Detailed description of the invention
For making the object of the embodiment of the present invention, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
The structural representation of the fluid jetting head that Fig. 1 provides for the embodiment of the present invention one.Fluid jetting head as shown in Figure 1 comprises: silicon substrate 1, drive circuit 3 and multiple printhead; Drive circuit 3 and printhead are respectively formed on silicon substrate 1.
Multiple printhead is matrix arrangement.Arbitrary printhead comprises: liquid chamber 21 and a piezo-electric device 22; The bottom of liquid chamber 21 to be formed on silicon substrate 1 and to be formed with the ink-feed channel 23 with liquid chamber 21 conducting, top be formed with liquid chamber 21 conducting go out ink passage 24; Piezo-electric device 22 is arranged in liquid chamber 21, wherein, at least one end of piezo-electric device 22 and the sidewall of liquid chamber 21 affixed, by the vibration of piezo-electric device 22, control liquid chamber 21 and outwards spray ink through going out ink passage 24 or inject ink through ink-feed channel 23 to liquid chamber 21.Piezo-electric device 22 can comprise piezoelectric element 22a further; Piezoelectric element 22a comprises: the first electrode 221 stacked gradually, piezoelectric layer 222 and the second electrode 223; When applying voltage to the first electrode 221 and the second electrode 223, the voltage difference formed between the first electrode 221 and the second electrode 223 drives piezoelectric element 22a to vibrate.
Drive circuit 3 comprises: driving pulse produces circuit and Drive and Control Circuit, wherein:
Driving pulse produces circuit and is connected with the first electrode 221 of the piezo-electric device 22 of each printhead respectively, applies driving pulse voltage for the first electrode 221 to each piezo-electric device 22.
The structural representation of Drive and Control Circuit 32 as shown in Figure 2, specifically comprises: for the data wire 321 of transferring printing data signal and multiple driving control unit 322 of connecting one to one with the second electrode 223 of each described piezo-electric device 22.Arbitrary driving control unit 322 is also connected with data wire 321, for obtaining the rank addresses enable signal of the corresponding piezo-electric device 22 connected, and according to the described rank addresses enable signal obtained and described print data signal, determine the voltage of the second electrode 223 being applied to the corresponding piezo-electric device 22 connected, to change the voltage difference at the two poles of the earth of the corresponding piezo-electric device 22 connected.
Multiple print head matrix arrangements that the fluid jetting head that the present embodiment provides comprises, and the driving control unit connected one to one with the piezo-electric device of each printhead is comprised by Drive and Control Circuit, two-dimension addressing piezo-electric device being realized to ranks can be realized, thus for matrix arrangement multiple printheads driving implementation is provided.The mode arranged due to multiple print head matrix, relative to prior art linear pattern mode, can utilize the space in shower nozzle more flexibly, make fluid jetting head structure more compact, be conducive to the miniaturization realizing fluid jetting head.In addition, the driving pulse of the present embodiment produces circuit and Drive and Control Circuit is all formed on a silicon substrate, therefore saves the space taken needed for additional configuration drive circuit in shower nozzle, and then is also conducive to the miniaturization realizing fluid jetting head.
On the basis of technique scheme, multiple printheads of fluid jetting head can be divided into groups, concrete packet mode is unrestricted, such as: can adopt and to divide equally or non-equal grading mode divides into groups.The drived control of grouping printhead can be carried out to fluid jetting head, to improve the flexibility of addressing speed and control under this situation.Concrete, the Drive and Control Circuit in drive circuit 3 also can comprise: for many regional choice lines of transfer printing head enable signal; Grouping printhead shares a regional choice line and carrys out transfer printing head enable signal, each driving control unit that each piezo-electric device correspondence namely often organizing printhead connects, and is connected with same regional choice line.
On the basis of technique scheme, in order to protect exposed drive circuit 3, can be formed with circuit isolation protective layer 25 on drive circuit 3, piezo-electric device 22 is formed on circuit isolation protective layer 25; Circuit isolation protective layer 25 is also formed with electrical connection via hole 26, drive circuit 3 is by the Electrode connection of electrical connection via hole 26 with piezo-electric device 22.Concrete, circuit isolation protective layer 25 is formed with the first electrical connection via hole and the second electrical connection via hole, driving pulse is produced circuit and is connected with the first electrode 221 of each piezo-electric device 22 respectively by the first electrical connection via hole; Driving control unit is connected with the second electrode 223 of corresponding piezo-electric device 22 by the second electrical connection via hole.
