CN103048844A - Optimizing method for slow light characteristic based on liquid filled photonic crystal groove waveguide - Google Patents
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- CN103048844A CN103048844A CN2013100106425A CN201310010642A CN103048844A CN 103048844 A CN103048844 A CN 103048844A CN 2013100106425 A CN2013100106425 A CN 2013100106425A CN 201310010642 A CN201310010642 A CN 201310010642A CN 103048844 A CN103048844 A CN 103048844A
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Abstract
The invention provides an optimizing method for a slow light characteristic based on liquid filled photonic crystal groove waveguide. By filling liquid with refractive indexes as 1.416 and 1.645 respectively in air holes of a first row and a second row closest to the photonic crystal groove waveguide, optimization can be conducted on the slow light characteristic of the photonic crystal groove waveguide. Simulation results show that when a group index of refraction is 150, a slow light bandwidth can reach 1.35 nm, and group velocity dispersion can be reduced to 5x10-6 ps2/km. When working temperature change of the photonic crystal groove waveguide or air hole radius manufacture errors affect the slow light characteristic, the slow light characteristic of the photonic crystal groove waveguide can be stabilized by adjusting the refractive index of filling liquid.
Description
Technical field
The present invention relates to a kind of photonic crystal slot wave based on liquid filling and lead slower rays characteristic optimizing method, belong to the microoptoelectronic device design field.
Background technology
Slow light effect is the new ideas that propose in 1999, and it refers to that the velocity of propagation of light pulse is much smaller than the phenomenon of the light velocity.Since slower rays can realize to light signal on time domain processing and to luminous energy local spatially, and become gradually study hotspot (document 1. T. F. Krauss. " Why do we need slow light. " the Nature Photonics of optical field, 2008,2 (8): 448-450.).Compare traditional slower rays production method, photon crystal wave-guide is owing to have unique photon band gap characteristic, can control the motion state of photon, can produce at normal temperatures slower rays, and can realize slower rays on any wavelength by the change structure parameter, thereby greatly promoted development (document 2. T. F. Krauss. " Slow light in photonic crystal waveguides. " the Journal of Physics D:Applied Physics of Technology of Slow Light, 2007,40 (9): 2666-2670.).And the photonic crystal slot wave to lead be a kind of new structure that proposed on the basis of photon crystal wave-guide in 2008, it combines the advantage of photon crystal wave-guide and regular troughs waveguide, can fill the test substance of low-refraction in the air groove, like this, slower rays will be bound in the very narrow low refractive index dielectric groove, not only spatially increased the intensity of signal, can also further strengthen interaction (the document 3. C. Caer of low-refraction test substance in slower rays and the groove, X. Le Roux, E. Cassan. " Enhanced localization of light in slow wave slot photonic crystal waveguides. " Optics Letters, 2012,37 (17): 3660-3662.), be small size, the realization of highly sensitive various full optical devices provides possibility (document 4. W. C. Lai, S. Chakravarty, X. L. Wang, C. Y. Lin, R. T. Chen. " On-chip methane sensing by near-IR absorption signatures in a photonic crystal slot waveguide. " Optics Letters, 2011,36 (6): 984-986.).
