CN103024301B - The formation method of floating gate type imageing sensor - Google Patents

The formation method of floating gate type imageing sensor Download PDF

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Publication number
CN103024301B
CN103024301B CN201310011410.1A CN201310011410A CN103024301B CN 103024301 B CN103024301 B CN 103024301B CN 201310011410 A CN201310011410 A CN 201310011410A CN 103024301 B CN103024301 B CN 103024301B
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pixel cell
data
pixel
floating gate
gate type
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CN103024301A (en
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伍冬
谢南
刘辉
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Tsinghua University
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Tsinghua University
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Abstract

The present invention proposes a kind of formation method of floating gate type imageing sensor, comprises step: resetted by each pixel cell of floating gate type imageing sensor; The primary data of reading section pixel cell; Carry out exposure image; Read data after the exposure of all pixel cells; And according to data after the primary data of partial pixel unit and the exposure of all pixel cells, carry out data operation process according to interpolation, obtain final image.It is simple that the present invention has algorithm, and operand is little, the advantage that image taking speed is fast.

Description

The formation method of floating gate type imageing sensor
Technical field
The invention belongs to floating gate type image sensor application technical field, refer more particularly to a kind of formation method of floating gate type imageing sensor.
Background technology
Flash memory is a kind of common memory, has a wide range of applications, such as smart mobile phone, panel computer etc. in electronic digital industry.Flash memory is the storage being realized data by its floating gate structure, realized the storage of data 1 by programming operation injection electronics to floating boom with the threshold voltage improving memory cell, realized the storage of data 0 by the electronics on erase operation pull-out floating boom with the threshold voltage reducing memory cell.
Floating gate type imageing sensor is a kind of novel imageing sensor, and the similar flash memory of pixel cell of this kind of imageing sensor, have employed floating gate structure.The pixel cell of floating gate type imageing sensor is under certain pressurized environment, by " programming " operation, the photoelectron that light signal produces is injected into floating boom to improve the threshold voltage of pixel cell, realize the record of intensity information, and by the electronics on " erasing " operation pull-out floating boom to realize the reset of pixel cell intensity information.Again by reading circuit, the convert information that pixel cell records can be become digital information, export and process, finally forming image.
As shown in Figure 1, " reset " operation is by wiping and the means such as programming, pixel cell threshold value being returned to initial condition to the operating procedure of floating gate type imageing sensor; " first time data reading " operation utilizes special reading circuit to be read out the information first time on pixel cell; " exposure image " operation exposes pixel cell, then be stored in pixel cell by conversion pressurized operation by intensity signal; " second time data reading " operation utilizes special reading circuit the information second time on pixel cell to be read out; " data operation process " operation deducts the rear data read that reset as final picture signal using reading the data obtained for the second time.Like this, floating gate type imageing sensor often becomes once as just needing reading two secondary data.CMOS and CCD is modal two kinds of imageing sensors at present, and these two kinds of imageing sensors, in the process of imaging, only need reading one secondary data.Comparatively speaking, the speed that floating gate type imageing sensor is Polaroid is slow.
Summary of the invention
The present invention one of is intended to solve the problems of the technologies described above at least to a certain extent or at least provides a kind of useful business to select.For this reason, the object of the invention is to propose a kind of speed faster for the problem of the floating gate type vision sensor data reading speed mentioned in above-mentioned background technology, the present invention puts forward a kind of formation method of the imageing sensor of floating gate type faster.
According to the formation method of the floating gate type imageing sensor of the embodiment of the present invention, comprising: each pixel cell of described floating gate type imageing sensor resets by A.; B. the primary data of reading section pixel cell; C. exposure image is carried out; D. data after the exposure of all pixel cells are read; And E. is according to data after the exposure of the primary data of described partial pixel unit and described all pixel cells, carries out data operation process, obtain final image according to interpolation.
In one embodiment of the invention, described step B comprises: often in row pixel cell, every adjacent k pixel cell is one group, read the primary data of this group first pixel cell, wherein K is the positive integer being greater than 1 and being less than the column number of image-generating unit in sensor array, and described step e comprises: the value that E1. defines the primary data of k-1 the pixel cell do not read in this group pixel cell is the primary data of first pixel cell of this group and the mean value of the primary data of first pixel cell of next group pixel cell; Deduct the primary data of each pixel cell with data after the exposure of each pixel cell of E2., obtain final image.
In the present invention, because the data after resetting only have read a wherein part, thus decrease the reading time, improve image taking speed.Meanwhile, because the data after resetting only have read a wherein part, need that interpolation is carried out to remainder and fill up.It is simple that the present invention has algorithm, the advantage that amount of calculation is little.
Additional aspect of the present invention and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 is the schematic diagram of the formation method of existing floating gate type imageing sensor
Fig. 2 is the schematic diagram of the formation method of floating gate type imageing sensor of the present invention
Fig. 3 is the schematic diagram of the floating gate type imageing sensor of m × n-pixel cell array
Embodiment
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the present invention, and can not limitation of the present invention be interpreted as.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", orientation or the position relationship of the instruction such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more these features.In describing the invention, the implication of " multiple " is two or more, unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, above-mentioned term concrete meaning in the present invention can be understood as the case may be.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature it " on " or D score can comprise the first and second features and directly contact, also can comprise the first and second features and not be directly contact but by the other characterisation contact between them.And, fisrt feature second feature " on ", " top " and " above " comprise fisrt feature directly over second feature and oblique upper, or only represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " below " and " below " comprise fisrt feature immediately below second feature and tiltedly below, or only represent that fisrt feature level height is less than second feature.
The present invention proposes a kind of formation method of new floating gate type imageing sensor, floating gate type imageing sensor can be helped to realize image taking speed faster.
As shown in Figure 2, formation method of the present invention comprises the steps:
A. pixel cell being resetted, by wiping and the means such as programming, pixel cell threshold value being returned to initial condition.
B. the digital independent after resetting.In this step, for the photosensitive array (as shown in Figure 3) of a m × n pixel cell, in every one-row pixels, a secondary data is read (wherein every k pixel, k<n), concrete operations are: every k pixel is one group, get first of these group data out (P that in such as Fig. 3, m-1 is capable in the value often organized m-1,1, P m-1,2, P m-1,3, P m-1,4...., P m-1, k-1, P m-1, kthis k pixel is one group, and the reset of this group pixel only reads out P afterwards m-1,1value).So after resetting, the reading times of data will reduce to original 1/k, and the reading time also reduces to original 1/k.Wherein, the value of k needs to adjust within the specific limits according to imaging precision, and the value of k is less, and imaging precision is higher but image taking speed is slower, otherwise the value of k is larger, and imaging precision is lower but image taking speed is faster.Time k is 1, the data namely after complete reading reset, this hourly velocity is the slowest but precision is the highest.
C. carry out exposure image, image information is preserved on the image sensor.
D. the data in pixel after exposure image are all read.
E. the data that the data after exposure image and second step read are processed, obtain last image.Interpolation is utilized, that k-1 data do not read out in every k certificate in approximate reduction second step in " data operation process " link.The concrete methods of realizing of interpolation is: in each group data, and the value of this k-1 pixel do not read all is got the value that reads with this group at their places and organized the mean value (P that in such as Fig. 3, m-1 is capable of these two values of value read with next m-1,2, P m-1,3, P m-1,4. ..., P m-1, kthe value of this k-1 pixel all gets this group readout P m-1,1with next group readout P m-1, k+1mean value, this line next organize k-1 pixel P not reading m-1, k+2, P m-1, k+3, P m-1, k+4..., P m-1,2k, will P be got m-1, k+1and P m-1,2k+1mean value, by that analogy), because reset operation can revert to initial threshold by unified for pixel, thus part read reset after the method for data can ensure the accuracy of data.
In the present invention, because the data after resetting only have read a wherein part, thus decrease the reading time, improve image taking speed.Meanwhile, because the data after resetting only have read a wherein part, need that interpolation is carried out to remainder and fill up.It is simple that the present invention has algorithm, the advantage that amount of calculation is little.
Describe and can be understood in flow chart or in this any process otherwise described or method, represent and comprise one or more for realizing the module of the code of the executable instruction of the step of specific logical function or process, fragment or part, and the scope of the preferred embodiment of the present invention comprises other realization, wherein can not according to order that is shown or that discuss, comprise according to involved function by the mode while of basic or by contrary order, carry out n-back test, this should understand by embodiments of the invention person of ordinary skill in the field.
In the description of this specification, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, identical embodiment or example are not necessarily referred to the schematic representation of above-mentioned term.And the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
Although illustrate and describe embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, those of ordinary skill in the art can change above-described embodiment within the scope of the invention when not departing from principle of the present invention and aim, revising, replacing and modification.

