CN103033537A - Preparation method of gas sensor sensitive film based on flexible substrate - Google Patents
Preparation method of gas sensor sensitive film based on flexible substrate Download PDFInfo
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- CN103033537A CN103033537A CN2012105583695A CN201210558369A CN103033537A CN 103033537 A CN103033537 A CN 103033537A CN 2012105583695 A CN2012105583695 A CN 2012105583695A CN 201210558369 A CN201210558369 A CN 201210558369A CN 103033537 A CN103033537 A CN 103033537A
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- 239000000758 substrate Substances 0.000 title claims abstract description 69
- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229920000301 poly(3-hexylthiophene-2,5-diyl) polymer Polymers 0.000 claims abstract description 19
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 18
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 18
- 238000000151 deposition Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 10
- 239000011248 coating agent Substances 0.000 claims abstract description 6
- 238000000576 coating method Methods 0.000 claims abstract description 6
- 238000001259 photo etching Methods 0.000 claims abstract description 6
- 239000012528 membrane Substances 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 9
- 239000002019 doping agent Substances 0.000 claims description 9
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 claims description 8
- 238000003618 dip coating Methods 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 239000012855 volatile organic compound Substances 0.000 abstract description 6
- 239000010408 film Substances 0.000 abstract 2
- 238000004140 cleaning Methods 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 12
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- -1 dip-coating Chemical compound 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009459 flexible packaging Methods 0.000 description 1
- 235000021393 food security Nutrition 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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Abstract
The invention discloses a preparation method of a gas sensor sensitive film based on a flexible substrate, which comprises the following steps: selecting a flexible substrate and cleaning the flexible substrate; coating a layer of photoresist on the surface of the flexible substrate, carrying out photoetching development on the photoresist, and forming an electrode pattern on the surface of the flexible substrate; sequentially depositing Cr and Au on a flexible substrate with photoresist and electrode patterns on the surface; stripping the photoresist on the flexible substrate and Cr and Au deposited on the photoresist to form an Au electrode; and depositing a rr-P3HT thin film doped with carbon nanotubes on the flexible substrate on which the Au electrode is formed. The gas sensor sensitive film capable of detecting the volatile organic compounds generated by food deterioration is prepared by the method.
Description
Technical field
The present invention relates to the gas sensor technical field, a kind of preparation method of the gas sensor sensitive membrane based on flexible substrate particularly, the volatile organic compounds that produces for detection of food spoilage is such as alcohol gas.
Background technology
Along with the development in epoch, the progress of science and technology and human lives's needs, in recent years, the development of sensor was faced with huge challenge, produce a kind of light, cheapness, but the sensor that large tracts of land is made is imperative.Based on the gas sensor of flexible substrate owing to the various advantages such as its pliability make a lot of problems obtain the improvement of essence, thereby make it have more wide application prospect.
At present, food security becomes the focal issue that the people of the whole society pay close attention to, and becomes a very important task thereby prepare a kind of gas sensor that detects the volatile organic compounds of food spoilage generation.
The rr-P3HT film of the doped carbon nanometer pipe that employing is modified through lauryl amine is as the sensitive membrane material, and the carbon nano-tube after lauryl amine is modified can well be dissolved in the organic solvent with rr-P3HT, so that the doping better effects if, also so that more effective to the detection of gas.
Summary of the invention
The technical matters that (one) will solve
In view of this, fundamental purpose of the present invention is to provide a kind of preparation method of the gas sensor sensitive membrane based on flexible substrate, to prepare the gas sensor sensitive membrane that can detect the volatile organic compounds that food spoilage produces.
(2) technical scheme
For achieving the above object, the invention provides a kind of preparation method of the gas sensor sensitive membrane based on flexible substrate, comprising:
Choose a flexible substrate, and clean this flexible substrate;
At this flexible substrate surface coating one deck photoresist, this photoresist is carried out photoetching development, form electrode pattern on this flexible substrate surface;
Have on the surface on the flexible substrate of photoresist and electrode pattern and deposit successively Cr and Au;
Peel off the Cr and the Au that deposit on photoresist on this flexible substrate and the photoresist, form the Au electrode; And
At the rr-P3HT film that forms dopant deposition carbon nano-tube on this flexible substrate of Au electrode.
