CN103033143B - Optical detector - Google Patents
Optical detector Download PDFInfo
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- CN103033143B CN103033143B CN201210366993.5A CN201210366993A CN103033143B CN 103033143 B CN103033143 B CN 103033143B CN 201210366993 A CN201210366993 A CN 201210366993A CN 103033143 B CN103033143 B CN 103033143B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/10—Image acquisition
- G06V10/12—Details of acquisition arrangements; Constructional details thereof
- G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
- G06V10/145—Illumination specially adapted for pattern recognition, e.g. using gratings
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- General Physics & Mathematics (AREA)
- Artificial Intelligence (AREA)
- Multimedia (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Laser Beam Processing (AREA)
Abstract
A kind of optical detector, comprises: LASER Light Source, Emission Lasers; Collimation lens, converts the laser launched from described LASER Light Source to directional light; Light deformation component, allows described directional light changes shape to be line laser; Radiation component, adopts the selected portions of described line laser to irradiate object to be measured; Image pick-uping part, based on the laser reflected from described body surface, pick up the picture of described object, this object is irradiated by the selected portions of described line laser; And controller, the radiation of described line laser is controlled by described radiation component.Described line laser is made up of multiple part, and the plurality of part comprises an end portion and other end part; And described controller controls described radiation component, make described radiation component adopt the part of described line laser, sequentially irradiate described object from a described end portion to other end part.
Description
Technical field
The present invention relates to a kind of optical detector (probe).
Background technology
Known non-contact optical detector (Japanese Translation such as seeing PCT international application No.2009-534969 is announced) traditionally.This non-contact optical detector uses laser to irradiate object (hereinafter referred to as workpiece) to be measured, detects by the light of the surface reflection of workpiece, and obtains each position coordinates put of workpiece.
Known line optics detector 100 as shown in Figure 10, as the example of non-contact optical detector.Line optics detector 100 uses beam expander 103, and this beam expander 103 allows laser changes shape to be light L1, and light L1 is (hereinafter referred to as the line laser) of line in shape.In online optical detector 100, collimation lens 102 is used to convert the laser launched by LASER Light Source 101 to directional light.Then, beam expander 103 allows directional light changes shape to be line laser L1.Therefore, workpiece W is irradiated by line laser L1.The line laser L1 being projected to workpiece W reflects on the surface of workpiece W, to be incident on image pick-up element (not shown).Like this, line optics detector 100 can the shape (form) of " once " measuring workpieces W.
Known flying spot as shown in Figure 11 (flyingspot) optical detector 200, another example as non-contact optical detector.Flying spot optical detector 200 uses and rotates galvanometer (galvanometer) catoptron 203.In flying spot optical detector 200, the laser launched by LASER Light Source 201 is incident on galvanometer mirror 203 by catoptron 202.Then, the light L2(reflected from galvanometer mirror 203 is hereinafter referred to as a laser (pointlaserlight)) discrete point irradiate workpiece W.Galvanometer mirror 203 is driven to rotate about incident light.Point laser L2 scans the surface of workpiece W, makes invocation point laser L2 draw the line of the rotary actuation according to galvanometer mirror 203.The point laser L2 having scanned the surface of workpiece W is reflected, to be incident on image pick-up element (not shown) on workpiece.Like this, flying spot optical detector 200 can the shape of " sequentially (insequence) " measuring workpieces W.
Known rotating mirror optical detector 300 as shown in Figure 12, as an example again of non-contact optical detector.Rotating mirror optical detector 300 uses reflecting rotating multisurface mirror 303.In rotating mirror optical detector 300, the laser launched by LASER Light Source 301 is incident on polygonal mirror 303 by catoptron 302.Then, the light L3(reflected from polygonal mirror 303 is hereinafter referred to as a laser) discrete point irradiate workpiece W.Polygonal mirror 303 is driven to rotate about incident light.Point laser L3 scans the surface of workpiece W, makes invocation point laser L3 draw the line of the rotary actuation according to polygonal mirror 303.The point laser L3 having scanned the surface of workpiece W is reflected, to be incident on image pick-up element (not shown) on workpiece.Like this, rotating mirror optical detector 300 can the shape of " sequentially " measuring workpieces W, is similar to flying spot optical detector 200.
