CN103048844B - Optimizing method for slow light characteristic based on liquid filled photonic crystal groove waveguide - Google Patents
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Abstract
The invention provides an optimizing method for a slow light characteristic based on liquid filled photonic crystal groove waveguide. By filling liquid with refractive indexes as 1.416 and 1.645 respectively in air holes of a first row and a second row closest to the photonic crystal groove waveguide, optimization can be conducted on the slow light characteristic of the photonic crystal groove waveguide. Simulation results show that when a group index of refraction is 150, a slow light bandwidth can reach 1.35 nm, and group velocity dispersion can be reduced to 5x10-6 ps2/km. When working temperature change of the photonic crystal groove waveguide or air hole radius manufacture errors affect the slow light characteristic, the slow light characteristic of the photonic crystal groove waveguide can be stabilized by adjusting the refractive index of filling liquid.
Description
Technical field
The present invention relates to a kind of photonic crystal groove waveguide slower rays characteristic optimizing method based on liquid filling, belong to microoptoelectronic device design field.
Background technology
Slow light effect is the new ideas proposed in 1999, and it refers to the phenomenon of velocity of propagation much smaller than the light velocity of light pulse.Because slower rays can realize to the process of light signal in time domain and to luminous energy local spatially, and become study hotspot (document 1. T. F. Krauss. " Why do we need slow light. " the Nature Photonics of optical field gradually, 2008,2 (8): 448-450.).Compare traditional slower rays production method, photon crystal wave-guide is owing to having unique photon band gap characteristic, the motion state of photon can be controlled, slower rays can be produced at normal temperatures, and the slower rays that can be realized by change structure parameter on any wavelength, thus greatly promoted development (document 2. T. F. Krauss. " Slow light in photonic crystal waveguides. " the Journal of Physics D:Applied Physics of Technology of Slow Light, 2007,40 (9): 2666-2670.).And photonic crystal groove waveguide is a kind of new structure proposed on the basis of photon crystal wave-guide for 2008, it combines the advantage of photon crystal wave-guide and regular troughs waveguide, the test substance of low-refraction can be filled in air groove, like this, slower rays will be bound in very narrow low refractive index dielectric groove, not only spatially add the intensity of signal, interaction (the document 3. C. Caer of low-refraction test substance in slower rays and groove can also be strengthened further, X. Le Roux, E. Cassan. " Enhanced localization of light in slow wave slot photonic crystal waveguides. " Optics Letters, 2012, 37 (17): 3660-3662.), for small size, the realization of highly sensitive various all-optical device provides possibility (document 4. W. C. Lai, S. Chakravarty, X. L. Wang, C. Y. Lin, R. T. Chen. " On-chip methane sensing by near-IR absorption signatures in a photonic crystal slot waveguide. " Optics Letters, 2011, 36 (6): 984-986.).
But in conventional photonic crystal groove waveguides, group index can change with the change of wavelength, will there is serious GVD (Group Velocity Dispersion) phenomenon in its slower rays produced, cause light pulse signal broadening, waveform distorts.Consider practical application, the bandwidth sum GVD (Group Velocity Dispersion) problem of photonic crystal groove waveguide slower rays becomes the emphasis of a lot of scholar's research.2010, J. people (the document 5. J. Wu such as Wu, Y. P. Li, C. Peng, Z. Y. Wang. " Wideband and low dispersion slow light in slotted photonic crystal waveguide. " Optics Communications, 2010, 283 (14): 2815-2819.) the airport position by changing air groove both sides in photonic crystal groove waveguide achieves broadband, the slower rays of low GVD (Group Velocity Dispersion), simulation result shows, it is 54 that this photonic crystal groove waveguide structure can produce group velocity, bandwidth can reach the slower rays phenomenon of 3.3nm.2011, Iran scholar (document 6. H. Aghababaeian, M. H. Vadjed-Samiei, N. Granpayeh. " Temperature stabilization of group index in silicon photonic crystal waveguides. " Journal of the Optical Society of Korea, 2011,15 (4): 398-402.) by changing the airport radius of air groove both sides in photonic crystal groove waveguide, when the group velocity of slower rays is brought up