CN103008619A - Method for vacuumizing smelting chamber of electron beam (EB) furnace - Google Patents
Method for vacuumizing smelting chamber of electron beam (EB) furnace Download PDFInfo
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- CN103008619A CN103008619A CN2012104630078A CN201210463007A CN103008619A CN 103008619 A CN103008619 A CN 103008619A CN 2012104630078 A CN2012104630078 A CN 2012104630078A CN 201210463007 A CN201210463007 A CN 201210463007A CN 103008619 A CN103008619 A CN 103008619A
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Abstract
The invention relates to a method for vacuumizing a smelting chamber of an electron beam (EB) furnace. The method is characterized by comprising the following steps: 1, ensuring that all the furnace chambers are ready for vacuumizing; 2, opening a plunger valve of a rotary feeder, an isolating valve of a blocky material feeder and an isolating valve of the smelting chamber; 3, starting holding pumps P-GP4-01 and P-GP7-01, wherein the holding pumps are applied to a diffusion pump of the smelting chamber; 4, opening a vacuum valve between the holding pump and the diffusion pump of the smelting chamber; and 5, opening the diffusion pump of the smelting chamber, wherein the diffusion pump can be started after the holding pump operates for 5 to 8 minutes under the condition that the vacuum valve is opened; and the diffusion pump needs to be heated for 50 to 65 minutes so as to heat oil to the working temperature. The process design has the benefits that the smelting chamber of the EB furnace is vacuumized by the method, so the vacuum degree required by smelting can be obtained quickly, the smelting cost is effectively saved and the life of vacuumizing equipment is better prolonged.
Description
Technical field
It is a kind of to EB stove (electron beam furnace) that the inventive method belongs to, especially the method and technology field that vacuumizes, 3200KW EB stove working chamber.
Technical background
Existing 3200KW EB stove (electron beam furnace) is as a kind of capital equipment of melting titanium ingot.The melting of EB stove need to be carried out under higher vacuum condition.The working chamber then is the groundwork chamber of carrying out melting work, and space is large, and the easy leak point of vacuum is many, so the difficulty of finding time is large, speed is slow.
Existing vacuum-pumping method: with the working chamber, main feed space draws the ingot chamber, and the rotary feeding chamber vacuumizes separately, waits for when all furnace chambers all are extracted into certain vacuum and spend, and connection valve is opened.Because each furnace chamber vacuum is different, can cause the decline of vacuum, sometimes may need from newly vacuumizing, perhaps because vacuum difference is large, cause the connection valve to be difficult for being opened.Affect efficient and device security.
Summary of the invention
For reaching fast EB stove working chamber is vacuumized, the invention provides a kind of method that can effectively vacuumize EB stove working chamber within a short period of time.Especially for the vacuum pumping method of 3200KW EB stove.
The present invention adopts following technical scheme to realize.
The method that a kind of EB stove working chamber vacuumizes, the present invention is characterised in that,
1, guaranteeing that all furnace chambers are closed and carried out finds time to prepare;
2, open Rotary feeder plunger valve, piece material feeder isolating valve and working chamber's isolating valve;
3, start holding pump P-GP4-01 and P-GP7-01; These holding pumps are for working chamber's diffusion pump;
4, open vacuum valve between holding pump and the working chamber's diffusion pump;
5, open working chamber's diffusion pump; Holding pump need to could start diffusion pump after moving 5～8 minutes in the situation that vacuum valve is opened; Diffusion pump will need to heat 50～65 minutes, so that its oil is heated to operating temperature;
6, start main vavuum pump group GP1, GP2 and GP3;
7, open first vacuum valve of vavuum pump group the place ahead;
8, open vacuum valve SVO-GVH-01 and SVO-GVH-02;
9, open the vacuum valve SVO-GMC-01 of working chamber, beginning slightly vacuumizes all furnace chambers; Slightly vacuumizing is 50～65 minutes, to reach the vacuum that can allow the diffusion pump lift valve open;
10, when the permission indicators of working chamber's lift valve shows green, close working chamber's vacuum valve, and open working chamber's lift valve; This moment, diffusion pump just was evacuated to condition of high vacuum degree with furnace chamber; This EB system allows suction at least 8 hours, to extract moisture and the oxygen in the furnace chamber; The time of bleeding can be longer or shorter, by the front smelting furnace conditional decision of bleeding;
11, when reaching suitable final vacuum, can close lift valve, and can carry out leak-testing;
12, in case after reaching qualified high vacuum state, before the beginning melting, water system is switched to plant water from warm water.
The beneficial effect of this technological design is: utilize the method that EB stove working chamber is vacuumized, can faster obtain the required vacuum of melting, so both effectively saved the melting cost, well prolonged again the life-span of evacuating equipment.
Below in conjunction with the drawings and specific embodiments the present invention is done further explanation.
Description of drawings
Fig. 1 is operating structure schematic diagram of the present invention.