Optionally, in order to protect piezoelectric element, piezo-electric device 22 also comprises the vibration isolation protective layer 22b being coated on piezoelectric element 22a outer surface; Vibration isolation protective layer 22b plays a role as oscillating plate, concrete, while there is vibration under the voltage difference effect that the piezoelectric layer 222 of piezoelectric element 22a applies at the two poles of the earth, drives vibration isolation protective layer 22b to vibrate together.Under this situation; first electrical connection via hole and the second electrical connection via hole penetrate vibration isolation protective layer 22b; second electrical connection via hole can be opened in circuit isolation protective layer 25 and the first nonoverlapping region of electrode 221; produce circuit to make the driving pulse in drive circuit 3 to be connected with the first electrode 221 of piezo-electric device 22 by the first electrical connection via hole, the connecting line of the Drive and Control Circuit in drive circuit 3 can be connected with the second electrode 223 of piezo-electric device 22 through the second electrical connection via hole.
Optionally, piezo-electric device 22 can be set to cantilever beam structure.Such as: one end of piezo-electric device 22 and the sidewall being fixedly connected on liquid chamber 21, the other end stretches into and unsettled in liquid chamber 21; In the two ends of i.e. piezo-electric device 22, one end is stiff end, and the other end is movable end.The benefit of design like this is, when the two poles of the earth of piezo-electric device are formed with voltage difference, the Oscillation Amplitude of piezo-electric device movable end of the present invention, in hinge structure, to be the Oscillation Amplitude of the piezo-electric device of stiff end larger at two ends, therefore, when obtaining identical Oscillation Amplitude, the power consumption needed for piezo-electric device of the present invention is less.
The schematic diagram of the driving pulse generation circuit that Fig. 3 provides for the invention process two.As shown in Figure 3, driving pulse generation circuit 31 comprises: input IN, electric capacity C, charging control circuit, charge/discharge control circuit and output OUT.
Input IN is for receiving outside print signal.The print signal of outside input can be specially periodic square wave signal, and as shown in Figure 4, pulse width is Tc.Electric capacity C is used for the discharge and recharge that hockets.Charging control circuit is used for when the rising edge of print signal arrives, and control capacitance C charges.Charge/discharge control circuit is used for when the trailing edge of print signal arrives, and control capacitance C discharges.Output OUT is used for exporting to the first electrode of each piezo-electric device or amplifying the voltage at output capacitance C two ends.Concrete:
Charging control circuit can comprise: the first triode Q1, the second triode Q2, the 3rd triode Q3, the first resistance R1 and the 3rd resistance R3.Wherein: the base stage of the first triode Q1 is connected with input IN, colelctor electrode is connected with one end of the 3rd resistance R3, grounded emitter; The other end of the 3rd resistance R3, is connected with the parallel connection point of the colelctor electrode of the 3rd triode Q3 and the base stage of the second address transistor Q2; The emitter stage of the second triode Q2 is connected with high voltage reference line VH through the first resistance R1, and colelctor electrode is connected with one end of electric capacity C, the other end ground connection of electric capacity C; The base stage of the 3rd triode Q3 is connected with the series connection point of the first resistance R1 and the second triode Q2, and emitter stage is connected with high voltage reference line VH;
Charge/discharge control circuit can comprise: the 4th triode Q4, the 5th triode Q5 and the second resistance R2; Charge/discharge control circuit also can comprise phase inverter 313.Wherein: the input of phase inverter 313 is connected with input IN, output is connected with the parallel connection point of the base stage of the 4th triode Q4 and the colelctor electrode of the 5th triode Q5; The emitter stage of the 4th triode Q4 is through the second resistance R2 ground connection, and colelctor electrode is connected with one end of electric capacity C, the other end ground connection of electric capacity C; The base electrode of the 5th triode Q5 is connected with the series connection point of the emitter stage of the 4th triode Q4 and the second resistance R2, grounded emitter;
If output OUT output is the voltage of electric capacity C both end voltage after amplifying, then driving pulse generation circuit 31 also can comprise: the 6th triode Q6 and the 7th triode Q7.Wherein, the base stage of the 6th triode Q6 is connected with one end of memory capacitance C with the parallel connection point of the base stage of the 7th triode Q7, the other end ground connection of memory capacitance; The colelctor electrode of the 6th triode Q6 connects high voltage reference line VH; The grounded collector of the 7th triode Q7; The point in parallel of the emitter stage of the 6th triode Q6 and the emitter stage of the 7th triode Q7, is connected with output OUT.
