CN103086379B - Radiation-intercepting device of crucible for electron-beam smelting - Google Patents
Radiation-intercepting device of crucible for electron-beam smelting Download PDFInfo
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- CN103086379B CN103086379B CN201310023866.XA CN201310023866A CN103086379B CN 103086379 B CN103086379 B CN 103086379B CN 201310023866 A CN201310023866 A CN 201310023866A CN 103086379 B CN103086379 B CN 103086379B
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- furnace wall
- interception cover
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Abstract
The invention belongs to the technical field of metallurgical smelting, and particularly relates to a radiation-intercepting special device for electron-beam smelting. The radiation-intercepting special device is characterized in that a radiation-intercepting cover is positioned above a smelting crucible and movably arranged on the top of a furnace wall through a slidable suspension rod, and the radiation-intercepting cover is movably connected with the slidable suspension rod through a suspending articulated buckle; the radiation-intercepting cover is in a spherical shape, the concave surface of the spherical shape is downward, and the focus point of the concave surface is positioned in the center of the smelting crucible; and the concave surface is provided with an arc-shaped notch. The radiation-intercepting special device disclosed by the invention has the advantages of simple structure and practical function, and is convenient for manufacture, and greatly enhances the utilization ratio of electron-beam energy by the amplitude of 20%-50% because the radiation-intercepting cover can intercept the heat radiation beams of a silicon fusant and electron-beams reflected by the surface of the silicon fusant back to act on the surface of the silicon fusant again.
Description
Technical field
The invention belongs to metallurgical smelting technical field, the radiation interception special purpose device that particularly a kind of electron beam melting is used.
Background technology
At present; in world wide, prepare polycrystalline silicon used for solar battery material and formed large-scale production; main preparation methods is improved Siemens, but its comprehensive power consumption is up to 170kWh/kg, and produces and be discontinuity; cannot in the production of Si, form and work continuously; and this method has been taked the thermal chemical vapor deposition falling behind on the core link of flow process, and the link of technical process is too much, a low conversion rate; cause flow time oversize, increased material consumption, energy consumption cost.
For this reason, countries in the world are all in the brand-new processing method of trying to explore to prepare HIGH-PURITY SILICON material, wherein to prepare polysilicon with short production cycle owing to having for metallurgy method, pollute little, cost is low, technique is relatively simple, the features such as scale is controlled, be considered to can effectively reduce one of technology of production of polysilicon cost, become at present the focus that competitively research and develop countries in the world, electron beam melting technology is that metallurgy method is prepared one of method important in solar energy level silicon, it is the electron beam that the utilizes high-energy-density processing method as melting thermal source, can effectively reduce the phosphorus in polysilicon, aluminium, the vapo(u)rability impurity such as calcium, the crucible adopting in existing electron beam melting process mostly is water jacketed copper crucible, this is mainly because it can reuse, avoid the advantages such as secondary pollution.
In fusion process, silicon materials directly contact with water jacketed copper crucible, its heat conductivility is relatively good, the heat that causes water-cooling system to be taken away is more, the heat that crucible planner in the past mainly takes away from minimizing water-cooling system starts with to improve the utilization ratio of beam energy, for example: increase the modes such as crucible substrate.Though which can improve beam energy utilization ratio, but can not unrestrictedly improve beam energy utilization ratio, if want to continue to improve the capacity usage ratio of crucible, also need to start with from other side.
Summary of the invention
The present invention, for overcoming above-mentioned not enough problem, provides the radiation blocking apparatus of a kind of electron beam melting crucible.This apparatus structure is simple, adopts radiation interception cover that the thermal radiation of reflection and beam energy interception back reflection are returned in smelting pot and continue to act among melt, has improved the utilising efficiency of beam energy.
The technical scheme that the present invention adopted is for achieving the above object: the radiation blocking apparatus of crucible for a kind of electron beam melting, comprise radiation interception cover, slip hanger bar and vacuum melting device, in vacuum melting device, inside, furnace wall is working chamber, fire door is installed on furnace wall, water-cooled pallet is fixedly installed in bottom, furnace wall, on water-cooled pallet, have water-in and water outlet, smelting pot is fixedly installed on water-cooled pallet, vacuum pump group is fixedly installed on furnace wall, electron beam gun is fixedly installed in top, furnace wall, it is characterized in that: radiation interception cover is positioned at smelting pot top, and be movably installed in the top of furnace wall by slip hanger bar, between radiation interception cover and slip hanger bar, be flexibly connected by hanging kinge-joint knot.
Described radiation interception cover is spherical shape, and down, concave surface focus point is positioned at smelting pot center to its concave surface, also has a circular arc cutaway on it.
Described radiation interception cover is positioned at smelting pot top 10-30cm, and its orthographicprojection is circular, and radius is 15-40cm.
Described radiation interception cover material is quartz, 304 stainless steels, graphite or copper.