Usually, as measuring principle, light cutting method (light-sectionmethod) is for non-contact optical detector.Such as, as shown in figure 13 and figure 14, when line optics detector 100 is with the shape of light cutting method measuring workpieces W, the surface of workpiece W is irradiated by line laser L1, and this line laser L1 comes from LASER Light Source 101 by optical system (unshowned collimation lens and beam expander).Therefore, the picture being picked up the region be irradiated with a laser by image pick-up element 104 is only needed, with the shape of measuring workpieces W.Compare with rotating mirror optical detector 300 with flying spot optical detector 200, the line optics detector 100 in optical system without travel mechanism is easier to safeguard.
Especially, when utilize from traditional optical detector laser irradiate there is the workpiece of minute surface or corner (corner) time, sometimes obtain due to multiple reflections mistake shape (falseshape) (ghost image).
In the situation of online optical detector 100, as shown in figs. 15 and 16, with wire shaped constantly projecting laser, and once obtain the shape of workpiece W.Thus when forming ghost image due to multiple reflections, true picture (realimage) R and ghost image (virtualimage) V can not be distinguished from each other out, and this is inappropriate.
In this, flying spot optical detector 200 and rotating mirror optical detector 300 irradiate workpiece W, make invocation point laser draw line on workpiece, sequentially to obtain the shape of workpiece W.Therefore, flying spot optical detector 200 and rotating mirror optical detector 300 can relatively easily identify the ghost image formed due to multiple reflections.
But, compared with line optics detector 100, flying spot optical detector 200 and rotating mirror optical detector 300 structurally more complicated, this is because detector 200 and 300 all needs travel mechanism separately in optical system, as mentioned above.Therefore, the maintenance of detector 200 and 300 is pretty troublesome.
In addition, when needing to utilize motor etc. to control the flying spot optical detector 200 of the operating angle of galvanometer mirrors 203, except non-precision controls the operating angle of galvanometer mirror 203, otherwise can not the shape of measuring workpieces W exactly.In addition, because galvanometer mirror 203 is travel mechanism, so its performance degradation after long-time use.Therefore galvanometer mirror 203 must be safeguarded.
In addition, when rotating mirror optical detector 300, be necessary contour accuracy (profileaccuracy) (particularly the flatness) of improving polygonal mirror 303 as much as possible, with the shape of Measurement accuracy workpiece W.This is because measuring accuracy depends on the contour accuracy of polygonal mirror 303.Because polygonal mirror 303 is polyhedral catoptron, unless so the surface of polygonal mirror 303 has uniform surface accuracy, otherwise can not the shape of Measurement accuracy workpiece W.
Summary of the invention
The invention provides a kind of optical detector, this optical detector sequentially can measure the shape of object, and not be used in optical system and assemble travel mechanism.
According to an aspect of the present invention, provide a kind of optical detector, comprise: the LASER Light Source of Emission Lasers, the laser launched by LASER Light Source is converted to the collimation lens of directional light, permission directional light changes the light deformation component that shape is line laser, the selected portions of line laser is adopted to irradiate the radiation component of object to be measured, based on the image pick-uping part of the picture of the laser pickup object of the surface reflection irradiated by the selected portions of line laser from object, with the controller of the radiation by radiation component control line laser, wherein line laser is made up of multiple part, the plurality of part comprises an end portion and other end part, and controller controls radiation component, described radiation component is made to adopt the part of line laser, from a described end portion to other end part sequentially irradiating object.
