CN103034064B - Device for pre-aligning substrate and further detecting and adjusting substrate direction - Google Patents
Device for pre-aligning substrate and further detecting and adjusting substrate direction Download PDFInfo
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- CN103034064B CN103034064B CN201110298961.1A CN201110298961A CN103034064B CN 103034064 B CN103034064 B CN 103034064B CN 201110298961 A CN201110298961 A CN 201110298961A CN 103034064 B CN103034064 B CN 103034064B
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Abstract
The invention provides a substrate pre-aligning device of a lithography machine. The substrate pre-aligning device of the lithography machine comprises a pre-aligning table, multiple supporting elements and four groups of clamping positioning components, wherein the pre-aligning table is installed on a rotary table and used for pre-aligning the position of a glass substrate; the multiple supporting elements are used for supporting the glass substrate; the four groups of clamping positioning components are located on the periphery of the pre-aligning table and used for positioning the glass substrate. The substrate pre-aligning device provided by the invention not only can be simultaneously used for pre-aligning the substrate, detecting the detection and adjusting the detection, but also can simultaneously satisfy demands on more compact space and cost decrease; and therefore, the efficiency of a whole substrate transmission system is improved.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, particularly relate in a kind of lithographic equipment the device that can be used for substrate prealignment and orientation substrate detection and adjustment.
Background technology
In lithographic equipment, when glass substrate uploads in work stage, glass substrate has the ideal position of a demand.But in actual mechanical process, compared with ideal position, glass substrate has certain bias and deflection.Calculate eccentricity value and the deflection value of substrate, thus the position of adjustment substrate placing stage.In order to determine the position of glass substrate practical center, the Vision Builder for Automated Inspection CCD based on optical measurement is adopted to realize the location of glass substrate in mask aligner inside, as shown in Figure 2, namely CCD1 and CCD2 on substrate two limits is positioned at for determining the eccentricity value of glass substrate, utilize the deflection value determining glass substrate with CCD2 and CCD3 on one side simultaneously, after measurement, above-mentioned measured value is fed back to workpiece table system, compensated by workpiece table system, the bias of adjustment substrate and deflection.Visual range due to the Vision Builder for Automated Inspection CCD of optical measurement has certain demand, therefore needed to carry out preliminary prealignment operation to it before substrate uploads to work stage, there is directivity in substrate itself simultaneously, also needs the angle detecting carrying out substrate before substrate is uploaded.Also be use the Vision Builder for Automated Inspection CCD of optical measurement to detect the directionality problem of substrate in current substrate industry, need to carry out 180 ° of rotations by rotating machine arm to substrate after angle detecting simultaneously.
Summary of the invention
The object of the invention is to propose the simple device of a kind of structure, can simultaneously for substrate prealignment, angle detecting and direction adjustment.
The present invention proposes a kind of mask aligner substrate prealignment device, comprising: prealignment platform, is arranged on a rotating platform, carries out prealignment to the position of glass substrate; Multiple support component, support glass substrate; And four groups of clamping and positioning assemblies, be positioned at the surrounding of prealignment platform, glass substrate is positioned.
Wherein, described each clamping and positioning assembly comprises driving cylinder, connector, drive base plate, location bearing, location bearing fixed head, location bearing trimming bolt and bolt support seat, described location bearing is arranged on location bearing fixed head, described location bearing fixed head is fixed on by the location bearing trimming bolt on described bolt support seat and drives on base plate, described driving base plate is installed on the piston of driving cylinder by connector, and drive cylinder body to be fixed on prealignment platform, seesawing of location bearing is driven by driving seesawing of steam-cylinder piston, thus clamping glass substrate.
Wherein, location bearing fixed head is arranged and movement cylinder waist-shaped hole in the same way, regulate the front and back position of location bearing.
Wherein, the upper surface of support component is circular arc.
Wherein, also comprise orientation substrate checkout gear, comprise a correlation photoelectric sensor; Described correlation photoelectric sensor is arranged on prealignment platform, and its transmitting terminal is higher than glass substrate, and receiving terminal is lower than glass substrate; The launch spot irradiated substrate direction discernment region of correlation photoelectric sensor.
Wherein, also comprise orientation substrate adjusting device, by installing stepping motor under prealignment platform, driving prealignment platform to rotate, carrying out the adjustment of orientation substrate.