Yet in conventional photonic crystal slot wave was led, group index can change with the variation of wavelength, and will there be serious GVD (Group Velocity Dispersion) phenomenon in the slower rays of its generation, cause the light pulse signal broadening, the waveform distorted.Consider practical application, the photonic crystal slot wave is led the bandwidth of slower rays and the emphasis that the GVD (Group Velocity Dispersion) problem becomes a lot of scholar's research.2010, J. people (document 5. J. Wu such as Wu, Y. P. Li, C. Peng, Z. Y. Wang. " Wideband and low dispersion slow light in slotted photonic crystal waveguide. " Optics Communications, 2010,283 (14): the broadband has been realized in the airport position of 2815-2819.) leading hollow air drain both sides by changing the photonic crystal slot wave, the slower rays of low GVD (Group Velocity Dispersion), simulation result shows, it is 54 that this photonic crystal slot wave guide structure can produce group velocity, and bandwidth can reach the slower rays phenomenon of 3.3nm.2011, Iran scholar (document 6. H. Aghababaeian, M. H. Vadjed-Samiei, N. Granpayeh. " Temperature stabilization of group index in silicon photonic crystal waveguides. " Journal of the Optical Society of Korea, 2011,15 (4): 398-402.) lead the airport radius of hollow air drain both sides by changing the photonic crystal slot wave, the group velocity of slower rays is brought up at 40 o'clock, and bandwidth is 10nm.But because the hole shape of photonic crystal and size are difficult to accurately control (document 7. J. Li, T. P. White, L. O ' Faolain, A. Gomez-Iglesias, T. F. Krauss. " Systematic design of flat band slow light in photonic crystal waveguides. " Optical Express, 2008,16 (9): 6227-6232; Document 8. W. W. Song, R. A. Integlia, W. Jiang. " Slow light loss due to roughness in photonic crystal waveguides:An analytic approach. " Physical Review B, 2010,82 (3): 235306.), although more than two kinds of methods improved to a certain extent the slower rays characteristic that the photonic crystal slot wave is led, increased the complicacy that the photonic crystal slot wave is led preparation.And in actual applications, the slower rays characteristic that the photonic crystal slot wave is led also can be subject to environment temperature inevitably and the photonic crystal slot wave is led the impact that the airport radius prepares error, and this will seriously limit the range of application that the photonic crystal slot wave is led slower rays.J. people (document 9. J. Wu such as Wu, Y. P. Li, C. Peng, Z. Y. Wang. " Numerical demonstration of slow light tuning in slotted photonic crystal waveguide using microfluidic infiltration. " Optics Communications, 2011,284 (8): 2149-2152.) in the liquid of proposition in 2011 filling different refractivity in the air groove that the photonic crystal slot wave is led, realized tuning to the slower rays operation wavelength, but its slower rays characteristic does not improve.
The present invention propose liquid filling by selecting certain refractive index in the photonic crystal slot wave is led the airport of air groove both sides to realize the slower rays characteristic of broadband, low GVD (Group Velocity Dispersion).Because the liquid filling operation can be carried out after the photonic crystal slot wave is led preparation, can control more neatly the slower rays characteristic that the photonic crystal slot wave is led, so, the impact that the preparation error that environment temperature and photonic crystal slot wave are led the airport radius is led the slower rays characteristic to the photonic crystal slot wave can be eliminated or reduces by the refractive index of regulating filling liquid, not only reduced the photonic crystal slot wave and led the complicacy of preparation, and improved the photonic crystal slot wave and led the range of application of slower rays.In addition, but leading, the designed photonic crystal slot wave of the present invention has reusing, can lead the liquid of middle filling different refractivity at same photonic crystal slot wave according to the practical application needs, to realize different slower rays characteristics, greatly improve the utilization factor that the photonic crystal slot wave is led.
Summary of the invention
The technical matters that (one) will solve
The object of the invention is to overcome the deficiency that existing photonic crystal slot wave is led slower rays characteristic optimizing method, propose a kind of photonic crystal slot wave simple, feasible, that be easy to realize and lead slower rays characteristic optimizing method, the slower rays of its generation has high group index, wide bandwidth, low GVD (Group Velocity Dispersion), is not subjected to environment temperature interference and airport radius to prepare the advantages such as error effect.
(2) technical scheme
In order to achieve the above object, the present invention proposes a kind of photonic crystal slot wave based on liquid filling and leads slower rays characteristic optimizing method.This optimization method is the liquid of filling a kind of refractive index in the photonic crystal slot wave is led in the first row airport of close air groove, and in the second row airport of the most close air groove, fill the liquid of another kind of refractive index, by regulating the refractive index size of two kinds of filling liquids, thereby effectively improve the dispersion curve that the photonic crystal slot wave is led, to realize the slower rays characteristic of high group index, wide bandwidth, low GVD (Group Velocity Dispersion).When having error between ambient temperature changes or the photonic crystal slot wave is led airport radius and the expection, can finely tune the refractive index of these two kinds of filling liquids again, not change to guarantee the slower rays characteristic that photonic crystal slot wave that expection will realize is led.