Accompanying drawing explanation
By the detailed description hereinafter provided and the accompanying drawing only provided in a schematic manner, the above and other object of the present invention, advantage and characteristic will become and more can be understood fully, and therefore not mean that it is the description of limitation of the present invention.Wherein:
Fig. 1 is the explanatory view of the structure of optical detector according to the first embodiment;
Fig. 2 is the explanatory view of the optical system in the optical detector of the first embodiment;
Fig. 3 illustrates that object to be measured is irradiated by a laser to make invocation point laser on object, draw the explanatory view of the state of line;
Fig. 4 illustrates the explanatory view of closing the state that light that the micro-reflector relating to the formation of ghost image makes to reflect on the micro-reflector of closing is not propagated towards object to be measured;
Fig. 5 shows the example of the shape of the object to be measured obtained by the optical detector of Fig. 4;
Fig. 6 is the explanatory view of the structure of optical detector according to the second embodiment;
Fig. 7 is the explanatory view of the optical system in the optical detector of the second embodiment;
Fig. 8 illustrates that object to be measured is irradiated by a laser to make invocation point laser on object, draw the explanatory view of the state of line;
Fig. 9 illustrates that the unit (cell) of closing and relating to the formation of ghost image is to stop light at the explanatory view of the state of the unit place transmission of closing;
Figure 10 is the explanatory view of the optical system in traditional wire optical detector;
Figure 11 is the explanatory view of the optical system in traditional flying spot optical detector;
Figure 12 is the explanatory view of the optical system in traditional rotating mirror optical detector;
Figure 13 A illustrates the front view using the body form of traditional wire optical detector to measure;
Figure 13 B illustrates the side view using the body form of traditional wire optical detector to measure;
Figure 14 shows the example of the shape of the object to be measured obtained by the optical detector of Figure 13;
Figure 15 is the side view of the state that the multiple reflections occurred when using traditional wire optical detector to measure the shape of object is shown; And
The shape that Figure 16 shows object to be measured and the example of ghost image obtained by the optical detector of Figure 15.
Embodiment
With reference to accompanying drawing, embodiment of the present invention will be described.
(the first embodiment)
Be non-contact optical detector according to the optical detector 1A of the first embodiment, the surface of its scanning workpiece W also obtains the position coordinates of the every bit of workpiece W.As shown in fig. 1, optical detector 1A comprises optics 10A, image pick-uping part 20A and controller 30A.
As shown in Figures 1 and 2, optics 10A comprises LASER Light Source 11, collimation lens 12, beam expander 13 and DMD(Digital Micromirror Device) 15.
LASER Light Source 11 is such as by LD(laser diode) form, and produce and Emission Lasers light source.Laser is emitted to collimation lens 12 by LASER Light Source 11, and this collimation lens is positioned at the right of LASER Light Source 11 in the horizontal direction.
Light from LASER Light Source 11 incidence is converted to directional light by collimation lens 12, and allows parallel light propagation to beam expander 13, and this beam expander is positioned at the right of collimation lens 12 in the horizontal direction.
Beam expander 13 is such as excellent lens or post lens.The beam expander 13 serving as light deformation component allows the directional light changes shape of self-focus lens 12 to be line laser.When directional light passes beam expander 13 in the horizontal direction from the left side, directional light becomes the light beam (i.e. line laser) of wire.Then, line laser is transmitted to DMD15, and this DMD15 is positioned at the right of beam expander 13 in the horizontal direction.
DMD15 comprises IC(integrated circuit) the optical device of about rectangle, it has with the hundreds of several thousand of lattice-shaped arranged in form to millions of micro-reflectors.DMD15 reflection comes from the line laser of beam expander 13.Each micro-reflector corresponds to a pixel of display device.The controller 30A of description is performed On/Off (ON/OFF) by the inclination controlling micro-reflector below to control.Between line laser, the light that the micro-reflector of opening reflects propagates to irradiate the workpiece W being positioned at below downwards.On the other hand, the light that micro-reflector in off position reflects is not transmitted to workpiece W, and is transmitted to the absorber in detector.Each micro-reflector is separately driven, and therefore for each micro-reflector, namely can control the reflection of light for each display pixel.Therefore, DMD15 serves as light-reflecting components, the selected portions of its reflected ray laser.In addition, LASER Light Source 11, collimation lens 12, beam expander 13 and DMD15 are placed on same optical axis.
Image pick-uping part 20A comprises optical receiver lens 21 and imageing sensor 22.Optical receiver lens 21 transmission is from the laser of the surface reflection of workpiece W.The laser being transmitted through optical receiver lens 21 is incident on imageing sensor 22, and this imageing sensor 22 is positioned on same optical axis with optical receiver lens 21.
Imageing sensor 22 is image pick-up element, this image pick-up element based on the picture of the laser pickup workpiece W of the surface reflection from workpiece W, to obtain the coordinate figure of the every bit of workpiece W.Imageing sensor 22 exports the coordinate figure of acquisition to controller 30A.Therefore, imageing sensor 22 serves as image pick-uping part, and it is based on reflection on DMD15 and the picture of the laser that reflects on the surface of workpiece W further and picking up work piece W.