In the such scheme, in the described step of choosing a flexible substrate, described flexible substrate is PI or PET.
In the such scheme, described in the step of this flexible substrate surface coating one deck photoresist, described photoresist is 9920 positive glue.
In the such scheme, describedly depositing successively in the step of Cr and Au on the surface has the flexible substrate of photoresist and electrode pattern, is to adopt electron beam evaporation technique to have on the surface on the flexible substrate of photoresist and electrode pattern to deposit successively Cr and Au.
In the such scheme, described in the step of the rr-P3HT film of dopant deposition carbon nano-tube, is to adopt dip-coating, spray printing or method for printing screen at the rr-P3HT film that forms dopant deposition carbon nano-tube on this flexible substrate of Au electrode on forming this flexible substrate of Au electrode.The carbon nano-tube of described doping is the carbon nano-tube of modifying through lauryl amine.
(3) beneficial effect
Characteristics of the present invention are by the rr-P3HT film of deposit one deck doped carbon nanometer pipe on the Au electrode (modifying through lauryl amine), detect at normal temperatures the volatile organic compounds that food spoilage produces with this.Modification by lauryl amine, improved the dispersiveness of carbon nano-tube in organic solvent, and can evenly mix with rr-P3HT, the volatile organic compounds that at normal temperatures food spoilage is produced has good sensitivity, and can be applicable to the detection of flexible packaging food.
Description of drawings
Fig. 1 is preparation method's process flow diagram of the gas sensor sensitive membrane based on flexible substrate provided by the invention.
Fig. 2 is the synoptic diagram according to the flexible substrate of choosing of the embodiment of the invention.
Fig. 3 carries out synoptic diagram behind the photoetching development according to the embodiment of the invention to the photoresist on the flexible substrate.
Fig. 4 be according to the embodiment of the invention on the surface has the flexible substrate of photoresist and electrode pattern, deposit successively Cr and Au after synoptic diagram.
Fig. 5 is the synoptic diagram that forms the Au electrode behind the Cr that deposits on photoresist on this flexible substrate and the photoresist according to peeling off of the embodiment of the invention and the Au.
Fig. 6 is the synoptic diagram behind the rr-P3HT film of dopant deposition carbon nano-tube on the flexible substrate according to the embodiment of the invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Fig. 1 is preparation method's process flow diagram of the gas sensor sensitive membrane based on flexible substrate provided by the invention, and the method may further comprise the steps:
Step 1: choose a flexible substrate, and clean this flexible substrate; Wherein, described flexible substrate is the flexible substrate such as PI or PET, and is light, cheapness, and pliable and tough, flexible, its purpose is to reduce cost, is convenient to use.Fig. 2 shows the synoptic diagram according to the flexible substrate of choosing of the embodiment of the invention.
Step 2: at this flexible substrate surface coating one deck photoresist, this photoresist is carried out photoetching development, form electrode pattern on this flexible substrate surface; Wherein, described photoresist is 9920 positive glue.Fig. 3 shows and according to the embodiment of the invention photoresist on the flexible substrate is carried out synoptic diagram behind the photoetching development.
Step 3: adopt electron beam evaporation technique to have on the surface on the flexible substrate of photoresist and electrode pattern and deposit successively Cr and Au.Fig. 4 show according to the embodiment of the invention on the surface has the flexible substrate of photoresist and electrode pattern, deposit successively Cr and Au after synoptic diagram.
Step 4: peel off the Cr and the Au that deposit on photoresist on this flexible substrate and the photoresist, form the Au electrode; Fig. 5 shows the synoptic diagram that forms the Au electrode behind the Cr that deposits on photoresist on this flexible substrate and the photoresist according to peeling off of the embodiment of the invention and the Au.