In the such scheme, described photonic crystal slot wave is led and is air bridge structure, can utilize the techniques such as mask, electron beam exposure, ion etching, dry etching, wet etching to be prepared from semiconductor base material silicon-on-insulator (Silicon On Insulator, SOI).
In the such scheme, described photonic crystal slot wave guide structure is that elder generation's airport of etching triangular arranged on common silicon medium background forms two-dimentional triangular crystal lattice photonic crystal, and middle row airport in the x-direction being replaced with a width is=0.32
aAir groove consist of the radius of airport
r=0.30
a(wherein
aBe the grating constant of photonic crystal, i.e. spacing between the adjacent vacant pore), the background media silicon thickness
h=220nm, the effective refractive index of silicon is
n=2.87, the refractive index of all airports before not filling is 1.0.Lead device and be operated in the smaller 1550nm wave band of loss, this programme setting grating constant for guaranteeing the photonic crystal slot wave
aBe 442nm.
In the such scheme, lead the liquid refractivity of middle filling with the difference of class of liquids at the photonic crystal slot wave, can between 1.33 to 2.0, change, the photonic crystal slot wave that is filled with liquid led to be placed in the container that toluene is housed to soak take out after about 5 minutes, can be with liquid removal, and can continue to fill the liquid of other different refractivity.
In the such scheme, the refractive index size of two kinds of liquid of described adjusting, when referring to that the working temperature of leading when the photonic crystal slot wave is 290K, at the liquid that near filling refractive index in the first row airport of air groove is 1.416, simultaneously at the liquid that near filling refractive index in the second row airport of air groove is 1.645.Can produce group velocity is down to
c/ 150 o'clock, bandwidth can reach the slower rays phenomenon of 1.35nm, and simultaneously, in the slower rays bandwidth range, the GVD (Group Velocity Dispersion) value is all less than 5 * 10
-6Ps
2/ km(has reduced more than 10 times before comparing liquid filling).
In the such scheme, ambient temperature changes, when referring to that working temperature that the photonic crystal slot wave is led changes to 300K from 290K, only need to become near the liquid of filling in the first row airport of air groove refractive index and be 1.408 liquid, to become refractive index near the liquid of filling in the second row airport of air groove simultaneously is 1.634 liquid, so just can stablize the slower rays characteristic that the photonic crystal slot wave is led, make its not variation with temperature and changing.
In the such scheme, have error between the airport radius that the photonic crystal slot wave is led and the expection, refer in the preparation process that the photonic crystal slot wave is led and since artificial or airport radius that machine error causes from expect 0.30
aBecome 0.29
aPerhaps 0.31
aWhen the airport radius is 0.29
aThe time, can be 1.347 liquid with become refractive index near the liquid of filling in the first row airport of air groove, will become near the liquid of filling in the second row airport of air groove simultaneously refractive index and be 1.615 liquid; And when the airport radius be 0.31
aThe time, can be 1.452 liquid with become refractive index near the liquid of filling in the first row airport of air groove, to become refractive index near the liquid of filling in the second row airport of air groove simultaneously is 1.701 liquid, like this, the slower rays characteristic led of photonic crystal slot wave also can not change.