Controller 30A comprises CPU(CPU (central processing unit)), RAM(random access memory), ROM(ROM (read-only memory)) etc., and be connected to optics 10A and image pick-uping part 20A.
CPU reads the various handling procedures be stored in ROM, with by these program developments in RAM, and with launch program cooperative perform various types of process.Therefore, CPU performs the overall control of optical detector 1A.
The handling procedure that RAM launches to be performed by CPU to the program storage area in RAM, and stores input data and result data in data storage areas, and these result data are produced by the execution of program.
The system program that the ROM storage be made up of nonvolatile semiconductor memory will be performed by CPU, the various handling procedures that will perform in system program, the data that will use when various handling procedure is performed and the data of various results obtained by the algorithm process of CPU.Program is stored in ROM with the form of computer readable program code.
For each micro-reflector, the inclination of each micro-reflector of controller 30A control DMD15, with the reflection of control line laser.Particularly, when line laser is projected on some micro-reflectors, controller 30A from one end of micro-reflector to the other end sequentially release line laser projection micro-reflector thereon one by one, and closes the micro-reflector except the micro-reflector just opened.Therefore, the part forming line laser by from an end portion of line laser to the order of other end part sequentially to lower propagation, that is, propagate on the direction of workpiece W.
Based on the picture of the workpiece W picked up by imageing sensor 22, controller 30A determines that whether ghost image exists.If determine that ghost image exists, then controller 30A controls to cause the line laser part of the formation of ghost image not propagated towards workpiece W.
In optical detector 1A, pass sequentially through the shape of imageing sensor 22 picking up work piece W continuously.Therefore, the presence or absence of ghost image can be determined as follows: when the picture position of picking up changes predetermined threshold or more from the picture position of last pickup, determine that ghost image exists.
Below, with reference to the operation that figure 3 to Fig. 5 will describe according to the optical detector 1A of the first embodiment.
First, from LASER Light Source 11 Emission Lasers of optical detector 1A.The laser launched from LASER Light Source 11 marches to beam expander 13 by collimation lens 12.Beam expander 13 allows the light changes shape coming from collimation lens 12 to be line laser.
Then, line laser is transmitted to DMD15.At DMD15 place, for the reflection of each micro-reflector control line laser.
Concrete, when projecting when line laser on some micro-reflectors in DMD15, controller 30A from one end of micro-reflector to the other end sequentially micro-reflector of release line laser projection it one by one, and closes the micro-reflector except the micro-reflector be just opened.That is, the number being in the micro-reflector of opening is always merely one, and the light only reflected on the micro-reflector of opening is propagated towards workpiece W.Therefore, workpiece W is always irradiated by a laser.
From one of micro-reflector end to the other end sequentially micro-reflector of release line laser projection it one by one.Therefore, irradiated workpiece W with a laser, made invocation point laser draw line (see figure 3) thereon.
Therefore, optical detector 1A can the shape of sequentially measuring workpieces W, and not be used in optical system and assemble travel mechanism, such as galvanometer mirror or polygonal mirror.Thus, there is no need the precision safeguarding travel mechanism and adjustment travel mechanism.In addition, even if when forming ghost image due to multiple reflections, still easily ghost image can be identified.
Be irradiated to the surface reflection of the light on workpiece W at workpiece W in the above described manner, to be incided on imageing sensor 22 by optical receiver lens 21.Therefore, can the image of picking up work piece W.Then, based on the picture of the workpiece W picked up by imageing sensor 22, controller 30A determines the presence or absence of ghost image.Because optical detector 1A irradiates workpiece W, make the setting-out on the surface of workpiece W of invocation point laser, even if so when forming ghost image due to multiple reflections, still easily ghost image can be identified.In addition, the light of the formation causing ghost image can be identified in line laser.
When determining that ghost image exists, controller 30A prevents the line laser part of the formation causing ghost image from propagating towards workpiece W, as shown in Figure 4.That is, among the micro-reflector of the DMD15 of online laser projection on it, the micro-reflector relating to the formation of ghost image is closed, and the light preventing from micro-reflector in off position reflects is propagated towards workpiece W.Thus, the formation (see figure 5) of ghost image can be prevented.
