CN103029930A - Switching connector for chemical liquid medicament storing tank - Google Patents
Switching connector for chemical liquid medicament storing tank Download PDFInfo
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- CN103029930A CN103029930A CN2012105465218A CN201210546521A CN103029930A CN 103029930 A CN103029930 A CN 103029930A CN 2012105465218 A CN2012105465218 A CN 2012105465218A CN 201210546521 A CN201210546521 A CN 201210546521A CN 103029930 A CN103029930 A CN 103029930A
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Abstract
The invention provides a switching connector for a chemical liquid medicament storing tank. The switching connector for the chemical liquid medicament storing tank is provided with a liquid supply connection hole, an air supplementing connection hole, an overpressure overflow exhaust hole and a liquid return connection hole. In the switching connector for the chemical liquid medicament storing tank, the functions of liquid supply, liquid return, air supplement, overpressure overflow exhaust and the like are integrated, so that use requirements of different complex liquid medicament conveying processes can be met; when the air pressure in the liquid storing tank is higher than a set pressure, the overpressure overflow exhaust hole is used for exhausting air, so that the air pressure in the tank is kept stable, the stability of liquid supply is facilitated, and the critical pressure of overpressure exhausting is adjustable; and the impact of a reflux liquid medicament on a liquid medicament in the liquid storing tank can be reduced through the liquid return connection hole provided with a porous plate, so that the stability of liquid supply and the liquid medicament are facilitated, and noise is reduced.
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to a kind of chemical liquid fluid reservoir conversion connector that the several functions connections such as feed flow, time liquid, tonifying Qi, superpressure overflow exhaust are integrated in one.
Background technology
Need to use various chemical liquids in semiconductor fabrication process, comprising the severe corrosive liquid, and this liquid all is spendable through certain proportion dilution rear by the higher stoste of the outside concentration of supplying with of process equipment.Present stage, employed chemical liquids stoste substantially all was standard items, because it has stronger corrosive property, in splendid attire, preservation and use procedure, all to avoid directly contacting with operating personal or directly being exposed in the environment, in order to avoid contaminated environment or by environmental pollution as far as possible.
The fluid reservoir of storage liquid is to be made by the material of chemically-resistant liquid corrosion, and the fluid reservoir top is typically provided with two communication ports, and one of them can be used as for subsequent use or connects as required.Its type of attachment and liquid transporting pattern are comparatively single, can not satisfy complicated delivery technology requirement.In actual use, when holding to process equipment providing chemical liquid stoste by factory, consideration for aspects such as the stability of supplying with and safetys, except simple feed flow or ventilation interface, also need fluid reservoir to possess the function that connects other demand pipelines, in order to adapt to complexity or the more chemical liguid supply system of functional requirement.
Summary of the invention
The technical matters that (one) will solve
The technical problem to be solved in the present invention provides a kind of can being used with existing chemical stoste fluid reservoir, and the several functions such as feed flow, time liquid, tonifying Qi, superpressure overflow exhaust are connected the chemical liquid fluid reservoir conversion connector that is integrated in one.
(2) technical scheme
For reaching above-mentioned purpose, chemical liquid fluid reservoir conversion connector of the present invention, it is provided with feed flow communication port 3, tonifying Qi communication port 4, superpressure overflow deflation hole 1 and returns liquid communication port 2; Described superpressure overflow deflation hole 1 is the second order round tube hole, comprises the first rank exhaust hole and second-order exhaust hole, and described second-order exhaust hole links to each other with fluid reservoir 13, and the diameter of described the first rank exhaust hole is greater than the diameter of described second-order exhaust hole.
In described the first rank exhaust hole end cap 5, spring 6 and sealant beads 7 are installed, described end cap 5 and described sealant beads 7 place respectively the two ends of described spring 6, with described second-order exhaust hole movable sealing, described end cap 5 is provided with through hole to described sealant beads 7 under spring 6 effects.
Described end cap 5 is provided with outside thread, and described end cap 5 is connected with superpressure overflow deflation hole 1 by screw thread.
Through hole on the described end cap 5 is interior hexangle type.
Described time liquid communication port 2 is the second order round tube hole, comprise that fluid through-hole is returned on the first rank and second-order returns fluid through-hole, described second-order returns fluid through-hole and links to each other with fluid reservoir 13, the diameter that fluid through-hole is returned on described the first rank returns the diameter of fluid through-hole less than described second-order, the end face that described second-order returns fluid through-hole is provided with breaker plate, and the hole on the described breaker plate is through hole.
Porose cross-sectional area sum on the described breaker plate is greater than the cross-sectional area on liquid back pipe road.
The material of described chemical liquid fluid reservoir conversion connector is the corrosion stability plastics.
