CN102975111A - Grinding method and special device for soft magnetic ferrite magnetic cores - Google Patents

Grinding method and special device for soft magnetic ferrite magnetic cores Download PDF

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CN102975111A
CN102975111A CN2012103138052A CN201210313805A CN102975111A CN 102975111 A CN102975111 A CN 102975111A CN 2012103138052 A CN2012103138052 A CN 2012103138052A CN 201210313805 A CN201210313805 A CN 201210313805A CN 102975111 A CN102975111 A CN 102975111A
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air gap
grinding
grinding machine
soft
magnetic
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王宏
周锋
卢佛山
王京平
胡春元
林庆培
温金池
王家融
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GUANGDONG MAGSOURCE ELECTRONIC CO Ltd
Guangdong Fenghua Advanced Tech Holding Co Ltd
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GUANGDONG MAGSOURCE ELECTRONIC CO Ltd
Guangdong Fenghua Advanced Tech Holding Co Ltd
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Abstract

本发明公开了一种软磁铁氧体磁心的研磨方法及其专用设备,其制备方法是指在研磨机床上将磁心进行双排或多排纵向排列,用同一台磨床对排列好的磁心先进行平面加工再进行气隙加工的方法。在加工设备中,所述的气隙砂轮切削面是两个或者等距的多个。本发明的有益技术效果是研磨时生产效率高、加工成本低、产品精度及一致性好。

The invention discloses a grinding method of a soft ferrite core and special equipment thereof. The preparation method refers to arranging the magnetic cores in double or multiple rows longitudinally on a grinding machine, and using the same grinding machine to grind the arranged magnetic cores first. The method of plane machining followed by air gap machining. In the processing equipment, there are two or more equidistant cutting surfaces of the air-gap grinding wheel. The beneficial technical effects of the invention are high production efficiency, low processing cost, good product precision and consistency during grinding.

Description

一种软磁铁氧体磁心的研磨方法及其专用设备A grinding method and special equipment for soft ferrite core

技术领域 technical field

本发明涉及磁性元器件的深加工方法,尤其涉及一种软磁铁氧体磁心的研磨方法及其专用设备。The invention relates to a deep processing method of magnetic components, in particular to a grinding method of a soft ferrite core and special equipment thereof.

背景技术 Background technique

随着软磁铁氧体市场的不断发展和完善,并且伴随着客户要求的不断提升,对软磁铁氧体材料及磁心元件提出了越来越高的要求。例如,用于单端激励电路的许多功率铁氧体磁心都需要开气隙,其目的主要是减小磁心在不对称磁场状态下工作时的剩磁,气隙越大剩磁越小,这样同体积的磁心就可能输出更大的功率,避免在交流大信号或直流偏置下的磁饱和现象,且能更好地控制电感量,提高变压器的工作稳定性。With the continuous development and improvement of the soft ferrite market, and with the continuous improvement of customer requirements, higher and higher requirements are put forward for soft ferrite materials and magnetic core components. For example, many power ferrite cores used in single-ended excitation circuits need to open an air gap. The main purpose is to reduce the remanence of the core when it works in an asymmetric magnetic field state. The larger the air gap, the smaller the remanence, so The magnetic core with the same volume can output more power, avoid magnetic saturation under large AC signal or DC bias, and can better control the inductance and improve the working stability of the transformer.

研磨工序是软磁铁氧体磁心深加工生产中的关键工序,尤其对于开口磁心需要根据客户对电性能的要求加工平面或气隙,所谓磁心的平面加工是指将磁心排在研磨机床上,利用机床上端设置的平面砂轮端的平面砂轮切削面将磁心的边柱顶端面的毛刺或凹凸面削平或抛光,使两个磁心端面充分接触保持好的电感性能;所谓气隙加工是指将磁心排在研磨机床上,利用机床上端设置的气隙砂轮端的气隙砂轮切削面将磁心的中柱或边腿削短,中柱或边腿在磁心中的深浅是根据磁心电感的大小和精度来设置的。客户在设计磁心电感的同时更注重在使用过程中磁心的电感稳定性和一致性,因为稳定性和一致性不良会造成客户自身产品的质量波动,其中气隙产品加工的稳定性和一致性对磁心器件有较大影响。由于受工艺技术、设备、砂轮、工夹具等因素的制约,在研磨工序磁心加工中一直以来都采用传统的平面、气隙单排加工工艺方法,导致生产效率低、产品一致性不好等缺点。The grinding process is a key process in the deep processing of soft ferrite cores, especially for open cores, it is necessary to process planes or air gaps according to customer requirements for electrical performance. The cutting surface of the flat grinding wheel set on the upper end flattens or polishes the burr or concave-convex surface on the top surface of the side column of the magnetic core, so that the end faces of the two magnetic cores are fully contacted to maintain good inductance performance; On the machine tool, use the cutting surface of the air gap grinding wheel on the upper end of the machine tool to shorten the center column or side legs of the magnetic core. The depth of the center column or side legs in the magnetic core is set according to the size and accuracy of the magnetic core inductance. When designing the magnetic core inductance, customers pay more attention to the stability and consistency of the inductance of the magnetic core during use, because poor stability and consistency will cause fluctuations in the quality of the customer's own products, and the stability and consistency of air gap product processing have a great impact on Magnetic core devices have a greater impact. Due to the constraints of technology, equipment, grinding wheels, fixtures and other factors, the traditional plane and air-gap single-row processing method has always been used in the grinding process of magnetic cores, resulting in low production efficiency and poor product consistency. .