to 40, bandwidth is 10nm.But due to hole shape and the very difficult accurately control of size (the document 7. J. Li of photonic crystal; T. P. White; L. O ' Faolain; A. Gomez-Iglesias; T. F. Krauss. " Systematic design of flat band slow light in photonic crystal waveguides. " Optical Express; 2008,16 (9): 6227-6232; Document 8. W. W. Song, R. A. Integlia, W. Jiang. " Slow light loss due to roughness in photonic crystal waveguides:An analytic approach. " Physical Review B, 2010,82 (3): 235306.), although above two kinds of methods improve the slower rays characteristic of photonic crystal groove waveguide to a certain extent, add complicacy prepared by photonic crystal groove waveguide.And in actual applications, the slower rays characteristic of photonic crystal groove waveguide is also inevitably subject to the impact that environment temperature and photonic crystal groove waveguide airport radius prepare error, and this will seriously limit the range of application of photonic crystal groove waveguide slower rays.J. people (the document 9. J. Wu such as Wu, Y. P. Li, C. Peng, Z. Y. Wang. " Numerical demonstration of slow light tuning in slotted photonic crystal waveguide using microfluidic infiltration. " Optics Communications, 2011,284 (8): 2149-2152.) in 2011, the liquid of filling different refractivity in air groove in photonic crystal groove waveguide is proposed, what achieve slower rays operation wavelength is tuning, but its slower rays characteristic does not improve.
The present invention proposes by selecting the liquid filling of certain refractive index in the airport of photonic crystal groove waveguide air groove both sides to realize the slower rays characteristic of broadband, low GVD (Group Velocity Dispersion).Because liquid filling operation can be carried out after photonic crystal groove waveguide preparation, the slower rays characteristic of photonic crystal groove waveguide can be controlled more neatly, so, the preparation error of environment temperature and photonic crystal groove waveguide airport radius can be eliminated or reduce by regulate the refractive index of filling liquid the impact of photonic crystal groove waveguide slower rays characteristic, not only reduce complicacy prepared by photonic crystal groove waveguide, and improve the range of application of photonic crystal groove waveguide slower rays.In addition, photonic crystal groove waveguide designed by the present invention has can reusing, the liquid of filling different refractivity in same photonic crystal groove waveguide can be needed according to practical application, to realize different slower rays characteristics, substantially increase the utilization factor of photonic crystal groove waveguide.
Summary of the invention
(1) technical matters that will solve
The object of the invention is to the deficiency overcoming existing photonic crystal groove waveguide slower rays characteristic optimizing method, propose a kind of simple, feasible, be easy to realize photonic crystal groove waveguide slower rays characteristic optimizing method, its produce slower rays have high group index, wide bandwidth, low GVD (Group Velocity Dispersion), not by environment temperature disturb and airport radius prepare the advantages such as error effect.
(2) technical scheme
In order to achieve the above object, the present invention proposes a kind of photonic crystal groove waveguide slower rays characteristic optimizing method based on liquid filling.This optimization method is near the liquid of filling a kind of refractive index in the first row airport of air groove in photonic crystal groove waveguide, and near the liquid of filling another kind of refractive index in the second row airport of air groove, by regulating the refractive index size of two kinds of filling liquids, thus effectively improve the dispersion curve of photonic crystal groove waveguide, to realize the slower rays characteristic of high group index, wide bandwidth, low GVD (Group Velocity Dispersion).When ambient temperature change or photonic crystal groove waveguide airport radius and expection between there is error time, can finely tune the refractive index of these two kinds of filling liquids again, to ensure to expect that the slower rays characteristic of the photonic crystal groove waveguide that will realize does not change.
In such scheme, described photonic crystal groove waveguide is air bridge structure, can the technique such as mask, electron beam exposure, ion etching, dry etching, wet etching be utilized to be prepared from semiconductor base material silicon-on-insulator (Silicon On Insulator, SOI).