As mentioned above, the optical detector 1A of the first embodiment comprises the LASER Light Source 11 of Emission Lasers; The laser launched from LASER Light Source 11 is converted to the collimation lens 12 of directional light; Permission directional light changes shape is the beam expander 13 of line laser; The selected portions of line laser is adopted to irradiate the radiation component of workpiece W; Imageing sensor 22, when workpiece W is irradiated by the selected portions of line laser, imageing sensor 22 based on the laser reflected from body surface, the picture of picking up work piece W; And controller 30A, by the radiation of radiation component control line laser.Line laser is made up of multiple part (corresponding to each micro-reflector), and the plurality of part comprises an end portion and other end part (one end and the other end corresponding to micro-reflector); And controller 30A controls radiation component, make radiation component adopt the part of line laser, sequentially from an end portion to other end part (correspond to and sequentially open micro-reflector one by one) and irradiate workpiece W.
Therefore, optical detector 1A can the shape of sequentially measuring workpieces W, and not be used in optical system and assemble travel mechanism, such as galvanometer mirror or polygonal mirror.Thus, there is no need the precision safeguarding travel mechanism and adjustment travel mechanism.In addition, even if when forming ghost image due to multiple reflections, still ghost image can be identified easily.
Especially, according to the optical detector 1A of the first embodiment, radiation component is DMD15, and this DMD15 comprises multiple micro-reflector with lattice-shaped arranged in form and the selected portions of reflected ray laser.In addition, when line laser projects on some micro-reflectors, controller 30A from one end of micro-reflector to the other end sequentially micro-reflector of release line laser projection it, and closes the micro-reflector except the micro-reflector be just opened.Because DMD15 has good response to On/Off conversion, and there is high efficiency of light, so optical detector 1A performs radiation control by using this advantage of DMD15, which enhance the convenience (convenience) of optical detector 1A.
In addition, according to the optical detector 1A of the first embodiment, based on the picture of the workpiece W picked up by imageing sensor 22, whether controller 30A determines the existence of ghost image.If determine that ghost image exists, then controller 30A prevents from causing the line laser part of the formation of ghost image to propagate (not irradiating workpiece W) towards workpiece W.
Thus the formation of ghost image is prevented from, this causes efficient measurement.
(the second embodiment)
Be the surface of scanning workpiece W according to the optical detector 1 of the second embodiment and obtain the non-contact optical detector of the position coordinates of the every bit of workpiece W.As shown in Figure 6, optical detector 1 comprises optics 10, image pick-uping part 20 and controller 30.The structure identical with the structure of the optical detector 1A of the first embodiment of optical detector 1 represents with identical reference marker.
Optics 10 comprises LASER Light Source 11, collimation lens 12, beam expander 13 and liquid crystal shutter (shutter) array 14.
LASER Light Source 11 is such as by LD(laser diode) form, and produce and Emission Lasers.Laser is emitted to collimation lens 12 by LASER Light Source 11, and collimation lens 12 is disposed in the below of LASER Light Source 11.
Collimation lens 12 converts the light launched from LASER Light Source 11 to directional light, and allows parallel light propagation to beam expander 13, and this beam expander 13 is disposed in the below of collimation lens 12.
Beam expander 13 is such as excellent lens or post lens.The beam expander 13 serving as light deformation component allows the directional light changes shape coming from collimation lens 12 to be line laser.When directional light is from during above through beam expander 13, directional light becomes the light beam (i.e. line laser) of wire.Then, line laser is transmitted to liquid crystal shutter array 14, and this liquid crystal shutter array 14 is disposed in the below of beam expander 13.
Liquid crystal shutter array 14 is the array of liquid crystal shutter, and liquid crystal shutter is to change the mode transmission of the layout of liquid crystal molecule by applying electric field to liquid crystal molecule applying or stopping or stopping the element of light.
When line laser enters liquid crystal shutter array 14 from above, the unit (cell) that the controller 30 that will be described below controls liquid crystal shutter array is opened or is closed, and therefore for the transmission (see figure 7) of each unit controls by the line laser of unit.Therefore, liquid crystal shutter array 14 serves as the Transmission light parts of the selected portions of radioparent laser.
The laser being transmitted through liquid crystal shutter array 14 irradiates the workpiece W being positioned at below.
In addition, LASER Light Source 11, collimation lens 12, beam expander 13 and liquid crystal shutter array 14 are placed on same optical axis.