(3) beneficial effect
Can find out that from technique scheme the present invention has following beneficial effect:
1) utilize photon crystal wave-guide to realize that slower rays has larger bandwidth, less volume, better realizability than other slower rays production methods, and structural parameters are various, the slower rays of generation is controlled, more is applicable to practical application;
2) the living slower rays of photonic crystal slot wave artificial delivery can be bound in the very narrow low refractive index dielectric groove, increased the intensity of light signal on the space, further strengthen the interaction of low-refraction material in slower rays and the groove, can be used for realizing various small sizes, highly sensitive full optical device;
3) this photonic crystal slot wave based on liquid filling of the present invention's proposition is led slower rays characteristic optimizing method, adjust the slower rays characteristic that the photonic crystal slot wave is led by the liquid of in the airport of the most close air groove both sides, filling different refractivity, can produce group velocity and be down to
c/ 150 o'clock, bandwidth can reach the slower rays phenomenon of 1.35nm, and simultaneously, in the slower rays bandwidth range, the GVD (Group Velocity Dispersion) value is all less than 5 * 10
-6Ps
2/ km(has reduced more than 10 times before comparing liquid filling), further enlarge the artificial delivery of photonic crystal slot wave and given birth to the range of application of Technology of Slow Light in photoelectric field;
4) this photonic crystal slot wave based on liquid filling of the present invention's proposition is led slower rays characteristic optimizing method, can lead at the photonic crystal slot wave and prepare in the situation about finishing, by the refractive index size of fine setting filling liquid, make the slower rays characteristic of its generation not be subjected to the impact that environment temperature is disturbed and the airport radius prepares error.Solve the optical device of leading based on the photonic crystal slot wave owing to be subjected to temperature, airport radius to prepare the impact of error, and caused the limited problem of its range of application;
5) this photonic crystal slot wave based on liquid filling of the present invention's proposition is led slower rays characteristic optimizing method, do not need to change the structural parameters that the photonic crystal slot wave is led, compare with traditional implementation method (changing radius or position that the photonic crystal slot wave is led middle local air hole), the photonic crystal slot wave guide structure that the method adopts is more simplified, and has reduced the complicacy of technique.And, the slower rays characteristic that the photonic crystal slot wave is led is less (when the temperature of external environment or the airport radius generation subtle change to the dependence of structural parameters, can by regulating the refractive index of filling liquid, keep the slower rays characteristic not change), reduced the Process Exploration difficulty.
Description of drawings
Below each photonic crystal slot wave of getting of figure structural parameters of leading and filling liquid the refractive index size all with embodiment in identical.
Fig. 1 is the structural representation that two-dimentional triangular crystal lattice photonic crystal slot wave is led, first row airport 1 mark of close air groove, and refractive index is n1, second row airport 2 marks of close air groove, refractive index is n1;
Fig. 2 is that the photonic crystal slot wave is led the mould field pattern on the yz xsect;
The dispersion curve that Fig. 3 (a) leads for the photonic crystal slot wave and the relation between the n1; The dispersion curve that Fig. 3 (b) leads for the photonic crystal slot wave and the relation between the n2;
Fig. 4 is that the photonic crystal slot wave is led through filling group index and the GVD (Group Velocity Dispersion) curve after optimizing;
Fig. 5 is that the photonic crystal slot wave is led the group index curve when working temperature is 290K and 300K;
Fig. 6 is that the airport radius that the photonic crystal slot wave is led is 0.29
a, 0.30
aWith 0.31
aThe time the group index curve.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, concrete structure of the present invention, principle and optimizing process are described in further detail.
The present invention proposes a kind of photonic crystal slot wave based on liquid filling and lead slower rays characteristic optimizing method, be illustrated in figure 1 as two-dimentional triangular crystal lattice photonic crystal slot wave guide structure synoptic diagram, it is the photon crystal wave-guide that forms the W1 structure in common triangular crystal lattice photonic crystal by row airport in the x-direction in the middle of removing, and placing a width at the place, defect center again is 0.32
aAir groove form.First row airport 1 mark of close air groove, second row airport 2 marks of close air groove will be filled respectively the liquid of two kinds of different refractivities to realize the photonic crystal slot wave is led the optimization of slower rays characteristic in the airport of these two kinds of figure notations.