发明内容 Contents of the invention

本发明要解决的技术问题是解决软磁铁氧体磁心研磨时生产效率低、加工成本高、产品精度及一致性不好的问题。The technical problem to be solved by the invention is to solve the problems of low production efficiency, high processing cost, poor product precision and consistency when grinding soft ferrite cores.

本发明要解决的技术问题是通过以下技术方案实现的:一种软磁铁氧体磁心的研磨方法,在研磨机床上将磁心进行双排或多排纵向排列,用同一台磨床对排列好的磁心先进行平面加工再进行气隙加工的方法。The technical problem to be solved in the present invention is achieved through the following technical solutions: a grinding method for soft ferrite cores, the magnetic cores are arranged vertically in double or multiple rows on a grinding machine, and the aligned magnetic cores are aligned with the same grinding machine The method of performing flat machining first and then air gap machining.

进一步:在上述软磁铁氧体磁心的研磨方法中,所述的磁心是沿平行的双导轨方向双排或多排纵向排列,导轨的高度根据加工的磁心尺寸设计。Further: In the grinding method of the above soft ferrite core, the magnetic cores are arranged longitudinally in two or more rows along the direction of parallel double guide rails, and the height of the guide rails is designed according to the size of the processed magnetic core.

本发明还提供了上述软磁铁氧体磁心研磨方法的专用设备,它包括研磨机床、研磨机床上端设置磨床装配轴,在磨床装配轴上装配有受逻辑控制器PLC控制的平面砂轮和气隙砂轮;所述的平面砂轮设有平面砂轮基座和平面砂轮基座前端的平面砂轮切削面;所述的气隙砂轮上设有气隙砂轮基座和气隙砂轮基座前端的气隙砂轮切削面,所述的气隙砂轮切削面是两个或者等距的多个。The present invention also provides special equipment for the grinding method of the above-mentioned soft ferrite core, which includes a grinding machine, a grinding machine assembly shaft is arranged at the upper end of the grinding machine, and a plane grinding wheel and an air gap grinding wheel controlled by a logic controller PLC are assembled on the grinding machine assembly shaft; The plane grinding wheel is provided with a plane grinding wheel base and a plane grinding wheel cutting surface at the front end of the plane grinding wheel base; the air-gap grinding wheel is provided with an air-gap grinding wheel base and an air-gap grinding wheel cutting surface at the front end of the air-gap grinding wheel base, There are two or more equidistant cutting surfaces of the air-gap grinding wheel.

进一步:在上述软磁铁氧体磁心研磨方法的专用设备中,所述的研磨机床上设有方便磁心整齐排列的导轨;所述的导轨是平行的双导轨;导轨的高度根据加工的磁心尺寸设计。所述的磨床装配轴包括由带动电机驱动的磨床横轴,所述磨床横轴的法兰尺寸从现16mm增加至20~35mm宽度(根据磁心加工排数调整),所述带动电机功率达到2.2KW以上。Further: in the above-mentioned special equipment for the grinding method of the soft ferrite core, the grinding machine is provided with guide rails which facilitate the neat arrangement of the magnetic cores; the guide rails are parallel double guide rails; the height of the guide rails is designed according to the size of the processed magnetic cores . The assembly shaft of the grinding machine includes a horizontal shaft of the grinding machine driven by a driving motor, the flange size of the horizontal shaft of the grinding machine is increased from the current 16 mm to a width of 20-35 mm (adjusted according to the number of magnetic core processing rows), and the power of the driving motor reaches 2.2 mm. More than KW.

