CN102969445B - A kind of manufacture method of piezoelectric element - Google Patents

A kind of manufacture method of piezoelectric element Download PDF

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CN102969445B
CN102969445B CN201210472450.1A CN201210472450A CN102969445B CN 102969445 B CN102969445 B CN 102969445B CN 201210472450 A CN201210472450 A CN 201210472450A CN 102969445 B CN102969445 B CN 102969445B
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piezoelectric
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piezoelectric element
layer
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CN102969445A (en
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梅欣
张俊
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LIYANG PRODUCTIVITY PROMOTION CENTER
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LIYANG PRODUCTIVITY PROMOTION CENTER
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Abstract

The invention discloses a kind of manufacture method of piezoelectric element, comprise the steps: to prepare polymeric piezoelectric material, this polymeric piezoelectric material is heated under 160 ~ 190 DEG C of conditions and makes it decompose; Polymeric piezoelectric material after decomposing and binding agent and volatile solvent are formed slurry; Insulated substrate is provided, forms the first electrode layer on this insulated substrate surface; This slurry is coated with and invests the first electrode layer surface, form piezoelectric layer; And form the second electrode lay in this piezoelectric layer surface.This piezoelectric element forms piezoelectric layer with the polymeric piezoelectric material of novelty, and the Electrostrictive strain of this piezoelectric element improves 2 ~ 5% than the piezoelectric element using Kynoar as piezopolymer.<!--1-->