In such scheme, described photonic crystal groove waveguide structure is that the airport first etching triangular arranged in common silicon medium background forms two-dimentional triangular crystal lattice photonic crystal, middle row airport is in the x-direction replaced with a width is=0.32
aair groove form, the radius of airport
r=0.30
a(wherein
afor the grating constant of photonic crystal, the spacing namely between adjacent vacant pore), background media silicon thickness
h=220nm, the effective refractive index of silicon is
n=2.87, the refractive index of all airports before not filling is 1.0.For ensureing that photonic crystal groove waveguide devices function is at the smaller 1550nm wave band of loss, this programme setting grating constant
afor 442nm.
In such scheme, the liquid refractivity of filling in photonic crystal groove waveguide is with the difference of class of liquids, can change between 1.33 to 2.0, the photonic crystal groove waveguide being filled with liquid is placed in the container that toluene is housed to soak after about 5 minutes and takes out, by liquid removal, and can continue the liquid of filling other different refractivity.
In such scheme, the refractive index size of described adjustment two kinds of liquid, refer to when the working temperature of photonic crystal groove waveguide is 290K, in the first row airport near air groove, fill the liquid that refractive index is 1.416, in the second row airport near air groove, fill the liquid that refractive index is 1.645 simultaneously.Group velocity can be produced be down to
cwhen/150, bandwidth can reach the slower rays phenomenon of 1.35nm, and meanwhile, in slower rays bandwidth range, GVD (Group Velocity Dispersion) value is all less than 5 × 10
-6ps
2/ km(reduces more than 10 times before comparing liquid filling).
In such scheme, ambient temperature changes, when referring to that the working temperature of photonic crystal groove waveguide changes to 300K from 290K, only the liquid of filling in the first row airport of air groove need be become the liquid that refractive index is 1.408, the liquid of filling in the second row airport of air groove is become the liquid that refractive index is 1.634 simultaneously, so just can stablize the slower rays characteristic of photonic crystal groove waveguide, make its not variation with temperature and changing.
In such scheme, there is error, refer in the preparation process of photonic crystal groove waveguide between the airport radius of photonic crystal groove waveguide and expection, the airport radius caused due to artificial or machine error is from 0.30 of expection
abecome 0.29
aor 0.31
a.When airport radius is 0.29
atime, the liquid of filling in the first row airport of air groove can be become the liquid that refractive index is 1.347, the liquid of filling in the second row airport of air groove be become the liquid that refractive index is 1.615 simultaneously; And when airport radius is 0.31
atime, the liquid of filling in the first row airport of air groove can be become the liquid that refractive index is 1.452, the liquid of filling in the second row airport of air groove is become the liquid that refractive index is 1.701 simultaneously, like this, the slower rays characteristic of photonic crystal groove waveguide also can not change.
(3) beneficial effect
As can be seen from technique scheme, the present invention has following beneficial effect:
1) utilize photon crystal wave-guide to realize slower rays and have larger bandwidth, less volume, better realizability than other slower rays production methods, and structural parameters are various, the slower rays of generation is controlled, is more suitable for practical application;
2) slower rays that photonic crystal groove waveguide produces can be bound in very narrow low refractive index dielectric groove, spatially add the intensity of light signal, further enhance the interaction of low-refraction material in slower rays and groove, can be used for realizing various small size, highly sensitive all-optical device;
3) this photonic crystal groove waveguide slower rays characteristic optimizing method based on liquid filling of the present invention's proposition, adjusted the slower rays characteristic of photonic crystal groove waveguide by the liquid of filling different refractivity in the airport near air groove both sides, group velocity can be produced and be down to
cwhen/150, bandwidth can reach the slower rays phenomenon of 1.35nm, and meanwhile, in slower rays bandwidth range, GVD (Group Velocity Dispersion) value is all less than 5 × 10
-6ps
2/ km(reduces more than 10 times before comparing liquid filling), expand photonic crystal groove waveguide further and produce the range of application of Technology of Slow Light in photoelectric field;
4) this photonic crystal groove waveguide slower rays characteristic optimizing method based on liquid filling of the present invention's proposition, can when photonic crystal groove waveguide have been prepared, by finely tuning the refractive index size of filling liquid, the slower rays characteristic making it produce does not prepare the impact of error by environment temperature interference and airport radius.Solve optical device based on photonic crystal groove waveguide owing to preparing the impact of error by temperature, airport radius, and the problem causing its range of application limited;
5) this photonic crystal groove waveguide slower rays characteristic optimizing method based on liquid filling of the present invention's proposition, do not need the structural parameters changing photonic crystal groove waveguide, compared with traditional implementation method (changing radius or the position in local air hole in photonic crystal groove waveguide), the photonic crystal groove waveguide structure that the method adopts more is simplified, and reduces the complicacy of technique.And, the dependence of slower rays characteristic to structural parameters of photonic crystal groove waveguide is less (when temperature or the airport radius generation subtle change of external environment, can, by regulating the refractive index of filling liquid, slower rays characteristic be kept not change), reduce Process Exploration difficulty.