与现有技术相比,本发明的软磁铁氧体磁心的研磨方法,在研磨机床上将磁心进行双排或多排纵向排列,用同一台磨床对排列好的磁心先进行平面加工再进行气隙加工的方法。本发明完全实现铁氧体磁心平面、气隙的双排或多排加工。大幅度提升了生产效率,同时保证磁心的尺寸加工精度和电感一致性,满足客户要求。通过30天,20多个批次的验证,平均质量水平如下:加工精度:电感L±3%,CPK=1.58;尺寸±0.10mm,CPK=2.03;单机产能:30K付/小时以上。同规格产品产能提升至200%以上,产品电感一致性提高,加工精度好,证明本发明具有可靠性、可重复性。Compared with the prior art, the grinding method of the soft ferrite magnetic core of the present invention, on the grinding machine, the magnetic cores are arranged in double or multiple rows longitudinally, and the arranged magnetic cores are first plane-processed and then air-processed with the same grinding machine. Gap machining method. The invention fully realizes double-row or multi-row processing of ferrite magnetic core planes and air gaps. The production efficiency is greatly improved, and at the same time, the dimensional processing accuracy and inductance consistency of the magnetic core are guaranteed to meet customer requirements. After 30 days and more than 20 batches of verification, the average quality level is as follows: processing accuracy: inductance L±3%, CPK=1.58; size ±0.10mm, CPK=2.03; stand-alone production capacity: more than 30K pay/hour. The production capacity of products of the same specification is increased to more than 200%, the consistency of product inductance is improved, and the processing accuracy is good, which proves that the present invention has reliability and repeatability.

附图说明 Description of drawings

图1是研磨机床对两排磁心进行平面加工时的截面简图;Figure 1 is a schematic cross-sectional view of a grinding machine for plane processing of two rows of magnetic cores;

图2是研磨机床对两排磁心进行气隙加工时的截面简图;Figure 2 is a schematic cross-sectional view of the grinding machine for air gap machining of two rows of magnetic cores;

图3是研磨机床对三排磁心进行平面加工时的截面简图;Fig. 3 is a schematic cross-sectional view of a grinding machine for plane processing of three rows of magnetic cores;

图4是研磨机床对三排磁心进行气隙加工时的截面简图;Figure 4 is a schematic cross-sectional view of the grinding machine for air gap machining of three rows of magnetic cores;

图5是未进行研磨加工的磁心截面图;Fig. 5 is a cross-sectional view of a magnetic core without grinding;

图6是进行研磨中平面加工后的磁心截面图;Fig. 6 is the cross-sectional view of the magnetic core after grinding the middle plane;

图7是进行研磨中平面和气隙加工后的磁心截面图;Figure 7 is a cross-sectional view of the magnetic core after grinding the middle plane and air gap processing;

其中,1研磨机床、2平面砂轮、3气隙砂轮、21平面砂轮基座、22平面砂轮切削面、31气隙砂轮基座、32气隙砂轮切削面、4导轨、5磁心、6磁心加工气隙面。Among them, 1 grinding machine, 2 flat grinding wheel, 3 air gap grinding wheel, 21 flat grinding wheel base, 22 flat grinding wheel cutting surface, 31 air gap grinding wheel base, 32 air gap grinding wheel cutting surface, 4 guide rail, 5 magnetic core, 6 magnetic core processing air gap surface.

具体实施方式 Detailed ways

本发明的主旨是对平面砂轮和研磨气隙砂轮的发明创新,并对机床的的装配轴进行改进,同时对磨床研磨机床进行改造,增加角度调节功能,采用双导轨固定工艺,完全实现铁氧体磁心平面、气隙的双排或多排加工。大幅度提升了生产效率,同时保证磁心的尺寸加工精度和电感一致性,满足客户要求。面结合图及实施方式对本发明的内容作进一步详述。The gist of the present invention is to innovate the plane grinding wheel and the grinding air-gap grinding wheel, improve the assembly axis of the machine tool, and at the same time transform the grinding machine tool, increase the angle adjustment function, and adopt the double guide rail fixing process to completely realize the ferrite Double-row or multi-row processing of body magnetic core plane and air gap. The production efficiency is greatly improved, and at the same time, the dimensional processing accuracy and inductance consistency of the magnetic core are guaranteed to meet customer requirements. The content of the present invention will be further described in detail with reference to the drawings and embodiments.