Description

A kind of manufacture method of piezoelectric element
Technical field
The present invention relates to a kind of piezoelectric element and manufacture method thereof.
Background technology
Piezoelectric element is element pressure being converted to the signal of telecommunication, and it comprises piezoelectric material layer and is positioned at the electrode layer of these piezoelectric material layer both sides.When applying pressure on this piezoelectric element surface, can detect that the corresponding signal of telecommunication exports at this two electrode layer.This piezoelectric material layer is made up of the material with piezoelectric effect, and piezoelectric comparatively conventional in prior art is piezoelectric ceramic, as barium titanate, lead titanates and pick lead titanates etc., and piezopolymer, as Kynoar (PVDF) etc.
Kynoar and copolymer thereof are as modal organic piezopolymer.Due to them, there is good pliability and easily make large-area film, thus in audio frequency and sonac, biomedical transducer, electromechanical transducer and pyroelectricity and optics, there is important application prospect.But its actuation capability is low, and under 150MV/m electric field, its Electrostrictive strain is only 7%.Therefore, this area researcher wishes to find the piezopolymer that can replace Kynoar improving Electrostrictive strain, improves the performance of piezoelectric device.
Summary of the invention
The invention discloses a kind of manufacture method of piezoelectric element, comprise the steps:
Prepare polymeric piezoelectric material, this polymeric piezoelectric material is heated under 160 ~ 190 DEG C of conditions and makes it decompose;
Polymeric piezoelectric material after decomposing and binding agent and volatile solvent are formed slurry;
Insulated substrate is provided, forms the first electrode layer on this insulated substrate surface;
This slurry is coated with and invests the first electrode layer surface, form piezoelectric layer; And
The second electrode lay is formed in this piezoelectric layer surface; Wherein
This piezopolymer is for having the material of chemical structural formula (I);
Wherein
The integer of n and m respectively for being greater than 1; Preferred n and m is respectively the integer of 5 to 600, and more preferably n and m is respectively the integer of 10 to 300.
P be 0 or be greater than 1 integer; Preferred p is the integer of 0 or 1 to 300, and more preferably p is the integer of 5 to 150.
The C of X and Z respectively for being substituted or being unsubstituted 4-C 60aromatic unit or aliphat unit; C preferably respectively for being substituted or being unsubstituted 6-C 40aromatic unit or aliphat unit.
Y is the C being substituted or being unsubstituted 2-C 40aliphat unit; The C being preferably substituted or being unsubstituted 3-C 20aliphat unit; Be more preferably the C being substituted or being unsubstituted 4-C 12hydrocarbon chain or C 4-C 12dioxygen alkyl; More preferably, Y is dioxygen butyl.
G 1, G 2, G 3and G 4c respectively for being substituted or being unsubstituted 1-C 12fatty group.Preferably G 1, G 2, G 3and G 4c respectively for being substituted or being unsubstituted 1-C 6fatty group; Be more preferably the methyl, ethyl, propyl group, butyl, methoxyl group, ethyoxyl or the propoxyl group that are substituted or are unsubstituted, be more preferably methyl.
The invention has the beneficial effects as follows: form piezoelectric layer with the polymeric piezoelectric material of novelty, prepared novel piezoelectric element.This piezoelectric element is mutually stacked by the metal and piezopolymer with different work functions, and when acting on when being under pressure, this piezoelectric layer has different Schottky contacts from the first electrode layer and the second electrode lay, thus produces electrical potential difference.The Electrostrictive strain of this piezoelectric element improves 2 ~ 5% than the piezoelectric element using Kynoar as piezopolymer.
Accompanying drawing explanation
Fig. 1 is the made according to the method for the present invention structural representation comprising the piezoelectric element of piezopolymer.
Embodiment
In order to make those skilled in the art more clearly understand technical scheme of the present invention, describe piezoelectric element of the present invention and manufacture method thereof in detail below with reference to accompanying drawing.
As shown in Figure 1, it comprises the first electrode layer 1, piezoelectric layer 2 and the second electrode lay 3 to the piezoelectric element that the manufacture method comprising the piezoelectric element of piezopolymer according to the present invention is made, and the manufacture method of piezoelectric element of the present invention comprises the following steps:
The invention also discloses a kind of manufacture method of piezoelectric element, it comprises the following steps:
The first, polymeric piezoelectric material is provided, and by this polymeric piezoelectric material 160 ~ 190 DEG C of heating 1 ~ 5 hour, makes this polymeric piezoelectric material decomposes.
The material of piezoelectric layer 2 is for having the material of chemical structural formula (I);
The integer of n and m respectively for being greater than 1;
P be 0 or be greater than 1 integer;
The C of X and Z respectively for being substituted or being unsubstituted 4-C 60aromatic unit or aliphat unit;
Y is the C being substituted or being unsubstituted 2-C 40aliphat unit; And G 1, G 2, G 3and G 4c respectively for being substituted or being unsubstituted 1-C 12fatty group.
Preferably, n and m is respectively the integer of 5 to 600, and more preferably n and m is respectively the integer of 10 to 300.
Preferably, p is the integer of 0 or 1 to 300, and more preferably p is the integer of 5 to 150.
Preferably, the C of X and Z respectively for being substituted or being unsubstituted 6-C 40aromatic unit or aliphat unit.
Preferably, Y is the C being substituted or being unsubstituted 3-C 20aliphat unit; Preferably, Y is the C being substituted or being unsubstituted 4-C 12hydrocarbon chain or C 4-C 12dioxygen alkyl, more preferably, Y is dioxygen butyl.
Preferably, G 1, G 2, G 3and G 4c respectively for being substituted or being unsubstituted 1-C 6fatty group, is more preferably the methyl, ethyl, propyl group, butyl, methoxyl group, ethyoxyl or the propoxyl group that are substituted or are unsubstituted, is more preferably methyl.