Accompanying drawing explanation
The structural parameters of the photonic crystal groove waveguide that following figure gets and the refractive index size of filling liquid all identical with embodiment.
Fig. 1 is the structural representation of two-dimentional triangular crystal lattice photonic crystal groove waveguide, and near first row airport 1 mark of air groove, refractive index is n1, and near second row airport 2 marks of air groove, refractive index is n1;
Fig. 2 is the mode distributions figure of photonic crystal groove waveguide on yz xsect;
Relation between the dispersion curve that Fig. 3 (a) is photonic crystal groove waveguide and n1; Relation between the dispersion curve that Fig. 3 (b) is photonic crystal groove waveguide and n2;
The group index that Fig. 4 is photonic crystal groove waveguide after filling and optimizing and GVD (Group Velocity Dispersion) curve;
Fig. 5 is the group index curve of photonic crystal groove waveguide when working temperature is 290K and 300K;
Fig. 6 is the airport radius of photonic crystal groove waveguide is 0.29
a, 0.30
awith 0.31
atime group index curve.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, concrete structure of the present invention, principle and optimizing process are described in further detail.
The present invention proposes a kind of photonic crystal groove waveguide slower rays characteristic optimizing method based on liquid filling, be illustrated in figure 1 two-dimentional triangular crystal lattice photonic crystal groove waveguide structure schematic diagram, it is the photon crystal wave-guide forming W1 structure by removing middle row airport in the x-direction in common triangular crystal lattice photonic crystal, then place a width at defect center place be 0.32
aair groove formed.Near first row airport 1 mark of air groove, near second row airport 2 marks of air groove, in the airport of these two kinds of figure notations, the liquid of two kinds of different refractivities will be filled respectively to realize the optimization to photonic crystal groove waveguide slower rays characteristic.
In the construction shown in fig. 1,
afor grating constant (spacing namely between adjacent vacant pore), the radius of airport is
r=0.30
a, the refractive index of not filling front all airports is 1.0, and medium background material adopts pure silicon, and silicon thickness is
h=220nm, effective refractive index is
n=2.87, air groove width is
=0.32
a.The present invention designs digital 1 and 2 airports marked interior filling refractive indexes in FIG and is respectively the liquid of n1 and n2, and wherein n1 represents the refractive index size of liquid in digital 1 airport marked, and n2 represents the refractive index size of liquid in digital 2 airports marked.
According to the defined formula of group velocity, for a centre frequency be
light wave, group velocity
for:
（1）
In formula,
for light wave angular frequency;
for wave vector;
for slower rays group index, react the degree that slower rays slows down.
Slower rays phenomenon in photonic crystal groove waveguide is formed by constantly there is Bragg reflection phenomenon between guided mode and periodic lattice.Fig. 2 is the mode distributions figure of photonic crystal groove waveguide on yz xsect utilizing the MEEP software emulation of Massachusetts Institute of Technology (MIT) to obtain, can it is evident that, the energy of guided mode mainly concentrates in air groove, perpendicular on light wave transmissions direction, energy reduces gradually, can infer, near the two air-discharging hole sites on air groove both sides, radius size or refractive index size having the greatest impact to groove waveguides optical field distribution and slower rays characteristic.From the angle of preparation, due to position and the very difficult accurately control of size of the photonic crystal airport of micro-or nano size, if the airport position of change air groove both sides or radius size not only can increase complicacy prepared by photonic crystal groove waveguide, and additionally can introduce preparation error.So the present invention proposes to improve its slower rays characteristic by changing in photonic crystal groove waveguide near the refractive index size of filling liquid in two emptying pores of air groove, and in airport, the refractive index of liquid regulates by filling different types of liquid.