实施方式一:如图1-2,5-7,一种软磁铁氧体磁心研磨方法的专用设备,它包括研磨机床1、研磨机床上端设置磨床装配轴,在磨床装配轴上装配有受逻辑控制器PLC控制的平面砂轮2和气隙砂轮3;所述的平面砂轮设有平面砂轮基座21和平面砂轮基座前端的平面砂轮切削面22;所述的气隙砂轮3上设有气隙砂轮基座31和气隙砂轮基座前端的气隙砂轮切削面32,所述的气隙砂轮切削面32是两个,图2中所述的气隙砂轮切削面32与磁心加工气隙面6是一一对应的。所述的研磨机床1上设有方便磁心整齐排列的双导轨4。所述的磨床装配轴包括由带动电机驱动的磨床横轴,所述磨床横轴的法兰尺寸从现16mm增加至25mm宽度,所述带动电机功率达到2.2±0.2KW。在研磨机床1上将磁心沿双导轨进行双排纵向排列,用同一台磨床对排列好的磁心先进行平面加工再进行气隙加工的方法,这个先后顺序受逻辑控制器PLC控制的控制。图5是未进行研磨加工的磁心截面图,从图5可以看出磁心边柱与内柱毛刺很多,图6是进行研磨中平面加工后的磁心截面图,从图6可以看出磁心边柱平整、光滑;图7是进行研磨中平面和气隙加工后的磁心截面图,从图7可以看出磁心中柱被削短了。其加工精度:电感L±3%,CPK=1.58;尺寸±0.10mm,CPK=2.11;单机产能:30K付/小时。Embodiment 1: As shown in Fig. 1-2, 5-7, a kind of special equipment for soft ferrite core grinding method, it includes grinding machine tool 1, the upper end of the grinding machine tool is provided with the grinding machine assembly shaft, and the receiving logic is assembled on the grinding machine assembly shaft The plane grinding wheel 2 and the air gap grinding wheel 3 controlled by the controller PLC; the plane grinding wheel is provided with a plane grinding wheel base 21 and a plane grinding wheel cutting surface 22 at the front end of the plane grinding wheel base; the air gap grinding wheel 3 is provided with an air gap The air gap grinding wheel cutting surface 32 at the front end of the grinding wheel base 31 and the air gap grinding wheel base, the air gap grinding wheel cutting surface 32 is two, the air gap grinding wheel cutting surface 32 and the magnetic core processing air gap surface 6 described in Fig. 2 It is one-to-one correspondence. The grinding machine tool 1 is provided with double guide rails 4 to facilitate the neat arrangement of magnetic cores. The assembly shaft of the grinding machine includes a horizontal shaft of the grinding machine driven by a driving motor, the flange size of the horizontal shaft of the grinding machine increases from the current 16mm to a width of 25mm, and the power of the driving motor reaches 2.2±0.2KW. On the grinding machine 1, the magnetic cores are arranged longitudinally in double rows along the double guide rails, and the same grinding machine is used to process the arranged magnetic cores on the plane and then to process the air gap. This sequence is controlled by the logic controller PLC. Figure 5 is a cross-sectional view of the magnetic core without grinding. From Figure 5, it can be seen that there are many burrs on the side column and the inner column of the magnetic core. Figure 6 is a cross-sectional view of the magnetic core after grinding. Flat and smooth; Figure 7 is a cross-sectional view of the magnetic core after grinding the plane and air gap. From Figure 7, it can be seen that the core column of the magnetic core has been cut short. Its processing precision: inductance L±3%, CPK=1.58; size ±0.10mm, CPK=2.11; stand-alone production capacity: 30K pay/hour.