Image pick-uping part 20 comprises optical receiver lens 21 and imageing sensor 22.Optical receiver lens 21 transmission is from the laser of the surface reflection of workpiece W.The laser being transmitted through optical receiver lens 21 is incident on imageing sensor 22, and imageing sensor 22 and optical receiver lens 21 are positioned on same optical axis.
Imageing sensor 22 be based on the surface reflection from workpiece W laser pickup workpiece W picture, to obtain the image pick-up element of the coordinate figure of the every bit of workpiece W.Imageing sensor 22 exports the coordinate figure of acquisition to controller 30.Therefore, imageing sensor 22 serves as based on being transmitted through liquid crystal shutter array 14 and the image pick-uping part of the picture of the laser that reflects on the surface of workpiece W further and picking up work piece W.
Controller 30 comprises CPU(CPU (central processing unit)), RAM(random access memory), ROM(ROM (read-only memory)) etc., and be connected to optics 10 and image pick-uping part 20.
CPU read be stored in various handling procedures in ROM with by this program development in RAM, and cooperative perform various types of process with the program launched.Therefore, CPU performs the overall control of optical detector 1.
The handling procedure that RAM launches to be performed by CPU to the program storage area in RAM, and stores input data and result data in data storage areas, and these result data are produced by the execution of program.
The system program that the ROM storage be made up of nonvolatile semiconductor memory will be performed by CPU, the various handling procedures that will perform in system program, the data used when various handling procedure is performed and the data of various results obtained by the algorithm process of CPU.Program is stored in ROM with the form of computer readable program code.
The unit that controller 30 controls liquid crystal shutter is opened or is closed, and therefore for the transmission of each unit controls by the line laser of described unit.Particularly, controller 30 sequentially opens liquid crystal shutter from one end of liquid crystal shutter one by one to the other end, and closes the liquid crystal shutter except the liquid crystal shutter be just opened.Therefore, by from an end portion of line laser to the order of other end part sequentially transmission form the part of line laser.
Based on the picture of the workpiece W picked up by imageing sensor 22, whether controller 30 determines the existence of ghost image.If determine that ghost image exists, so controller 30 blocks the transmission of the light of the formation causing ghost image.
In optical detector 1, the shape of workpiece W is picked up sequentially continuously by imageing sensor 22.Thus, the presence or absence of ghost image can be determined as follows: when the picture position of picking up has changed predetermined threshold value or more from the picture position of last pickup, determine that ghost image exists.
Below, with reference to Fig. 8 to Fig. 9, the operation according to the optical detector 1 of the second embodiment is described.
First, from LASER Light Source 11 Emission Lasers of optical detector 1.The laser launched from LASER Light Source 11 marches to beam expander 13 by collimation lens 12.Beam expander 13 allows the light changes shape of self-focus lens 12 to be line laser.
Then, line laser is transmitted to liquid crystal shutter array 14, and for the transmission of each unit controls through the line laser of the unit of liquid crystal shutter array 14.
Particularly, sequentially open from one end of liquid crystal shutter to the other end liquid crystal shutter arranged with row that liquid crystal shutter array 14 comprises one by one, and close the liquid crystal shutter except the liquid crystal shutter be just opened.That is, the number of the unit opened always is merely one, and line laser is only transmitted through the unit of unlatching.Therefore, workpiece W is always irradiated by a laser.
Sequentially liquid crystal shutter is opened one by one to the other end from one end of unit.Therefore, irradiate workpiece W with a laser, make invocation point laser draw line (see figure 8) thereon.
Therefore, optical detector 1 can the shape of sequentially measuring workpieces W, and not be used in optical system and assemble travel mechanism, such as galvanometer mirror or polygonal mirror.Thus, there is no need the precision safeguarding travel mechanism and adjustment travel mechanism.In addition, even if when forming ghost image due to multiple reflections, still easily ghost image can be identified.
Be irradiated to the surface reflection of the light on workpiece W at workpiece W in the above described manner, to be incided on imageing sensor 22 by optical receiver lens 21.Therefore, can the image of picking up work piece W.Then, based on the picture of the workpiece W picked up by imageing sensor 22, controller 30A determines the presence or absence of ghost image.Because optical detector 1 irradiates workpiece W, make the setting-out on the surface of workpiece W of invocation point laser, even if so when forming ghost image due to multiple reflections, still easily ghost image can be identified.In addition, the light of the formation causing ghost image can be identified in line laser.
