 | Seiko Epson Corp | 半導体製造装置の排気トラップ機構 |
CN101220518A (zh) * | 2007-01-12 | 2008-07-16 | 中国电子科技集团公司第四十八研究所 | 一种用于高温扩散系统的尾气收集装置 |
CN201899961U (zh) * | 2010-12-17 | 2011-07-20 | 青岛赛瑞达电子科技有限公司 | 扩散炉的尾气处理系统管道装置 |
CN202148370U (zh) * | 2011-06-09 | 2012-02-22 | 阳光大地(福建)新能源有限公司 | 一种太阳电池扩散工艺的尾排装置 |
CN102936752A (zh) * | 2012-10-26 | 2013-02-20 | 陈功 | 磷扩散炉的三氯氧磷排除装置 |
-
2013
- 2013-01-17 CN CN201310018278.7A patent/CN103088429B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04152517A (ja) * | 1990-10-17 | 1992-05-26 | Hitachi Ltd | 半導体素子の製造方法 |
JP2001297988A (ja) * | 2000-04-13 | 2001-10-26 | Seiko Epson Corp | 半導体製造装置の排気トラップ機構 |
CN101220518A (zh) * | 2007-01-12 | 2008-07-16 | 中国电子科技集团公司第四十八研究所 | 一种用于高温扩散系统的尾气收集装置 |
CN201899961U (zh) * | 2010-12-17 | 2011-07-20 | 青岛赛瑞达电子科技有限公司 | 扩散炉的尾气处理系统管道装置 |
CN202148370U (zh) * | 2011-06-09 | 2012-02-22 | 阳光大地(福建)新能源有限公司 | 一种太阳电池扩散工艺的尾排装置 |
CN102936752A (zh) * | 2012-10-26 | 2013-02-20 | 陈功 | 磷扩散炉的三氯氧磷排除装置 |
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CN103088429B (zh) | 2015-05-06 |
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Owner name: WU XIAOJIANG Free format text: FORMER OWNER: CHEN GONG Effective date: 20150401 |
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Free format text: CORRECT: ADDRESS; FROM: 313100 HUZHOU, ZHEJIANG PROVINCE TO: 318055 TAIZHOU, ZHEJIANG PROVINCE |
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Effective date of registration: 20150401 Address after: 318055 Zhejiang Province, Luqiao District, the new town of the former village of the first seven Wu District No. 3, No. 24, No. Applicant after: Wu Xiaojiang Address before: 313100 Zhejiang Changxin Zhongcheng Electronics Co., Ltd., No. 1299, East Street, Changxing County County, Zhejiang, Huzhou Applicant before: Chen Gong |
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Effective date of registration: 20181115 Address after: Room 103-16, Building 5, 656 Qixing Road, Wuxing District, Huzhou City, Zhejiang Province, 313028 Patentee after: Huzhou Peiyou Incubator Co., Ltd. Address before: 318055 No. 24, Qianqian 3, Qianqian Village, Xinqiao Town, Luqiao District, Taizhou City, Zhejiang Province Patentee before: Wu Xiaojiang |
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Effective date of registration: 20190620 Address after: 266109 South End of Hanhai Road, Qianhai Community, Qianhongtan Street, Chengyang District, Qingdao City, Shandong Province Patentee after: Qingdao Furunde Microelectronic Equipment Co., Ltd. Address before: Room 103-16, Building 5, 656 Qixing Road, Wuxing District, Huzhou City, Zhejiang Province, 313028 Patentee before: Huzhou Peiyou Incubator Co., Ltd. |