According to formula (1), to the guided mode dispersion curve of photonic crystal groove waveguide, (horizontal ordinate is light wave angular frequency
; Ordinate is wave vector
) carry out differentiate, the variation relation of group index with wavelength can be obtained.In order to improve the group index of photonic crystal groove waveguide, should dispersion curve be made smooth as far as possible, and in order to increase slower rays bandwidth, smooth dispersion relation should be realized in frequency range large as far as possible.Fig. 3 is the photonic crystal groove waveguide dispersion curve that utilizes the MPB software emulation of Massachusetts Institute of Technology (MIT) to obtain and the relation between n1, n2.Can it is evident that, along with the increase of n1, dispersion curve moves to low frequency direction gradually, and the change of HFS is more obvious.Along with the increase of n2, dispersion curve also moves to low frequency direction gradually, but the change of center section is more obvious.If design increases n1 and reduces the dispersion curve slope of afterbody, select suitable n2 to reduce the slope of center section dispersion curve simultaneously, so just can improve group index within the scope of very large bandwidth, while also can reduce GVD (Group Velocity Dispersion).
According to above analysis, regulating the refractive index of filling liquid in the airport of photonic crystal groove waveguide air groove both sides to make n1=1.416, n2=1.645, for ensureing that slower rays is operated in 1550nm wave band, selecting grating constant
a=442nm, obtains the group index of photonic crystal groove waveguide and GVD (Group Velocity Dispersion) curve as shown in Figure 4.According to the definition of slower rays bandwidth, when setting group index upper and lower undulate quantity is no more than central value 10% in bandwidth range, corresponding wavelength coverage is the bandwidth of slower rays, slower rays group index at wavelength from (namely in the wavelength coverage that bandwidth is 1.35nm) in 1549.48 to 1550.83 scopes, can be brought up to 150(and slows to by light group velocity by this New-type photon crystal groove waveguides then designed by the present invention
c/ 150).And in slower rays bandwidth range, GVD (Group Velocity Dispersion) value is all less than 5 × 10
-6ps
2the photonic crystal groove waveguide GVD (Group Velocity Dispersion) value that/km(is common can reach 10
7-9ps
2/ km), the needs of practical application can be met completely.
Material is prepared due to photonic crystal groove waveguide---the refractive index of silicon can variation with temperature and changing, and meanwhile, silicon also has thermal expansion character, causes photonic crystal airport radius also can variation with temperature and changing.In addition, also need to consider be filled in liquid refractivity in airport also can variation with temperature and changing.So the change of temperature will inevitably cause the change of photonic crystal groove waveguide slower rays characteristic.Silicon materials thermo-optical coeffecient and thermal expansivity are respectively
=1.86 × 10
-4/ K and
=0.5 × 10
-6/ K.The thermo-optical coeffecient of filling liquid is
, within the specific limits, the refractive index variation with temperature amount of medium can be obtained by thermo-optic effect:
（2）
In formula,
,
,
be respectively the refractive index of medium, refractive index variable quantity and thermo-optical coeffecient;
for temperature variation.
Can be obtained by thermal expansivity, the relation between photonic crystal airport change in radius and temperature:
（3）
In formula,
,
,
be respectively airport radius, airport radius varitation and thermal expansivity.
Fig. 5 is when the working temperature of photonic crystal groove waveguide changes to 300K from 290K, the group index curve of photonic crystal groove waveguide.Can find out, as temperature change 10K, the operation wavelength of photonic crystal groove waveguide will be drifted about 1.7nm nearly.For being operated in outdoor optical device, the temperature difference is probably more than 10K sooner or later, and under this situation, due to the drift of wavelength, the optical device that photonic crystal groove waveguide is formed just can not work again.The liquid of filling in the first row airport of air groove is become the liquid that refractive index is 1.408 by the present invention, the liquid of filling in the second row airport of air groove is become the liquid that refractive index is 1.634 simultaneously, at this moment the group index curve of photonic crystal groove waveguide is in Fig. 5 shown in dotted line, the group index curve co-insides before substantially not changing with temperature.So, by adjusting the refractive index size of filling liquid, the slower rays characteristic of photonic crystal groove waveguide can be stablized, greatly reduce the change of temperature to the impact of photonic crystal groove waveguide slower rays characteristic.