The course of work that driving pulse as shown in Figure 3 produces circuit is as follows:
Print signal Tc is inputted from input IN.
When the rising edge of print signal Tc arrives, charging control circuit works, concrete: the first triode Q1 conducting, second triode Q2 conducting, electric current flows to electric capacity C by the first resistance R1, make the voltage VBE3 that the voltage at the first resistance R1 two ends equals between the base stage of the 3rd triode Q3 and emitter stage, the 3rd triode Q3 conducting.Like this, the 3rd triode Q3, the first resistance R1 and the second triode Q2 are just equivalent to a constant-current circuit, and might as well be called that the electric capacity C that the first constant-current circuit 311, first constant-current circuit 311 flows to electric capacity C remains on steady state value, electric capacity C starts charging.In electric capacity C charging process, the voltage linear at electric capacity C two ends increases, and the voltage at electric capacity C two ends is after the 6th triode Q6 and the 7th triode Q7 amplifies, and outputs to the first electrode of the piezo-electric device of each printhead through output OUT.If Drive and Control Circuit provides constant low pressure to the second electrode of piezo-electric device, as ground voltage, then between the two poles of the earth of piezo-electric device, be formed with voltage difference, this voltage difference drives the movable end of piezo-electric device to liquid chamber top curved; Voltage difference is larger, and the degree that piezo-electric device is bending is larger; At the movable end of piezo-electric device in the process of liquid chamber top curved, the volume between piezo-electric device and liquid chamber top reduces, thus makes the ink in liquid chamber from going out ink passage ejection, realizes inkjet printing; Meanwhile, at the movable end of piezo-electric device in the process of liquid chamber top curved, the volume between bottom piezo-electric device and liquid chamber increases, thus the ink of outside print cartridge is injected in liquid chamber by ink-feed channel.
When the trailing edge of print signal Tc arrives, charge/discharge control circuit works, concrete: the 4th triode Q4 conducting, and electric capacity C is discharged by the second resistance R2, make the voltage VBE5 that the voltage at the second resistance R2 two ends equals between the base stage of the 5th triode Q5 and emitter stage, the 5th triode Q5 conducting.Like this, the 4th triode Q4, the second resistance R2 and the 5th triode Q5 are just equivalent to a constant-current circuit, might as well be called the second constant-current circuit 312; The electric current of releasing through the second constant-current circuit 312 from electric capacity C remains on steady state value, the voltage linear at electric capacity C two ends reduce and the voltage at electric capacity C two ends after the 6th triode Q6 and the 7th triode Q7 amplifies, output to the first electrode of the piezo-electric device of each printhead through output OUT.If Drive and Control Circuit provides constant low pressure to the second electrode of piezo-electric device, as ground voltage, then along with output OUT is to the continuous reduction of the voltage of the first electrode output of piezo-electric device, voltage difference between piezo-electric device the two poles of the earth is corresponding reduction also, the movable end of piezo-electric device moves along the bottom direction of liquid chamber, reduce its degree of crook gradually, until the voltage difference at piezo-electric device the two poles of the earth is zero, piezo-electric device replys initial natural extended configuration.
It is simple that the driving pulse that the present embodiment provides produces circuit structure, and cost is low, can provide public driving pulse voltage to the piezo-electric device of each printhead.After Drive and Control Circuit completes the addressing of piezo-electric device, target piezo-electric device can vibrate under the control of driving pulse voltage, drive liquid chamber periodically ink-jet and the blotting of target printhead, and then the continous inkjet of realize target printhead prints.