A kind of method of above-mentioned mask aligner substrate prealignment device being carried out to orientation substrate detection adjustment, wherein a pair adjacent edge of described substrate is provided with a direction discernment breach, all the other each pair of adjacent edges are provided with chamfering, comprise the following steps: according to the size range of the direction discernment breach on substrate and other chamferings, determine orientation substrate recognition detection region; Correlation photoelectric sensor is used to irradiate described surveyed area; If the receiving terminal end of correlation photoelectric sensor can receive project signal, then orientation substrate is correct; If the receiving terminal of correlation photoelectric sensor does not receive project signal, then rotate prealignment platform, repeat above-mentioned testing process, until the receiving terminal of correlation photoelectric sensor receives project signal.
Wherein, when the receiving terminal of described correlation photoelectric sensor does not receive project signal, 180 ° are carried out to prealignment platform and rotates and detect next time.
Wherein, when occurring that described chamfering maximum side length is greater than direction discernment breach length of short sides minimum value, described orientation substrate recognition detection region is equitant surface area between the region that the unlapped region of full-size of chamfering and the minimum dimension of direction discernment breach cover; When occurring that described chamfering length of side minimum value is greater than direction discernment breach length of short sides maximum, described orientation substrate recognition detection region is equitant surface area between the region that the unlapped region of full-size of direction discernment breach and the minimum dimension of chamfering cover.
Substrate prealignment device of the present invention can simultaneously for substrate prealignment, angle detecting and direction adjustment, simultaneously can the comparatively nervous and demand that reduces costs of meeting spatial, thus improves the efficiency of whole substrate transport system.
Accompanying drawing explanation
Can be further understood by following detailed Description Of The Invention and institute's accompanying drawings about the advantages and spirit of the present invention.
Fig. 1 is mask aligner glass substrate transmission system structural representation;
Fig. 2 is mask aligner glass substrate prealignment measuring principle figure;
Fig. 3 is glass substrate prealignment device structural representation of the present invention;
Fig. 4 is glass substrate prealignment device positioning component structural representation of the present invention;
Fig. 5 and Fig. 6 is glass substrate direction discernment notch size figure;
Fig. 7 and Fig. 8 is other chamfer dimesions of glass substrate figure;
Fig. 9 is glass substrate spot detection administrative division map.
Embodiment
Specific embodiments of the invention are described in detail below in conjunction with accompanying drawing.
As shown in Figure 1, the glass substrate transmission system of mask aligner is primarily of plate storehouse 4, prealignment platform 1, manipulator 3 three major part compositions.In work, glass substrate 2 takes out by manipulator 3 from plate storehouse 4, is placed on prealignment platform 1.For reaching the demand of complete machine for glass substrate 2 two prealignment visual fields, need the prealignment operation carrying out glass substrate 2, this part operation completes on prealignment platform 1.Operation is detected to glass substrate 2 travel direction, and by rotating platform 5 pairs of glass substrate 2 travel direction adjustment, glass substrate 2 is placed in work stage 6 by manipulator 3 more afterwards, and after waiting end exposure, glass substrate 2 is put back to plate storehouse 4 by manipulator 3 more simultaneously.
As shown in Figure 3 and Figure 4, Fig. 3 is glass substrate prealignment device structural representation of the present invention.Glass substrate 2 is positioned on multiple support component 100, and the upper end of support component 100 is designed to circular arc, can reduce the frictional force between substrate 2 and support component 100 in prealignment process.The distribution of support component 100 needs to leave enough spaces and ensures that mechanical palm fork can enter this segment space and carry out taking laying board, the complexity of pitching due to mechanical palm is higher, its manufacturing cost is higher, therefore on prealignment platform 1, be designed with substrate there is detecting sensor 30, situation can be there is by the substrate detected in real time on prealignment device, effectively can prevent from having manipulator under substrate existent condition to continue to put plate like this on prealignment device thus plate fork knocks and there is substrate and damage plate fork, and then damage manipulator.
As shown in Figure 4, the operation of substrate prealignment carries out substrate prealignment by the mechanical grip mode of four groups of clamping and positioning assemblies.Often organize clamping and positioning assembly by driving cylinder 80, connector 90, driving base plate 60, location bearing 15, location bearing fixed head 10, location bearing trimming bolt 20 and bolt support seat 50 to form, its motion principle is that location bearing 15 is arranged on fixed head 10, fixed head 10 is bolted on and drives on base plate 60, base plate 60 is driven to be installed on the piston of driving cylinder 80 by connector 90, and cylinder body is fixed on prealignment platform 1, therefore seesawing of location bearing 15 can be driven by seesawing of steam-cylinder piston.Substrate 2 is fixed to the position of needs by four direction clamping and positioning assembly respectively to intermediary movements.Arrange and movement cylinder waist-shaped hole in the same way on location bearing fixed head 10 in design, can before and after the front and back position of adjustment fixing plate 10, the namely front and back position of adjustment location bearing 15.In the design because the substrate of different batches has certain overall dimension tolerance, therefore the front and back regulated quantity of location bearing 15 can ensure cylinder clamping after location bearing 15 and substrate 2 edge leave certain gap, when after prealignment terminates, substrate got by manipulator substrate 2 can not and location bearing 15 between produce hard friction.