Step 5: the rr-P3HT film that adopts the method dopant deposition carbon nano-tube such as dip-coating, spray printing or serigraphy in this flexible substrate that forms the Au electrode, wherein, this carbon nano-tube is the carbon nano-tube of modifying through lauryl amine, its purpose is and can be dissolved in the organic solvent together with rr-P3HT, thereby better mixes with rr-P3HT; Described rr-P3HT film is the rr-P3HT of doped carbon nanometer pipe (modifying through lauryl amine), and its purpose is to improve rr-P3HT to the response of tested gas by mixing.Fig. 6 shows the synoptic diagram behind the rr-P3HT film of dopant deposition carbon nano-tube on the flexible substrate according to the embodiment of the invention.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. the preparation method based on the gas sensor sensitive membrane of flexible substrate is characterized in that, comprising:
Choose a flexible substrate, and clean this flexible substrate;
At this flexible substrate surface coating one deck photoresist, this photoresist is carried out photoetching development, form electrode pattern on this flexible substrate surface;
Have on the surface on the flexible substrate of photoresist and electrode pattern and deposit successively Cr and Au;
Peel off the Cr and the Au that deposit on photoresist on this flexible substrate and the photoresist, form the Au electrode; And
At the rr-P3HT film that forms dopant deposition carbon nano-tube on this flexible substrate of Au electrode.
2. the preparation method based on the gas sensor sensitive membrane of flexible substrate described in according to claim 1 is characterized in that, in the described step of choosing a flexible substrate, described flexible substrate is PI or PET.
3. the preparation method based on the gas sensor sensitive membrane of flexible substrate described in according to claim 1 is characterized in that described in the step of this flexible substrate surface coating one deck photoresist, described photoresist is 9920 positive glue.
4. the preparation method based on the gas sensor sensitive membrane of flexible substrate described in according to claim 1, it is characterized in that, describedly depositing successively in the step of Cr and Au on the surface has the flexible substrate of photoresist and electrode pattern, is to adopt electron beam evaporation technique to have on the surface on the flexible substrate of photoresist and electrode pattern to deposit successively Cr and Au.
5. the preparation method based on the gas sensor sensitive membrane of flexible substrate described in according to claim 1, it is characterized in that, described in the step of the rr-P3HT film of dopant deposition carbon nano-tube, is to adopt dip-coating, spray printing or method for printing screen at the rr-P3HT film that forms dopant deposition carbon nano-tube on this flexible substrate of Au electrode on forming this flexible substrate of Au electrode.
6. the preparation method based on the gas sensor sensitive membrane of flexible substrate described in according to claim 5 is characterized in that the carbon nano-tube of described doping is the carbon nano-tube of modifying through lauryl amine.
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| CN2012105583695A CN103033537A (en) | 2012-12-20 | 2012-12-20 | Preparation method of gas sensor sensitive film based on flexible substrate |
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| CN2012105583695A CN103033537A (en) | 2012-12-20 | 2012-12-20 | Preparation method of gas sensor sensitive film based on flexible substrate |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529105A (en) * | 2013-11-06 | 2014-01-22 | 惠州市富济电子材料有限公司 | Tube-type oxygen sensor testing electrodes and protective layers |
| CN104865293A (en) * | 2015-05-19 | 2015-08-26 | 清华大学 | Flexible gas sensor based on three-dimensional net structured sensitive film and preparation method of flexible gas sensor |