In structure shown in Figure 1,
aBe grating constant (being the spacing between the adjacent vacant pore) that the radius of airport is
r=0.30
a, the refractive index of all airports is not 1.0 before not filling, and the medium background material adopts pure silicon, and silicon thickness is
h=220nm, effective refractive index is
n=2.87, the air groove width is
=0.32
aFill the liquid that refractive index is respectively n1 and n2 in the airport of the present invention design numeral 1 and 2 marks in Fig. 1, wherein n1 represents the refractive index size of liquid in the airport of digital 1 mark, and n2 has represented the refractive index size of liquid in the airport of digital 2 marks.
According to the defined formula of group velocity, for a centre frequency be
Light wave, group velocity
For:
（1）
In the formula,
Be the light wave angular frequency;
Be wave vector;
Be the slower rays group index, reacted the degree that slower rays slows down.
Slower rays phenomenon in the photonic crystal slot wave is led forms by the Bragg reflection phenomenon constantly occurs between guided mode and the periodic lattice.Fig. 2 is that the photonic crystal slot wave that utilizes the MEEP software emulation of Massachusetts Institute of Technology (MIT) to obtain is led the mould field pattern on the yz xsect, can it is evident that, the energy of guided mode mainly concentrates in the air groove, on perpendicular to the light wave transmissions direction, energy reduces gradually, can infer two air-discharging hole sites, radius size or refractive index size the having the greatest impact to the field distribution of slot wave leaded light and slower rays characteristic on the most close air groove both sides.Angle from preparation, because the position of the photonic crystal airport of micro-or nano size and size are difficult to accurately control, not only the complicacy that the photonic crystal slot wave is led preparation can be increased if change airport position or the radius size of air groove both sides, and the preparation error can be additionally introduced.So, the present invention propose by change the photonic crystal slot wave lead in the two emptying pores of close air groove the refractive index size of filling liquid improve its slower rays characteristic, and the refractive index of liquid is regulated by the different types of liquid of filling in the airport.
According to formula (1), (horizontal ordinate is the light wave angular frequency to the guided mode dispersion curve that the photonic crystal slot wave is led
Ordinate is wave vector
) carry out differentiate, can obtain group index with the variation relation of wavelength.The group index of leading in order to improve the photonic crystal slot wave should make dispersion curve smooth as far as possible, and in order to increase the slower rays bandwidth, should realize smooth dispersion relation in large as far as possible frequency range.Fig. 3 is that the photonic crystal slot wave that utilizes the MPB software emulation of Massachusetts Institute of Technology (MIT) to obtain is led the relation between dispersion curve and n1, the n2.Can it is evident that along with the increase of n1, dispersion curve moves to the low frequency direction gradually, and the variation of HFS is more obvious.Along with the increase of n2, dispersion curve also moves to the low frequency direction gradually, but the variation of center section is more obvious.If design increases the dispersion curve slope that n1 reduces afterbody, select simultaneously suitable n2 to reduce the slope of center section dispersion curve, so just can in very large bandwidth range, improve group index, also can reduce GVD (Group Velocity Dispersion) simultaneously.
According to above analysis, the refractive index that adjusting photonic crystal slot wave is led the interior filling liquid of airport of air groove both sides makes n1=1.416, and n2=1.645 is operated in the 1550nm wave band for guaranteeing slower rays, selects grating constant
a=442nm obtains group index that the photonic crystal slot wave leads and GVD (Group Velocity Dispersion) curve as shown in Figure 4.Definition according to the slower rays bandwidth, corresponding wavelength coverage was the bandwidth of slower rays when undulate quantity was no more than central value 10% about the setting group index in bandwidth range, then lead can be in wavelength from 1549.48 to 1550.83 scopes (namely in bandwidth is the wavelength coverage of 1.35nm) for the designed this New-type photon crystal slot wave of the present invention, the slower rays group index is brought up to 150(be about to the light group velocity and slow to
c/ 150).And in the slower rays bandwidth range, the GVD (Group Velocity Dispersion) value is all less than 5 * 10
-6Ps
2The photonic crystal slot wave that/km(is common is led the GVD (Group Velocity Dispersion) value can reach 10
7-9Ps
2/ km), can satisfy the needs of practical application fully.
