CN103020925A - Template image acquisition method - Google Patents
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- CN103020925A CN103020925A CN2011102979215A CN201110297921A CN103020925A CN 103020925 A CN103020925 A CN 103020925A CN 2011102979215 A CN2011102979215 A CN 2011102979215A CN 201110297921 A CN201110297921 A CN 201110297921A CN 103020925 A CN103020925 A CN 103020925A
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Abstract
The invention discloses a template image acquisition method. The method comprises the following steps of: (a) inputting a first image, wherein the first image has an alignment mark; (b) calculating a centroid coordinate of the alignment mark, and rounding the acquired centroid coordinate; (c) cutting the first image by taking the centroid acquired in the step (b) as a center so as to acquire a second image, thus enabling the distance from the centroid of the alignment mark to the left and right edges of the second image is equal to the distance from the centroid of the alignment mark to the upper and lower edges of the second image; (d) calculating the centroid coordinate of the second image, and calculating a first offset between the centroid coordinate of the second image and the center of the second image; (e) amplifying the second image by utilizing an interpolation method so as to acquire a third image; (f) converting the first offset in the step (d) into a second offset based on the amplification factor in the step (e); (g) translating the third image according to the second offset; and (h) reducing the third image to be the size which is the same as that of the second image by utilizing the interpolation method. According to the method, the central position of the template image can be basically overlapped with the centroid position of the alignment mark.
Description
Technical field
The present invention relates to SIC (semiconductor integrated circuit) photoetching production field, relate in particular to a kind of acquisition methods of template image.
Background technology
Alignment system is a core subsystem in the semiconductor lithography equipment, and its alignment precision has often directly determined the alignment precision that semiconductor lithography equipment can reach.Semiconductor lithography equipment will be depicted in circuitous pattern on the mask is projected in the exposure object (for example, silicon chip) that scribbles photosensitive material by the method for optical projection surface.Then realize that by techniques such as etchings the figure between mask and the exposure object shifts.Because chip is comprised of multilayer circuit, integrated circuit (IC) chip needs multiexposure, multiple exposure to finish usually.For guaranteeing the exact position relation between the different circuit layers, in the projection exposure process, must realize accurate aligning between mask, the exposure object by alignment system.
The machine vision alignment system is by the auto-alignment between machine vision technique realization mask and the exposure object.In this Automatic Alignment System, obtain the pattern of alignment mark and be imaged on Charge Coupled Device (CCD) (CCD by imaging optical path, Charge Coupled Device) or on CMOS (the Complementary Metal OxideSemiconductor Transistor) imageing sensor, thereby obtains the digital picture of alignment mark.By the matching technique of Digital Image Processing and template image, obtain the position of marking image in image coordinate system, convert thereof into again and be the coordinate (worktable coordinate system coordinate or mask platform coordinate system coordinate) of alignment mark at physical world.By the coordinate relation of mark on mask and the exposure object, set up the relative coordinate relation between them, thereby realize the aligning between mask and the exposure object.
In semiconductor lithography equipment, because the characteristic of image matching technology, the deviation of the center position of template image and the center position of alignment mark, the position that directly causes marking image in image coordinate system is produced deviation, and then the alignment result in the step photo-etching machine engineer testing and efficient are exerted an influence.
Yet, be applied at present the acquisition methods of the template image on the semiconductor lithography equipment alignment system, mainly be to determine image boundary by threshold value is set, and then obtain template image.Although the method is simple to operate, but require the template image sharpness high, for the template image that is generated by the relatively poor image of Shadows Processing effect, the center deviation of the center of image and alignment mark very large (usually at tens microns) need to could realize through engineer testing repeatedly aiming at usually.
Summary of the invention
The object of the present invention is to provide a kind of acquisition methods of template image, to improve the disappearance of prior art.