The circuit diagram of the driving control unit that Fig. 5 provides for the invention process three.As shown in Figure 5, driving control unit 322 comprises: the first address wire 3221, second address wire 3222, first address transistor 3223, second address transistor 3224, data transistor 3225, divider resistance 3226 and driving transistors 3227.Wherein:
First address wire 3221 is for transmitting piezo-electric device row address enable signal; Second address wire 3222 is for transmitting piezo-electric device column address enable signal; The signal that first address transistor 3223 inputs for responding the first address wire 3221; The signal that second address transistor 3224 inputs for responding the second address wire 3222; The signal that data transistor 3225 inputs for response data line 321.
Concrete, the grid of the first address transistor 3223 is connected with the first address wire 3221, and the grid of the second address transistor 3224 is connected with the second address wire 3222, and the grid of data transistor 3225 is connected with data wire 321; The drain-source path of the first address transistor 3223, the drain-source path of the second address transistor 3224 are in parallel with the drain-source path of data transistor 3225; Divider resistance 3226 be serially connected in the grid of driving transistors 3227 and Drive and Control Circuit for transmit reference voltage reference voltage line 324 between; The grid of driving transistors 3227 is also connected with the drain-source path parallel connection point of the first address transistor 3223, second address transistor 3224 and data transistor 3225; The drain-source path of driving transistors 3227 is serially connected between the second electrode of piezo-electric device 22 and ground signalling line.
The grid of driving transistors 3227 forms memory capacitance 3228, and this memory capacitance 3228 works as memory component, and memory node electric capacity 3228 is shown in broken lines, because it is a part for driving transistors 3227.Alternatively, also an independent component can be connected in series as this memory capacitance 3228 between the grid and ground signalling line of driving transistors 3227.
On the basis of technique scheme, drive if multiple printheads of Drive and Control Circuit to fluid jetting head carry out grouping, Drive and Control Circuit comprises the regional choice line driving enable signal for transfer printing head, then driving control unit also can comprise; Select transistor 3229.Transistor 3229 is selected to select the signal of line transmission for response region.Concrete, select the grid of transistor 3229 to be connected with regional choice line 323; Select the drain-source path of transistor 3229, between the drain-source path of the grid being serially connected in driving transistors 3227 and the first address transistor 3223, second address transistor 3224 and data transistor 3225 is in parallel.
The course of work of Drive and Control Circuit is as shown in Figure 5 as follows:
On reference voltage line 324, transmission is with reference to high pressure VH; Data wire 321 transmits print data signal; Regional choice line 323 corresponding with printing target area in Drive and Control Circuit transmits printhead enable signal; In multiple printhead, determine target printhead according to printing target area, and obtain the rank addresses of the piezo-electric device of this printhead; According to the rank addresses of this piezo-electric device, the first address wire 3221 and the second address wire 3222 of the driving control unit 322 that connect corresponding to this piezo-electric device in Drive and Control Circuit, respectively line of input address enable signal and column address enable signal.
When transmission represents the high-voltage signal of printhead enable signal on regional choice line 323, select transistor 3229 conducting, illustrate that printhead corresponding to current driving control unit is addressed printhead; When in the first address wire 3221, transmission represents the low-voltage signal of row address enable signal, the first address transistor 3223 ends; When in the second address wire 3222, transmission represents the low-voltage signal of column address enable signal, the second address transistor 3224 ends; When data wire 324 transmits the low-voltage signal representing print data signal, data transistor 3225 ends.When the first address transistor 3223 and the second address transistor 3224 all end, the piezo-electric device that current driving control unit correspondence connects is described, is addressed piezo-electric device; When data transistor cut-off, illustrate to there are data to be printed.
Under the prerequisite selecting transistor 3229 conducting, if the first address transistor 3224, second address transistor 3225 and data transistor 3226 all end, memory capacitance 5 is charged, driving transistors 3227 conducting, now, be serially connected in the drain-source path of the driving transistors 3227 between the second electrode of piezo-electric device 22 and ground signalling line, the second electrode be equivalent to for piezo-electric device 22 provides constant ground voltage, if driving pulse produces the first electrode output higher driving pulse voltage of output OUT to piezo-electric device of circuit, then can be poor at the two poles of the earth coating-forming voltage of this piezo-electric device 22, this voltage difference drives piezo-electric device 22 to vibrate, corresponding printhead carries out inkjet printing.