The specific embodiment
See Fig. 1
,The method that a kind of EB stove working chamber vacuumizes, the present invention is characterised in that,
1, guaranteeing that all furnace chambers are closed and carried out finds time to prepare;
2, open Rotary feeder plunger valve, piece material feeder isolating valve and working chamber's isolating valve;
3, start holding pump P-GP4-01 and P-GP7-01; These holding pumps are for working chamber's diffusion pump;
4, open vacuum valve between holding pump and the working chamber's diffusion pump;
5, open working chamber's diffusion pump; Holding pump need to could start diffusion pump after moving 5～8 minutes in the situation that vacuum valve is opened; Diffusion pump will need to heat 50～65 minutes, so that its oil is heated to operating temperature;
6, start main vavuum pump group GP1, GP2 and GP3;
7, open first vacuum valve of vavuum pump group the place ahead;
8, open vacuum valve SVO-GVH-01 and SVO-GVH-02;
9, open the vacuum valve SVO-GMC-01 of working chamber, beginning slightly vacuumizes all furnace chambers; Slightly vacuumizing is 50～65 minutes, to reach the vacuum that can allow the diffusion pump lift valve open;
10, when the permission indicators of working chamber's lift valve shows green, close working chamber's vacuum valve, and open working chamber's lift valve; This moment, diffusion pump just was evacuated to condition of high vacuum degree with furnace chamber; This EB system allows suction at least 8 hours, to extract moisture and the oxygen in the furnace chamber; The time of bleeding can be longer or shorter, by the front smelting furnace conditional decision of bleeding;
11, when reaching suitable final vacuum, can close lift valve, and can carry out leak-testing;
12, in case after reaching qualified high vacuum state, before the beginning melting, water system is switched to plant water from warm water.
Claims (1)
1. the method that EB stove working chamber vacuumizes is characterized in that,
(1), guaranteeing that all furnace chambers are closed and carried out finds time to prepare;
(2), open Rotary feeder plunger valve, piece material feeder isolating valve and working chamber's isolating valve;
(3), start holding pump P-GP4-01 and P-GP7-01; These holding pumps are for working chamber's diffusion pump;
(4), open vacuum valve between holding pump and the working chamber's diffusion pump;
(5), open working chamber's diffusion pump; Holding pump need to could start diffusion pump after moving 5～8 minutes in the situation that vacuum valve is opened; Diffusion pump will need to heat 50～65 minutes, so that its oil is heated to operating temperature;
(6), start main vavuum pump group GP1, GP2 and GP3;
(7), open first vacuum valve of vavuum pump group the place ahead;
(8), open vacuum valve SVO-GVH-01 and SVO-GVH-02;
(9), open the vacuum valve SVO-GMC-01 of working chamber, beginning slightly vacuumizes all furnace chambers; Slightly vacuumizing is 50～65 minutes, to reach the vacuum that can allow the diffusion pump lift valve open;
(10), close working chamber's vacuum valve, and open working chamber's lift valve when green when the permission indicators of working chamber's lift valve shows; This moment, diffusion pump just was evacuated to condition of high vacuum degree with furnace chamber; This EB system allows suction at least 8 hours, to extract moisture and the oxygen in the furnace chamber; The time of bleeding can be longer or shorter, by the front smelting furnace conditional decision of bleeding;
(11), when reaching suitable final vacuum, can close lift valve, and can carry out leak-testing;
(12), in case after reaching qualified high vacuum state, before the beginning melting, water system is switched to plant water from warm water.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210463007.8A CN103008619B (en) | 2012-11-16 | 2012-11-16 | A kind of method that EB stove working chamber vacuumizes |
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| CN201210463007.8A CN103008619B (en) | 2012-11-16 | 2012-11-16 | A kind of method that EB stove working chamber vacuumizes |
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| CN103008619A true CN103008619A (en) | 2013-04-03 |
| CN103008619B CN103008619B (en) | 2015-10-07 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104353816A (en) * | 2014-10-20 | 2015-02-18 | 云南钛业股份有限公司 | Method for quickly cooling cast ingot |
| CN105333741A (en) * | 2015-11-09 | 2016-02-17 | 云南钛业股份有限公司 | Method for rapid pumping out |
| CN109457120A (en) * | 2018-12-28 | 2019-03-12 | 云南钛业股份有限公司 | A kind of electron beam cold hearth melting furnace blanking device and baiting method for exempting from mixing |
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| CN101343063A (en) * | 2008-08-13 | 2009-01-14 | 厦门大学 | Purification apparatus and method for solar energy level polysilicon |
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2012
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| JP2001335854A (en) * | 2000-05-31 | 2001-12-04 | Mitsubishi Heavy Ind Ltd | Apparatus and method for refining high purity metal |
| CN201237447Y (en) * | 2008-07-11 | 2009-05-13 | 宁波科田磁业有限公司 | Air extractor used for neodymium iron boron sintering furnace |
| CN101343063A (en) * | 2008-08-13 | 2009-01-14 | 厦门大学 | Purification apparatus and method for solar energy level polysilicon |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104353816A (en) * | 2014-10-20 | 2015-02-18 | 云南钛业股份有限公司 | Method for quickly cooling cast ingot |
| CN105333741A (en) * | 2015-11-09 | 2016-02-17 | 云南钛业股份有限公司 | Method for rapid pumping out |
| CN109457120A (en) * | 2018-12-28 | 2019-03-12 | 云南钛业股份有限公司 | A kind of electron beam cold hearth melting furnace blanking device and baiting method for exempting from mixing |
| CN109457120B (en) * | 2018-12-28 | 2024-05-17 | 云南钛业股份有限公司 | Discharging device and discharging method for electron beam cold bed smelting furnace without mixing |
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| CN103008619B (en) | 2015-10-07 |
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