| CN105548318A (en) * | 2016-01-25 | 2016-05-04 | 深圳大学 | Wearable electrochemical sensor electrode and wearable electrochemical sensor |
| CN106290488A (en) * | 2016-09-18 | 2017-01-04 | 江南大学 | Amino-functionalized carbon nanotube resistance type formaldehyde gas sensor and preparation method thereof |
| CN106814110A (en) * | 2017-01-05 | 2017-06-09 | 华中科技大学 | A kind of stretchable semiconductor resistance-type flexible gas sensor and preparation method thereof |
| CN107132253A (en) * | 2017-06-15 | 2017-09-05 | 上海因士环保科技有限公司 | The preparation method and gas sensor of a kind of air-sensitive film based on flexible substrate |
| CN109580723A (en) * | 2018-10-23 | 2019-04-05 | 华中科技大学 | A kind of preparation method and product of flexible humidity sensor |
| CN109694492A (en) * | 2019-02-19 | 2019-04-30 | 李德文 | A kind of Cr layer that can improve PI flexible substrate Yu Au electrode adhesion performance |
| CN111370445A (en) * | 2018-12-26 | 2020-07-03 | 陕西坤同半导体科技有限公司 | Flexible display screen and manufacturing method and application thereof |
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| US20080095922A1 (en) * | 2006-07-31 | 2008-04-24 | Samsung Electronics Co., Ltd. | Method of manufacturing gas sensor using metal ligand and carbon nanotubes |
| CN101298510A (en) * | 2008-06-19 | 2008-11-05 | 同济大学 | Polythiofuran-carbon nanotube composite photosensitive film material and preparation thereof |
| CN102798648A (en) * | 2012-07-30 | 2012-11-28 | 中国科学院微电子研究所 | Preparation method of sensor film material based on flexible substrate |
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2012
- 2012-12-20 CN CN2012105583695A patent/CN103033537A/en active Pending
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| US20080095922A1 (en) * | 2006-07-31 | 2008-04-24 | Samsung Electronics Co., Ltd. | Method of manufacturing gas sensor using metal ligand and carbon nanotubes |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529105A (en) * | 2013-11-06 | 2014-01-22 | 惠州市富济电子材料有限公司 | Tube-type oxygen sensor testing electrodes and protective layers |
| CN103529105B (en) * | 2013-11-06 | 2015-09-02 | 惠州市富济电子材料有限公司 | A kind of tubular oxygen sensor test electrode and protective seam |
| CN104865293A (en) * | 2015-05-19 | 2015-08-26 | 清华大学 | Flexible gas sensor based on three-dimensional net structured sensitive film and preparation method of flexible gas sensor |
| CN105548318A (en) * | 2016-01-25 | 2016-05-04 | 深圳大学 | Wearable electrochemical sensor electrode and wearable electrochemical sensor |
| CN106290488B (en) * | 2016-09-18 | 2020-01-10 | 江南大学 | Amino-functionalized carbon nanotube resistance type formaldehyde gas sensor and preparation method thereof |
| CN106290488A (en) * | 2016-09-18 | 2017-01-04 | 江南大学 | Amino-functionalized carbon nanotube resistance type formaldehyde gas sensor and preparation method thereof |
| CN106814110A (en) * | 2017-01-05 | 2017-06-09 | 华中科技大学 | A kind of stretchable semiconductor resistance-type flexible gas sensor and preparation method thereof |
| CN106814110B (en) * | 2017-01-05 | 2020-11-06 | 华中科技大学 | Stretchable semiconductor resistance type flexible gas sensor and preparation method thereof |
| CN107132253A (en) * | 2017-06-15 | 2017-09-05 | 上海因士环保科技有限公司 | The preparation method and gas sensor of a kind of air-sensitive film based on flexible substrate |
| CN109580723A (en) * | 2018-10-23 | 2019-04-05 | 华中科技大学 | A kind of preparation method and product of flexible humidity sensor |
| CN109580723B (en) * | 2018-10-23 | 2020-10-02 | 华中科技大学 | Preparation method of flexible humidity sensor and product |
| CN111370445A (en) * | 2018-12-26 | 2020-07-03 | 陕西坤同半导体科技有限公司 | Flexible display screen and manufacturing method and application thereof |
| CN109694492A (en) * | 2019-02-19 | 2019-04-30 | 李德文 | A kind of Cr layer that can improve PI flexible substrate Yu Au electrode adhesion performance |
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Application publication date: 20130410 |