For solving the problems of the technologies described above, the acquisition methods of template image provided by the invention may further comprise the steps: (a) input the first image, and the first image has alignment mark; (b) calculate the coordinate of the centre of form of alignment mark, and the centre of form of obtaining is rounded; (c) cutting the first image centered by the centre of form that step (b) is obtained to obtain the second image, makes centre of form coordinate after the rounding of alignment mark to the second image left and right edges, Edge Distance equates up and down; (d) calculate the centre of form coordinate of the second image, and calculate the first side-play amount between the center of the centre of form coordinate of the second image and the second image; (e) utilize interpolation method to amplify the second image, to obtain the 3rd image; (f) based on the enlargement factor in the step (e) the first side-play amount in the step (d) is converted into the second side-play amount; (g) come translation the 3rd image according to the second side-play amount; (h) utilize interpolation method to dwindle the 3rd image to the size identical with the second image.
In one embodiment of this invention, step (b) may further comprise the steps: adopt the Tuscany algorithm that the first image is carried out rim detection, obtain the position of the sub-pixel edge of alignment mark by the method for gradient direction fitting of a polynomial; Follow the tracks of and join algorithm by the edge, sub-pixel edge is transformed into unique polygon, and obtains the centre of form of alignment mark by the triangle split plot design.
In one embodiment of this invention, step (b) may further comprise the steps: use edge detector to extract the edge of the alignment mark of the first image; Use gravity model appoach to calculate the coordinate of the centre of form of alignment mark according to the edge that extracts.
In one embodiment of this invention, step (b) may further comprise the steps: utilize large Tianjin method to calculate the gray threshold of the first image; Utilize gray threshold that the first image is carried out binaryzation, with the background segment of alignment mark and the first image; Utilize gravity model appoach to calculate the coordinate of the centre of form of alignment mark.
In one embodiment of this invention, step (b) may further comprise the steps: utilize gravity model appoach to calculate the coordinate of the centre of form of alignment mark.
In one embodiment of this invention, step (c) may further comprise the steps: calculate respectively the centre of form and round to the distance of coboundary and the lower limb of the first image; Calculate respectively the centre of form and round to the distance of left hand edge and the right hand edge of the first image; Cutting the first image centered by the centre of form coordinate after rounding equates the up and down Edge Distance of centre of form coordinate to the first image after rounding, and the left and right edges distance of centre of form coordinate to the first image after rounding equates, to obtain the second image.
In one embodiment of this invention, the interpolation method in the step (e) is arest neighbors interpolation method, two-wire type interpolation method or two cubes of interpolation methods.
In one embodiment of this invention, step (g) may further comprise the steps: when needs with the 3rd image left or during right translation the first pixel unit, left side or right side cutting the first pixel unit at the 3rd image, and increasing by the first pixel unit in right side or the left side of the 3rd image, the gray-scale value that wherein increases row newly directly copies the gray-scale value at the right side or left column edge; When needs with the 3rd image up or down during translation the second pixel unit, upside or downside cutting the second pixel unit at the 3rd image, and increase by the second pixel unit at downside or the upside of the 3rd image, increase wherein that capable gray-scale value directly copies down or the gray-scale value of ascending edge newly.
In sum, the acquisition methods of template image of the present invention, main high-precision center locating algorithm and the interpolation algorithm used, accurately locate the position of form center of alignment mark, the center of the template image that obtains and the position of form center of alignment mark overlap substantially, and the error of both errors can be controlled at below the 20nm.
Description of drawings
Fig. 1 is the process flow diagram of acquisition methods of the template image of a preferred embodiment of the present invention;
Fig. 2 A～2E is the implementation procedure synoptic diagram of acquisition methods of the template image of a preferred embodiment of the present invention.
Embodiment
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand fully purpose of the present invention, feature and effect.
Fig. 1 is the process flow diagram of acquisition methods of the template image of a preferred embodiment of the present invention.Fig. 2 A～2E is the implementation procedure synoptic diagram of acquisition methods of the template image of a preferred embodiment of the present invention.Please refer to Fig. 1 and Fig. 2 A～2E.In the present embodiment, the acquisition methods of template image can be applicable to the alignment system in the semiconductor lithography equipment, and specifically details are as follows.
Shown in the step S11 among Fig. 1 and Fig. 2 A, input the first image 31, the first images 31 and have alignment mark 33.At this, the part of removing alignment mark 33 in the first image 31 may be defined as the background 32 of the first image 31.That is, the first image 31 is comprised of background 32 and alignment mark 33.