When determining that ghost image exists, controller 30 stops the transmission causing the part of the line laser of the formation of ghost image, as shown in Figure 9.That is, the unit relating to the liquid crystal shutter of the formation of ghost image is closed, and makes the Transmission light stoping there.Thus, the formation (see figure 5) of ghost image can be prevented.
As mentioned above, according to the optical detector 1 of the second embodiment, line laser is made up of multiple part (corresponding to unit), comprises an end portion and other end part (one end and the other end corresponding to described unit); And controller 30 controls radiation component, make radiation component utilize the part of line laser sequentially from an end portion to other end part (to correspond to and sequentially open unit one by one) and irradiate workpiece W, the mode of employing is similar to the optical detector 1A of the first embodiment.Therefore, optical detector 1 can the shape of sequentially measuring workpieces W, and not be used in optical system and assemble travel mechanism, such as galvanometer mirror or polygonal mirror.Thus, there is no need the precision safeguarding travel mechanism and adjustment travel mechanism.In addition, even if when forming ghost image due to multiple reflections, still easily ghost image can be identified.
Especially, according to the optical detector 1 of the second embodiment, radiation component is liquid crystal shutter array 14, and it comprises arranges and the liquid crystal shutter of radioparent laser selected portions with row.In addition, controller 30 sequentially opens liquid crystal shutter from one end of liquid crystal shutter one by one to the other end, and closes the liquid crystal shutter except the liquid crystal shutter be just opened.Because liquid crystal shutter array 14 high precision can control radiation, so optical detector 1 performs radiation control by using this advantage of liquid crystal shutter array 14, which provide more reliable measurement result.
In addition, according to the optical detector 1 of the second embodiment, based on the picture of the workpiece W picked up by imageing sensor 22, whether controller 30 determines the existence of ghost image, and the mode of employing is similar to the optical detector 1A of the first embodiment.If determine that ghost image exists, then controller 30 stops the transmission (radiation) causing the line laser part of the formation of ghost image.Thus, prevent the formation of ghost image, cause effective measurement.
Hereinbefore, describe in detail embodiments of the invention.But, the invention is not restricted to these embodiments, and therefore can suitably change and not depart from the scope of the present invention.
Such as, in a first embodiment, from one end of micro-reflector to the other end sequentially micro-reflector of release line laser projection it one by one.But, the present invention is not limited thereto.Such as, sequentially micro-reflector can be opened from one end to the other end in the mode of once opening multiple micro-reflector (such as two then two).
In addition, in a first embodiment, using the example of DMD15 as light-reflecting components.But, the present invention is not limited thereto, but the light-reflecting components of any type can be used, as long as this light-reflecting components has the function of the selected portions of reflected ray laser.
In addition, in a second embodiment, sequentially the unit that is included in liquid crystal shutter array 14 is opened one by one from one end of liquid crystal shutter array 14 to the other end.But, the present invention is not limited thereto.Such as, sequentially unit can be opened from one end to the other end in the mode of once opening multiple unit (such as two then two).
In addition, in a second embodiment, using the example of liquid crystal shutter array 14 as Transmission light parts.But, the present invention is not limited thereto, but the Transmission light parts of any type can be used, as long as these Transmission light parts are the array (i.e. shutter array) of the particulate (microparticle) of the shutter function with shading light.Such as, MEMS shutter array can be used, or PLZT shutter array replaces liquid crystal shutter array 14.
In addition, in the first and second embodiment, whether the existence of ghost image is determined as follows: when the picture position of picking up changes predetermined threshold value or more from the picture position of last pickup, determine that ghost image exists.The method but defining method is not limited thereto, but any method can be used, as long as can determine the presence or absence of ghost image.
In addition, detailed configuration and the operation of the element of optical detector 1A and 1 also can suitably change, and do not depart from the scope of the present invention.