实施方式二:如图3-7,一种软磁铁氧体磁心研磨方法的专用设备,它包括研磨机床1、研磨机床上端设置磨床装配轴,在磨床装配轴上装配有受逻辑控制器PLC控制的平面砂轮2和气隙砂轮3;所述的平面砂轮设有平面砂轮基座21和平面砂轮基座前端的平面砂轮切削面22;所述的气隙砂轮3上设有气隙砂轮基座31和气隙砂轮基座前端的气隙砂轮切削面32,所述的气隙砂轮切削面32是3个,图3中所述的气隙砂轮切削面32与磁心加工气隙面6是一一对应的。所述的研磨机床1上设有方便磁心整齐排列的双导轨4。所述的磨床装配轴包括由带动电机驱动的磨床横轴,所述磨床横轴的法兰尺寸从现16mm增加至27mm宽度,所述带动电机功率达到2.5±0.2KW。在研磨机床1上将磁心沿双导轨进行三排纵向排列,用同一台磨床对排列好的磁心先进行平面加工再进行气隙加工的方法,这个先后顺序受逻辑控制器PLC控制的控制。图5是未进行研磨加工的磁心截面图,从图5可以看出磁心边柱与内柱毛刺很多,图6是进行研磨中平面加工后的磁心截面图,从图6可以看出磁心边柱平整、光滑;图7是进行研磨中平面和气隙加工后的磁心截面图,从图7可以看出磁心中柱被削短了。其加工精度为:电感L±3%,CPK=1.56;尺寸±0.10mm,CPK=2.03;单机产能:45K付/小时。Embodiment 2: As shown in Fig. 3-7, a kind of special equipment of soft magnetic ferrite core grinding method, it comprises grinding machine tool 1, the upper end of grinding machine tool is provided with grinding machine assembly axis, is equipped with on the grinding machine assembly axis and is controlled by logic controller PLC The plane grinding wheel 2 and the air gap grinding wheel 3; the plane grinding wheel is provided with the plane grinding wheel base 21 and the plane grinding wheel cutting surface 22 at the front end of the plane grinding wheel base; the air gap grinding wheel 3 is provided with the air gap grinding wheel base 31 With the air gap grinding wheel cutting surface 32 at the front end of the air gap grinding wheel base, the air gap grinding wheel cutting surface 32 is 3, and the air gap grinding wheel cutting surface 32 described in Fig. 3 is one-to-one correspondence with the magnetic core processing air gap surface 6 of. The grinding machine tool 1 is provided with double guide rails 4 to facilitate the neat arrangement of magnetic cores. The assembly shaft of the grinding machine includes a horizontal shaft of the grinding machine driven by a driving motor, the flange size of the horizontal shaft of the grinding machine is increased from 16mm to 27mm in width, and the power of the driving motor reaches 2.5±0.2KW. On the grinding machine 1, the magnetic cores are arranged vertically in three rows along the double guide rails, and the same grinding machine is used to process the arranged magnetic cores on the plane and then the air gap. This sequence is controlled by the logic controller PLC. Figure 5 is a cross-sectional view of the magnetic core without grinding. From Figure 5, it can be seen that there are many burrs on the side column and the inner column of the magnetic core. Figure 6 is a cross-sectional view of the magnetic core after grinding. Flat and smooth; Figure 7 is a cross-sectional view of the magnetic core after grinding the plane and air gap. From Figure 7, it can be seen that the core column of the magnetic core has been cut short. Its processing precision is: inductance L±3%, CPK=1.56; size ±0.10mm, CPK=2.03; stand-alone production capacity: 45K pay/hour.

Claims (6)

1. the Ginding process of a soft-magnetic ferrite core is characterized in that: carry out magnetic core double on lapping machine or arrange longitudinal arrangement more, with same the grinding machine method that air gap processing is carried out in advanced parallel planes processing again to the magnetic core that arranges.
2. the Ginding process of soft-magnetic ferrite core according to claim 1, it is characterized in that: described magnetic core is double along parallel two guide rail directions or arranges longitudinal arrangement more.
3. equipment that is exclusively used in claim 1 or 2 described soft-magnetic ferrite core Ginding process, it comprises that lapping machine (1), lapping machine upper end arrange the grinding machine assembled shaft, are equipped with flat-faced wheel (2) and the air gap emery wheel (3) that is subjected to logic controller PLC control in the grinding machine assembled shaft; Described flat-faced wheel is provided with the flat-faced wheel cutting face (22) of flat-faced wheel pedestal (21) and flat-faced wheel pedestal front end; Described air gap emery wheel (3) is provided with the air gap emery wheel cutting face (32) of air gap emery wheel pedestal (31) and air gap emery wheel pedestal front end, it is characterized in that: described air gap emery wheel cutting face (32) is two or equidistant a plurality of.
4. the special equipment of soft-magnetic ferrite core Ginding process according to claim 3, it is characterized in that: described lapping machine (1) is provided with the guide rail (4) that makes things convenient for the magnetic core proper alignment.
5. the special equipment of soft-magnetic ferrite core Ginding process according to claim 4, it is characterized in that: described guide rail is parallel two guide rails.
6. according to claim 4 or the special equipment of 5 described soft-magnetic ferrite core Ginding process, it is characterized in that: described grinding machine assembled shaft comprises the grinding machine transverse axis that is driven by drive motor, the flange size of described grinding machine transverse axis is 20~35mm width, and described drive motor power reaches more than the 2.2KW.
CN2012103138052A 2012-08-20 2012-08-20 Grinding method and special device for soft magnetic ferrite magnetic cores Pending CN102975111A (en)