(3) beneficial effect
The device that the present invention adopts technique scheme to provide is connected function to connect feed flow, time liquid, tonifying Qi and is integrated in one, can satisfies complicated and different liquid delivery technology operatings needs with superpressure overflow exhaust; When fluid reservoir internal gas pressure during greater than setting pressure, the exhaust of superpressure overflow deflation hole makes the tank internal gas pressure stable, be conducive to the stable of feed flow, and the critical pressure of superpressure exhaust is adjustable; With breaker plate return the liquid communication port, the liquid that can reduce to reflux is conducive to stablizing of feed flow and liquid itself, and has reduced noise the impact of fluid reservoir inner liquid medicine.
Description of drawings
Fig. 1 is the section-drawing of chemical liquid fluid reservoir conversion connector of the present invention;
Fig. 2 is the application scheme drawing of chemical liquid fluid reservoir conversion connector of the present invention.
Among the figure, 1: superpressure overflow deflation hole; 2: return the liquid communication port; 3: the feed flow communication port; 4: the tonifying Qi communication port; 5: end cap; 6: spring; 7: sealant beads; 8: the external lug of feed flow communication port; 9: return liquid communication port joint; 10: feed flow communication port internal connection; 11: inner feed pipe; 12: tonifying Qi communication port joint; 13: fluid reservoir.
The specific embodiment
Below in conjunction with drawings and Examples chemical liquid fluid reservoir conversion connector of the present invention is described in further detail.Following examples are used for explanation the present invention, but are not used for limiting the scope of the invention.
In description of the invention, need to prove, term " " center "; " vertically "; " laterally "; " on "; D score; " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", orientation or the position relationship of indications such as " outward " are based on orientation shown in the drawings or position relationship, only be for convenience of description the present invention and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second ", " the 3rd " only are used for describing purpose, and can not be interpreted as indication or hint relative importance.
In description of the invention, need to prove that unless clear and definite regulation and restriction are arranged in addition, term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be captive joint, also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can indirectly link to each other by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can particular case understand above-mentioned term concrete meaning in the present invention.
In addition, in description of the invention, except as otherwise noted, the implication of " a plurality of " is two or more.
As shown in Figure 1, chemical liquid fluid reservoir conversion connector of the present invention, it is provided with feed flow communication port 3, tonifying Qi communication port 4, superpressure overflow deflation hole 1 and returns liquid communication port 2.Superpressure overflow deflation hole 1 is the second order round tube hole, comprises the first rank exhaust hole and second-order exhaust hole, and the second-order exhaust hole links to each other with fluid reservoir 13.Wherein, the diameter of the first rank exhaust hole is greater than the diameter of second-order exhaust hole.End cap 5, spring 6 and sealant beads 7 are installed in the first rank exhaust hole, and end cap 5 and sealant beads 7 place respectively the two ends of spring 6, and with second-order exhaust hole movable sealing, end cap 5 is provided with through hole to sealant beads 7 under spring 6 effects.End cap 5 is provided with outside thread, and end cap 5 is connected with superpressure overflow deflation hole 1 by screw thread.Through hole on the end cap 5 is interior hexangle type.Interior hexangle type through hole is used for the height that rotary end cover 5 is adjusted end cap 5, has the function of exhaust concurrently.The height of adjusting end cap 5 can change the amount of compression of spring 6, namely changes the exhaust critical pressure of superpressure overflow deflation hole 1.When fluid reservoir internal gas pressure during greater than setting pressure, the exhaust of superpressure overflow deflation hole makes the tank internal gas pressure stable, be conducive to the stable of feed flow, and the critical pressure of superpressure exhaust is adjustable.
Returning liquid communication port 2 is the second order round tube hole, comprise that fluid through-hole is returned on the first rank and second-order returns fluid through-hole, second-order returns fluid through-hole and links to each other with fluid reservoir 13, the diameter that fluid through-hole is returned on the first rank returns the diameter of fluid through-hole less than second-order, the end face that second-order returns fluid through-hole is provided with breaker plate, and the hole on the breaker plate is through hole.Porose cross-sectional area sum on the breaker plate is greater than the cross-sectional area on liquid back pipe road, the backflow liquid can be slowed down and be divided into multiply, and the liquid that reduces to reflux is to the impact of tank inner liquid medicine, and the through hole of this breaker plate can be circular, square or other geometric configuration holes.With breaker plate return the liquid communication port, the liquid that can reduce to reflux is conducive to stablizing of feed flow and liquid itself, and has reduced noise the impact of fluid reservoir inner liquid medicine.
The material of chemical liquid fluid reservoir conversion connector is the corrosion stability plastics, such as polytetrafluoroethylene (PTFE), Kynoar (PVDF) or tetrafluoroethylene (PFA) etc.