Then, shown in the step S12 among Fig. 1 and Fig. 2 B, calculate the coordinate of the centre of form of alignment mark 33, and the coordinate of the centre of form is rounded, with the centre of form coordinate 41 after obtaining rounding.Particularly, it can calculate acquisition by four kinds of methods, is described below respectively.
First method mainly comprises following two steps.At first, adopt Tuscany (Canny) algorithm that the first image 31 is carried out rim detection, obtain the position of the sub-pixel edge of alignment mark 33 by the method for gradient direction fitting of a polynomial.Secondly, follow the tracks of and join algorithm by the edge, sub-pixel edge is transformed into unique polygon, and obtain the coordinate of the centre of form of alignment mark 33 by the triangle split plot design, obtain centre of form coordinate 41 after rounding.
In above-mentioned first step, utilize the Tuscany algorithm to carry out rim detection and mainly divided for four steps carried out: the first, gaussian filtering is to image denoising; The second, obtain in length and breadth two gradient map and comprehensive gradient map by original gray-scale map; The 3rd, carry out non-very big inhibition in conjunction with above-mentioned three gradient map; The 4th, carry out the edge and connect.Because the Tuscany algorithm is the algorithm of realizing already in this area, so do not repeat them here.
Second method mainly comprises following two steps.At first, use edge detector to extract the edge of the alignment mark 33 of the first image 31; Secondly, use gravity model appoach to calculate the coordinate of the centre of form of alignment mark 33 according to the edge that extracts, obtain centre of form coordinate 41 after rounding.Wherein, edge detector can be Roberts, PreWitt, Sobel, LoG or Zeros Crossing edge detector.Yet the present invention does not impose any restrictions this.
The third method mainly comprises following three steps.At first, utilize large Tianjin method (Ostu) to calculate the gray threshold of the first image 31; Secondly, utilize gray threshold that the first image 31 is carried out binaryzation, the background 32 of alignment mark 33 and the first image 31 is cut apart; Again, utilize gravity model appoach to calculate the coordinate of the centre of form of alignment mark 33, obtain centre of form coordinate 41 after rounding.Wherein, large Tianjin method is the method that a kind of adaptive threshold value is determined, is the algorithm of realizing already in this area, so do not repeat them here.
The 4th kind of method is to utilize gravity model appoach to calculate the coordinate of the centre of form of alignment mark 33, obtains centre of form coordinate 41 after rounding.
In the present embodiment, after the centre of form coordinate 41 after calculating obtains rounding of alignment mark 33, shown in step S13 among Fig. 1, cutting the first image 31 centered by the centre of form coordinate 41 after rounding, to obtain the second image 46 among Fig. 2 C, make centre of form coordinate 41 to second images 46 left and right edges after the rounding of alignment mark, Edge Distance equates up and down.
Particularly, in this step, shown in Fig. 2 B, calculate the coboundary of centre of form coordinate 41 to first images 31 and the distance 44 and 45 of lower limb, to the distance 42 and 43 of left hand edge and the right hand edge of the first image 31.Subsequently, cutting the first image 31 centered by centre of form coordinate 41 equates the up and down Edge Distance of center to the first image 31, the left and right edges distance of center to the first image 31 is equated, to obtain the second image 46.In the present embodiment, namely be taken to the smaller in the distance 42 and 43 of the left hand edge of the first image 31 and right hand edge, come cutting the greater, overlap with left hand edge or the right hand edge of the first image 31 to guarantee the second image 46 left hand edges or right hand edge.In like manner, be taken to coboundary and the distance 44 of lower limb and 45 the smaller of the first image 31, come cutting the greater, overlap with coboundary or the lower limb of the first image 31 to guarantee the second image 46 coboundarys or lower limb.Yet the present invention does not do any restriction to concrete method of cutting out.
In the present embodiment, shown in step S14 among Fig. 1 and Fig. 2 C, calculate the centre of form coordinate 51 of the second image 46, and calculate the first side-play amount 53 between the center 52 of the centre of form coordinate 51 of the second image 46 and the second image 46.Need to prove that at this, centre of form coordinate 51 is not pass through the coordinate figure that rounds, the centre of form coordinate 41 among Fig. 2 B then is the coordinate figure through rounding, and therefore, centre of form coordinate 51 herein is not equal to the centre of form coordinate 41 among Fig. 2 B.In addition, the first side-play amount 53 comprises transversal displacement and the vertical misalignment amount between the center 52 of centre of form coordinate 51 and the second image 46.