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CN103878874A (en) * 2013-11-08 2014-06-25 山东嘉诺电子有限公司 Soft magnetic ferrite core forming and blanking guide rail device
CN104227515A (en) * 2014-09-01 2014-12-24 常熟市研明电子元器件厂 Ferrite core center column grinding device
CN105583718A (en) * 2014-11-07 2016-05-18 中国科学院微电子研究所 Chemical mechanical polishing method
CN106158346A (en) * 2016-08-31 2016-11-23 海宁市飞腾电子有限公司 A kind of manufacture method of EP type magnetic ferrite magnetic core
CN107471049A (en) * 2017-09-18 2017-12-15 广东肇庆微硕电子有限公司 Air gap emery wheel, core grinding device and core grinding method
CN107471082A (en) * 2017-09-13 2017-12-15 芜湖市中天密封件有限公司 The lapping device and Ginding process of aircraft check valve
CN108098518A (en) * 2017-12-12 2018-06-01 江西中磁科技协同创新有限公司 A kind of soft magnetic materials grinding machine
CN116021352A (en) * 2021-10-26 2023-04-28 三环永磁(北京)科技有限公司 Positioning sliding groove mechanism of cylindrical magnetic steel, grinding device and grinding method

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US6626742B2 (en) * 2000-05-04 2003-09-30 Mpm Ltd. Polishing method and device
CN201579680U (en) * 2010-01-08 2010-09-15 上海继顺磁性材料有限公司 Soft magnetic ferrite magnetic core auto-turnover grinding equipment
CN201765944U (en) * 2010-06-11 2011-03-16 上海继顺磁性材料有限公司 Equipment for forming double gaps on soft magnetic ferrite magnetic core in one step
CN102476349A (en) * 2010-11-30 2012-05-30 中芯国际集成电路制造(上海)有限公司 Chemical mechanical grinding device

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CN1098347A (en) * 1993-11-13 1995-02-08 俞文一 Soft magnetic ferrite congruent surface fine grinding technology and products thereof
US6626742B2 (en) * 2000-05-04 2003-09-30 Mpm Ltd. Polishing method and device
CN201579680U (en) * 2010-01-08 2010-09-15 上海继顺磁性材料有限公司 Soft magnetic ferrite magnetic core auto-turnover grinding equipment
CN201765944U (en) * 2010-06-11 2011-03-16 上海继顺磁性材料有限公司 Equipment for forming double gaps on soft magnetic ferrite magnetic core in one step
CN102476349A (en) * 2010-11-30 2012-05-30 中芯国际集成电路制造(上海)有限公司 Chemical mechanical grinding device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103878874A (en) * 2013-11-08 2014-06-25 山东嘉诺电子有限公司 Soft magnetic ferrite core forming and blanking guide rail device
CN104227515A (en) * 2014-09-01 2014-12-24 常熟市研明电子元器件厂 Ferrite core center column grinding device
CN104227515B (en) * 2014-09-01 2016-12-07 常熟市研明电子元器件厂 FERRITE CORE center pillar lapping device
CN105583718A (en) * 2014-11-07 2016-05-18 中国科学院微电子研究所 Chemical mechanical polishing method
CN105583718B (en) * 2014-11-07 2018-02-02 中国科学院微电子研究所 Chemical mechanical polishing method
CN106158346A (en) * 2016-08-31 2016-11-23 海宁市飞腾电子有限公司 A kind of manufacture method of EP type magnetic ferrite magnetic core
CN107471082A (en) * 2017-09-13 2017-12-15 芜湖市中天密封件有限公司 The lapping device and Ginding process of aircraft check valve
CN107471049A (en) * 2017-09-18 2017-12-15 广东肇庆微硕电子有限公司 Air gap emery wheel, core grinding device and core grinding method
CN108098518A (en) * 2017-12-12 2018-06-01 江西中磁科技协同创新有限公司 A kind of soft magnetic materials grinding machine
CN116021352A (en) * 2021-10-26 2023-04-28 三环永磁(北京)科技有限公司 Positioning sliding groove mechanism of cylindrical magnetic steel, grinding device and grinding method

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