In the preparation process of photonic crystal groove waveguide, inevitably introduce artificial or machine error, thus cause photonic crystal groove waveguide airport radius not identical with desired value.According to the preparation level of current photonic crystal groove waveguide, the error range of airport radius is within ± 2%.Suppose that the airport radius of photonic crystal groove waveguide designed in the present invention is from 0.30 of expection
abecome 0.29
aor 0.31
a, according to analysis above, the change of photonic crystal airport size can cause the slower rays characteristic of photonic crystal groove waveguide to change.When airport radius is 0.29
atime, the liquid of filling in the first row airport of air groove is become the liquid that refractive index is 1.347 by the present invention's design, the liquid of filling in the second row airport of air groove is become the liquid that refractive index is 1.615 simultaneously; And when airport radius is 0.31
atime, the liquid of filling in the first row airport of air groove is become the liquid that refractive index is 1.452 by the present invention's design, the liquid of filling in the second row airport of air groove is become the liquid that refractive index is 1.701 simultaneously.After filling, under three kinds of airport radiuses, the group index curve of photonic crystal groove waveguide as shown in Figure 6, can find out, airport radius error can compensate by regulating the filling liquid of different refractivity, thus ensures that the slower rays characteristic of photonic crystal groove waveguide does not change.
Claims (1)
1. the photonic crystal groove waveguide slower rays characteristic optimizing method based on liquid filling, it is characterized in that: this photonic crystal groove waveguide structure is that the airport first etching triangular arranged on semiconductor base material silicon-on-insulator forms two-dimentional triangular crystal lattice photonic crystal, then the airport removing a middle row forms photon crystal wave-guide, and finally placing a width again at defect center place is
ω=0.32
aair groove and form photonic crystal groove waveguide, the radius of airport
r=0.30
a, wherein
a=442nm is the grating constant of photonic crystal, the spacing namely between adjacent vacant pore, silicon thickness
h=220nm, in order to effectively improve the dispersion curve of photonic crystal groove waveguide, to realize high group index, wide bandwidth, the slower rays characteristic of low GVD (Group Velocity Dispersion), filling near in the first row airport of air groove the liquid that refractive index is 1.416, simultaneously filling near in the second row airport of air groove the liquid that refractive index is 1.645, like this, when the working temperature of photonic crystal groove waveguide is 290K, can produce group index is 150, bandwidth can reach the slower rays phenomenon of 1.35nm, simultaneously, in slower rays bandwidth range, GVD (Group Velocity Dispersion) value is all less than 5 × 10
-6ps
2/ km, in addition, when the working temperature of photonic crystal groove waveguide changes or airport radius there is preparation error and has an impact to its slower rays characteristic, all can by the slower rays characteristic regulating the refractive index size of filling liquid carry out stable photonic crystal groove waveguide.
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| CN107918170B (en) * | 2016-10-08 | 2020-07-31 | 青岛大学 | Photonic crystal slow light waveguide device and slow light effect obtaining method |
| CN109425930A (en) * | 2017-09-01 | 2019-03-05 | 南京理工大学 | A kind of slower rays characteristic optimizing method of elliptical aperture photonic crystal Slot waveguide |
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| Title |
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| Dispersion control and slow light in slotted photonic crystal waveguides;A. Di Falco,et al.;《APPLIED PHYSICS LETTERS》;20080225;全文 * |
| Dispersion engineering of slow light photonic crystal waveguides using microfluidic infiltration;M. Ebnali-Heidari, et al.;《OPTICS EXPRESS》;20090202;第17卷(第3期);第1630页第2段-第1632页最后一段 * |
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