In the present embodiment, shown in step S15 among Fig. 1 and Fig. 2 D, utilize interpolation method to amplify the second image 46, to obtain the 3rd image 61.Wherein, the alignment mark 33 in the second image 46 also Synchronous Radio become greatly alignment mark 62 after the amplification.The centre of form of the alignment mark 62 after this amplifies corresponds to 60 among Fig. 2 D, and the center 52 of the second image 46 can correspond to 63 among Fig. 2 D at this.In addition, in the present embodiment, interpolation method can be arest neighbors interpolation method, two-wire type interpolation method or two cubes of interpolation methods.The present invention does not do any restriction to this.
In the present embodiment, shown in step S16 among Fig. 1 and Fig. 2 D, based on the enlargement factor among the above-mentioned steps S15 the first side-play amount 53 is converted into the second side-play amount.Particularly, if the second image 46 converts the 3rd image 61 to after amplifying 10 times in step S15, then in this step, transversal displacement in the first side-play amount 53 and vertical misalignment amount multiply by respectively 10 and round, and obtain transversal displacement 64 and vertical misalignment amount 65 in the second side-play amount with correspondence.Yet the present invention does not do any restriction to this enlargement factor, and the user can determine according to the actual requirements voluntarily.
In the present embodiment, shown in step S17 among Fig. 1, come translation the 3rd image 61 according to the second side-play amount, its objective is that the centre of form 60 in order to make the alignment mark 62 after the amplification overlaps with the center 63 of the 3rd image 61.Take Fig. 2 D as example, because in the horizontal, the center 63 of the 3rd image 61 is on the left side of the centre of form 60, therefore, and just need to be with the 3rd image 61 to left the first pixel unit.At this, the first pixel unit is the transversal displacement 64 in corresponding the second side-play amount.At this moment, can be at left side cutting first pixel unit of the 3rd image 61, and increase by the first pixel unit on the right side of the 3rd image 61, the gray-scale value that wherein increases row (that is, horizontal) newly directly copies the gray-scale value of right column border.At this moment, can finish horizontal translation.In other embodiments, when the right in the centre of form 60, the center 63 of the 3rd image 61, need to be with the 3rd image 61 during to right translation the first pixel unit, can be at right side cutting first pixel unit of the 3rd image 61, and increasing by the first pixel unit in the left side of the 3rd image 61, the gray-scale value that wherein increases row newly directly copies the gray-scale value at left column edge.
In the vertical, in Fig. 2 D, the center 63 of the 3rd image 61 is in the bottom of the centre of form 60, therefore, and just need to be with the 3rd image 61 downward translation the second pixel units.At this, the second pixel unit is the vertical misalignment amount 65 in corresponding the second side-play amount.At this moment, can be at downside cutting second pixel unit of the 3rd image 61, and increase by the second pixel unit at the upside of the 3rd image 61, the gray-scale value that wherein increases row (that is, vertical) newly directly copies the gray-scale value of ascending edge.At this moment, can finish longitudinally translation.In other embodiments, when the top in the centre of form 60, the center 63 of the 3rd image 61, in the time of the 3rd image 61 need to being made progress translation the second pixel unit, can be at upside cutting second pixel unit of the 3rd image 61, and increase by the second pixel unit at the downside of the 3rd image 61, wherein increase the gray-scale value that capable gray-scale value directly copies descending edge newly.Yet the present invention does not impose any restrictions this shift method.
In the present embodiment, shown in step S18 among Fig. 1, utilize interpolation method to dwindle the 3rd image 61 to the size identical with the second image 46.For example, when the enlargement factor among the step S15 was 10, minification herein namely can be 0.1.At this, what interpolation method can be with among the step S15 is similar, is arest neighbors interpolation method, two-wire type interpolation method or two cubes of interpolation methods.Yet the present invention does not impose any restrictions this.The 3rd image 61 after the translation namely becomes the 4th image 81 among Fig. 2 E after dwindling, alignment mark wherein corresponds to 82.Thus, can finish whole process.