The refractive index of the preparation material of leading owing to the photonic crystal slot wave---silicon can variation with temperature change, and simultaneously, silicon also has thermal expansion character, causes the photonic crystal airport radius also can variation with temperature and change.In addition, need also to consider that the liquid refractivity that is filled in the airport also can variation with temperature and change.So the variation of temperature will inevitably cause that the photonic crystal slot wave leads the change of slower rays characteristic.Silicon materials thermo-optical coeffecient and thermal expansivity are respectively
=1.86 * 10
-4/ K and
=0.5 * 10
-6/ K.The thermo-optical coeffecient of filling liquid is
, within the specific limits, can be got the refractive index variation with temperature amount of medium by thermo-optic effect:
In the formula,
,
,
Be respectively refractive index, refractive index variable quantity and the thermo-optical coeffecient of medium;
Be temperature variation.
Can be got the relation between photonic crystal airport change in radius and the temperature by thermal expansivity:
In the formula,
,
,
Be respectively airport radius, airport change in radius amount and thermal expansivity.
When Fig. 5 changes to 300K for the working temperature of leading when the photonic crystal slot wave from 290K, the group index curve that the photonic crystal slot wave is led.Can find out, when temperature change 10K, the operation wavelength that the photonic crystal slot wave the is led 1.7nm nearly that will drift about.For being operated in outdoor optical device, the temperature difference probably surpasses 10K sooner or later, and under this situation, because the drift of wavelength, the photonic crystal slot wave is led the optical device of formation and just can not have been worked again.It is 1.408 liquid that the present invention will become refractive index near the liquid of filling in the first row airport of air groove, to become refractive index near the liquid of filling in the second row airport of air groove simultaneously is 1.634 liquid, at this moment the photonic crystal slot wave group index curve of leading is among Fig. 5 shown in the dotted line, basically the group index curve before not changing to overlap with temperature.So, by adjusting the refractive index size of filling liquid, can stablize the slower rays characteristic that the photonic crystal slot wave is led, the impact of slower rays characteristic is led in the variation that greatly reduces temperature on the photonic crystal slot wave.
In the preparation process that the photonic crystal slot wave is led, can introduce inevitably artificial or machine error, thereby it is not identical with desired value to cause the photonic crystal slot wave to lead the airport radius.According to the preparation level that present photonic crystal slot wave is led, the error range of airport radius is in ± 2%.Suppose that airport radius that photonic crystal slot wave designed among the present invention leads is from 0.30 of expection
aBecome 0.29
aPerhaps 0.31
a, according to the analysis of front, the variation of photonic crystal airport size can cause that the slower rays characteristic that the photonic crystal slot wave is led changes.When the airport radius is 0.29
aThe time, it is 1.347 liquid that the present invention design will become refractive index near the liquid of filling in the first row airport of air groove, will become near the liquid of the interior filling of second row airport of air groove simultaneously refractive index and be 1.615 liquid; And when the airport radius be 0.31
aThe time, it is 1.452 liquid that the present invention design will become refractive index near the liquid of filling in the first row airport of air groove, will become near the liquid of the interior filling of second row airport of air groove simultaneously refractive index and be 1.701 liquid.After the filling, the group index curve that the photonic crystal slot wave is led under three kinds of airport radiuses as shown in Figure 6, can find out that the airport radius error can compensate by the filling liquid of regulating different refractivity, thereby guarantee that the slower rays characteristic that the photonic crystal slot wave is led does not change.