After carrying out prealignment operation, the situation that orientation substrate is not right when being placed in work stage by substrate 2, may be there is, therefore need to carry out orientation substrate detection operation.As viewed in figures 5-8, according to SEMI D12-95 standard, for 2.5G substrate, the profile of every block glass substrate there is the breach in an identifiable design direction.Be on the long side direction of substrate, the identification breach overall dimension deviation namely on 470mm length direction is 5 ± 1.5mm, and as shown in Figure 5, the breach overall dimension deviation on 370mm length direction is 2 ± 1.0mm.As shown in Figure 6, can find that from figure substrate breach long limit size range is 3.5-6.5mm, short side dimension scope is 1---3mm.As shown in Figure 7, the dimensional discrepancy of other three chamferings of glass substrate is 1.5 ± 1.0mm.As shown in Figure 8, can find that from figure substrate bevel edge size range is 0.5-2.5mm.
The region that one piece directly can be distinguished substrate identification breach and chamfering can be found that there is after overlap is carried out to aforesaid substrate notch size areal map and chamfer dimesion areal map, we design correlation photoelectric sensor 40 on prealignment platform to utilize this block region, as shown in Figure 4.Photoelectric sensor 40 is made up of two parts, and its transmitting terminal is arranged on the top higher than substrate 2 by support 70, and receiving terminal is arranged on the below lower than substrate 2 by support 70, the hot spot of transducer 40 drop on can distinguish substrate identification breach and chamfering region within.During as detected, the receiving terminal of photoelectric sensor 40 can receive this orientation substrate of signal instruction correctly, otherwise then judges that orientation substrate is incorrect, and its spot detection region as shown in Figure 9.Very simple structure so just can be utilized to detect the direction of substrate.When finding that orientation substrate is incorrect, need the adjustment its direction being carried out 180 °.In the present invention, a kind of simple direction adjustment device of design, is provided with stepping motor 110 in the below of prealignment platform 1 exactly, by motor, whole prealignment platform 1 is carried out to the rotation of 180 °.For ease of the control of its anglec of rotation, encoder (not shown) can be installed on stepping motor and come to detect in real time.
Above-mentioned detection substrate approach is common to the various substrate with direction discernment breach, is not only confined to 2.5G, may extend to the angle detecting of larger sized glass substrate.
It should be noted that, method of testing substrate of the present invention is not limited to size range and the distribution form of the substrate chamfering shown in above-mentioned Fig. 5-Fig. 9 and direction discernment breach, for the substrate of other dimensional form, those skilled in the art also according to the record of above-described embodiment, should be known according to corresponding size scope determination orientation substrate recognition detection region and carry out detecting the method adjusted easily.Such as, when occurring that described chamfering maximum side length is greater than direction discernment breach length of short sides minimum value, described orientation substrate recognition detection region is equitant surface area between the region that the unlapped region of full-size of chamfering and the minimum dimension of direction discernment breach cover; When occurring that described chamfering length of side minimum value is greater than direction discernment breach length of short sides maximum, described orientation substrate recognition detection region is equitant surface area between the region that the unlapped region of full-size of direction discernment breach and the minimum dimension of chamfering cover.Other forms of substrate also Using such method can determine orientation substrate recognition detection region.
Just preferred embodiment of the present invention described in this specification, above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (9)
1. a mask aligner substrate prealignment device, is characterized in that comprising:
Prealignment platform, is arranged on a rotating platform, carries out prealignment to the position of glass substrate;
Multiple support component, support glass substrate; And
Four groups of clamping and positioning assemblies, be positioned at the surrounding of prealignment platform, glass substrate is positioned, wherein, described each clamping and positioning assembly comprises driving cylinder, connector, drive base plate, location bearing, location bearing fixed head, location bearing trimming bolt and bolt support seat, described location bearing is arranged on location bearing fixed head, described location bearing fixed head is fixed on by the location bearing trimming bolt on described bolt support seat and drives on base plate, described driving base plate is installed on the piston of driving cylinder by connector, and drive cylinder body to be fixed on prealignment platform, location bearing motion is driven and clamping glass substrate by driving seesawing of steam-cylinder piston, described driving base plate and driving number of cylinders are four, the quantity of described location bearing is eight groups, each driving base plate comprises two groups of location bearings, each driving cylinder drives two groups of location bearing motions by described driving base plate simultaneously.