In sum, the acquisition methods of the template image that preferred embodiment of the present invention provides, main high-precision center locating algorithm and the interpolation algorithm used, accurately locate the position of form center of alignment mark, the center of the template image that obtains and the position of form center of alignment mark overlap substantially, and the error of both errors can be controlled at below the 20nm.
More than describe preferred embodiment of the present invention in detail.The ordinary skill that should be appreciated that this area need not creative work and just can design according to the present invention make many modifications and variations.Therefore, all in the art technician all should be in the determined protection domain by claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (8)
1. the acquisition methods of a template image is characterized in that, may further comprise the steps:
(a) input the first image, described the first image has alignment mark;
(b) coordinate of the centre of form of the described alignment mark of calculating, and the coordinate of the described centre of form that will obtain rounds;
(c) described the first image of cutting centered by the described centre of form that step (b) is obtained to obtain the second image, makes centre of form coordinate after described the rounding of described alignment mark to described the second image left and right edges, Edge Distance equates up and down;
(d) calculate the centre of form coordinate of described the second image, and calculate the first side-play amount between the center of the centre of form coordinate of described the second image and described the second image;
(e) utilize interpolation method to amplify described the second image, to obtain the 3rd image;
(f) based on the enlargement factor in the step (e) described the first side-play amount in the step (d) is converted into the second side-play amount;
(g) come described the 3rd image of translation according to described the second side-play amount; And
(h) utilize interpolation method to dwindle described the 3rd image to the size identical with described the second image.
2. the acquisition methods of template image according to claim 1 is characterized in that, step (b) may further comprise the steps:
Adopt the Tuscany algorithm that described the first image is carried out rim detection, obtain the position of the sub-pixel edge of described alignment mark by the method for gradient direction fitting of a polynomial; And
Follow the tracks of and join algorithm by the edge, described sub-pixel edge is transformed into unique polygon, and obtains the described centre of form of described alignment mark by the triangle split plot design.
3. the acquisition methods of template image according to claim 1 is characterized in that, step (b) may further comprise the steps:
Use edge detector to extract the edge of the described alignment mark of described the first image; And
Use gravity model appoach to calculate the coordinate of the described centre of form of described alignment mark according to the described edge that extracts.
4. the acquisition methods of template image according to claim 1 is characterized in that, step (b) may further comprise the steps:
Utilize large Tianjin method to calculate the gray threshold of described the first image;
Utilize described gray threshold that described the first image is carried out binaryzation, with the background segment of described alignment mark and described the first image; And
Utilize gravity model appoach to calculate the coordinate of the described centre of form of described alignment mark.
5. the acquisition methods of template image according to claim 1 is characterized in that, step (b) may further comprise the steps:
Utilize gravity model appoach to calculate the coordinate of the described centre of form of described alignment mark.
6. the acquisition methods of template image according to claim 1 is characterized in that, step (c) may further comprise the steps:
Calculate respectively the described centre of form and round to the distance of coboundary and the lower limb of described the first image;
Calculate respectively the described centre of form and round to the distance of left hand edge and the right hand edge of described the first image; And
Described the first image of cutting centered by the centre of form coordinate after described the rounding, centre of form coordinate to the up and down Edge Distance of described the first image after described the rounding is equated, centre of form coordinate after described the rounding to the left and right edges distance of described the first image equates, to obtain described the second image.
7. the acquisition methods of template image according to claim 1 is characterized in that, the described interpolation method in the step (e) is arest neighbors interpolation method, two-wire type interpolation method or two cubes of interpolation methods.
8. the acquisition methods of template image according to claim 1 is characterized in that, step (g) may further comprise the steps:
When needs with described the 3rd image left or during right translation the first pixel unit, left side or described the first pixel unit of right side cutting at described the 3rd image, and increasing described the first pixel unit in right side or the left side of described the 3rd image, the gray-scale value that wherein increases row newly directly copies the gray-scale value at the right side or left column edge; And
When needs with described the 3rd image up or down during translation the second pixel unit, upside or described the second pixel unit of downside cutting at described the 3rd image, and increase described the second pixel unit at downside or the upside of described the 3rd image, increase wherein that capable gray-scale value directly copies down or the gray-scale value of ascending edge newly.
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