Claims (5)
1. the photonic crystal slot wave based on liquid filling is led slower rays characteristic optimizing method, it is characterized in that: the liquid of in the photonic crystal slot wave is led, filling respectively two kinds of refractive indexes in the first row of close air groove and the second row airport, by regulating the refractive index size of these two kinds of filling liquids, thereby effectively improve the dispersion curve that the photonic crystal slot wave is led, to realize high group index, wide bandwidth, the slower rays characteristic of low GVD (Group Velocity Dispersion), and the temperature change of leading when the photonic crystal slot wave or airport radius all can be stablized the slower rays characteristic that the photonic crystal slot wave is led by the refractive index size of regulating filling liquid when preparing error its slower rays characteristic being exerted an influence.
2. a kind of photonic crystal slot wave based on liquid filling as claimed in claim 1 is led slower rays characteristic optimizing method, it is characterized in that: photonic crystal slot wave guide structure is first at semiconductor base material silicon-on-insulator (Silicon On Insulator, SOI) airport of upper etching triangular arranged forms two-dimentional triangular crystal lattice photonic crystal, middle row airport is in the x-direction replaced with a width to be
=0.32
aAir groove consist of the radius of airport
r=0.30
a(wherein
A=442nm is the grating constant of photonic crystal, i.e. spacing between the adjacent vacant pore), silicon thickness
h=220nm, the effective refractive index of silicon
n=2.87, the refractive index of all airports is 1.0 before not filling.
3. a kind of photonic crystal slot wave based on liquid filling as claimed in claim 1 is led slower rays characteristic optimizing method, it is characterized in that: when the working temperature of leading when the photonic crystal slot wave is 290K, in the first row airport of the most close air groove, fill refractive index and be 1.416 liquid, in the second row airport of the most close air groove, fill simultaneously refractive index and be 1.645 liquid, can produce group index is 150, bandwidth can reach the slower rays phenomenon of 1.35nm, simultaneously, in the slower rays bandwidth range, the GVD (Group Velocity Dispersion) value is all less than 5 * 10
-6Ps
2/ km.
4. a kind of photonic crystal slot wave based on liquid filling as claimed in claim 3 is led slower rays characteristic optimizing method, it is characterized in that: when the working temperature of leading when the photonic crystal slot wave changes to 300K from 290K, if it is 1.408 liquid that the liquid of filling in the first row airport of close air groove becomes refractive index, it is 1.634 liquid that the liquid of filling in the second row airport of close air groove simultaneously becomes refractive index, and the slower rays characteristic led of photonic crystal slot wave just can variation with temperature and change like this.
5. a kind of photonic crystal slot wave based on liquid filling as claimed in claim 3 is led slower rays characteristic optimizing method, it is characterized in that: when the airport radius of leading when the photonic crystal slot wave becomes 0.29a from 0.30a, it is 1.347 liquid that the liquid of filling in can the first row airport with the most close air groove becomes refractive index, and it is 1.615 liquid that the liquid of filling in the second row airport of close air groove simultaneously becomes refractive index; And the airport radius of leading when the photonic crystal slot wave is when becoming 0.31a from 0.30a, it is 1.452 liquid that the liquid of filling in can the first row airport with the most close air groove becomes refractive index, it is 1.701 liquid that the liquid of filling in the second row airport of close air groove simultaneously becomes refractive index, like this, the slower rays characteristic led of photonic crystal slot wave also can not change because of the preparation error of airport radius.
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| CN104062267A (en) * | 2014-06-27 | 2014-09-24 | 东北大学 | Refractive index measuring method based on slow light and photonic crystal micro-cavity |
| CN104991308A (en) * | 2015-07-27 | 2015-10-21 | 中国科学院半导体研究所 | Waveguide structure |
| CN104991308B (en) * | 2015-07-27 | 2018-04-20 | 中国科学院半导体研究所 | A kind of waveguiding structure |
| CN107918170A (en) * | 2016-10-08 | 2018-04-17 | 青岛大学 | A kind of photonic crystal slow optical wave guide device and slow light effect acquisition methods |
| CN109425930A (en) * | 2017-09-01 | 2019-03-05 | 南京理工大学 | A kind of slower rays characteristic optimizing method of elliptical aperture photonic crystal Slot waveguide |
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| CN103048844B (en) | 2015-04-08 |
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