Claims (6)
1. an optical detector, comprises:
LASER Light Source, Emission Lasers;
Collimation lens, converts the laser launched from described LASER Light Source to directional light;
Light deformation component, allows described directional light changes shape to be line laser;
Radiation component, adopts the selected portions of described line laser to irradiate object to be measured;
Image pick-uping part, based on the laser reflected from described body surface, pick up the picture of described object, this object is irradiated by the selected portions of described line laser; And
Controller, controls the radiation of described line laser by described radiation component,
Wherein, described line laser is made up of multiple part, and the plurality of part comprises an end portion and other end part;
Described controller controls described radiation component, makes described radiation component adopt the part of described line laser, sequentially irradiates described object from a described end portion to other end part;
Based on the picture of described object, the presence or absence of described controller determination ghost image, the picture of described object is picked up by described image pick-uping part; And
When described controller determines that described ghost image exists, described controller prevents the part for described line laser from propagating towards described object, and the described part of described line laser causes the formation of described ghost image.
2. optical detector according to claim 1, wherein said radiation component is light-reflecting components, and this light-reflecting components reflects the selected portions of described line laser.
3. optical detector according to claim 2, wherein
Described light-reflecting components is Digital Micromirror Device, and this Digital Micromirror Device comprises the multiple micro-reflectors with lattice-shaped arranged in form; And
When described line laser is projected to described micro-reflector on some, described controller sequentially open described micro-reflector from one end of these micro-reflectors to the other end described in some, and the micro-reflector during to close in described micro-reflector more described except the micro-reflector be just unlocked.
4. optical detector according to claim 1, wherein said radiation component is Transmission light parts, the selected portions of line laser described in this Transmission light parts transmission.
5. optical detector according to claim 4, wherein
Described Transmission light parts are shutter array, comprise the shutter arranged with row; And
Described controller sequentially opens described shutter from one end of these shutters to the other end, and closes the shutter except the shutter be just opened.
6. optical detector according to claim 5, wherein
Described shutter array is one in liquid crystal shutter array, MEMS shutter array and PLZT shutter array.
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| JP2011-216055 | 2011-09-30 | ||
| JP2011216055A JP5869281B2 (en) | 2011-04-11 | 2011-09-30 | Optical probe |
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| US9690092B2 (en) | 2013-06-28 | 2017-06-27 | Intel Corporation | MEMS scanning mirror light pattern generation |
| US9467680B2 (en) | 2013-12-12 | 2016-10-11 | Intel Corporation | Calibration of a three-dimensional acquisition system |
| JP2015148570A (en) * | 2014-02-07 | 2015-08-20 | 株式会社ミツトヨ | Optical probe, fitting cover and shape measurement apparatus |
| JP6608249B2 (en) * | 2015-11-09 | 2019-11-20 | 株式会社ミツトヨ | Optical pickup device |
| US10659764B2 (en) | 2016-06-20 | 2020-05-19 | Intel Corporation | Depth image provision apparatus and method |
| US10609359B2 (en) | 2016-06-22 | 2020-03-31 | Intel Corporation | Depth image provision apparatus and method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1591162A (en) * | 2003-09-02 | 2005-03-09 | 精工爱普生株式会社 | Projector |
| CN101458067A (en) * | 2008-12-31 | 2009-06-17 | 苏州大学 | Laser flare measuring device and measuring method thereof |
| CN102175180A (en) * | 2011-02-25 | 2011-09-07 | 上海大学 | Portable optical three-dimensional measurement device based on embedded real-time digital micromirror module |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| GB2410794A (en) * | 2004-02-05 | 2005-08-10 | Univ Sheffield Hallam | Apparatus and methods for three dimensional scanning |
| EP1834490A1 (en) * | 2005-01-06 | 2007-09-19 | Thomson Licensing | Reducing rainbow artifacts in digital light projection systems |
| ATE441087T1 (en) | 2006-04-27 | 2009-09-15 | 3D Scanners Ltd | OPTICAL SCANNING PROBE |
| DE102008015499C5 (en) * | 2008-03-25 | 2013-01-10 | Steinbichler Optotechnik Gmbh | Method and device for determining the 3D coordinates of an object |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1591162A (en) * | 2003-09-02 | 2005-03-09 | 精工爱普生株式会社 | Projector |
| CN101458067A (en) * | 2008-12-31 | 2009-06-17 | 苏州大学 | Laser flare measuring device and measuring method thereof |
| CN102175180A (en) * | 2011-02-25 | 2011-09-07 | 上海大学 | Portable optical three-dimensional measurement device based on embedded real-time digital micromirror module |
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| CN103033143A (en) | 2013-04-10 |
| EP2574877A1 (en) | 2013-04-03 |
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