The second, the polymeric piezoelectric material after decomposes and binding agent and volatile solvent are formed slurry.
3rd, insulated substrate is provided, forms the first electrode layer 1 on this insulated substrate surface.First electrode layer 1 is formed in this insulated substrate surface by modes such as plating, deposition, evaporation or sputterings.The first electrode layer 1 formed by said method can have thinner thickness.Sputtering method is adopted to form the aluminium film of 100 micron thickness at silicon substrate surface as the first electrode layer 1 in the present embodiment.
Piezoelectric layer 2 can also comprise a small amount of binding agent, this piezoelectric layer 2 is better combined and shaping with electrode layer.This polymeric piezoelectric material accounts for more than 90% of piezoelectric layer 2 gross mass, is preferably more than 95%.
In one embodiment, this piezoelectric layer 2 comprises and accounts for the polymeric piezoelectric material of total weight than 97%, and accounts for the binding agent of total weight than 3%.
In one embodiment, this binding agent is PAN.The thickness of this piezoelectric polymer layer 2 is 10 ~ 300 microns, is preferably 100 ~ 200 microns.In one embodiment, the thickness of this piezoelectric polymer layer 2 is about 150 microns.
4th, above-mentioned mixing disposed slurry is coated with and invests the first electrode layer 1 surface, form piezoelectric layer 2.The thickness of this piezoelectric layer 2 is preferably 10 ~ 300 microns.In the present embodiment, can use scraper that described slurry is coated on aluminium foil surface, the thickness of the piezoelectric layer 2 formed is about 150 microns.
5th, form the second electrode lay 3 on this piezoelectric layer 2 surface.The second electrode lay 3 is formed in this insulated substrate surface by modes such as plating, deposition, evaporation or sputterings.The second electrode lay 1 formed by said method can have thinner thickness.Sputtering method is adopted to form the golden film of 100 micron thickness on the surface of this piezoelectric layer 2 as the second electrode lay 3 in the present embodiment.
The work function forming the metal of the first electrode layer 1 is unequal with the work function of the metal forming the second electrode lay 3.Preferably, the work function difference of the work function of the metal of the first electrode layer 1 and the metal of the second electrode lay 3 is comparatively large, preferably difference more than 0.5eV.First electrode layer 1 with different work functions is mutually stacked with the second electrode lay 3 and this piezoelectric layer 2, when acting on when being under pressure, piezoelectric layer 2 inside produces separation of charge, because this polymeric piezoelectric material has different Schottky contacts from the metal of different work functions, thus produce electrical potential difference and electric current.First electrode layer 1 is larger with the work function difference of the metal of the second electrode lay 3, then the electrical potential difference produced is larger.
Preferably, the first electrode layer 1 can be aluminium/copper (Al/Cu) with the material of the second electrode lay 3, the combination of aluminium/nickel (Al/Ni), aluminium/gold (Al/Au), zinc/gold (Zn/Au).In one embodiment, the material of the first electrode layer 1 is Al, its work function 4.28eV, and the material of the second electrode lay 3 is Au, its work function 5.1eV.
First electrode layer 1 and the second electrode lay 3 can be tinsel or metallic film, or are respectively tinsel and metallic film.This tinsel can with this piezoelectric polymer layer 2 phase pressing, this metallic film is directly formed at the surface of this piezoelectric polymer layer 2 by plating or the method such as deposition.The thickness of this tinsel is preferably 200 ~ 1000 microns.The thickness of this metallic film is preferably 10 ~ 200 microns.In one embodiment, the first electrode layer 1 and the second electrode lay 3 are the tinsel that thickness is about 0.5 millimeter.
As shown in Figure 1, piezoelectric element made according to the method for the present invention comprises the first electrode layer 1, piezoelectric layer 2 and the second electrode lay 3.This piezoelectric layer 2 has two relative surfaces, and the first electrode layer 1 and the second electrode lay 3 are separately positioned on the relative surface of piezoelectric layer 2 two, and form three laminatings and close and stackedly arrange structure, this piezoelectric layer 2 is arranged between the first electrode layer 1 and the second electrode lay 3.
Test the piezoelectric effect of this piezoelectric element in piezoelectric element access primary Ioops method by this embodiment formed, wherein, the load resistance R in this loop is 4.0 × 10 6ohm (Ω), the size of this piezoelectric element is 20 × 20 millimeters.When the pressure be subject to when this piezoelectric element surface increases in time gradually, the magnitude of voltage that can record this load resistance R two ends constantly increases, and concrete data are as shown in table 1.After this pressure durations a period of time, this magnitude of voltage declines very slowly, and sustainablely reaches a few hours more than.When pressure increase or when reducing, this voltage changes rapidly with the change of pressure.When being respectively 4,000 Ns and 60,000 Ns when being under pressure, the power output of this piezoelectric element 100 is 0.3 nanowatt (nW) and 3nw.
Table 1
This piezoelectric element is mutually stacked by the metal and piezoelectric polymer layer with different work functions, when acting on when being under pressure, this piezopolymer inside produces separation of charge, because it has different Schottky contacts from the metal of different work functions, thus produces electrical potential difference and electric current.Through measuring, the Electrostrictive strain of this piezoelectric element improves 2 ~ 5% than the piezoelectric element using Kynoar as piezopolymer.
Be appreciated that; be only the preferred embodiments of the present invention; scope of the invention process can not be limited with this; those skilled in the art in spirit of the present invention can to its make various modification or; these changes done according to the present invention's spirit, all should be included in the present invention's scope required for protection.