As shown in Figure 2, feed flow communication port 3 and tonifying Qi communication port 4 are through hole, feed flow communication port external lug 8 and feed flow communication port internal connection 10 are provided with outside thread, and be threaded connection respectively in the two ends of feed flow communication port 3, feed flow communication port internal connection 10 other ends are connected with inner feed pipe 11, return liquid communication port joint 9 and be provided with outside thread and be threaded connection in the first rank of returning liquid communication port 2 and return fluid through-hole, tonifying Qi communication port joint 12 is provided with outside thread and is threaded connection in described tonifying Qi communication port 4.Above-mentioned screw thread is the NPT screw thread, also can adopt R screw thread etc.
The working process of chemical liquid fluid reservoir conversion connector of the present invention is as follows: be directed to the circular form chemical liguid supply system; the external lug 8 of feed flow communication port is connected with liquid feeding pipeline among Fig. 2; return liquid communication port joint 9 and loop back liquid pipeline and be connected; feed flow communication port internal connection 10 connects the inner feed pipe 11 of fluid reservoir; inner feed pipe 11 lower ends are near fluid reservoir 13 bottoms; guaranteeing the peak use rate of liquid, tonifying Qi communication port joint 12 and protective gas (such as nitrogen etc.) chargine line is connected.During work, liquid flow in the process equipment through liquid feeding pipeline under differential pressure action, meanwhile unnecessary liquid can flow back to fluid reservoir 13 via the liquid back pipe road, pass through back when entering fluid reservoir 13 to shunt with breaker plate deceleration decompression in the liquid communication port 2, avoid refluxing liquid pressure or flow velocity are excessive to be impacted fluid reservoir 13 inner liquid medicines.By the protective gas chargine line protective gas is inputted in the fluid reservoir 13 simultaneously, played the space of filling up the liquid that has used, keep the effect of fluid reservoir 13 inside and outside differential pressure balances.When fluid reservoir 13 internal gas pressures are higher than the setting pressure of superpressure overflow deflation hole 1, sealant beads 7 is by jack-up among Fig. 1, and spring 6 shrinks, and superpressure overflow deflation hole 1 is opened exhaust, make the stable gas pressure in the fluid reservoir 13, thereby can realize the steady and continuous supply of chemical liquid.
In addition, chemical liquid fluid reservoir conversion connector and outside feed pipe and inner feed pipe 11, chemical liquid fluid reservoir conversion connector and return liquid communication port joint 9 and can also be connected by other means.Feed flow communication port external lug 8 and feed flow communication port internal connection 10 are welded in the two ends of feed flow communication port 3, and time liquid communication port joint 9 is welded in go back to the first rank of liquid communication port 2 and returns fluid through-hole, and tonifying Qi communication port joint 12 is welded in tonifying Qi communication port 4.
In addition, chemical liquid fluid reservoir conversion connector can also be connected by BULKHEAD UNION with outside feed pipe and inner feed pipe 11.Feed flow communication port 3 interior installation BULKHEAD UNIONs, BULKHEAD UNION two ends respectively with inner feed pipe 11 be connected feed pipe and be connected.BULKHEAD UNION comprises that the middle part is provided with male-pipe and the nut of flange, after male-pipe passes feed flow communication port 3, screws nut chemical liquid fluid reservoir conversion connector is clamped between the flange and nut on the male-pipe.
Above embodiment only is used for explanation the present invention, and be not limitation of the present invention, the those of ordinary skill in relevant technologies field is in the situation that does not break away from the spirit and scope of the present invention, can also make a variety of changes and modification, so all technical schemes that are equal to also belong to category of the present invention.
Claims (7)
1. a chemical liquid fluid reservoir conversion connector is characterized in that, described chemical liquid fluid reservoir conversion connector is provided with feed flow communication port (3), tonifying Qi communication port (4), superpressure overflow deflation hole (1) and returns liquid communication port (2); Described superpressure overflow deflation hole (1) is the second order round tube hole, comprise the first rank exhaust hole and second-order exhaust hole, described second-order exhaust hole links to each other with fluid reservoir (13), and the diameter of described the first rank exhaust hole is greater than the diameter of described second-order exhaust hole.
2. chemical liquid fluid reservoir conversion connector according to claim 1, it is characterized in that, end cap (5), spring (6) and sealant beads (7) are installed in described the first rank exhaust hole, described end cap (5) and described sealant beads (7) place respectively the two ends of described spring (6), with described second-order exhaust hole movable sealing, described end cap (5) is provided with through hole to described sealant beads (7) under spring (6) effect.
3. chemical liquid fluid reservoir conversion connector according to claim 2 is characterized in that, described end cap (5) is provided with outside thread, and described end cap (5) is connected with superpressure overflow deflation hole (1) by screw thread.