Claims (1)

1. a formation method for floating gate type imageing sensor, is characterized in that, comprising:
A. each pixel cell of described floating gate type imageing sensor is resetted;
B. the primary data of reading section pixel cell, specifically comprise: often in row pixel cell, every adjacent k pixel cell is one group, reads the primary data of this group first pixel cell, and wherein k is the positive integer being greater than 1 and being less than the column number of image-generating unit in sensor array;
C. exposure image is carried out;
D. data after the exposure of all pixel cells are read; And
E. according to data after the primary data of described partial pixel unit and the exposure of described all pixel cells, carry out data operation process according to interpolation, obtain final image, specifically comprise:
E1. the value defining the primary data of k-1 the pixel cell do not read in this group pixel cell is the mean value of the primary data of the primary data of first pixel cell of this group and first pixel cell of next group pixel cell;
After the exposure of E2. each pixel cell, data deduct the primary data of each pixel cell, obtain final image.
CN201310011410.1A 2013-01-11 2013-01-11 The formation method of floating gate type imageing sensor Expired - Fee Related CN103024301B (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1429016A (en) * 2001-12-28 2003-07-09 富士胶片株式会社 Solid electronic image inductor and control method thereof
CN101263708A (en) * 2005-06-28 2008-09-10 摩托罗拉公司 Image sensor architecture employing one or more floating gate device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4701975B2 (en) * 2005-10-05 2011-06-15 パナソニック株式会社 Solid-state imaging device and imaging device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1429016A (en) * 2001-12-28 2003-07-09 富士胶片株式会社 Solid electronic image inductor and control method thereof
CN101263708A (en) * 2005-06-28 2008-09-10 摩托罗拉公司 Image sensor architecture employing one or more floating gate device

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