Described slip hanger bar is 3-5 root, and every slip hanger bar is provided with independently drive unit.
The radius of described circular arc cutaway is 5-10cm.
Present device is simple in structure, practical function, and this device has the following advantages:
1. radiation interception cover can be tackled the thermal radiation of silicon melt, by the radiation of interception silicon liquid level, radiation is reflected and again acts on silicon liquid level, has effectively reduced the energy due to thermal radiation loss, has improved the capacity usage ratio of electron beam equipment.
2. radiation interception cover not only can be tackled the radiation producing due to silicon melt, and can tackle the energy of reflecting electron beam, forefathers' research shows, beam energy utilization ratio only has 75% left and right, major cause is to have during due to beam bombardment silicon melt level 25% energy to be reflected, radiation interception cover can be tackled this reflected energy, for the melting of silicon melt.
To sum up, the invention provides the radiation blocking apparatus of a kind of electron beam melting crucible, have advantages of easy to make, this radiation blocking apparatus can be by the thermal radiation of silicon melt, tackled by the electron beam line of silicon melt surface reflection, again act on silicon melt surface, greatly improved beam energy utilization ratio, increase rate reaches 20 ~ 50%.
Brief description of the drawings
Fig. 1 is the structure diagram of the radiation blocking apparatus of a kind of electron beam melting crucible.
Fig. 2 is the plan structure figure of radiation interception cover in Fig. 1
In figure: 1. vacuum pump group, 2. slip hanger bar, 3. electron beam gun, 4. furnace wall, 5. electron beam, 6. radiation interception cover, 7. fire door, 8. working chamber, 9. smelting pot, 10. melt liquid, 11. water-ins, 12. water outlets, 13. water-cooled pallets, 14. hang kinge-joint knot, 15. breach
Embodiment
Describe the present invention in detail below in conjunction with specific embodiment and accompanying drawing, but the present invention is not limited to specific embodiment.
Embodiment 1
As shown in Figures 1 and 2, the radiation blocking apparatus of crucible for a kind of electron beam melting, comprise radiation interception cover, slip hanger bar and vacuum melting device, in vacuum melting device, 4 inside, furnace wall are working chamber 8, fire door 7 is installed on furnace wall, water-cooled pallet 13 is fixedly installed in 4 bottoms, furnace wall, on water-cooled pallet, have water-in 11 and water outlet 12, smelting pot 9 is fixedly installed on water-cooled pallet, vacuum pump group 1 is fixedly installed on furnace wall, electron beam gun 3 is fixedly installed in top, furnace wall, radiation interception cover 6 is positioned at smelting pot top, and be movably installed in the top of furnace wall by slip hanger bar 2, between radiation interception cover 6 and slip hanger bar 2, be flexibly connected by hanging kinge-joint knot.
Radiation interception cover is spherical shape, and down, concave surface focus point is positioned at smelting pot center to its concave surface, and radiation interception cover is positioned at smelting pot top 30cm, and its orthographicprojection is circular, and radius is 15cm, and radiation interception cover material is copper.
The upper electron beam direct radiation of radiation interception cover position also has a circular arc cutaway 15, and the radius of circular arc cutaway is 5cm.
Circular arc cutaway is mainly the direct radiation for avoiding electron beam, and the radiation of electron beam is directly acted among the melt of smelting pot.
Slip hanger bar is 3, every slip hanger bar is provided with independently drive unit, in fusion process, by regulating the lifting of slip hanger bar, regulate the angle of inclination of radiation interception cover, make electron beam that radiation interception cover reflects and energy in the central position of smelting pot.
Use above-mentioned smelting apparatus and traditional smelting apparatus to carry out the contrast experiment of electron beam melting purifying polycrystalline silicon:
(a) traditional smelting apparatus carries out melting to 0.5kg silicon materials, and stationary electron beams power 12kw ensures that in electron beam crucible, silicon materials can not be melted completely, when forming after stabilised bath, at once closes bundle.Silicon ingot is taken out and cut at center, and corrosion, carries out cross-section morphology analysis, marks the form in molten bath, calculates the molten bath area of section part, and is designated as A0;
B). according to same smelting parameter, adopt the device that is added with radiation interception cover to carry out melting, calculate the molten bath area of section part, be designated as A1;
C). by contrast silicon ingot section molten bath area A 1 and A0, find A1-> A0, prove thus, the water jacketed copper crucible that is added with radiation interception can significantly improve the capacity usage ratio of electron beam, and beam energy utilization ratio improves 20%.
Embodiment 2
As depicted in figs. 1 and 2, the radiation blocking apparatus of crucible for a kind of electron beam melting, in device except with lower component difference, other all with in embodiment 1, install identical:
Radiation interception cover is positioned at smelting pot top 10cm, and its orthographicprojection is circular, and radius is 40cm, and radiation interception cover material is graphite.
