CN103075952B - 一种用于微纳米尺度二维尺寸测量的微触觉测头 - Google Patents
一种用于微纳米尺度二维尺寸测量的微触觉测头 Download PDFInfo
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- CN103075952B CN103075952B CN201210557870.XA CN201210557870A CN103075952B CN 103075952 B CN103075952 B CN 103075952B CN 201210557870 A CN201210557870 A CN 201210557870A CN 103075952 B CN103075952 B CN 103075952B
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CN201210557870.XA CN103075952B (zh) | 2012-12-20 | 2012-12-20 | 一种用于微纳米尺度二维尺寸测量的微触觉测头 |
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CN103075952B true CN103075952B (zh) | 2015-04-29 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105698661A (zh) * | 2016-03-07 | 2016-06-22 | 安徽电气工程职业技术学院 | 微纳米三坐标测量机接触式扫描探头 |
CN106839959B (zh) * | 2016-12-19 | 2019-05-03 | 西安交通大学 | 一种多向位移测量测头 |
CN106940171B (zh) * | 2017-04-01 | 2024-04-02 | 国家电网公司 | Gis设备伸缩节弹簧补偿量在线监测装置 |
CN109211088B (zh) * | 2018-11-13 | 2020-06-19 | 安徽理工大学 | 一种分层结构的磁控变刚度微纳测头 |
CN113340250B (zh) * | 2021-04-30 | 2022-03-15 | 成都飞机工业(集团)有限责任公司 | 一种采用探头测量孔径的方法 |
CN115591808A (zh) * | 2022-11-08 | 2023-01-13 | 郭峰平(Cn) | 一种用于检测弹壳深度和外观的ccd检测机 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5449903A (en) * | 1991-05-14 | 1995-09-12 | Cornell Research Foundation, Inc. | Methods of fabricating integrated, aligned tunneling tip pairs |
CN1975322A (zh) * | 2006-12-04 | 2007-06-06 | 天津大学 | 基于纳米测量机和微触觉测头的微几何量测量装置 |
CN101793499A (zh) * | 2010-03-30 | 2010-08-04 | 上海市计量测试技术研究院 | 一种用于微纳米坐标测量的多测头测量方法与装置 |
CN101813451A (zh) * | 2010-03-30 | 2010-08-25 | 上海市计量测试技术研究院 | 一种用于微纳米几何量测量的阵列式测头 |
CN201828268U (zh) * | 2010-09-28 | 2011-05-11 | 深迪半导体(上海)有限公司 | 一种超小型mems陀螺仪传感器 |
CN202974172U (zh) * | 2012-12-20 | 2013-06-05 | 上海市计量测试技术研究院 | 一种用于微纳米尺度二维尺寸测量的微触觉测头 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5449903A (en) * | 1991-05-14 | 1995-09-12 | Cornell Research Foundation, Inc. | Methods of fabricating integrated, aligned tunneling tip pairs |
CN1975322A (zh) * | 2006-12-04 | 2007-06-06 | 天津大学 | 基于纳米测量机和微触觉测头的微几何量测量装置 |
CN101793499A (zh) * | 2010-03-30 | 2010-08-04 | 上海市计量测试技术研究院 | 一种用于微纳米坐标测量的多测头测量方法与装置 |
CN101813451A (zh) * | 2010-03-30 | 2010-08-25 | 上海市计量测试技术研究院 | 一种用于微纳米几何量测量的阵列式测头 |
CN201828268U (zh) * | 2010-09-28 | 2011-05-11 | 深迪半导体(上海)有限公司 | 一种超小型mems陀螺仪传感器 |
CN202974172U (zh) * | 2012-12-20 | 2013-06-05 | 上海市计量测试技术研究院 | 一种用于微纳米尺度二维尺寸测量的微触觉测头 |
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Inventor after: Wu Junjie Inventor after: Li Yuan Inventor after: Wu Jiahuan Inventor after: Jian Li Inventor after: Fan Guofang Inventor after: Chen Xin Inventor after: Lei Lihua Inventor after: Mao Chenfei Inventor before: Wu Junjie Inventor before: Li Yuan Inventor before: Fan Guofang Inventor before: Chen Xin Inventor before: Lei Lihua Inventor before: Mao Chenfei |
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Free format text: CORRECT: INVENTOR; FROM: WU JUNJIE LI YUAN FAN GUOFANG CHEN XIN LEI LIHUA MAO CHENFEI TO: WU JUNJIE LI YUAN WU JIAHUAN JIAN LI FAN GUOFANG CHEN XIN LEI LIHUA MAO CHENFEI |
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