Claims (6)

1. comprise a manufacture method for the piezoelectric element of piezopolymer, it is characterized in that, comprise the steps:
Prepare polymeric piezoelectric material, this polymeric piezoelectric material is heated under 160 ~ 190 DEG C of conditions and makes it decompose;
Polymeric piezoelectric material after decomposing and binding agent and volatile solvent are formed slurry;
Insulated substrate is provided, forms the first electrode layer on this insulated substrate surface;
This slurry is coated with and invests the first electrode layer surface, form piezoelectric layer; Wherein, polymeric piezoelectric material accounts for more than 90% of piezoelectric layer gross mass; And
The second electrode lay is formed in this piezoelectric layer surface;
First electrode layer and the second electrode lay have different work functions; The work function of the first electrode layer differs more than 0.5eV with the second electrode lay work function;
This piezopolymer is for having the material of chemical structural formula (I);
Wherein
The integer of n and m respectively for being greater than 1;
P be 0 or be greater than 1 integer;
The C of X and Z respectively for being substituted or being unsubstituted 4-C 60aromatic unit or aliphat unit;
Y is the C being substituted or being unsubstituted 2-C 40fatty group;
G 1, G 2, G 3and G 4c respectively for being substituted or being unsubstituted 1-C 12fatty group;
The Electrostrictive strain of above-mentioned piezoelectric element improves 2 ~ 5% than the piezoelectric element using Kynoar as piezopolymer.
2. the method for claim 1, is characterized in that, n and m is respectively the integer of 5 to 600.
3. the method for claim 1, is characterized in that, p is the integer of 0 or 1 to 300.
4. the method for claim 1, is characterized in that, the C of X and Z respectively for being substituted or being unsubstituted 6-C 40aromatic unit or aliphat unit.
5. the method for claim 1, is characterized in that, Y is dioxygen butyl.
6. the method for claim 1, is characterized in that, G 1, G 2, G 3and G 4methyl, ethyl, propyl group, butyl, methoxyl group, ethyoxyl or propoxyl group respectively for being substituted or being unsubstituted.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101063035A (en) * 2006-04-29 2007-10-31 长兴化学工业股份有限公司 Organic luminescent material and usage thereof
CN102074648A (en) * 2009-11-24 2011-05-25 清华大学 Piezoelectric element and preparation method thereof

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JPS57126124A (en) * 1981-01-28 1982-08-05 Tokyo Shibaura Electric Co Piezoelectric or pyroelectric element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101063035A (en) * 2006-04-29 2007-10-31 长兴化学工业股份有限公司 Organic luminescent material and usage thereof
CN102074648A (en) * 2009-11-24 2011-05-25 清华大学 Piezoelectric element and preparation method thereof

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