4. chemical liquid fluid reservoir conversion connector according to claim 3 is characterized in that, the through hole on the described end cap (5) is interior hexangle type.
5. each described chemical liquid fluid reservoir conversion connector according to claim 1-4, it is characterized in that, described time liquid communication port (2) is the second order round tube hole, comprise that fluid through-hole is returned on the first rank and second-order returns fluid through-hole, described second-order returns fluid through-hole and links to each other with fluid reservoir (13), the diameter that fluid through-hole is returned on described the first rank returns the diameter of fluid through-hole less than described second-order, and the end face that described second-order returns fluid through-hole is provided with breaker plate, and the hole on the described breaker plate is through hole.
6. chemical liquid fluid reservoir conversion connector according to claim 5 is characterized in that, the porose cross-sectional area sum on the described breaker plate is greater than the cross-sectional area on liquid back pipe road.
7. chemical liquid fluid reservoir conversion connector according to claim 6 is characterized in that, the material of described chemical liquid fluid reservoir conversion connector is the corrosion stability plastics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105465218A CN103029930A (en) | 2012-12-14 | 2012-12-14 | Switching connector for chemical liquid medicament storing tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105465218A CN103029930A (en) | 2012-12-14 | 2012-12-14 | Switching connector for chemical liquid medicament storing tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103029930A true CN103029930A (en) | 2013-04-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012105465218A Pending CN103029930A (en) | 2012-12-14 | 2012-12-14 | Switching connector for chemical liquid medicament storing tank |
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| CN (1) | CN103029930A (en) |
Citations (10)
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| JP2002175825A (en) * | 2000-12-06 | 2002-06-21 | Sumitomo Electric Ind Ltd | Pressure change preventing tank structure, electrolysis liquid circulation type secondary battery, and redox flow type secondary battery |
| WO2003102314A1 (en) * | 2002-05-29 | 2003-12-11 | Diy Direct Express Limited | Overflow preventer |
| CN201347231Y (en) * | 2008-11-03 | 2009-11-18 | 李胜利 | Bottle cap capable of preventing fluid from flowing back |
| CN101636612A (en) * | 2007-01-11 | 2010-01-27 | 株式会社美姿把 | Pressure regulating apparatus |
| CN101766863A (en) * | 2008-12-29 | 2010-07-07 | 北京谊安医疗系统股份有限公司 | Safety overflow valve |
| CN202022729U (en) * | 2011-01-21 | 2011-11-02 | 广州达意隆包装机械股份有限公司 | Non-backflow filling valve |
| CN102502132A (en) * | 2011-10-09 | 2012-06-20 | 北京七星华创电子股份有限公司 | Liquid storage device |
| CN202279375U (en) * | 2011-10-26 | 2012-06-20 | 邵霞 | Safety storage tank for liquid volatile medicine for chemical experiments |
| CN202402375U (en) * | 2011-12-05 | 2012-08-29 | 上海汽车集团股份有限公司 | Liquid storage tank |
| CN203006192U (en) * | 2012-12-14 | 2013-06-19 | 北京七星华创电子股份有限公司 | Conversion connector of liquid storage pot containing chemical liquid medicine |
-
2012
- 2012-12-14 CN CN2012105465218A patent/CN103029930A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002175825A (en) * | 2000-12-06 | 2002-06-21 | Sumitomo Electric Ind Ltd | Pressure change preventing tank structure, electrolysis liquid circulation type secondary battery, and redox flow type secondary battery |
| WO2003102314A1 (en) * | 2002-05-29 | 2003-12-11 | Diy Direct Express Limited | Overflow preventer |
| CN101636612A (en) * | 2007-01-11 | 2010-01-27 | 株式会社美姿把 | Pressure regulating apparatus |
| CN201347231Y (en) * | 2008-11-03 | 2009-11-18 | 李胜利 | Bottle cap capable of preventing fluid from flowing back |
| CN101766863A (en) * | 2008-12-29 | 2010-07-07 | 北京谊安医疗系统股份有限公司 | Safety overflow valve |
| CN202022729U (en) * | 2011-01-21 | 2011-11-02 | 广州达意隆包装机械股份有限公司 | Non-backflow filling valve |
| CN102502132A (en) * | 2011-10-09 | 2012-06-20 | 北京七星华创电子股份有限公司 | Liquid storage device |
| CN202279375U (en) * | 2011-10-26 | 2012-06-20 | 邵霞 | Safety storage tank for liquid volatile medicine for chemical experiments |
| CN202402375U (en) * | 2011-12-05 | 2012-08-29 | 上海汽车集团股份有限公司 | Liquid storage tank |
| CN203006192U (en) * | 2012-12-14 | 2013-06-19 | 北京七星华创电子股份有限公司 | Conversion connector of liquid storage pot containing chemical liquid medicine |
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Application publication date: 20130410 |