CN103066092A - Image sensor wafer reverse side processing method - Google Patents
Image sensor wafer reverse side processing method Download PDFInfo
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- CN103066092A CN103066092A CN2013100112888A CN201310011288A CN103066092A CN 103066092 A CN103066092 A CN 103066092A CN 2013100112888 A CN2013100112888 A CN 2013100112888A CN 201310011288 A CN201310011288 A CN 201310011288A CN 103066092 A CN103066092 A CN 103066092A
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- wafer
- oxide film
- reverse side
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- wafer rear
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CN2013100112888A CN103066092A (en) | 2013-01-11 | 2013-01-11 | Image sensor wafer reverse side processing method |
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CN2013100112888A CN103066092A (en) | 2013-01-11 | 2013-01-11 | Image sensor wafer reverse side processing method |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1638095A (en) * | 2003-12-26 | 2005-07-13 | 株式会社瑞萨科技 | Fabrication method of semiconductor integrated circuit device |
US20100148290A1 (en) * | 2008-12-17 | 2010-06-17 | Samsung Electronics Co., Ltd. | Cmos image sensors and related devices and fabrication methods |
CN101752394A (en) * | 2008-12-08 | 2010-06-23 | 全视科技有限公司 | CMOS image sensor with improved backside surface treatment |
CN102779826A (en) * | 2012-08-15 | 2012-11-14 | 豪威科技(上海)有限公司 | Backside illuminated CMOS (Complementary Metal Oxide Semiconductor) image sensor |
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- 2013-01-11 CN CN2013100112888A patent/CN103066092A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1638095A (en) * | 2003-12-26 | 2005-07-13 | 株式会社瑞萨科技 | Fabrication method of semiconductor integrated circuit device |
CN101752394A (en) * | 2008-12-08 | 2010-06-23 | 全视科技有限公司 | CMOS image sensor with improved backside surface treatment |
US20100148290A1 (en) * | 2008-12-17 | 2010-06-17 | Samsung Electronics Co., Ltd. | Cmos image sensors and related devices and fabrication methods |
CN102779826A (en) * | 2012-08-15 | 2012-11-14 | 豪威科技(上海)有限公司 | Backside illuminated CMOS (Complementary Metal Oxide Semiconductor) image sensor |
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ASS | Succession or assignment of patent right |
Owner name: WUHAN XINXIN SEMICONDUCTOR MANUFACTURING CO., LTD. Free format text: FORMER OWNER: LU WEI Effective date: 20130716 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 200124 PUDONG NEW AREA, SHANGHAI TO: 430205 WUHAN, HUBEI PROVINCE |
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TA01 | Transfer of patent application right |
Effective date of registration: 20130716 Address after: 430205 Wuhan Province, East Lake City Development Zone, No., No. four high road, No. 18 Applicant after: Wuhan Xinxin Semiconductor Manufacturing Co., Ltd. Address before: 200124, room 9, No. 905, Lane 301, Haiyang Road, Shanghai, Pudong New Area Applicant before: Lu Wei |
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C12 | Rejection of a patent application after its publication | ||
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Application publication date: 20130424 |