The upper electron beam direct radiation of radiation interception cover position also has a circular arc cutaway 15, and the radius of circular arc cutaway is 10cm, and slip hanger bar is 5.
After carrying out as the contrast experiment in embodiment 1, obtain, beam energy utilization ratio improves 50%.
Embodiment 3
As depicted in figs. 1 and 2, the radiation blocking apparatus of crucible for a kind of electron beam melting, in device except with lower component difference, other all with in embodiment 1, install identical:
Radiation interception cover is positioned at smelting pot top 18cm, and its orthographicprojection is circular, and radius is 30cm, and radiation interception cover material is quartz.
The upper electron beam direct radiation of radiation interception cover position also has a circular arc cutaway 15, and the radius of circular arc cutaway is 8cm, and slip hanger bar is 4.
After carrying out as the contrast experiment in embodiment 1, obtain, beam energy utilization ratio improves 42%.
Embodiment 4
As depicted in figs. 1 and 2, the radiation blocking apparatus of crucible for a kind of electron beam melting, in device except with lower component difference, other all with in embodiment 1, install identical:
Radiation interception cover is positioned at smelting pot top 22cm, and its orthographicprojection is circular, and radius is 25cm, and radiation interception cover material is graphite.
The upper electron beam direct radiation of radiation interception cover position also has a circular arc cutaway 15, and the radius of circular arc cutaway is 6cm, and slip hanger bar is 4.
After carrying out as the contrast experiment in embodiment 1, obtain, beam energy utilization ratio improves 32%.
Claims (5)
1. the radiation blocking apparatus of an electron beam melting use crucible, comprise radiation interception cover, slip hanger bar and vacuum melting device, in vacuum melting device, inside, furnace wall (4) is working chamber (8), fire door (7) is installed on furnace wall, water-cooled pallet (13) is fixedly installed in bottom, furnace wall (4), on water-cooled pallet, have water-in (11) and water outlet (12), smelting pot (9) is fixedly installed on water-cooled pallet, vacuum pump group (1) is fixedly installed on furnace wall, electron beam gun (3) is fixedly installed in top, furnace wall, it is characterized in that: radiation interception cover (6) is positioned at smelting pot top, and be movably installed in the top of furnace wall by slip hanger bar (2), between radiation interception cover (6) and slip hanger bar (2), be flexibly connected by hanging kinge-joint knot, described radiation interception cover is spherical shape, its concave surface down, concave surface focus point is positioned at smelting pot center, on it, also have a circular arc cutaway (15).
2. the radiation blocking apparatus of crucible for a kind of electron beam melting according to claim 1, is characterized in that: described radiation interception cover is positioned at smelting pot top 10-30cm, and its orthographicprojection is circular, and radius is 15-40cm.
3. the radiation blocking apparatus of crucible for a kind of electron beam melting according to claim 1, is characterized in that: described radiation interception cover material is quartz, 304 stainless steels, graphite or copper.
4. the radiation blocking apparatus of crucible for a kind of electron beam melting according to claim 1, is characterized in that: described slip hanger bar is 3-5 root, and every slip hanger bar is provided with independently drive unit.
5. the radiation blocking apparatus of crucible for a kind of electron beam melting according to claim 1, is characterized in that: the radius of described circular arc cutaway is 5-10cm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310023866.XA CN103086379B (en) | 2013-01-23 | 2013-01-23 | Radiation-intercepting device of crucible for electron-beam smelting |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310023866.XA CN103086379B (en) | 2013-01-23 | 2013-01-23 | Radiation-intercepting device of crucible for electron-beam smelting |
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| CN103086379A CN103086379A (en) | 2013-05-08 |
| CN103086379B true CN103086379B (en) | 2014-12-10 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201981012U (en) * | 2011-01-29 | 2011-09-21 | 大连隆田科技有限公司 | Equipment for effectively purifying polycrystalline silicon powder body by electron beam |
| CN202063730U (en) * | 2011-05-16 | 2011-12-07 | 大连隆田科技有限公司 | Electron beam and slag filter smelting polycrystalline silicon purifying equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10273313A (en) * | 1997-03-28 | 1998-10-13 | Kawasaki Steel Corp | Production of polycrystal silicon ingot |
| JP4947455B2 (en) * | 2005-08-16 | 2012-06-06 | 則近 山内 | Method and apparatus for refining silicon using electron beam |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201981012U (en) * | 2011-01-29 | 2011-09-21 | 大连隆田科技有限公司 | Equipment for effectively purifying polycrystalline silicon powder body by electron beam |
| CN202063730U (en) * | 2011-05-16 | 2011-12-07 | 大连隆田科技有限公司 | Electron beam and slag filter smelting polycrystalline silicon purifying equipment |
Non-Patent Citations (1)
| Title |
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| JP特开平10-273313A 1998.10.13 * |
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