If the first address transistor 3224, at least one transistor turns in second address transistor 3225 and data transistor 3226, and/or select transistor 3229 to end, then memory capacitance 5 is discharged, driving transistors 3227 ends, now, be serially connected in the drain-source path of the driving transistors 3227 between the second electrode of piezo-electric device 22 and ground signalling line, be equivalent to for the second electrode of piezo-electric device 22 provides constant high-order voltage, if driving pulse produces the first electrode output higher driving pulse voltage of output OUT to piezo-electric device of circuit, then can not be poor at the two poles of the earth coating-forming voltage of this piezo-electric device 22, therefore this piezo-electric device 22 can not vibrate, corresponding printhead does not carry out inkjet printing.
As can be seen here, the Drive and Control Circuit structure that the present embodiment provides is simple and easy to realize; This circuit is only all correct and under there is the condition of print data in region addressing and piezo-electric device addressing, just can provide low pressure to the second electrode of piezo-electric device 22, produce together with the driving pulse voltage that circuit output end OUT exports with driving pulse, produce voltage difference at the two poles of the earth of piezo-electric device 22, thus drive corresponding piezo-electric device to vibrate; Otherwise piezo-electric device does not vibrate.Therefore, the present embodiment can accurately addressing, improves the accuracy of printing, and the grouping that the present embodiment carries out printhead by printhead enable signal controls, and therefore also helps the speed improving addressing, and then improves print speed.
The drived control method flow diagram of the fluid jetting head that Fig. 6 provides for the embodiment of the present invention four.Method as shown in Figure 6 comprises:
Step 61: the first electrode of the piezo-electric device of each printhead in multiple printheads of the matrix arrangement comprised to fluid jetting head, applies driving pulse respectively and produces the driving pulse voltage that circuit exports.
Step 62: transmit print data signal on the data wire of Drive and Control Circuit.
Step 63: determine target printhead according to the printing target area obtained in advance in described multiple printhead, and obtain the rank addresses of the target piezo-electric device of described target printhead; According to the rank addresses of described target piezo-electric device, the target drives control unit line of input column address enable signal that connect corresponding to described target piezo-electric device in described Drive and Control Circuit.
Step 64: described target drives control unit receives described print data signal by described data wire, and according to described rank addresses enable signal and described print data signal, determine the voltage of the second electrode being applied to described target piezo-electric device, to produce voltage difference at described target piezo-electric device the two poles of the earth.
Step 65: described target piezo-electric device vibrates under described voltage difference effect, outwards sprays ink by target liq chamber to control described target printhead or injects ink to described target liq chamber.
On the basis of technique scheme, in order to improve the flexibility of addressing speed and control, the drived control method of fluid jetting head also can comprise: target area corresponding with described printing target area in described Drive and Control Circuit is selected line transmits target printhead enable signal; Described target drives control unit selects line to receive described target printhead enable signal by described target area.Accordingly, above-mentioned steps 64 specifically can be: when described target drives control unit receives described target printhead enable signal, according to rank addresses enable signal and the described print data signal of described target piezo-electric device, determine the voltage of the second electrode being applied to described target piezo-electric device, to produce voltage difference at described target piezo-electric device the two poles of the earth.
The drived control method of the fluid jetting head that the present embodiment provides can according to printing target area, to multiple printhead procession two-dimension addressings of matrix arrangement, drive the piezo-electric device vibration of the target printhead be addressed to realize inkjet printing, thus provide attainable type of drive for print head matrix multiple in fluid jetting head arranges.Because the mode of the multiple print head matrix arrangements in fluid jetting head is relative to prior art linear pattern mode, the space in shower nozzle can be utilized more flexibly, make fluid jetting head structure more compact, be conducive to the miniaturization realizing fluid jetting head.The fluid jetting head structure of the drived control method that the present embodiment provides and drive circuit realize, and see the record of the corresponding embodiment of Fig. 1-Fig. 5, can not repeat them here.
Last it is noted that above embodiment is only in order to illustrate technical scheme of the present invention, be not intended to limit; Although with reference to previous embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the scope of various embodiments of the present invention technical scheme.