2. prealignment device as claimed in claim 1, wherein, location bearing fixed head is arranged and movement cylinder waist-shaped hole in the same way, regulates the front and back position of location bearing.
3. prealignment device as claimed in claim 1, wherein, the upper surface of support component is circular arc.
4. prealignment device as claimed in claim 1, wherein, also comprises orientation substrate checkout gear, comprises a correlation photoelectric sensor; Described correlation photoelectric sensor is arranged on prealignment platform, and its transmitting terminal is higher than glass substrate, and receiving terminal is lower than glass substrate; The launch spot irradiated substrate direction discernment region of correlation photoelectric sensor.
5. prealignment device as claimed in claim 1, wherein, also comprises orientation substrate adjusting device, by installing stepping motor under prealignment platform, driving prealignment platform to rotate, carrying out the adjustment of orientation substrate.
6. a mask aligner orientation substrate detects method of adjustment, adopt as the prealignment device as described in arbitrary in claim 1 to 5, wherein a pair adjacent edge of described substrate is provided with a direction discernment breach, all the other each pair of adjacent edges are provided with chamfering, it is characterized in that: according to the size range of the direction discernment breach on substrate and other chamferings, determine orientation substrate recognition detection region; Correlation photoelectric sensor is used to irradiate described surveyed area; If the receiving terminal of correlation photoelectric sensor can receive project signal, then orientation substrate is correct; If the receiving terminal of correlation photoelectric sensor does not receive project signal, then rotate prealignment platform, repeat above-mentioned testing process, until the receiving terminal of correlation photoelectric sensor receives project signal.
7. mask aligner orientation substrate as claimed in claim 6 detects method of adjustment, wherein, when the receiving terminal of described correlation photoelectric sensor does not receive project signal, carries out 180 ° rotate and detect next time prealignment platform.
8. mask aligner orientation substrate as claimed in claim 6 detects method of adjustment, wherein, when occurring that described chamfering maximum side length is greater than direction discernment breach length of short sides minimum value, described orientation substrate recognition detection region is equitant surface area between the region that the unlapped region of full-size of chamfering and the minimum dimension of direction discernment breach cover.
9. mask aligner orientation substrate as claimed in claim 6 detects method of adjustment, wherein, when occurring that described chamfering length of side minimum value is greater than direction discernment breach length of short sides maximum, described orientation substrate recognition detection region is equitant surface area between the region that the unlapped region of full-size of direction discernment breach and the minimum dimension of chamfering cover.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110298961.1A CN103034064B (en) | 2011-09-29 | 2011-09-29 | Device for pre-aligning substrate and further detecting and adjusting substrate direction |
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| CN201110298961.1A CN103034064B (en) | 2011-09-29 | 2011-09-29 | Device for pre-aligning substrate and further detecting and adjusting substrate direction |
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| CN103034064A CN103034064A (en) | 2013-04-10 |
| CN103034064B true CN103034064B (en) | 2015-03-25 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103434841A (en) | 2013-07-16 | 2013-12-11 | 深圳市华星光电技术有限公司 | Glass substrate positioning device |
| CN106814550B (en) * | 2015-11-30 | 2018-08-24 | 上海微电子装备（集团）股份有限公司 | Work stage substrate delivery/reception device and pre-alignment method |
| CN110320686B (en) * | 2019-07-15 | 2023-07-25 | 中导光电设备股份有限公司 | Pre-alignment device of ULED screen substrate detection/measurement equipment and use method thereof |
| CN112577970A (en) * | 2019-09-30 | 2021-03-30 | 深圳中科飞测科技股份有限公司 | Detection method, alignment method of detection equipment and detection equipment |
| CN113695162B (en) * | 2021-07-29 | 2022-12-02 | 蚌埠高华电子股份有限公司 | Automatic dispensing integrated equipment for liquid crystal glass substrate and control method |
| CN116140778A (en) * | 2023-04-14 | 2023-05-23 | 宁波尚进自动化科技有限公司 | Bonding welding method and judging method |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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