CN103032297B - 基于碟型传感器阀的压电泵 - Google Patents
基于碟型传感器阀的压电泵 Download PDFInfo
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- CN103032297B CN103032297B CN201210551295.2A CN201210551295A CN103032297B CN 103032297 B CN103032297 B CN 103032297B CN 201210551295 A CN201210551295 A CN 201210551295A CN 103032297 B CN103032297 B CN 103032297B
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- Prior art keywords
- pump
- valve
- piezoelectric
- outlet valve
- inlet valve
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- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 9
- 239000007788 liquid Substances 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 238000005086 pumping Methods 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000006835 compression Effects 0.000 abstract 1
- 238000007906 compression Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 9
- 238000005452 bending Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 4
- 239000000446 fuel Substances 0.000 description 3
- 238000013270 controlled release Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Reciprocating Pumps (AREA)
Abstract
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Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210551295.2A CN103032297B (zh) | 2012-12-06 | 2012-12-06 | 基于碟型传感器阀的压电泵 |
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CN201210551295.2A CN103032297B (zh) | 2012-12-06 | 2012-12-06 | 基于碟型传感器阀的压电泵 |
Publications (2)
Publication Number | Publication Date |
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CN103032297A CN103032297A (zh) | 2013-04-10 |
CN103032297B true CN103032297B (zh) | 2015-05-13 |
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CN201210551295.2A Expired - Fee Related CN103032297B (zh) | 2012-12-06 | 2012-12-06 | 基于碟型传感器阀的压电泵 |
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CN (1) | CN103032297B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109162903A (zh) * | 2018-09-20 | 2019-01-08 | 长春工业大学 | 一种新型圆板式浮动阀压电泵 |
CN109882380B (zh) * | 2019-03-01 | 2020-04-21 | 浙江师范大学 | 一种双振子自激泵 |
CN110131141A (zh) * | 2019-03-03 | 2019-08-16 | 浙江师范大学 | 一种易维护的自调节式压电药物输送泵 |
CN109973366A (zh) * | 2019-04-11 | 2019-07-05 | 长春工业大学 | 一种锥形弹性阀压电泵 |
CN117536839B (zh) * | 2024-01-09 | 2024-04-02 | 上海隐冠半导体技术有限公司 | 一种压电泵、控制方法、控制装置及存储介质 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5816780A (en) * | 1997-04-15 | 1998-10-06 | Face International Corp. | Piezoelectrically actuated fluid pumps |
CN200989293Y (zh) * | 2006-10-19 | 2007-12-12 | 吉林大学 | 微型喷水推进泵 |
CN201057136Y (zh) * | 2007-05-25 | 2008-05-07 | 吉林大学 | 压电振子主动阀式压电泵 |
CN102374158A (zh) * | 2011-06-21 | 2012-03-14 | 浙江师范大学 | 自感知压电隔膜泵 |
CN202574604U (zh) * | 2012-05-07 | 2012-12-05 | 浙江师范大学 | 压电喷水推进装置 |
CN202579119U (zh) * | 2012-06-04 | 2012-12-05 | 浙江师范大学 | 一种新型自感知压电隔膜泵 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10213073A (ja) * | 1997-01-30 | 1998-08-11 | Kasei Optonix Co Ltd | 圧電ポンプ |
JP2010196492A (ja) * | 2009-02-23 | 2010-09-09 | Alps Electric Co Ltd | バルブ付きダイヤフラムポンプ及び開閉バルブ |
-
2012
- 2012-12-06 CN CN201210551295.2A patent/CN103032297B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5816780A (en) * | 1997-04-15 | 1998-10-06 | Face International Corp. | Piezoelectrically actuated fluid pumps |
CN200989293Y (zh) * | 2006-10-19 | 2007-12-12 | 吉林大学 | 微型喷水推进泵 |
CN201057136Y (zh) * | 2007-05-25 | 2008-05-07 | 吉林大学 | 压电振子主动阀式压电泵 |
CN102374158A (zh) * | 2011-06-21 | 2012-03-14 | 浙江师范大学 | 自感知压电隔膜泵 |
CN202574604U (zh) * | 2012-05-07 | 2012-12-05 | 浙江师范大学 | 压电喷水推进装置 |
CN202579119U (zh) * | 2012-06-04 | 2012-12-05 | 浙江师范大学 | 一种新型自感知压电隔膜泵 |
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CN103032297A (zh) | 2013-04-10 |
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PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Zhang Zhonghua Inventor after: Han Junwu Inventor after: Wang Shuyun Inventor after: Wen Jianming Inventor after: Ma Jijie Inventor after: Jiang Xiaoyu Inventor before: Zhang Zhonghua Inventor before: Han Junwu Inventor before: Wang Shuyun Inventor before: Ma Zehui Inventor before: Cheng Guangming |
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COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: ZHANG ZHONGHUA KAN JUNWU WANG SHUYUN MA ZEHUI CHENG GUANGMING TO: ZHANG ZHONGHUA KAN JUNWU WANG SHUYUN WEN JIANMING MA JIJIE JIANG XIAOYU |
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C14 | Grant of patent or utility model | ||
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150513 Termination date: 20151206 |
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EXPY | Termination of patent right or utility model |